JPS6042908B2 - Stabilization method for biological FET sensor - Google Patents
Stabilization method for biological FET sensorInfo
- Publication number
- JPS6042908B2 JPS6042908B2 JP52062447A JP6244777A JPS6042908B2 JP S6042908 B2 JPS6042908 B2 JP S6042908B2 JP 52062447 A JP52062447 A JP 52062447A JP 6244777 A JP6244777 A JP 6244777A JP S6042908 B2 JPS6042908 B2 JP S6042908B2
- Authority
- JP
- Japan
- Prior art keywords
- fet
- fet sensor
- biological
- sensor
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analysing Biological Materials (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Description
【発明の詳細な説明】
本発明はゲート絶縁部に選択的感応膜を有する電界効果
トランジスタ(FET)センサーの安定化方法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for stabilizing a field effect transistor (FET) sensor having a selectively sensitive membrane in the gate insulator.
近年生理学、医学の分野で血液に代表される体液中の物
質、例えばH゛、Na゛、に゛、Cl−等のイオン、O
2、CO2等のガス、その他グリコース、ラクトース類
の糖類、ホルモン、酵素、抗体等の濃度測定が頻繁に行
われるようになつた。In recent years, in the fields of physiology and medicine, substances in body fluids represented by blood, such as ions such as H, Na, Ni, Cl-, O
2. Concentrations of gases such as CO2, other sugars such as glycose and lactose, hormones, enzymes, antibodies, etc. are now frequently measured.
しかし従来の測定方法である体液を直接採取して分析す
る方法は分析作業に時間と労力がかかるため近年の測定
量の増加に対応することが困難である。したがつて最近
上記測定を連続的にモニタリングする必要性が認識され
始めた。これらの目的のため種々。の測定方法が検討さ
れているが、その中でもゲート部に特定の物質を選択的
に吸着もしくは配位または透過する感応膜を有するゲー
ト絶縁形FET)例えば松尾らが報告しているような(
T0Matsu0andに、DWise11EEETr
ans|0nBME、21、N06pp485〜487
、1974)感応膜としてSi3N4、SiO2等を用
いるH゛センサー、アルミナシリケート膜を用いたNa
゛センサー等のイオンセンサー、酵素膜を用いた酵素電
極、抗体反応を用いた免疫体センサーやイオン交換膜を
用いたガス・センサー等は超小型化の容易なこと、測定
回路が簡単で装置が安価なこと、ゲート部の選択惑応膜
を変えることにより種々の物質の測定が可能となる等の
理由により生体モニタリング用センサーとして非常に有
望なものである。However, the conventional measurement method of directly collecting and analyzing body fluids requires time and effort for analysis, making it difficult to cope with the recent increase in the amount of measurement. Therefore, the need for continuous monitoring of the above measurements has recently begun to be recognized. Various for these purposes. Measurement methods are being considered, including the one reported by Matsuo et al.
T0Matsu0and, DWise11EEETr
ans|0nBME, 21, N06pp485-487
, 1974) H sensor using Si3N4, SiO2, etc. as a sensitive film, Na sensor using an alumina silicate film
゛Ion sensors such as sensors, enzyme electrodes using enzyme membranes, immune sensors using antibody reactions, gas sensors using ion exchange membranes, etc. can be easily miniaturized, have simple measurement circuits, and are easy to use. It is a very promising sensor for biological monitoring because it is inexpensive and it is possible to measure various substances by changing the selective permeation membrane in the gate part.
これらのFETは、このままでもセンサーとして充分使
用できるものであるが、生体中での測定に対しては非常
に不安定な測定値を示すという欠点があつた。例えば緩
衝液中では安定な測定ができても血液中ではドリフトを
生じたり、測定個体や測定部位の変化により同一濃度で
も再現性のない異なつた値を示すことが多く生体用モニ
ターとして不適当であつた。本発明者らは種々検討した
結果、上記生体中での不安定な測定値は主として体液中
の蛋白等がセンサー部へ吸着することに起因するものと
推定し、さらに蛋白等の吸着を防止し生体用センサーと
して使用すべく鋭意検討した結果FETゲート部の選択
性感応膜上に測定対象物質を透過するが蛋白等の巨大分
子を透過しない孔を有する多孔性ポリマーで被覆するこ
とにより安定した測定値を示すことを見い出した。これ
らの効果はとくにイオンセンサーの場合において著しい
。本発明に於いて被覆に用いられる多孔性ポリマーは、
そのポリマー素材自体は測定対象物質を透過しないが、
膜にあいている孔により低分子量の物質を透過するもの
であり、具体的には透析膜、逆浸透膜や限外淵過膜に使
用されている様な膜であり、素材としてはアセチルセル
ロース、ニトロセルロース、PVClナイロン、ポリカ
ーボネート、テフロン等である。Although these FETs can be fully used as sensors as they are, they have the drawback of showing extremely unstable measured values when measured in living organisms. For example, although stable measurements can be made in a buffer solution, drift occurs in blood, and even the same concentration often shows different values with no reproducibility due to changes in the individual being measured or the measurement site, making it unsuitable as a biological monitor. It was hot. As a result of various studies, the present inventors deduced that the unstable measured values in the living body are mainly caused by the adsorption of proteins, etc. in body fluids to the sensor section, and furthermore, measures were taken to prevent the adsorption of proteins, etc. As a result of extensive research into its use as a biosensor, stable measurements were achieved by coating the selective sensitive membrane in the FET gate area with a porous polymer that has pores that allow the substance to be measured to pass through, but do not allow macromolecules such as proteins to pass through. It was found that the value of These effects are particularly remarkable in the case of ion sensors. The porous polymer used for coating in the present invention is
Although the polymer material itself does not transmit the substance to be measured,
It is a membrane that allows low molecular weight substances to permeate through the pores in the membrane, specifically membranes such as those used in dialysis membranes, reverse osmosis membranes, and ultrafiltration membranes, and the material is acetyl cellulose. , nitrocellulose, PVCl nylon, polycarbonate, Teflon, etc.
これらの膜は測定対象イオンは透過しなければならない
が、血液中の蛋白を透過しないことが望ましく、孔の最
大径は40A以下でなければならない。また空孔の割合
は大きいほど感応速度が速いため有利であり、水に浸漬
した場合10%以上の含水率を持つことが好ましい。こ
れらの膜をFETゲート部に被覆する方法としては公知
の相分離法、抽出法等通常の限外枦過膜を作成するのと
同様の方法で皮膜を形成させることができる。These membranes must be permeable to ions to be measured, but desirably not permeable to proteins in blood, and the maximum diameter of the pores must be 40A or less. Further, the larger the proportion of pores, the faster the response speed, which is advantageous, and it is preferable that the material has a water content of 10% or more when immersed in water. The FET gate portion can be coated with these films by a method similar to that used for forming ordinary ultrafiltration films, such as a known phase separation method or extraction method.
膜をゲート部に被覆した形態は単に第1図aのようにF
ETlのゲート部2のまわりにポリマー皮膜を形成させ
たものの他にも、例えばbの如く、FETlをチューブ
4の中に入れ、ゲート部2とチューブの間に多孔性ポリ
マーを充填したものも含まれるのであり、この場合、膜
厚はゲート部と膜の体液と接する部分の一番近い距離d
で定義される。これらの膜の厚さはあまり薄いと強度的
な問題があるばかりでなく、ポリマー表面に吸着する物
質の影響が現われ、また厚いと応答時間が遅くなるのみ
でなく、FETセンサー最大の特徴である小型化という
目的にも反するのでポリマー皮膜の厚さは0.1μ〜1
Wf!Ftが好ましい。以上のようにして安定化された
FETセンサーはポリマー被覆を有しない従来のFET
センサーと全く同一の回路、方法によつて測定が可能で
あり、かつ生体中で安定した測定値を得ることが可能で
あるばかりでなく、抗血検性に於ても優れている。The form in which the gate portion is coated with the film is simply F as shown in Figure 1a.
In addition to those in which a polymer film is formed around the gate part 2 of the ETl, there are also ones in which the FETl is placed in the tube 4 and a porous polymer is filled between the gate part 2 and the tube, as shown in b. In this case, the film thickness is determined by the distance d between the gate part and the part of the film that is in contact with body fluids.
Defined by If the thickness of these films is too thin, not only will there be problems with strength, but also the effects of substances adsorbed on the polymer surface will appear, and if they are too thick, not only will the response time be slow, but this is the most important feature of FET sensors. Since it goes against the purpose of miniaturization, the thickness of the polymer film should be 0.1 μ to 1
Wf! Ft is preferred. The FET sensor stabilized as described above is similar to the conventional FET sensor without polymer coating.
It can be measured using the same circuit and method as the sensor, and it is not only possible to obtain stable measured values in vivo, but also has excellent anti-blood test properties.
次に実施例により本発明の具体的な説明を行なう。Next, the present invention will be specifically explained using examples.
なお実施例に於いて用いたPH及びNa+測定用FET
は前述の松尾らの報告したFETの構造を参考にしたも
のであり、測定も同文献と同様の方法でドレインソース
電圧VDSとドレイン電流1Dを一定とし、ゲートソー
ス電圧を測定することにより行なつた。実施例1
感応膜として窒化シリコンを持つFETpHセンサーの
先端ゲート部に次の方法により、多孔性アセチルセルロ
ース膜を形成した。Note that the FET for PH and Na+ measurement used in the examples
is based on the structure of the FET reported by Matsuo et al., and the measurement was carried out in the same manner as in the same literature by keeping the drain-source voltage VDS and drain current 1D constant and measuring the gate-source voltage. Ta. Example 1 A porous acetylcellulose membrane was formed at the tip gate portion of an FET pH sensor having silicon nitride as a sensitive membrane by the following method.
すなわち、アセチルセルロース17部、アセトン69.
2部、MgClO4l.45部、水12.35部をよく
混合溶解し得たアセチルセルロース溶液をFETゲート
部に塗布し、10℃で5(転)間をかけて溶媒を一部蒸
発させた後、0℃の水に浸漬し、ゲル化する。さらに、
これを水洗後、70℃温水中で熱処理をして多孔性膜を
得る。こうして得られたFETの先端部を一昼夜水に浸
漬した後、血液中及び血液と同−PHを持つ緩衡液中で
VGSを測定した結果を次表に示す。(Id=30μA
NVDS=2V)アセチルセルロースをコートしないF
ETは血液中で徐々に低VGsにドリフトを示し、緩衡
液と50rT1vもずれた値で平衡に達するのに対し、
アセチルセルロースをコートしたFETでは安定に正し
い値を示した。実施例2感応膜としてアルミノシリケー
トを有する−FETNaセンサーの先端ゲート部に次の
方法により、多孔性EVA(エチレンビニルアルコール
共重合体)皮膜を形成した。That is, 17 parts of acetyl cellulose, 69 parts of acetone.
2 parts, MgClO4l. 45 parts of acetylcellulose and 12.35 parts of water were thoroughly mixed and dissolved, and the acetyl cellulose solution was applied to the FET gate area, and after evaporating a portion of the solvent at 10°C for 5 minutes, the solution was mixed with water at 0°C. Soak in and gel. moreover,
After washing this with water, it is heat-treated in 70°C hot water to obtain a porous membrane. The tip of the FET thus obtained was immersed in water for a day and night, and then VGS was measured in blood and in a buffer solution having the same pH as blood. The results are shown in the following table. (Id=30μA
NVDS=2V) F not coated with acetylcellulose
ET gradually drifts to lower VGs in the blood and reaches equilibrium at a value that deviates from the buffer solution by 50rT1v, whereas
The FET coated with acetyl cellulose stably showed correct values. Example 2 A porous EVA (ethylene vinyl alcohol copolymer) film was formed on the tip gate portion of a -FETNa sensor having aluminosilicate as a sensitive film by the following method.
すなわち、EVA(エチレン含有量33モル%)頷部を
ジメチルスルホキシド80部に溶解し、FET先端に塗
布した後、5℃の水に浸漬しEVAを凝固させる。こう
して得られたFETを室温の蒸留水中に一晩浸漬した後
血液中及び血液と同−Na濃度同一PHの緩衡液中で測
定を行なつた結果、EVAをコートしないものは血液中
ではドリフトが起こり、実際のNa+の値よりも低い値
が得られたが、EVAをコートしたFETでは正確な値
が安定して測定できた。That is, a nodule of EVA (ethylene content: 33 mol %) is dissolved in 80 parts of dimethyl sulfoxide, applied to the tip of the FET, and then immersed in water at 5° C. to solidify the EVA. After immersing the FET obtained in this way in distilled water at room temperature overnight, measurements were taken in blood and in a buffer solution with the same Na concentration and pH as blood. As a result, the FET without EVA coating drifted in blood. Although this occurred and a value lower than the actual Na+ value was obtained, accurate values could be stably measured using the EVA-coated FET.
図面は多孔性ポリマー膜をFETゲート絶縁部に被覆し
た状態を示す一実施例であり、第1図aはゲート部にポ
リマー皮膜を形成させたものであり、第1図bはFET
をチューブ内に入れ、チューブとゲートとの間に多孔性
ポリマーを充填したものである。The drawings show an example in which a porous polymer film is coated on the FET gate insulating part, and Fig. 1a shows an example in which a polymer film is formed on the gate part, and Fig. 1b shows an FET gate insulating part coated with a porous polymer film.
is placed in a tube, and a porous polymer is filled between the tube and the gate.
Claims (1)
ンジスターの該膜上に多孔性ポリマー膜を被覆すること
を特徴とするFETセンサーの安定化方法。 2 多孔性ポリマー膜の厚さが0.1μ〜1mmである
特許請求の範囲第1項記載のFETセンサーの安定化方
法。 3 多孔性ポリマー膜の孔径が40Å以下である特許請
求の範囲第1項記載のFETセンサーの安定化方法。[Scope of Claims] 1. A method for stabilizing an FET sensor, which comprises coating a porous polymer film on a field effect transistor having a selectively sensitive film in an insulated gate portion. 2. The method for stabilizing an FET sensor according to claim 1, wherein the porous polymer membrane has a thickness of 0.1 μ to 1 mm. 3. The method for stabilizing an FET sensor according to claim 1, wherein the porous polymer membrane has a pore diameter of 40 Å or less.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52062447A JPS6042908B2 (en) | 1977-05-26 | 1977-05-26 | Stabilization method for biological FET sensor |
| US05/907,729 US4273636A (en) | 1977-05-26 | 1978-05-19 | Selective chemical sensitive field effect transistor transducers |
| GB21514/78A GB1578917A (en) | 1977-05-26 | 1978-05-23 | Transducers |
| DE2822787A DE2822787C2 (en) | 1977-05-26 | 1978-05-24 | Selectively chemically sensitive FET converter |
| FR7815609A FR2392381A1 (en) | 1977-05-26 | 1978-05-25 | FIELD-EFFECT TRANSISTOR SENSORS WITH SELECTIVE CHEMICAL SENSITIVITY |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52062447A JPS6042908B2 (en) | 1977-05-26 | 1977-05-26 | Stabilization method for biological FET sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53146695A JPS53146695A (en) | 1978-12-20 |
| JPS6042908B2 true JPS6042908B2 (en) | 1985-09-25 |
Family
ID=13200461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52062447A Expired JPS6042908B2 (en) | 1977-05-26 | 1977-05-26 | Stabilization method for biological FET sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6042908B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5825221B2 (en) * | 1977-12-12 | 1983-05-26 | 株式会社クラレ | FET reference electrode |
-
1977
- 1977-05-26 JP JP52062447A patent/JPS6042908B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53146695A (en) | 1978-12-20 |
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