JPS6049153B2 - Diamond sintered body with crystal grains arranged in a specific direction and its manufacturing method - Google Patents
Diamond sintered body with crystal grains arranged in a specific direction and its manufacturing methodInfo
- Publication number
- JPS6049153B2 JPS6049153B2 JP54073670A JP7367079A JPS6049153B2 JP S6049153 B2 JPS6049153 B2 JP S6049153B2 JP 54073670 A JP54073670 A JP 54073670A JP 7367079 A JP7367079 A JP 7367079A JP S6049153 B2 JPS6049153 B2 JP S6049153B2
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- temperature
- sintered body
- catalyst metal
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W99/00—Subject matter not provided for in other groups of this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/06—Processes using ultra-high pressure, e.g. for the formation of diamonds; Apparatus therefor, e.g. moulds or dies
- B01J3/062—Processes using ultra-high pressure, e.g. for the formation of diamonds; Apparatus therefor, e.g. moulds or dies characterised by the composition of the materials to be processed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2203/00—Processes utilising sub- or super atmospheric pressure
- B01J2203/06—High pressure synthesis
- B01J2203/0605—Composition of the material to be processed
- B01J2203/062—Diamond
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2203/00—Processes utilising sub- or super atmospheric pressure
- B01J2203/06—High pressure synthesis
- B01J2203/065—Composition of the material produced
- B01J2203/0655—Diamond
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2203/00—Processes utilising sub- or super atmospheric pressure
- B01J2203/06—High pressure synthesis
- B01J2203/0675—Structural or physico-chemical features of the materials processed
- B01J2203/0685—Crystal sintering
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Description
【発明の詳細な説明】
本発明は特定方向に結晶配列が揃つたダイヤモンド焼
結体及びその製造法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a diamond sintered body with crystal orientation aligned in a specific direction and a method for manufacturing the same.
近年、超高圧技術の発展により、ダイヤモンド砥粒が人
工的に合成され、石材の切断刃、研摩ホィール等に多量
に用いられ、その量は天然ダイヤの使用量をはるかに上
わまわつている。又これらを原料としてダイヤモンド焼
結体も製造されるに至り、切削工具や線引ダイス等の耐
磨工具に利用され、その応用は広範囲に及んできている
。現在市販されている人工ダイヤモンド砥粒は3種類に
大別される。即ち良好な立方体状の結晶形を有する切断
刃用ダイヤモンド(SDと略す)、結晶形は若干SDよ
り劣るが、おおむね立方体状を有する金属結合用ダイヤ
モンド(MDと略す)及び不規則な結晶形を有し破砕さ
れやすい樹脂結合用ダイヤモンド(RDと略す)である
。SD及び即はRDに比べると非常に破砕されにくい機
械的性質を有しており、その最大の大きさは約300〜
500μである。さて現在市販されているダイヤモンド
焼結体はダイヤモンド原料として上述のSD,MD,R
Dの3種類がその用途に応じて選択され、加うるに結合
材としてCO,Nl等の金属を添加して、ダイヤモンド
の熱力学的に安定な高温高圧下で焼結して得られている
。In recent years, with the development of ultra-high pressure technology, diamond abrasive grains have been artificially synthesized and used in large quantities for stone cutting blades, polishing wheels, etc., and the amount used far exceeds that of natural diamonds. Diamond sintered bodies have also been manufactured using these materials as raw materials, and have been used in wear-resistant tools such as cutting tools and wire drawing dies, and their applications have expanded to a wide range of areas. Artificial diamond abrasive grains currently available on the market are roughly divided into three types. That is, diamond for cutting blades (abbreviated as SD) has a good cubic crystal shape, diamond for metal bonding (abbreviated as MD) has a crystal shape that is slightly inferior to SD but generally cubic, and diamond for metal binding (abbreviated as MD) that has a crystal shape that is slightly inferior to SD. It is a resin-bonded diamond (abbreviated as RD) that is easily crushed. SD and Soku have mechanical properties that are extremely difficult to crush compared to RD, and their maximum size is approximately 300 ~
It is 500μ. Now, the diamond sintered bodies currently on the market are the above-mentioned SD, MD, and R diamond raw materials.
Three types (D) are selected depending on the application, and are obtained by adding metals such as CO and Nl as binders and sintering diamond at high temperature and high pressure, which is thermodynamically stable. .
また用いられるダイヤモンド粒子の大きさは10μ〜1
00pの間のものが、その用途によつて適宜選択されて
いる。この様なダイヤモンド焼結体は前述した様に切削
工具や線引ダイスにはすでに応用されているが、ダイヤ
モンドの良好な熱伝導性を生かしたヒートシンクに応用
される場合には、次の様な欠点を有する。RDの如き破
砕されやすいダイヤモンドを原料として用いた!場合に
は、たとえ大きな寸法の粒子を用いたとしても加圧工程
中に破砕され結果的に微粒な粒子となり、熱伝導方向の
単位長さ当りの粒界の個数が多くなり熱伝導率を低下さ
せる。又SDやMDの如き破砕されにくいダイヤモンド
を原料として用いこる場合には、RDに比し焼結が困難
で、かつ粒界部の体積が増大する為に金属結合材を多く
必要とするので、これもダイヤモンド単結晶の熱伝導率
より低い値となる。従来得らているダイヤモンド焼結体
の熱伝導率は0.4〜0.8Ca11cm−Sec−D
egで、4ダイヤモンドの1a型単結晶の熱伝導率2.
2Ca11cm・Sec●Degを大幅に下回つている
。この様な点に鑑み、本発明は短軸に対する長軸の長さ
の比が2以上である様な細長い形状のダイヤモンド粒子
を用いることにより、熱伝導率低下の主原因の一つであ
る熱伝導方向の単位長さ当りの粒界の個数を減少させれ
ば、良好な熱伝導率を有するダイヤモンド焼結体が得ら
れるという認識に立つものである。The size of the diamond particles used is 10μ to 1
A value between 00p and 00p is appropriately selected depending on the application. As mentioned above, such diamond sintered bodies have already been applied to cutting tools and wire drawing dies, but if they are to be applied to heat sinks that take advantage of diamond's good thermal conductivity, the following will be applied. It has its drawbacks. We used diamonds like RD, which are easily crushed, as raw materials! In some cases, even if particles with large dimensions are used, they will be crushed during the pressurization process, resulting in fine particles, which will increase the number of grain boundaries per unit length in the heat conduction direction and reduce thermal conductivity. let Furthermore, when diamonds that are difficult to fracture such as SD and MD are used as a raw material, sintering is difficult compared to RD, and the volume of the grain boundary increases, so a large amount of metal binder is required. This value is also lower than the thermal conductivity of diamond single crystal. The thermal conductivity of conventionally obtained diamond sintered bodies is 0.4-0.8Ca11cm-Sec-D
eg, the thermal conductivity of a type 1a single crystal of 4 diamond is 2.
It is significantly lower than 2Ca11cm・Sec●Deg. In view of these points, the present invention uses diamond particles with an elongated shape in which the ratio of the length of the long axis to the short axis is 2 or more. It is based on the recognition that a diamond sintered body having good thermal conductivity can be obtained by reducing the number of grain boundaries per unit length in the conduction direction.
即ち本発明は、ダイヤモンド焼結体を構成する個々のダ
イヤモンド結晶粒として、原料炭素質物質を直接ダイヤ
モンドに変換させ、その短軸に対する長軸の長さの比が
2以上であるような細長い形状を得ると共に、大部分の
粒フ子の長軸方向を焼結体中に於て、ある特定方向に配
列させ、更に個の々粒子を互に焼結させることによつて
良好な熱伝導率を有するダイヤモンド焼結体を提供する
ことにある。本発明によつて得られる焼結体をヒートシ
ンク・として用いる場合当然の事ながら、長軸方向を熱
伝導の方向として用いるべきであることは理解されよう
。That is, the present invention directly converts a raw material carbonaceous material into diamond as individual diamond crystal grains constituting a diamond sintered body, and has an elongated shape in which the length ratio of the long axis to the short axis is 2 or more. In addition, by arranging the long axis direction of most of the particles in a specific direction in the sintered body and sintering the individual particles together, good thermal conductivity can be achieved. An object of the present invention is to provide a diamond sintered body having the following properties. It will be understood that when the sintered body obtained according to the present invention is used as a heat sink, the long axis direction should be used as the direction of heat conduction.
本発明によつて得られるダイヤモンド焼結体を模式的に
第5図及び第6図に示す。A diamond sintered body obtained by the present invention is schematically shown in FIGS. 5 and 6.
第5図は円板”状の焼結体に於て大多数の結晶粒の長軸
が厚み方向に揃つて配列した状態を示し、第6図は円板
状の焼結体に於て結晶粒の長軸が半径方向に配列した状
態を示す断面図である。本発明によつて得られる焼結体
中の個々のダイヤモンド粒子の大きさは例えばその短軸
の長さが20〜80μで、長軸の長さが50μ〜400
μにわたり短軸に対する長軸の長さの比が2以上である
ものがほとんどであり、短軸が40μ、長軸が200μ
のものがその内で多数を占めている。このような特徴を
有する本発明によるダイヤモンド焼結体の製造法につい
て以下に説明する。本製造法の骨子は、上述の如き焼結
体の構造を得る為に、原料炭素質物質として黒鉛を用い
、まず短軸に対する長軸の長さの比が2以上であるよう
な細長い形状の結晶粒を、大多数の結晶粒の長軸がある
特定方向に配列した状態で合成することとそれらの粒子
を互に焼結して連続したダイヤモンド相を形成せしめる
ことの二つから成り立つ。Figure 5 shows the state in which the long axes of the majority of crystal grains are aligned in the thickness direction in a disc-shaped sintered body, and Figure 6 shows the state in which the long axes of the majority of crystal grains are aligned in the thickness direction in a disc-shaped sintered body. FIG. 2 is a cross-sectional view showing a state in which the long axes of the grains are arranged in the radial direction.The size of each diamond grain in the sintered body obtained by the present invention is, for example, such that the length of the short axis is 20 to 80μ. , the length of the major axis is 50 μ ~ 400
In most cases, the ratio of the length of the long axis to the short axis is 2 or more across μ, with the short axis being 40μ and the long axis being 200μ.
occupies the majority of them. A method for manufacturing a diamond sintered body according to the present invention having such characteristics will be described below. The gist of this manufacturing method is to use graphite as a raw material carbonaceous material to obtain the structure of the sintered body as described above. It consists of two steps: synthesizing crystal grains with the long axes of the majority of crystal grains aligned in a specific direction, and sintering these grains together to form a continuous diamond phase.
ダイヤモンド焼結体を得る従来の技術と本質的に異なる
点の一つは、出発原料としてダイヤモンドを用いるので
はなく、黒鉛を用いることであつて黒鉛のダイヤモンド
への変換と焼結を同時に行うことにある。他の一つは結
晶配列を特定の方向に揃えることである。One of the essential differences from conventional techniques for obtaining diamond sintered bodies is that graphite is used instead of diamond as a starting material, and the conversion of graphite to diamond and sintering are performed at the same time. It is in. Another method is to align the crystal alignment in a specific direction.
ダイヤモンド結晶の成長方向にの場合は長軸の方向)か
触媒金属と炭素との共晶融液の浸入方向と相関があるこ
とは公知の事実であるが、本発明は、これらの方向を特
定の方向に揃える為に新たな方法を発見したことに基づ
いてい6る。それはます一つに融液の浸入過程を制御す
る方法として触媒金属と原料炭素質物質との界面に所謂
ダイヤモンドの合成に不活性な金属層を新たに設けるこ
とであり、他の一つは触媒金属と炭素の共晶温度からの
加熱を特に急速に行うことであ1る。これらの方法が何
故合成された結晶の長軸方向をある特定の方向に配列さ
せるかは厳密には理解されなが、次の様に考えられる。
第1図に基づいて説明する。第1図は炭素の圧力・温度
相図であつて、ダイヤモンドの合成領域,を示すもので
ある。線油はダイヤモンドと黒鉛の熱力学的平衡線であ
つて、ABより高温側が黒鉛の安定領域で低温側がダイ
ヤモンドの安定領域である。線CDは高圧力下における
触媒金属と炭素との共晶線である。図中のものはNj−
C共晶線である。It is a well-known fact that there is a correlation with the growth direction of diamond crystals (in the case of the long axis direction) or the direction of penetration of the eutectic melt of catalyst metal and carbon, but the present invention specifies these directions. It is based on the discovery of a new method to align the One way to control the melt infiltration process is to newly provide a metal layer that is inert to the so-called diamond synthesis at the interface between the catalyst metal and the raw carbonaceous material, and the other method is to control the melt penetration process. The purpose is to heat the metal and carbon from the eutectic temperature particularly rapidly. Although it is not strictly understood why these methods align the long axes of synthesized crystals in a particular direction, it is thought to be as follows.
This will be explained based on FIG. FIG. 1 is a pressure/temperature phase diagram of carbon, which shows the synthesis region of diamond. The wire oil is a thermodynamic equilibrium line between diamond and graphite, and the higher temperature side than AB is the stable region of graphite, and the lower temperature side is the stable region of diamond. Line CD is the eutectic line between the catalyst metal and carbon under high pressure. The one in the figure is Nj-
C is a eutectic line.
斜線を施した領域EFGHが本発明に適宜な圧力・温度
領域である。又図中の線LMは昇温の状態を説明する為
のもので、L点は共晶温度、M点は実験温度を示す点で
ある。ダイヤモンド合成に不活性な金属層を触媒金属と
原料炭素の界面に介在させない公知のダイヤモンド合成
法の場合には、昇温過程で反応室の温度が共晶温度に達
した時、(第1図L点)に融液が界面に発生する。The shaded area EFGH is the appropriate pressure/temperature area for the present invention. Further, the line LM in the figure is for explaining the state of temperature increase, and the L point indicates the eutectic temperature and the M point indicates the experimental temperature. In the case of the known diamond synthesis method in which an inert metal layer is not interposed at the interface between the catalyst metal and the raw carbon, when the temperature of the reaction chamber reaches the eutectic temperature during the heating process (Fig. At point L), a melt is generated at the interface.
L点からM点に温度が上昇するにつれ融液が原料炭素の
内部へ浸入してゆくと共に各所にダイヤモンド結晶が晶
出され出す。しかるにL点近傍では融液の粘性が高く浸
入速度は緩慢である為ダイヤモンドの結晶は細長く成長
せず、各所で多数の核発生を行い、微粒て不規則な形状
のダイヤモンドが生成する。ところが不活生金属層を介
在させた楊合には、L点の温度に達しても炭素と触媒金
属が直接接触していないが為にこの様な不活性金属が触
媒金属中に拡散し終えるまで触媒金属と炭素との共晶融
液が形成されないことになる。即ち見掛け上共晶線CD
が高温側にすれる事を意味する。しかもより高温度にな
るから低い粘性の融液が得られる為、浸入速度が大きく
なり細長い形状の結晶が成長しやすくなり、しかもその
長軸方向が成長方向と一致し一定に揃うものと理解され
る。また、触媒金属と炭素との共晶温度からの加熱を急
速に行うことの効果は、次のように考えられる。As the temperature rises from point L to point M, the melt penetrates into the raw carbon and diamond crystals begin to crystallize at various locations. However, near point L, the viscosity of the melt is high and the rate of penetration is slow, so diamond crystals do not grow long and thin, and many nuclei are generated at various locations, producing fine, irregularly shaped diamonds. However, in the case of a Yang bond with an inactive live metal layer, the carbon and the catalyst metal are not in direct contact even when the temperature reaches the L point, so the inert metal finishes diffusing into the catalyst metal. A eutectic melt of catalyst metal and carbon will not be formed until That is, the apparent eutectic line CD
This means that the temperature is on the high temperature side. Moreover, since the temperature is higher, a low viscosity melt can be obtained, which increases the penetration rate and makes it easier for elongated crystals to grow, and it is understood that their long axes coincide with the growth direction and are uniformly aligned. Ru. Further, the effect of rapidly heating the catalyst metal and carbon from the eutectic temperature is considered as follows.
加熱を急速に行うと第1図L点で発生した共晶融液は短
時間のうちに高粘度の液体から低粘度の液体となり、炭
素質物質の中に急速に浸入してゆく。そのため晶出され
たダイヤモンドはその浸入方向に向つて成長し、細長い
形状を呈し、しかもその長軸方向が一定の方向に揃うこ
とになる。ところが加熱を緩慢に行なつた時には前述し
た如く融液の粘性が高いために融液の浸入がゆるやかと
なるので晶出されたダイヤモンドは細長く成長せずしか
も一定方向にその長軸が揃わなくなる。例えば室温から
第1図L点まで5分間で昇温し、更にL点からM点まで
30゜C/分の昇温速度で昇温した場合には、長軸方向
に各粒子が揃つて配列せずランダムな状態を呈すること
が多く、しかも各粒子の長軸と短軸の長さの比が1〜1
.5近くのものが多く観察された。ところが昇温速度を
例えば1500′C/分といつた非常に早い加熱を行う
と、逆に装置を破損する可能性が増大するのて昇温速度
は早ければ早いほど良いというものではない。好ましい
範囲は100℃/分から1200℃/分である。これら
の2つの方法は前述したように、それぞれ単独で効果を
有していることは理解されよう。そして、この2つの方
法を併用することが可能であることも当然のことながら
理解されよう。しかも両方法による相乗効果によりさら
に良好な結ノ果を得ることも明らかであろう。この様に
して、長軸と短軸の長さの比が2以上であるようにダイ
ヤモンド結晶粒子の各々が、その長軸方向が特定方向に
配列して合成されたものを互に焼結させるには、第1図
で斜線を施した′)EFGHの良好な圧力・温度領で一
定の時間保持することにより達成される。When heating is carried out rapidly, the eutectic melt generated at point L in FIG. 1 changes from a high viscosity liquid to a low viscosity liquid in a short period of time, and rapidly penetrates into the carbonaceous material. Therefore, the crystallized diamond grows in the direction of its penetration, takes on an elongated shape, and moreover, its major axis is aligned in a certain direction. However, when heating is carried out slowly, the viscosity of the melt is high as described above, so that the melt penetrates slowly, so that the crystallized diamond does not grow long and thin, and its long axes are not aligned in a certain direction. For example, if the temperature is raised from room temperature to point L in Figure 1 in 5 minutes, and then from point L to point M at a rate of 30°C/min, each particle is aligned in the long axis direction. The ratio of the length of each particle's long axis to short axis is 1 to 1.
.. Many cases close to 5 were observed. However, if heating is carried out at a very rapid temperature increase rate of, for example, 1500'C/min, the possibility of damaging the apparatus increases, so the faster the temperature increase rate, the better. The preferred range is 100°C/min to 1200°C/min. It will be understood that these two methods are each effective independently, as described above. It will be understood that it is possible to use these two methods in combination. Moreover, it is clear that even better results can be obtained due to the synergistic effect of both methods. In this way, each of the diamond crystal particles is arranged in a specific direction so that the ratio of the length of the long axis to the short axis is 2 or more, and the synthesized diamond crystal particles are sintered together. This can be achieved by holding the EFGH in a favorable pressure/temperature range for a certain period of time (') indicated by diagonal lines in FIG.
好適な保持時間は圧力・温度条件により異なソー概には
規定できないが、5分から3吟の範囲が好ましい。5分
以下であると焼結は十分に起らず、又3吟以上は非経済
θ的であり、いたずらに装置の寿命を縮めるだけである
。Suitable holding times vary depending on pressure and temperature conditions and cannot be generally defined, but are preferably in the range of 5 minutes to 3 minutes. If it is less than 5 minutes, sintering will not occur sufficiently, and if it is more than 3 minutes, it is uneconomical and will only unnecessarily shorten the life of the device.
本発明に使用される触媒金属は公知のものが利用される
。Known catalyst metals can be used in the present invention.
即ちFe,Ni,CO,Cr,Mn及びこれらの合金が
好ましい。形状は第3図の如き試料構成の場合には円板
状のものが好ましく第4図の如き場合には箔状のものを
黒鉛の外周部に巻きつけて用いられる。これらのものの
量は用いられる黒鉛量及び焼結体の持つべき特性から選
択されるべきである。That is, Fe, Ni, CO, Cr, Mn and alloys thereof are preferred. In the case of a sample structure as shown in FIG. 3, a disk-like shape is preferable, and in the case of a sample structure as shown in FIG. 4, a foil-like material is used by wrapping it around the outer periphery of the graphite. The amount of these substances should be selected depending on the amount of graphite used and the properties that the sintered body should have.
即ち黒鉛と触媒金属の合計重量に対して触媒金属量が5
0Wt%以上の触媒金属を用いるとダイヤモンド粒子は
成長するものの粒子と粒子の間隙に触媒金属が多量に残
留し粒子同志の焼結が起らず、特にヒートシンク材とし
て利用する場合に熱伝導率が低下するので好ましくない
。又逆に5Wt%以下の触媒金属を用いた場合には未変
換の黒鉛が残存するとともにダイヤモンド粒子同志の焼
結現象が発生せずこれも目的を果さない。良好な範囲は
5〜30wt%の間である。本発明に使用されるダイヤ
モンド合成に不活性な金属は前述した如く炭素と接触す
るのであるからダイヤモンドの触媒となりえない金属が
最も有効である。In other words, the amount of catalyst metal is 5% relative to the total weight of graphite and catalyst metal.
If a catalyst metal of 0 Wt% or more is used, diamond particles will grow, but a large amount of catalyst metal will remain in the gaps between the particles, and the particles will not sinter together, resulting in a decrease in thermal conductivity, especially when used as a heat sink material. This is not preferable because it lowers the temperature. On the other hand, if less than 5 wt % of the catalyst metal is used, unconverted graphite remains and the diamond particles do not sinter, which also does not serve the purpose. A good range is between 5 and 30 wt%. Since the metal inactive for diamond synthesis used in the present invention comes into contact with carbon as described above, the most effective metal is a metal that cannot act as a catalyst for diamond.
この意味でAu,Ag,Cu,Al,Zn,Sn,Pb
が使用されうる。又炭素と反応し炭化物を生成する金属
であつても用いる触媒金属よりも融点が高ければ、本発
明のダイヤモンド合成に不活性な金属として用いられる
。これらにはPt,Ti,Zr,Hf,■,Ta,Nb
,MO,Wらがある。これらの金属の中て最も効果が著
しいものはへuてある。これらの不活性金属を触媒金属
と炭素質物質との界面に介在せしめる方法としてはメッ
キ法、真空蒸着法、粉末塗布法、或いは箔状のものをは
さみ込む方法、イオンスパッタリング法等があるが、必
要とする量、純度、経済性などに応じ.て選択される。
これらの面から考慮して好ましい方法は真空蒸着法であ
る。又これら不活性金属の必要量は用いる触媒金属の種
類、反応物の性能および昇温条件から決定される。最も
好ましいAuの場合、使用する触媒に対し0.1Wt%
〜5Wt%が3良好な結果をもたらす。例えば100μ
の厚さのNj触媒を用い、昇温速度を50′C/分とし
た場合にはAuの厚みとして500A〜2μの厚さの範
囲が適当てある。500A以下の場合には一定方向に成
長したダイヤモンドは観察されず、微粒なダイヤモン4
ドの密集体であつた。In this sense, Au, Ag, Cu, Al, Zn, Sn, Pb
can be used. Further, even if a metal reacts with carbon to form a carbide, it can be used as an inert metal in the diamond synthesis of the present invention if it has a higher melting point than the catalyst metal used. These include Pt, Ti, Zr, Hf, ■, Ta, Nb
, MO, W et al. Among these metals, the one with the most remarkable effect is listed below. Methods for interposing these inert metals at the interface between the catalyst metal and the carbonaceous material include plating methods, vacuum evaporation methods, powder coating methods, methods of sandwiching foil-like materials, and ion sputtering methods. Depending on the required amount, purity, economic efficiency, etc. selected.
In view of these aspects, the preferred method is vacuum evaporation. The required amount of these inert metals is determined based on the type of catalyst metal used, the performance of the reactants, and the heating conditions. In the case of the most preferred Au, 0.1 wt% based on the catalyst used
~5 Wt% gives good results. For example, 100μ
When using an Nj catalyst having a thickness of 500A to 2μ when the heating rate is 50'C/min, the appropriate thickness of the Au layer is 500A to 2μ. In the case of 500A or less, diamonds grown in a certain direction are not observed, and fine diamonds 4 are observed.
It was a dense mass of de.
又5μの厚さの金箔を使用した場合にはダイヤモンドの
生成量が少なく、焼結状態に至らなかつた。一定方向に
成長したダイヤモンド結晶粒の配列を有する焼結体を得
るに必要な圧力、温度条件は第1図に示される斜線を施
した領域EFGHが良好な結果を得る。Furthermore, when gold foil with a thickness of 5 μm was used, the amount of diamond produced was small and did not reach a sintered state. Regarding the pressure and temperature conditions necessary to obtain a sintered body having an arrangement of diamond crystal grains grown in a certain direction, the shaded area EFGH shown in FIG. 1 gives good results.
EFは触媒金属と炭素の共晶線CDより200゜C高い
温度を示す線で、FGは圧力が65Kbである線で、G
Hはダイヤモンドと黒鉛の熱力学的平衡線部より100
゜C低い温度を示す直線である。圧力は最低65Kbを
必要とする。もし反応圧力が65Kbに達しない時には
原料炭素質物質の黒鉛が未変換のまま残留する事が多い
。温度が線9EF以下、CD以上、即ち例えばNi触媒
を使用した時には約1500℃ではダイヤモンドは形成
されるものの十分に成長した結晶が得られない。又平衡
線油の近傍の温度条件では一方向にのみ選択的に成長せ
ず全方向に均等に発達した形状例えばサイ7コロ状の6
ないし8面体の集形のものが多数を占める。この様な意
味第1図に示すEFGHの領域が好ましい。本発明によ
つて得られらる焼結体は、ダイヤモンド粒子の長軸が大
多数ある特定方向に配列してノいる。EF is a line indicating a temperature 200°C higher than the eutectic line CD of catalyst metal and carbon, FG is a line where the pressure is 65 Kb, and G
H is 100 from the thermodynamic equilibrium line of diamond and graphite
This is a straight line indicating a temperature that is ℃ lower. A minimum pressure of 65 Kb is required. If the reaction pressure does not reach 65 Kb, the raw carbonaceous material graphite often remains unconverted. When the temperature is below line 9EF and above CD, that is, when a Ni catalyst is used, for example, at about 1500° C., diamonds are formed, but sufficiently grown crystals cannot be obtained. In addition, under temperature conditions near the equilibrium wire oil, a shape that does not grow selectively in one direction but develops uniformly in all directions, such as a dice-shaped 6
The majority are octahedral or octahedral. In this sense, the EFGH region shown in FIG. 1 is preferable. In the sintered body obtained by the present invention, the long axes of the diamond particles are mostly aligned in a specific direction.
この方向を熱伝導の方向として用いれば天然ダイヤモン
ド単結晶に近い高い熱伝導率が得られる。それは本焼結
体を構成するダイヤモンドの粒子が細長い形状を有し、
長軸の長さが約200μであり普通半導体デバイスのヒ
ートシンク材として要求される厚さが300μ〜500
μであるから熱伝導方向に対して粒界数が少い事に起因
するからである。また、本焼結体は触媒金属を含有し連
続的な構造の故に電気熱伝導性を有している。If this direction is used as the direction of heat conduction, high thermal conductivity close to that of a natural diamond single crystal can be obtained. The diamond particles that make up this sintered body have an elongated shape,
The length of the major axis is approximately 200μ, and the thickness normally required as a heat sink material for semiconductor devices is 300μ to 500μ.
This is because the number of grain boundaries in the direction of heat conduction is small because of μ. Furthermore, this sintered body contains a catalytic metal and has electrothermal conductivity due to its continuous structure.
それ故本焼結体は半導体レーザーの如き電気伝導性を要
求するヒートシンク材として用いられる場合には、電極
の役割を兼用させることができ好適である。ところがイ
ンパットダイオードやガンダイオード等のヒートシンク
材として使用される時には逆に電気的絶縁性が要求され
る。この様な場合でも本発明による焼結体を王水等の強
酸によつて処理し、本焼結体中に含有される触媒金属を
溶解除去することにより、電気的絶縁性を有するダイヤ
モンド焼結体が得られ、この様な分野のヒートシンク材
として利用することができる。例えば0.1Ωαの固有
抵抗を有していた本焼結体を煮沸王水中にて約24T1
!f間処理することにより約1α5オーダーの固有抵抗
を有する焼結体とすることができた。また、本発明て得
られる焼結体はある特定方向の結晶配列性を有している
が、これを調べた所結晶学的な配向性を有していた。即
ちダイヤモンド結晶の成長方向に直角な平面に平行に1
11面が形成されていた。このような配向性を利用して
線引ダイスやドレッサーとして高性能のものを得ること
ができる。R.ベルマンの著書64ダイヤモンドの物理
的特性゛によればダイヤモンドの耐磨耗性は結晶面の方
向により異なり最も耐磨耗性の優れているのは100面
の〈100〉方向であるとされている。即ち100面に
直角方向に線引ダイスの穴方向Jを設ければ耐磨耗性の
優れた線引ダイスが得られる。またこの方向はへき開に
対しても最も強い方向であるので、線引ダイスとして非
常に良好なものが得られる。さて、本発明によるダイヤ
モンド焼結体を線引ダイスとして、或いはドレッサーと
して使用するに当つて、この結晶学的配向を利用して前
述した100面のく100〉方向が容易に決定され、こ
の方向を使用面とすることによつて耐磨耗性に優れ、へ
き開に強い線引ダイス或いはドレッサーを得ることが可
能である。また、高炭素鋼線の線引きの様な場合、線材
が熱的影響を受けない事が特に要求され、ダイス温度が
上昇しない事が必須とされる。Therefore, when this sintered body is used as a heat sink material that requires electrical conductivity, such as in a semiconductor laser, it is suitable because it can also serve as an electrode. However, when used as a heat sink material for Impatt diodes, Gunn diodes, etc., electrical insulation is required. Even in such cases, by treating the sintered body of the present invention with a strong acid such as aqua regia to dissolve and remove the catalyst metal contained in the sintered body, it is possible to create a diamond sintered body with electrical insulation properties. It can be used as a heat sink material in such fields. For example, this sintered body having a specific resistance of 0.1Ωα was placed in boiling aqua regia for about 24T1.
! By performing the treatment for a period of f, a sintered body having a resistivity of about 1α5 order could be obtained. Further, the sintered body obtained by the present invention has crystal orientation in a certain specific direction, and when examined, it was found to have crystallographic orientation. That is, 1 parallel to the plane perpendicular to the growth direction of the diamond crystal.
Eleven sides were formed. Utilizing such orientation, high-performance wire drawing dies and dressers can be obtained. R. According to Bellman's book 64 Physical Properties of Diamond, the abrasion resistance of diamond varies depending on the direction of the crystal planes, and the best abrasion resistance is said to be in the <100> direction of the 100 planes. . That is, if the hole direction J of the wire drawing die is provided in a direction perpendicular to the 100 plane, a wire drawing die with excellent wear resistance can be obtained. Also, since this direction is the direction that is most resistant to cleavage, a very good wire drawing die can be obtained. Now, when using the diamond sintered body according to the present invention as a wire drawing die or as a dresser, the above-mentioned 100〉 direction of the 100 plane can be easily determined using this crystallographic orientation, and this direction By using this as the surface, it is possible to obtain a wire drawing die or dresser that has excellent abrasion resistance and is resistant to cleavage. Further, in cases such as drawing high carbon steel wire, it is particularly required that the wire is not affected by heat, and it is essential that the die temperature does not rise.
本発明によるダイヤモンド焼結体は非常に高い熱伝導度
を有しいるが故に、線引工程で発生した摩擦熱はすみや
かに外部に伝達され、ダイス温度はほとんど上昇しない
。加うるに前述した優れた耐磨耗性と相俟つて、この様
な分野の線引ダイスとして特に性能を有する。Since the diamond sintered body according to the present invention has extremely high thermal conductivity, the frictional heat generated in the wire drawing process is quickly transferred to the outside, and the die temperature hardly increases. In addition, in combination with the above-mentioned excellent abrasion resistance, it has particularly good performance as a wire drawing die in this field.
実施例1 第4図に基いて述べる。Example 1 The explanation will be based on Figure 4.
炭素質物質として分光分析用高純度黒鉛棒を直径6?、
高さ10W0fLの円柱11として用い、その重量は4
70mgであつた。触媒金属13としては、0.1朗の
厚みのNj−Cr板(JISl種)と用い、その重量は
160m9で、全体に対する重量割合は25Wt%であ
つた。不活性金属12として、AuをNi−Cr板に厚
さ3000Aに真空蒸着させたものを、その蒸着面が黒
鉛円柱11に接触する様にその外周部に巻きつけ試料構
成体10を準備した。これを第2図に示す反応容器にら
納し、まず圧力を70kbに上げ次いで急速加熱を行い
、第1図L点(1300℃)まで3分間で昇費1し、更
にL点からM点までは1分間で昇温し、左終的に70k
b●1900℃に於い10分間保持した。その後冷却し
次いで圧力を大気圧まで下降させ、円板状の反応物を回
収した。反応物は強固に結合していた。これを厚み方向
に割り、その断面を研磨後組識を観察した所、第6図に
模式的に示される如き半径方向に、外周から中心に向つ
て成長したダイヤモンドの結晶粒が厚み方向に層状に一
定の配列をしており、短軸の長さは40〜60μで、長
軸の長さは100〜300pであり、かつ互に焼結して
おり使用した触媒金属が粒界に部分的に観容された。ま
た、X線回析法によりこの反応物を調べた所、使用した
黒鉛は全てダイヤモンドに変換していた。それと共にこ
の焼結体が結晶学的に高度な配向性を有する事も見出し
た。即ち、円板状の反応物の平滑表面に対してX線(C
UKα1)を入射させた場合、得られたX線回析ピーク
は111面からの反射のみで、他の面220,311,
40蒔からの反射は111面からの反射の強度を100
とした時2〜4と非常に少なかつた。言い換るとこの円
板状のダイヤモンド焼結体はその平滑面に平行な111
面から構成されていることを示すものである。この円板
状の焼結体から矩形状の試料を切り出し、ダイヤモンド
の成長方向に対して熱伝導率を測定した所、1.9ca
1/Cm・Sec・Degであり、ほぼ天然7ダイヤモ
ンドの1a型結晶に近い値を示し、ヒートシンク材とし
て有効な熱伝導性であつた。また触媒金属の適切な量的
割合を把握する為に次のA,Bの2種類の実験を行つた
。(4)触媒金属として0.47Wtの厚さのNi−C
r板を用つ いた他は全て実施例1と同一条件で行つた
。A high purity graphite rod for spectroscopic analysis is used as a carbonaceous material with a diameter of 6? ,
It is used as a cylinder 11 with a height of 10W0fL, and its weight is 4
It was 70 mg. As the catalyst metal 13, an Nj-Cr plate (JISl type) with a thickness of 0.1 mm was used, and its weight was 160 m9, and its weight proportion to the whole was 25 Wt%. As the inert metal 12, Au was vacuum-deposited on a Ni--Cr plate to a thickness of 3000 Å and wound around the outer circumference of the graphite cylinder 11 so that the evaporated surface was in contact with the graphite cylinder 11 to prepare the sample structure 10. This was placed in the reaction vessel shown in Figure 2, and the pressure was first raised to 70 kb, followed by rapid heating, and the temperature was increased to point L (1300°C) in Figure 1 in 3 minutes, and then from point L to point M. The temperature rose in 1 minute until it reached 70k.
b●Holded at 1900°C for 10 minutes. Thereafter, the reaction mixture was cooled and the pressure was lowered to atmospheric pressure, and a disk-shaped reactant was recovered. The reactants were tightly bound. When we cut this in the thickness direction and observed the structure after polishing the cross section, we found that diamond crystal grains that grew in the radial direction from the outer periphery toward the center were layered in the thickness direction, as schematically shown in Figure 6. The short axis has a length of 40 to 60μ, the long axis has a length of 100 to 300μ, and they are mutually sintered, so that the catalyst metal used is partially attached to the grain boundaries. was observed. Furthermore, when this reaction product was examined by X-ray diffraction, it was found that all of the graphite used had been converted into diamond. We also discovered that this sintered body has a high degree of crystallographic orientation. That is, X-rays (C
When UKα1) is incident, the obtained X-ray diffraction peak is only the reflection from the 111 plane, and the other planes 220, 311,
The reflection from 40 Maki is the intensity of reflection from 111 surface, which is 100
The number was very low, 2 to 4. In other words, this disk-shaped diamond sintered body has 111 parallel to its smooth surface.
This indicates that it is made up of surfaces. A rectangular sample was cut out from this disc-shaped sintered body, and its thermal conductivity was measured in the direction of diamond growth, and it was found to be 1.9 ca.
The value was 1/Cm・Sec・Deg, which was close to that of type 1a crystal of natural 7 diamond, and the thermal conductivity was effective as a heat sink material. In addition, in order to understand the appropriate quantitative ratio of the catalyst metal, the following two types of experiments A and B were conducted. (4) Ni-C with a thickness of 0.47 Wt as catalyst metal
All conditions were the same as in Example 1 except that an R plate was used.
この場合の触媒金属の重量割合は関憇%である。In this case, the weight proportion of the catalyst metal is 10%.
得られた円板状の反応物の状態は、触媒金属をマトリッ
クスとし、その中に成長した細長いダイヤモンド粒子が
観察され、ダイヤモンド5 粒子が互に焼結している部
分は少なく、断面全体の約30%であつた。この反応物
の熱伝導率を実施例1と同様の状態で測定しところ、0
.3caI/CwLesec−Degでありヒートシン
ク材としては不向きであつた。The state of the obtained disc-shaped reactant is that the catalytic metal is used as a matrix, and elongated diamond particles are observed to have grown within it. It was 30%. The thermal conductivity of this reactant was measured under the same conditions as in Example 1 and found to be 0.
.. 3caI/CwLesec-Deg, and was unsuitable as a heat sink material.
!O(B)触媒金属として10μの厚さのNi−Cr箔
を用いた以外は全て実施例1と同一の条件で行つた。! All experiments were carried out under the same conditions as in Example 1 except that a 10 μm thick Ni-Cr foil was used as the O(B) catalyst metal.
この場合の触媒金属の重量割合は3.3wt%である。
回収した円板状反応物の中心部に直径約2順の部分にわ
たつて未変換の黒鉛が存在すると共に、断面の観察から
、ダイヤモンドの生成した領域にも黒鉛が残存し、ダイ
ヤモンド粒子は互に焼結していなかつた。実施例2
炭素質物質として、直径67r$T,厚さ57rrIn
の分光分析用高純度黒鉛の円板7,7゛を用いた。The weight proportion of the catalyst metal in this case is 3.3 wt%.
Unconverted graphite exists in the center of the recovered disc-shaped reactant over an area approximately two diameters apart, and observation of the cross section reveals that graphite remains in the area where diamonds were formed, and the diamond particles are intertwined. It was not sintered. Example 2 As carbonaceous material, diameter 67r$T, thickness 57rrIn
A high-purity graphite disk 7.7゛ for spectroscopic analysis was used.
触媒金属として50pの厚さのパーマロイ(55Fe−
45N1)円板8を用い、その両面にAuを1000A
の厚さに真空蒸着させ、試料の構成は第3図の如く配置
した試料構成体6を準備し、第2図に示す如き反応容器
に収納した。この様な構成体に圧力73kbを付与し、
第1図L点の温度である1200゜Cはで5分間で昇温
し、次いでM点の2000″Cまで2分間で昇温させた
。最終的に73kb,2000まcの条件で5分間保持
した。次いで温度、圧力の順に下降させ円板状の強固に
結合した反応物を回収した。この断面を観察した所、第
5図に模式的に示された状態を示していた。X線回析に
よれば黒鉛は全てダイヤモンドに変換しており、かつ実
施例1と同様に配向性を有していることが判つた。この
円板状の焼結体の厚み方向の熱伝導率を測定した所2.
8ca1/Cm争Sec−Degであり、天然ダイヤモ
ンドの1a型単結晶の値を上回る非常に良好な熱伝導性
を示し、ヒートシンク材として好適であつた。実施例3
圧力、温度の良好条件を調べる為に、表1に示す条件で
実験を行つた。Permalloy (55Fe-
45N1) Use a disk 8 and coat 1000A of Au on both sides.
A sample structure 6 was prepared, with the structure of the sample arranged as shown in FIG. 3, and placed in a reaction container as shown in FIG. 2. Applying a pressure of 73 kb to such a structure,
The temperature at point L in Figure 1 was raised to 1200°C in 5 minutes, and then to 2000°C at point M in 2 minutes. The temperature and pressure were then lowered in this order to recover a disc-shaped, strongly bonded reactant. When the cross section was observed, it showed the state schematically shown in Figure 5. X-rays Diffraction revealed that all of the graphite had been converted to diamond, and that it had the same orientation as in Example 1.Thermal conductivity in the thickness direction of this disc-shaped sintered body was Measured location 2.
It had a Sec-Deg of 8ca1/Cm, exhibited very good thermal conductivity exceeding the value of type 1a single crystal natural diamond, and was suitable as a heat sink material. Example 3 In order to investigate favorable pressure and temperature conditions, an experiment was conducted under the conditions shown in Table 1.
使用した材料、構成は実施例1と同一条件とした。又、
昇温条件は、第1図L点までは2分間、その後各実験の
目的温度まで1分間で上昇させ、保持時間は10分間と
した。表1に於ける記号は次の通りである。O印は一定
方向に成長した結晶粒が互に焼結した良好焼結体、八印
は成長の方向性を有しない焼結体、×印は黒鉛の残留し
た焼結体を示す。The materials and configuration used were the same as in Example 1. or,
The temperature was raised to point L in Figure 1 for 2 minutes, then to the target temperature for each experiment in 1 minute, and the holding time was 10 minutes. The symbols in Table 1 are as follows. The O mark indicates a good sintered body in which crystal grains that have grown in a certain direction are sintered together, the 8 mark indicates a sintered body with no directionality of growth, and the X mark indicates a sintered body in which graphite remains.
Ni一Cr触媒の炭素との共晶温度は約1300゜Cで
ある。実施例4
不活性金属の種類及び量的割合の効果を調べる為に表2
に示す実験を行つた。The eutectic temperature of the Ni-Cr catalyst with carbon is about 1300°C. Example 4 Table 2 was used to examine the effects of the type and quantitative proportion of inert metals.
The experiment shown in was conducted.
触媒金属として50pの厚さのNi箔を用いた。第1図
L点からM点までの昇温時間を1吟間とした以外は実施
例1と同一条件とした。実験番号10では、一定方向に
成長した結晶粒は観察されなかつた。A 50p thick Ni foil was used as the catalyst metal. The conditions were the same as in Example 1 except that the heating time from point L to point M in FIG. 1 was 1 min. In Experiment No. 10, no crystal grains growing in a fixed direction were observed.
この中で最も良好な状態を示したものは実験番号9のも
のであつた。次いで番号8,13,11,14,15,
12の順てあつた。これらのものは、番号9のものに比
し結晶の配列性が劣るが、ダイヤモンドの粒子は、短軸
に対する長軸の長さの比が1.5〜2程度の細長い形状
を示しており、その効果は確認された。実施例5
本焼結体の耐磨耗性を調べる為に触媒金属として0.2
m!nの厚さのNi−Cr円板(JISI種)を使用し
、その両面にAuを厚さ2000八に蒸着して用いた。Among them, Experiment No. 9 showed the best condition. Then numbers 8, 13, 11, 14, 15,
12 came in order. These diamond particles are inferior in crystal alignment compared to No. 9, but the diamond particles exhibit an elongated shape with a ratio of the length of the long axis to the short axis of about 1.5 to 2. The effect was confirmed. Example 5 In order to investigate the wear resistance of this sintered body, 0.2
m! A Ni--Cr disk (JISI type) with a thickness of n was used, and Au was vapor-deposited on both sides to a thickness of 2,000.
それ以外は全て実施例4と同一条件で行つて、強固に焼
結した円板状の反応物を回収した。この物質をX線回析
法により調べた所、黒鉛は検出されず、原料の黒鉛は全
てダイヤモンドに変換していると共に共晶学的な配向性
も示していた。この配向性から本焼結体の100面の〈
100〉方向を割出し、この方向に穴を設け線引ダイス
を作成した。ダイヤモンドの粉末をCOを主体とした金
属結合材で焼結したダイヤモンド焼結体から作成された
現在市販されている線引ダイスと比較テストを行つた所
、ステンレス線の線引に於て、本焼結体によるものは市
販のものに比べ約3倍の耐磨耗性を示した。All other conditions were the same as in Example 4, and a strongly sintered disk-shaped reactant was recovered. When this material was examined by X-ray diffraction, no graphite was detected, and all of the raw material graphite had been converted to diamond, and it also showed eutectic orientation. From this orientation, the 100 faces of this sintered body are
A wire drawing die was prepared by indexing the 100> direction and making holes in this direction. We conducted a comparative test with a currently commercially available wire drawing die made from a diamond sintered body made by sintering diamond powder with a metal binder mainly composed of CO, and found that it was superior in drawing stainless steel wire. The one made of a sintered body showed about three times the wear resistance compared to the commercially available one.
また、0.8%の炭素を含有する高炭素鋼線の線引きに
於て、市販のもののダイス温度は150゜Cであつたの
に対し、本発明によるもののダイス温度は100゜Cと
低く、線材の熱的影響を大幅に低下せしめる事ができた
。実施例6
本焼結体の構造、即ち個々の結晶の配列性、お゛よび形
状に与える昇温速度の単独の効果を調べるために次の実
験を行つた。In addition, when drawing high carbon steel wire containing 0.8% carbon, the die temperature of the commercially available wire was 150°C, whereas the die temperature of the wire according to the present invention was as low as 100°C. We were able to significantly reduce the thermal effects of the wire. Example 6 The following experiment was conducted to investigate the independent effect of the temperature increase rate on the structure of the present sintered body, that is, the alignment and shape of individual crystals.
炭素物質として直径6篇、厚さ57mの分光分析用高純
度黒鉛の円板マ,7゛を用いた。触媒金属として0.2
T0n厚さのNi−Cr(JISI種)円板8を使用し
、不活性金属は使用しなかつた。試料の構成は第3図の
如く配置した試料構成体6を準備し、第2図に示す高温
高圧室に収納した。このような構成体に圧力73kbを
付与したのち、第1図L点の温度である1300″Cま
で5分間で昇温し、次いでM点の温度である2200′
Cまでの昇温時間を1分、5分、l粉、3紛の4条件で
行なつた。最終的に圧力73kb、温度2200′Cで
1粉間保持したのち、温度、圧力の順で下降させた。回
収した円板状の強固に結合した焼結体の断面を観察した
結果を表3に示す。As the carbon material, 7 mm discs of high purity graphite for spectroscopic analysis with a diameter of 6 and a thickness of 57 m were used. 0.2 as catalyst metal
A Ni-Cr (JISI type) disk 8 with a thickness of T0n was used, and no inert metal was used. A sample structure 6 arranged as shown in FIG. 3 was prepared and housed in a high temperature and high pressure chamber shown in FIG. 2. After applying a pressure of 73 kb to such a structure, the temperature was raised in 5 minutes to 1300'C, which is the temperature at point L in Figure 1, and then to 2200'C, which is the temperature at point M in Figure 1.
The temperature was raised to C under four conditions: 1 minute, 5 minutes, 1 powder, and 3 powder. Finally, the pressure was maintained at 73 kb and the temperature at 2200'C for one powder period, and then the temperature and pressure were lowered in this order. Table 3 shows the results of observing the cross section of the recovered disk-shaped strongly bonded sintered body.
但し表中の文字nは焼結体を構成する個々のダイヤモン
ド粒子の短軸に対する長軸の長さの比を示す。However, the letter n in the table indicates the ratio of the length of the long axis to the short axis of each diamond particle constituting the sintered body.
上記ダイヤモンド焼結体を切断し、その断面の観察を行
う前に円板状の厚み方向の熱伝導率を測定したところ、
室温において実験番号16のものは2.3ca1/Cm
−Sec−0Cを示し、実験番号19のものは1.2c
a1/Cm・Sec・゜Cを示した。Before cutting the diamond sintered body and observing its cross section, we measured the thermal conductivity in the thickness direction of the disc.
At room temperature, experiment number 16 was 2.3ca1/Cm
-Sec-0C, experiment number 19 is 1.2c
a1/Cm・Sec・°C was shown.
これらの値はほぼ天然ダイヤモンドの1a型単結晶の値
に匹敵するものである。両者の値の差は構造の差による
ものと理解される。These values are almost comparable to the values of type 1a single crystal natural diamond. It is understood that the difference between the two values is due to the difference in structure.
第1図はダイヤモンドの合成領域を示すものである。
線ABはダイヤモンドと黒鉛の熱力学的平衡線。線CD
は触媒金属と炭素との共晶線で図中のものはNi−C共
晶線である。EFGHで囲まれた斜線部が本発明に適切
な圧力温度領域てある。第2図は本発明に用いられる反
応容器の構成図の一例を示すもので、1は黒鉛製ヒータ
ーニ2,2゛は黒鉛製端板:3,3゛はBNデイスクニ
4はBNシリンダーニ5は反応室を示す。第3図は特許
請求の範囲第2項に記載されている試料を積層配置した
場合の一例である。7,7゛は黒鉛円板、8は触媒金属
円板、9,9″はダイヤモンド合成に不活性な金属で、
6はこれらの構成体で第2図の反応室5に収納される。
第4図は特許請求の範囲第2項に記載されている試料を
同心円状に配置した場合の一例である。11は黒鉛円柱
、12はダイヤモンド合成に不活性な金属、13は触媒
金属板、10はこれらの構成体で第2図の反応室5に収
納される。FIG. 1 shows the diamond synthesis area. Line AB is the thermodynamic equilibrium line between diamond and graphite. line cd
is the eutectic line between the catalyst metal and carbon, and the line in the figure is the Ni-C eutectic line. The shaded area surrounded by EFGH is a pressure and temperature range suitable for the present invention. Fig. 2 shows an example of a configuration diagram of a reaction vessel used in the present invention. 1 is a graphite heater plate 2, 2 is a graphite end plate, 3 is a BN disk, 4 is a BN cylinder plate, and 5 is a graphite heater plate. The reaction chamber is shown. FIG. 3 is an example of a case where the samples described in claim 2 are arranged in a stacked manner. 7,7゛ is a graphite disk, 8 is a catalyst metal disk, 9,9'' is a metal inactive for diamond synthesis,
These components are housed in the reaction chamber 5 shown in FIG. FIG. 4 is an example of a case where the samples described in claim 2 are arranged concentrically. Reference numeral 11 is a graphite cylinder, 12 is a metal inert to diamond synthesis, 13 is a catalyst metal plate, and 10 is a structure of these components, which is housed in the reaction chamber 5 shown in FIG.
Claims (1)
モンド焼結体に於て、これを構成するダイヤモンドの個
々の結晶粒がその短軸に対する長軸の長さの比が少なく
とも2以上であり、大多数の結晶粒の長軸方向が焼結体
中において、ある特定方向に配列しておりかつその長軸
方向に相互の結晶粒が焼結することにより、実質的に連
続したダイヤモンド相を形成していることを特徴とする
ダイヤモンド焼結体。 2 ダイヤモンドの原料となる炭素質物質とダイヤモン
ドを晶出させるべき触媒金属とを積層もしくは同心円状
に配置し、その両者の界面にダイヤモンド合成に不活性
な金属を介在せしめ、圧力としては65Kb以上、温度
としては使用する触媒金属と炭素との共晶温度より20
0℃高い温度以上、かつダイヤモンドと黒鉛の熱力学的
平衡線より100℃低い温度以下の3つの条件で規定さ
れる高温、高圧条件下にもたらし、更にダイヤモンド結
晶の成長及び焼結に十分な期間、所定の圧力、温度条件
下に維持し、炭素質物質のダイヤモンドへの変換及び焼
結を同時に行うことを特徴とする特定方向に結晶粒が配
列したダイヤモンド焼結体の製造法。 3 特許請求の範囲第2項記載のダイヤモンド合成に不
活性な金属が、Au、Ag、Cu、Pt、Ti、Zr、
Hf、Al、Zn、Sn、Pb、V、Nb、Ta、Mo
、Wであることを特徴とする製造法。 4 特許請求の範囲第2項記載のダイヤモンド合成に不
活性な金属が、Auであり、その重量割合が使用する触
媒金属に対し、0.1〜5wt%の範囲にあることを特
徴とする製造法。 5 ダイヤモンドの原料となる炭素質物質とダイヤモン
ドを晶出させるべき触媒金属とを積層もしくは同心円状
に配置し、圧力65Kb以上で加熱するに当り、触媒金
属と炭素との共晶温度より200℃高い温度以上、かつ
ダイヤモンドと黒鉛の熱力学的平衡線より100℃低い
温度以下の間の所定の温度に至るまでの昇温速度が少く
とも100℃/分以上である急速加熱を行い、更にダイ
ヤモンド結晶の成長及び焼結に十分な期間、所定の圧力
、温度条件下に維持し、炭素質物質のダイヤモンドへの
変換及び焼結を同時に行うことを特徴とする特定方向に
結晶粒が配列したダイヤモンド焼結体の製造法。[Claims] 1. In a polycrystalline diamond sintered body containing a catalyst metal for diamond synthesis, each crystal grain of diamond constituting the body has a length ratio of its major axis to its minor axis of at least 2. As described above, the long axis direction of the majority of crystal grains is arranged in a specific direction in the sintered body, and the mutual crystal grains are sintered in the long axis direction, resulting in a substantially continuous A diamond sintered body characterized by forming a diamond phase. 2. A carbonaceous material that is a raw material for diamond and a catalyst metal that is to crystallize diamond are arranged in layers or concentrically, and a metal that is inactive for diamond synthesis is interposed at the interface between the two, and the pressure is 65 Kb or more. The temperature is 20% from the eutectic temperature of the catalyst metal used and carbon.
Bring to high temperature and high pressure conditions defined by three conditions: 0°C higher than the temperature and 100°C lower than the thermodynamic equilibrium line of diamond and graphite, and for a period sufficient for the growth and sintering of diamond crystals. A method for producing a diamond sintered body in which crystal grains are arranged in a specific direction, the method comprising simultaneously converting a carbonaceous material into diamond and sintering it under predetermined pressure and temperature conditions. 3. The metal inactive for diamond synthesis according to claim 2 is Au, Ag, Cu, Pt, Ti, Zr,
Hf, Al, Zn, Sn, Pb, V, Nb, Ta, Mo
, W. 4. Production characterized in that the metal inactive for diamond synthesis according to claim 2 is Au, and its weight percentage is in the range of 0.1 to 5 wt% with respect to the catalyst metal used. Law. 5 When a carbonaceous material that is a raw material for diamond and a catalyst metal from which diamond is to be crystallized are arranged in layers or concentrically and heated at a pressure of 65 Kb or more, the temperature is 200°C higher than the eutectic temperature of the catalyst metal and carbon. Rapid heating is performed at a rate of at least 100°C/min to reach a predetermined temperature between the temperature and the temperature that is 100°C lower than the thermodynamic equilibrium line of diamond and graphite. Diamond sintering with crystal grains arranged in a specific direction is characterized by maintaining the carbonaceous material under predetermined pressure and temperature conditions for a sufficient period of time for growth and sintering, and simultaneously converting the carbonaceous material into diamond and sintering it. Method of manufacturing solids.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54073670A JPS6049153B2 (en) | 1979-06-11 | 1979-06-11 | Diamond sintered body with crystal grains arranged in a specific direction and its manufacturing method |
| US06/158,136 US4333986A (en) | 1979-06-11 | 1980-06-10 | Diamond sintered compact wherein crystal particles are uniformly orientated in a particular direction and a method for producing the same |
| US06/352,249 US4412980A (en) | 1979-06-11 | 1982-02-25 | Method for producing a diamond sintered compact |
| US06/352,248 US4425315A (en) | 1979-06-11 | 1982-02-25 | Diamond sintered compact wherein crystal particles are uniformly orientated in the particular direction and the method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54073670A JPS6049153B2 (en) | 1979-06-11 | 1979-06-11 | Diamond sintered body with crystal grains arranged in a specific direction and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55167117A JPS55167117A (en) | 1980-12-26 |
| JPS6049153B2 true JPS6049153B2 (en) | 1985-10-31 |
Family
ID=13524901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54073670A Expired JPS6049153B2 (en) | 1979-06-11 | 1979-06-11 | Diamond sintered body with crystal grains arranged in a specific direction and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6049153B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6176534A (en) * | 1984-09-21 | 1986-04-19 | Toa Nenryo Kogyo Kk | polyethylene film |
| JP2007248136A (en) * | 2006-03-14 | 2007-09-27 | Hitachi Ltd | Thermal gas flow measuring device |
-
1979
- 1979-06-11 JP JP54073670A patent/JPS6049153B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55167117A (en) | 1980-12-26 |
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