JPS6043679B2 - Semiconductor laser device with coupling circuit - Google Patents
Semiconductor laser device with coupling circuitInfo
- Publication number
- JPS6043679B2 JPS6043679B2 JP5958178A JP5958178A JPS6043679B2 JP S6043679 B2 JPS6043679 B2 JP S6043679B2 JP 5958178 A JP5958178 A JP 5958178A JP 5958178 A JP5958178 A JP 5958178A JP S6043679 B2 JPS6043679 B2 JP S6043679B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor laser
- light
- diffraction grating
- coupling circuit
- central axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title claims description 34
- 230000008878 coupling Effects 0.000 title claims description 12
- 238000010168 coupling process Methods 0.000 title claims description 12
- 238000005859 coupling reaction Methods 0.000 title claims description 12
- 230000003247 decreasing effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 23
- 239000013307 optical fiber Substances 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 13
- 230000010355 oscillation Effects 0.000 description 11
- 238000001228 spectrum Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000003776 cleavage reaction Methods 0.000 description 4
- 230000007017 scission Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001093 holography Methods 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Landscapes
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
Description
【発明の詳細な説明】
この発明は半導体発光素子、特に、他の発光素子への
結合を容易にする結合回路を備え、さらに単一軸モード
で発振する半導体レーザに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor light emitting device, and more particularly to a semiconductor laser that includes a coupling circuit that facilitates coupling to another light emitting device and further oscillates in a single axis mode.
半導体レーザは、最近急速に開発が進められている光フ
ァイバ通信や光情報処理等の主要な光源のひとつとして
期待され、性能の向上がはかられつつあるが、まだ不十
分な点が少なくない。その中のひとつに発振スペクトル
の問題がある。すなわち大容量長距離の光ファイバ通信
やホログラフイ等を用いる光情報処理においては、光源
のスペクトルは単一波長からなることが望ましい。なぜ
なら、もし光源のスペクトルが多くの波長成分を含むも
のであると、その光が光ファイバ中を長距離伝搬すると
きに、光ファイバ材質の屈折率の波長ごとのちがいによ
つて到達時間に差ができるいわゆる波長分散(あるいは
物質分散)による波長歪が大きくなるからである。一方
、ホログラフイにおいては、光源のスペクトルのひろが
りは、出 力像のぼやけとなつて出力の信号対雑音比を
劣化させるからである。これに対して従来の半導体レー
ザの発振スペクトルは数乃至10本程度の軸モードから
なることが多かつた。中にはストライプ構造の改良等に
より、一定電流で励起しているときには単一軸モード発
振する半導体レーザも開発されているが、このような半
導体レーザも高速の信号て直接変調されると活性領域の
キャリア数の変動によつて泌然的に多軸モード化するの
が避けられなかつた。 これまでに半導体レーザの単一
軸モード化を実現するひとつの方法として、半導体レー
ザの共振器反射鏡の少なくとも一方を回折格子で置き換
える方法が考案されている。Semiconductor lasers are expected to be one of the main light sources for optical fiber communications and optical information processing, which have been rapidly developed recently, and efforts are being made to improve their performance, but there are still many deficiencies. . One of them is the problem of oscillation spectrum. That is, in optical information processing using large-capacity, long-distance optical fiber communication, holography, etc., it is desirable that the spectrum of the light source consists of a single wavelength. This is because if the spectrum of the light source contains many wavelength components, when the light propagates over long distances in an optical fiber, the arrival time will differ due to the difference in the refractive index of the optical fiber material for each wavelength. This is because wavelength distortion due to so-called wavelength dispersion (or material dispersion) increases. On the other hand, in holography, the broadening of the spectrum of the light source blurs the output image and degrades the signal-to-noise ratio of the output. In contrast, the oscillation spectrum of conventional semiconductor lasers often consists of several to ten axial modes. Some semiconductor lasers have been developed that emit single-axis mode oscillation when excited with a constant current due to improvements in the stripe structure. It was inevitable that the number of carriers would change to a multi-axis mode. Up to now, as one method for realizing a single-axis mode in a semiconductor laser, a method has been devised in which at least one of the resonator reflectors of the semiconductor laser is replaced with a diffraction grating.
この構造は単一軸モード発振を得る点ではきわめて効果
的であるが、いわゆる外部共振器構造を採用しているた
めに通常の結晶のへき開園を利用した共振器とくらべて
やや安定度が低かつた。 さらに、半導体レーザの出射
ビームは大きなひ・ろがり角を持つことが多いので、他
の光学系へ結合させるためには適当な光学系からなる結
合回路を用いる必要があるが、回折格子を用いて単一軸
モード発振を得ている従来の半導体レーザでは、この回
折格子外部鏡と結合回路の両方を半導体レ・ −ザ素子
に近接きて設置しなければならず、構造が複雑で部品の
数も多く、製造がやや困難であつた。This structure is extremely effective in obtaining single-axis mode oscillation, but because it employs a so-called external resonator structure, it is somewhat less stable than a resonator that uses normal crystal cleavage. Ta. Furthermore, since the emitted beam of a semiconductor laser often has a large divergence angle, it is necessary to use a coupling circuit consisting of an appropriate optical system in order to couple it to another optical system. In conventional semiconductor lasers that obtain single-axis mode oscillation, both the external mirror of the diffraction grating and the coupling circuit must be installed close to the semiconductor laser element, resulting in a complex structure and a large number of components. There were a lot of problems, and manufacturing was somewhat difficult.
この発明の目的は、構造が簡単で製造容易かつ安定な
結合回路付単一軸モード発振装置を提供することにある
。An object of the present invention is to provide a single-axis mode oscillation device with a coupling circuit that is simple in structure, easy to manufacture, and stable.
この発明によれば、半導体レーザ素子と、その少なくと
も一方の出力端面に近接して設置され、中心軸に垂直な
面内で中心から周辺に向つて除仝に減少する屈折率を持
ち、内部に回折格子を持つ集束性光伝送体を含む結合回
路付単一軸モード発振半導体レーザ装置が得られる。According to the present invention, the semiconductor laser element is installed close to the output end face of at least one of the semiconductor laser elements, has a refractive index that gradually decreases from the center to the periphery in a plane perpendicular to the central axis, and has an internal structure. A single-axis mode oscillation semiconductor laser device with a coupling circuit including a focusing optical transmission body having a diffraction grating is obtained.
この発明の原理は、この発明の発明者らが実験的に見出
した次の事実に基づいている。The principle of this invention is based on the following fact experimentally discovered by the inventors of this invention.
すなわち半導体レーザの発振スペクトルはそのレーザ自
身からの出射光にきわめて敏惑に反応して変化する。し
たがつて、半導体レーザからの出射光のわずか一部分だ
けを波長選択性のある光学素子でその半導体レーザに帰
還させてやれば発振スペクトルを狭帯域化することがで
きる。つまり、半導体レーザ自身は、例えばへき開等に
よつて作られた安定な共振器により発振させておき、そ
こへ回折格子等によりその出射光を一部分帰還させるこ
とにより、発振スペクトルを単一軸モードにすることが
できる。こうすることにより、外部に一方の共振器反射
鏡として回折格子をつけた従来の単一軸モード発振半導
体レーザよりも安定度を高めることができる。さらにこ
の発明では、回折格子を、屈折率が中心から周辺に向つ
て除々に減少している集速性光伝送体からなる結合回路
の中に一体化して形成しているので、結合回路と単一軸
モード化のための帰還回路の両方を別々に設置した従来
の装置にくらべて、部品の数も少なく構造が簡単で製造
容易である。以下、図面を参照してこ.の発明の詳細な
説明する。第1図はこの発明の第1の実施例の斜視図を
、第2図はその断面図をそれぞれあられす。That is, the oscillation spectrum of a semiconductor laser changes in response to the light emitted from the laser itself. Therefore, if only a small portion of the light emitted from a semiconductor laser is returned to the semiconductor laser using an optical element with wavelength selectivity, the oscillation spectrum can be narrowed. In other words, the semiconductor laser itself is oscillated by a stable resonator made by, for example, cleavage, and by partially feeding back the emitted light to it using a diffraction grating, etc., the oscillation spectrum is made into a single-axis mode. be able to. By doing so, stability can be improved compared to a conventional single-axis mode oscillation semiconductor laser in which a diffraction grating is provided externally as one of the resonator reflectors. Furthermore, in this invention, the diffraction grating is formed integrally with the coupling circuit made of the speed-concentrating light transmitter whose refractive index gradually decreases from the center to the periphery. Compared to conventional devices in which both feedback circuits for uniaxial mode are installed separately, the number of parts is small, the structure is simple, and manufacturing is easy. Please refer to the drawings below. A detailed description of the invention will be given below. FIG. 1 is a perspective view of a first embodiment of the invention, and FIG. 2 is a sectional view thereof.
通常の良く知られた液相成長法で作られ、へき開により
共振器が形成されたA′GaAs−GaAs−AeGa
As二重ヘテロ構造の半導体レーザ素子1は金属融着に
よりヒートシンク2に固定されている。この半導体レー
ザ素子1の一方の共振器端面20に近接して設置された
集速性光伝送体3には中心軸30から周辺に向つて除々
に減少する屈折率分・布がつけられておりその中心軸3
0方向のほぼ中心部に中心軸30と70度の角度をなし
て、回折格子10が形成されている。この実施例では、
ガラス丸棒にイオン交換法により上述の屈折率分布をつ
けて集束性光伝送体3を製作し、その中心軸30に対し
て70度に研磨した面にプラスチック膜を塗り、そこへ
良く知られたレーザ光の干渉とエッチングを組み合わせ
た方法により周期構造を形成した後に反射率約20%の
誘電体膜を蒸着して回折格子10ととし、さらに同様な
方法で製作した別の集速性光伝送体を接着した。集束性
光伝送体3の中心軸30方向の長さは、一方の端面から
軸ずれして入射させた光ビームの蛇行ピッチの約1/ノ
2になるように選んだ。このようにすることにより、集
速性光伝送体の光ビーム変換作用として良く知られてい
るように、一方の端面上の物体の実像がもう一方の端面
上にできる。すなわち、この実施例では、集速性光伝送
体3の入射端面21を・半導体レーザ素子1の一方の共
振器端面20に近接させることにより、等価的の集束性
光伝送体3の出射端面22の位置に共振器端面20が出
来ることになる。したがつて、そこへ光ファイバ5の端
部を近接させて設置することにより、半導体レ・−ザ素
子1から出射された光ビーム40は効率良く光ファイバ
5へ結合できる。このとき、出射光ビーム40のうちの
特定の波長成分は、回折格子10により半導体レーザ素
子1に帰還され、その波長選択的な光帰還によつて軸モ
ードが単一化された。すなわち、内部に回折格子10を
持つ集束性光伝送体3は、光ファイバへの結合回路とし
てばかりでなく同時に単一軸モード化のための帰還回路
としても働くので、両方を別々に設置した従来の装置に
くらべて、部品の数も少なく構造が簡単で製造も比較的
容易であつた。しかも、半導体レーザ素子1の共振器と
ては結晶のへき開面等の安定なものを用いているので、
外部共振器を利用した従来の装置よりも安定であつた。
第3図はこの発明の第2の実施例の断面図をあられす。A'GaAs-GaAs-AeGa made by the usual well-known liquid phase growth method and with a cavity formed by cleavage.
A semiconductor laser element 1 having an As double heterostructure is fixed to a heat sink 2 by metal fusion. The speed-concentrating optical transmitter 3 installed close to one cavity end face 20 of the semiconductor laser device 1 is provided with a refractive index distribution that gradually decreases from the central axis 30 toward the periphery. Its central axis 3
A diffraction grating 10 is formed approximately at the center in the 0 direction, making an angle of 70 degrees with the central axis 30. In this example,
A convergent light transmitter 3 is manufactured by imparting the above-mentioned refractive index distribution to a glass round rod using the ion exchange method, and a plastic film is applied to the surface polished at 70 degrees with respect to the central axis 30. After forming a periodic structure by a method combining laser beam interference and etching, a dielectric film with a reflectance of about 20% was deposited to form the diffraction grating 10, and another light-collecting light beam fabricated in the same manner. The transmission body was glued. The length of the convergent light transmitter 3 in the direction of the central axis 30 was selected to be approximately 1/2 of the meandering pitch of the light beam incident from one end surface with an axis offset. By doing this, a real image of the object on one end surface is formed on the other end surface, as is well known as the light beam conversion effect of a condensing light transmission body. That is, in this embodiment, by bringing the incident end face 21 of the converging light transmitting member 3 close to one resonator end face 20 of the semiconductor laser element 1, the output end face 22 of the equivalent converging light transmitting member 3 is A resonator end face 20 is formed at the position. Therefore, by placing the end of the optical fiber 5 close thereto, the light beam 40 emitted from the semiconductor laser element 1 can be efficiently coupled to the optical fiber 5. At this time, a specific wavelength component of the emitted light beam 40 is fed back to the semiconductor laser device 1 by the diffraction grating 10, and the axial mode is unified by the wavelength-selective optical feedback. In other words, the focusing optical transmission body 3 having the diffraction grating 10 inside functions not only as a coupling circuit to the optical fiber but also as a feedback circuit for creating a single-axis mode at the same time. Compared to other devices, the number of parts was small, the structure was simple, and manufacturing was relatively easy. Moreover, since the resonator of the semiconductor laser element 1 is made of a stable material such as a crystal cleavage plane,
It was more stable than conventional devices using external resonators.
FIG. 3 shows a sectional view of a second embodiment of the invention.
ヒートシンク2に固定された半導体レーザ素子1の一方
の共振器端面20に近接させて、内部に回折格子10を
持つ集束性光伝送体3″が設置され、さらにその出射端
面22に近接させて光ファイバ5の端部を設置したもの
である。この実施例では回折格子1『を集束性光伝送体
3″の中心軸3『にほぼ垂直な面内に形成し、半導体レ
ーザ素子1および光ファイバ5の端部をその中心軸3『
からずれた位置に設置した。集束性光伝送体3″および
回折格子1『の製造方法は第1の実施例のところで述べ
たとおりである。半導体レーザ素子1を集束性光伝送体
3″の中心軸30″に対して軸ずれさせて設置すること
により、その出射光ビーム4『を回折格子1『へ適切な
角度で入射させることができ、所望の波長の光だけを帰
還させて軸モードの単一化が実現できた。また、光ビー
ム4『は集束性光伝送体3″中を蛇行しながら進むので
回折格子1『を通り抜けた光はやはり軸ずれさせて設置
した光ファイバ5に結合させることができた。この実施
例では、回折格子1『を形成する面が中心軸3『にほぼ
垂直なので、集束性光伝送体の面の研磨や回折格子の製
従等が第1の実施例の場合よりも容易であつた。この発
明は上記の基本的な実施例の他にいくつかの変形が可能
である。A convergent optical transmitter 3'' having a diffraction grating 10 inside is installed close to one resonator end face 20 of the semiconductor laser element 1 fixed to the heat sink 2, and is further placed close to the output end face 22 of the convergent optical transmitter 3'' to transmit light. The end of the fiber 5 is installed.In this embodiment, the diffraction grating 1' is formed in a plane substantially perpendicular to the central axis 3' of the focusing optical transmission body 3', and the semiconductor laser element 1 and the optical fiber 5 to its central axis 3'
It was installed in a position shifted from the The method of manufacturing the convergent optical transmitter 3'' and the diffraction grating 1'' is as described in the first embodiment.The semiconductor laser element 1 is aligned with respect to the central axis 30'' of the convergent optical transmitter 3'' By staggered installation, it was possible to make the emitted light beam 4' enter the diffraction grating 1' at an appropriate angle, and by returning only the light of the desired wavelength, it was possible to unify the axial mode. Furthermore, since the light beam 4' meandered through the convergent light transmission body 3', the light that passed through the diffraction grating 1' could be coupled to the optical fiber 5, which was installed with its axis shifted. In this embodiment, since the surface forming the diffraction grating 1' is almost perpendicular to the central axis 3', it is easier to polish the surface of the convergent light transmitter and fabricate the diffraction grating than in the first embodiment. It was hot. This invention can be modified in several ways in addition to the basic embodiment described above.
まず、実施例では集束性光伝送体3,3″の長さは蛇行
ピッチの約1/2に選んだが、これに限られるものでは
ない。すなわち、この長さに蛇行ピッチの半整数倍の長
さを加えた集束性光伝送体を用いても実施例で述べのと
ほぼ同様な効果が実現される。さらに、蛇行ピッチの1
/2よりも短かい長さの集束性光伝送体を用いることも
できる。その場合には半導体レーザ素子1および光ファ
イバ5との間隔を適当にあける必要がある。もちろんこ
のすき間に透明材を挿入しても良い。また、実施例では
、回折格子10,1『をはさむ集束性光伝送体としては
ほぼ同一の特性のものを用いたが、これは同じものであ
る必要はなく、例えば屈折率分布の変化の度合の異なる
ふたつの集速性光伝送体を用いても良い。こうすること
により、半導体レーザ組子1の出射ビーム経を適当に変
換することができ、光ファイバ5へより効率良く結合さ
せることができる。回折格子10,1『の位置は集束性
光伝送体の長さ方向の中心部に限らないが、集束性光伝
送体中で光ビームの径が大きく、かつほぼ平行になつて
いる部分が望ましい。そうすることにより、回折格子1
0,1『からの光帰還が十分に行なわれ、回折格子10
,1『の部分的な欠陥等の影響が小さくなる。さらに実
施例では回折格子10,1『を含む集束性光伝送体3,
3″は光ファイバ5への結合回路として用いたが、この
光ファイバ5の位置へ他の光学素子、例えば光検出器等
、を設置して、それらの光学素子への結合回路としても
用いることができるのは言うまでもない。First, in the embodiment, the length of the convergent optical transmission bodies 3, 3'' was selected to be approximately 1/2 of the meandering pitch, but it is not limited to this. In other words, this length is a half-integer multiple of the meandering pitch. Almost the same effect as described in the embodiment can be achieved even by using a convergent optical transmission body with an additional length.
Focusing light conduits with lengths shorter than /2 can also be used. In that case, it is necessary to provide an appropriate distance between the semiconductor laser element 1 and the optical fiber 5. Of course, a transparent material may be inserted into this gap. In addition, in the embodiment, materials with almost the same characteristics were used as the focusing optical transmission materials sandwiching the diffraction gratings 10 and 1', but they do not have to be the same, and for example, the degree of change in the refractive index distribution Two speed-concentrating optical transmission bodies with different speeds may be used. By doing so, the emitted beam diameter of the semiconductor laser muncture 1 can be appropriately converted, and the beam can be coupled to the optical fiber 5 more efficiently. The position of the diffraction gratings 10, 1' is not limited to the longitudinal center of the converging light transmitter, but it is preferable to place it at a portion of the convergent light transmitter where the diameter of the light beam is large and the beams are almost parallel. . By doing so, the diffraction grating 1
0,1' is sufficiently reflected, and the diffraction grating 10
, 1', the influence of partial defects etc. is reduced. Further, in the embodiment, a focusing optical transmission body 3 including a diffraction grating 10, 1',
3'' was used as a coupling circuit to the optical fiber 5, but it is also possible to install other optical elements, such as a photodetector, at the position of this optical fiber 5 and use it as a coupling circuit to those optical elements. Needless to say, it can be done.
第1図はこの発明の第1の実施例の斜視図、第2図はそ
の断面図、第3図はこの発明の第2の実施例の断面図を
、それぞれあられす。
なお図において、1は半導体レーザ素子、2はヒートシ
ンク、3,3″は集速性光伝送体、5は光ファイバ、1
0,1『は回折格子、20は半導体レーザ素子1の端面
、21,22は集束性光伝送体3の端面、30,3『は
中心軸、40,4『は光ビームを、それぞれあられす。FIG. 1 is a perspective view of a first embodiment of the invention, FIG. 2 is a sectional view thereof, and FIG. 3 is a sectional view of a second embodiment of the invention. In the figure, 1 is a semiconductor laser element, 2 is a heat sink, 3, 3'' is a speed-concentrating optical transmission body, 5 is an optical fiber, 1
0 and 1' are the diffraction gratings, 20 is the end face of the semiconductor laser element 1, 21 and 22 are the end faces of the convergent optical transmission body 3, 30 and 3' are the central axes, and 40 and 4' are the light beams, respectively. .
Claims (1)
面に近接して設置され中心軸にほぼ垂直な入出射端面を
持ち前記中心軸に垂直な面内で屈折率が中心から周返に
向つて徐々に減少している集速性光伝送体と、この集束
性光伝送体の内部に前記中心軸を横切る面内に設置され
た回折格子を含むことを特徴とする結合回路付半導体レ
ーザ装置。1. A semiconductor laser element, which is installed close to at least one of its output end faces, has an entrance/exit end face substantially perpendicular to the central axis, and has a refractive index gradually increasing from the center toward the periphery in a plane perpendicular to the central axis. 1. A semiconductor laser device with a coupling circuit, comprising: a converging light transmitting member having a decreasing velocity; and a diffraction grating disposed inside the converging light transmitting member in a plane crossing the central axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5958178A JPS6043679B2 (en) | 1978-05-18 | 1978-05-18 | Semiconductor laser device with coupling circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5958178A JPS6043679B2 (en) | 1978-05-18 | 1978-05-18 | Semiconductor laser device with coupling circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54150095A JPS54150095A (en) | 1979-11-24 |
| JPS6043679B2 true JPS6043679B2 (en) | 1985-09-30 |
Family
ID=13117330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5958178A Expired JPS6043679B2 (en) | 1978-05-18 | 1978-05-18 | Semiconductor laser device with coupling circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6043679B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58103187A (en) * | 1981-12-15 | 1983-06-20 | Mitsubishi Electric Corp | laser diode module |
| US5267077A (en) * | 1990-11-05 | 1993-11-30 | At&T Bell Laboratories | Spherical multicomponent optical isolator |
-
1978
- 1978-05-18 JP JP5958178A patent/JPS6043679B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54150095A (en) | 1979-11-24 |
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