JPS6050309B2 - Jig for constant acceleration testing of semiconductor devices - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a test jig for constant acceleration tests conducted to confirm the mechanical durability of semiconductor devices such as transistors, diodes, and integrated circuits.

Conventionally, various test methods have been applied to mechanical strength tests of semiconductor devices, but it is difficult to test the internal joints of devices with hollow interiors, such as containers for semiconductor devices using hermetic seals. As a strength confirmation test method, a constant acceleration test method that applies centrifugal force generated by rotation is applied.

In this test method, a groove is formed in a rotating plate (metallic disc) into which the semiconductor device is placed, and the semiconductor device is placed directly into the groove or placed in a separate container that can accommodate the semiconductor device. The container is fixed in the groove of the rotary plate, and the rotary plate is rotated at a specified number of rotations, thereby applying a predetermined acceleration to the semiconductor device using this number of rotations. FIG. 1 is a plan view of a conventional constant acceleration test jig, and FIG. 2 is an enlarged sectional view taken along line A-A.
That is, it consists of a metal rotary plate 1, a metal lid 2, and a metal hollow container 4 that accommodates and holds the semiconductor device 3, and these rotate to apply a predetermined load (generally 2
0000G acceleration) is applied.

The hollow container 4 has a quadrangular prism or cylindrical outer shape, and the interior is machined to fit a sample so that a semiconductor device can be accommodated therein. The grooves of the rotary plate 1 or the grooves of the hollow container 4 that come into contact with the semiconductor device require complex and highly accurate processing techniques to match the external shape of the semiconductor device. However, if the contact between the semiconductor device and the groove is uneven due to variations in the external dimensions of the semiconductor device, abnormalities may occur in the hermetically sealed container of the semiconductor device, causing the container to break. , there may be cases where the initial objective cannot be achieved. Furthermore, for external lead-out terminals that cannot be fixed,
There is a problem in that the terminal deforms abnormally due to acceleration and the value as a product is lost. J An object of the present invention is to simplify the shape of a container for fixing a semiconductor device in a constant acceleration test, prevent an inappropriate load from being applied to the semiconductor device, and make it possible to easily perform the test. The objective is to provide a test jig that is suitable for testing.

The present invention provides a jig used for constant acceleration testing of semiconductor devices, which is characterized by comprising a hollow container into which a semiconductor device and particulate matter are simultaneously packed, and a rotary plate that accommodates and holds the container. .

The present invention will be explained below using the drawings. FIG. 3 is a sectional view of a semiconductor device held in a hollow container.

A metal hollow container 4 that accommodates the semiconductor device has a hollow square or cylindrical shape, and is filled with the semiconductor device 3 and particulate matter 5, and is covered with a lid 7 with a backing 6 in between. It's summery. The particulate matter 5 needs to withstand centrifugal force and not damage the semiconductor device, and has a particle size of #10.
00 (approximately 25 microns) is suitable, and the material is arbitrarily selected such as silicon carbide, alumina, stone powder, or metal powder. The semiconductor device 3 is placed in this container 4, and the granular material 5 is packed therein so that there are no gaps.

When stuffing, it is better to give it some vibration. Backing is used to prevent particulate matter from scattering during or before acceleration testing. The metal container containing the semiconductor device in this way is placed in a recess provided in the rotating plate, the lid is placed over the whole, and a constant acceleration test is performed by applying a constant acceleration to the semiconductor device at a predetermined number of rotations. can be carried out.

Figures 4 and 5 show other embodiments of the metal hollow container, except that the container and the lid are fixed by screws (Figure 4) and rubber plugs (Figure 5). This is the same as the explanation for FIG.

In the constant acceleration test, a specified force is usually applied in each of six directions in three-dimensional directions of the semiconductor device, including the forward and reverse directions, and its mechanical strength is confirmed.

For this reason, conventional containers for holding semiconductor devices have been forced to undergo complicated processing to match the external shape of each semiconductor device under test. Semiconductor devices can be processed with one jig. Furthermore, by packing particulate matter between the semiconductor device and the hollow container wall, a gap is created between the container wall and the semiconductor device. This prevents the semiconductor device from being damaged by an inappropriate load.

[Brief explanation of drawings]

FIG. 1 is a plan view of a conventional jig, FIG. 2 is a sectional view taken along the line A-A, and FIGS. 3, 4, and 5 are sectional views each showing an example of a hollow container used in the present invention. be. 1... Rotating plate, 2... Rotating plate lid, 3
... Semiconductor device, 4 ... Hollow container, 5
...Particulate matter, 6...Backing, 7
・・・・・・Lid of hollow container.

Claims (1)

[Claims] 1. A jig used when performing a constant acceleration test by applying centrifugal force to a semiconductor device, which includes a hollow container equipped with a lid for accommodating the semiconductor device under test, and a container packed inside the container to secure the semiconductor device under test. 1. A jig for constant acceleration testing of a semiconductor device, comprising: a rotating plate having a plurality of concave portions around a rotating shaft for accommodating the container; and a lid covering the rotating plate.