JPS6050861B2 - Aluminum material for brazing - Google Patents
Aluminum material for brazingInfo
- Publication number
- JPS6050861B2 JPS6050861B2 JP819782A JP819782A JPS6050861B2 JP S6050861 B2 JPS6050861 B2 JP S6050861B2 JP 819782 A JP819782 A JP 819782A JP 819782 A JP819782 A JP 819782A JP S6050861 B2 JPS6050861 B2 JP S6050861B2
- Authority
- JP
- Japan
- Prior art keywords
- brazing
- amount
- precipitation
- aluminum material
- pitting corrosion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005219 brazing Methods 0.000 title claims description 27
- 239000000463 material Substances 0.000 title claims description 25
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 11
- 229910052782 aluminium Inorganic materials 0.000 title claims description 11
- 239000011701 zinc Substances 0.000 claims description 42
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 13
- 229910052725 zinc Inorganic materials 0.000 claims description 13
- 238000007747 plating Methods 0.000 claims description 11
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 4
- 238000001556 precipitation Methods 0.000 description 20
- 238000005260 corrosion Methods 0.000 description 14
- 230000007797 corrosion Effects 0.000 description 14
- 238000009792 diffusion process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 230000004907 flux Effects 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 238000005238 degreasing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229910000914 Mn alloy Inorganic materials 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 235000011121 sodium hydroxide Nutrition 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 229910018131 Al-Mn Inorganic materials 0.000 description 1
- 229910018461 Al—Mn Inorganic materials 0.000 description 1
- 101000993059 Homo sapiens Hereditary hemochromatosis protein Proteins 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- HVTHJRMZXBWFNE-UHFFFAOYSA-J sodium zincate Chemical compound [OH-].[OH-].[OH-].[OH-].[Na+].[Na+].[Zn+2] HVTHJRMZXBWFNE-UHFFFAOYSA-J 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 1
Landscapes
- Prevention Of Electric Corrosion (AREA)
Description
【発明の詳細な説明】
本発明は亜鉛置換メッキを施してからろう付けを行なう
アルミニウム材に関するもので、特に亜鉛置換メッキに
より犠牲陽極として必要な15g/d前後の均一なZn
析出層が得られ、その後のろう付けにより同時にZn拡
散処理させて優れた耐食性を得ることができるのである
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an aluminum material which is subjected to zinc displacement plating and then brazed. In particular, the present invention relates to an aluminum material which is subjected to zinc displacement plating and then brazed.
A precipitated layer is obtained, and during subsequent brazing, Zn diffusion treatment can be performed at the same time to obtain excellent corrosion resistance.
一般に自動車用アルミニウム製熱交換器の製造にはフラ
ックスろう付け法、真空ろう付け法、不活性ガスろう付
け法、等が用いられている。Generally, flux brazing, vacuum brazing, inert gas brazing, etc. are used to manufacture aluminum heat exchangers for automobiles.
フラックスろう付け法は高価なフラックスを使用するた
めのコスト高となるばかりか、洗浄廃液の処理問題があ
り、最近では真空ろう付け法や不活性ガスろう付け法に
移行しつつある。フラックスろう付け法では、フラック
スからのZnの析出と拡散が起り、該拡散層が犠牲陽極
となつて孔食が防止され、全面腐食となるために孔食が
貫通に到るまでには相当の時間が掛る。The flux brazing method is not only expensive due to the use of expensive flux, but also has problems with the disposal of washing waste liquid, and recently there has been a shift to vacuum brazing methods and inert gas brazing methods. In the flux brazing method, precipitation and diffusion of Zn from the flux occurs, and the diffusion layer acts as a sacrificial anode to prevent pitting corrosion, resulting in full-scale corrosion, so it takes considerable time for pitting corrosion to reach penetration. It takes time.
しかるに真空ろう付け法や不活性ガスろう付け法で造つ
た熱交換器等では犠牲陽極となるZn拡散層がないため
厳しい腐食環境に接すると孔食が発生し、短時間で貫通
することがある。最近、不活性ガスろう付け法において
、Al素材の表面に予じめ亜鉛置換メッキを施し、これ
をろう付けすることにより同時にZnを拡散させる方法
が提案されている。However, heat exchangers made using vacuum brazing or inert gas brazing do not have a Zn diffusion layer that serves as a sacrificial anode, so pitting corrosion may occur if they come into contact with a harsh corrosive environment, which can lead to penetration in a short period of time. . Recently, in an inert gas brazing method, a method has been proposed in which zinc displacement plating is applied to the surface of an Al material in advance, and this is brazed to simultaneously diffuse Zn.
Al素材には一般に純N)Al−Mn合金等が用いられ
ているが、これら素材に亜鉛置換メッキを行なうとZn
析出のバラツキが非常に大きく、Zn析出量の管理が困
難となり、実操業には適さないものである。これを改善
するため、N素材の表面を苛性ソーダでエッチングする
方法或いは溶剤だけで脱脂する方法が試みられたが、苛
性ソーダでエッチングするとZn析出量が5y/d以下
と少なくなり、必要な析出量、即ち15g/イ前後をつ
けようとするとフクレ等の異常析出を起す。また溶剤だ
けて脱脂すると目標の15y/d前後のものが容易に得
られるが、析出量にバラツキが大きく製造上の管理が不
J可能となる欠点があつた。本発明はこれに鑑み、従来
の純M、Al−Mn合金素材について、亜鉛置換メッキ
として広く用いられているジンケート処理(50y/
lZnO)370y/ lNaOH)液温35℃、5分
間、Zn析出量15y/d)を行ない、Zn析出量のバ
ラツキとその原因を調査し、バラツキの原因が微量不純
物や添加元素の量にあることを知見し、更に検討の結果
、亜鉛置換性の優れたろう付け用アルミニウム材を開発
したもので、FeO.l5〜0.50Wt%(以下Wt
%を単に%と記載する。Pure N)Al-Mn alloys are generally used as Al materials, but when these materials are subjected to zinc displacement plating, Zn
The variation in precipitation is very large, making it difficult to control the amount of Zn precipitation, making it unsuitable for actual operation. In order to improve this, methods of etching the surface of the N material with caustic soda or degreasing with only a solvent have been attempted, but etching with caustic soda reduces the amount of Zn precipitation to less than 5 y/d, and the required amount of precipitation, That is, if you try to apply around 15g/I, abnormal precipitation such as blisters will occur. Further, when degreasing with only a solvent, the target product of around 15 y/d can be easily obtained, but there is a drawback that the amount of precipitation is large and manufacturing control is difficult. In view of this, the present invention applies zincate treatment (50y/
lZnO) 370y/lNaOH) liquid temperature 35°C for 5 minutes, Zn precipitation amount 15y/d) was carried out to investigate the variation in the Zn precipitation amount and its cause, and to confirm that the cause of the variation is the amount of trace impurities and added elements. As a result of further investigation, we developed an aluminum material for brazing that has excellent zinc substitution properties, and has a FeO. l5~0.50Wt% (hereinafter referred to as Wt
% is simply written as %.
)、CUO.OO5〜0.10%、Al99.3O〜9
9.70%、残部不可避的不純物からなるアルミニウム
材に係る。即ち、本発明は純A1及びA1−Mn合金の
亜鉛置換メッキにおけるZn析出量のバラツキについて
、その原因を調査した結果、特にMn.Fe..Cuの
影響が大きく、Mnを添加するとZn析出量が低下し、
目標の15y/7T1を析出させるためには処理時間を
倍以上とする必要があり、一方処理時間を長くするとフ
クレなどの異常析出の原因となるため、亜鉛置換メッキ
の材料にはA1−Mn合金は好ましくないこと、また純
Nの中でも微量のFe及びCuの影響が特に大きいこと
、更に従来材料である純A1はJIS規格によりA1純
度の下限と、不純物の上限が規定されているが、実際に
市販されている純Nの成分はかなりバラツキがあり、こ
のような材料を用いて亜鉛置換メッキを行なうと、Zn
析出量に大きなバラツキを生じ、実験室的にはZn析出
量をある程度制御することが可能でも、実操業では非常
に困難であることを知見し、これに基づいて更に検討を
重ねた結果、Fe含有量を0.15〜0.50%、Cu
含有量を0.005〜0.10%、A1純度を99.3
0〜99.70%と規制することにより、亜鉛置換メッ
キ、特に前記ジンケート処理によつて15±3y/dの
均一な亜鉛析出量を得たもので.−ある。), CUO. OO5~0.10%, Al99.3O~9
This relates to an aluminum material consisting of 9.70% and the remainder being unavoidable impurities. That is, the present invention has investigated the causes of variations in the amount of Zn precipitated in zinc displacement plating of pure A1 and A1-Mn alloys, and has found that, in particular, Mn. Fe. .. The influence of Cu is large, and when Mn is added, the amount of Zn precipitation decreases,
In order to deposit the target 15y/7T1, it is necessary to more than double the processing time. On the other hand, increasing the processing time may cause abnormal precipitation such as blisters, so A1-Mn alloy is used as the material for zinc substitution plating. is undesirable, and even in pure N, the influence of small amounts of Fe and Cu is particularly large.Furthermore, for pure A1, which is a conventional material, the lower limit of A1 purity and the upper limit of impurities are specified by the JIS standard, but in reality The composition of commercially available pure N varies considerably, and when zinc displacement plating is performed using such materials, Zn
The amount of Zn precipitated varies greatly, and although it is possible to control the amount of Zn precipitated to some extent in the laboratory, it is extremely difficult to control it in actual operation.Based on this, we conducted further studies and found that content 0.15-0.50%, Cu
Content 0.005-0.10%, A1 purity 99.3
By regulating the amount to 0 to 99.70%, a uniform zinc precipitation amount of 15±3 y/d was obtained by zinc displacement plating, especially the above-mentioned zincate treatment. -Yes.
尚、不可避的不純物としてMn.Mg.Znlcr..
Tl等はそれぞれ0.01%以下とすることが望ましい
。しかして本発明アルミニウム材の成分を上記の如く限
定したのは次の理由によるものである。Incidentally, Mn. Mg. Znlcr. ..
It is desirable that Tl and the like be each 0.01% or less. However, the reason why the components of the aluminum material of the present invention are limited as described above is as follows.
二Fe含有量を0.15〜0.50%、Cu含有量を0
.005〜0.1%としたのは、Fe又はCuの何れか
が下限未満ではZIfr出量とバラツキが多なり、かつ
フクレ等の異常析出を起し易いためである。またFe又
はCuの何れかが上限を越えると上記ジンケート処ク理
によりZnJfT出量が少なく、該析出量を15±3y
/Rrlすることが困難となり、ろう付けにより充分な
Zn拡散状態が得られず、孔食を完全に防止できないた
めである。またA純度を99.30〜99.70%とし
たのは、99.30%未満ではZn析出量が低く、99
.70%を越えるとZn析出量とバラツキが多くなり、
しかもフクレ等の異常析出を起し易いためである。2 Fe content 0.15-0.50%, Cu content 0
.. The reason for setting the content to be 0.005 to 0.1% is that if either Fe or Cu is below the lower limit, the amount of ZIfr produced will vary widely and abnormal precipitation such as blisters will easily occur. Furthermore, when either Fe or Cu exceeds the upper limit, the amount of ZnJfT deposited is small due to the zincate treatment, and the amount of deposited is reduced to 15±3y.
/Rrl, and a sufficient Zn diffusion state cannot be obtained by brazing, and pitting corrosion cannot be completely prevented. In addition, the reason why the A purity is set to 99.30 to 99.70% is because if it is less than 99.30%, the amount of Zn precipitation will be low.
.. If it exceeds 70%, the amount of Zn precipitation and variation will increase,
Moreover, this is because abnormal precipitation such as blisters is likely to occur.
本発明アルミニウム材は以上の組成からなり、種々ろう
付け用材料に適用され、特に押出チューブ材として有効
である。The aluminum material of the present invention has the above composition and is applicable to various brazing materials, and is particularly effective as an extruded tube material.
また亜鉛置換メッキにはアルカリ性亜鉛酸ソーダによる
ジンケート処理を用いることが望ましく、処理に際して
は溶剤のみ)で表面を調整すればよい。またろう付け方
法としては、Znが蒸発しないような雰囲気例えばN2
ガス雰囲気中でフラックスを用いることなくろう付けす
るが、N2ガス中あるいは大気中でZncl2を含まな
いフラックスを用いてろう付けするか、或い、はZnc
l2を少量含むフラックスを用いて乾燥大気中でろう付
けし、工業的に行なわれている高真空ろう付け(10−
4T0rr以下)は適用できないが、N2ガスを少量導
入する低真空ろう付けは(10−3T0rr以上)はあ
る程度適用可能である。Further, for zinc displacement plating, it is desirable to use zincate treatment using alkaline sodium zincate, and the surface may be adjusted using only a solvent during the treatment. In addition, as a brazing method, an atmosphere where Zn does not evaporate, such as N2
Brazing is performed without using flux in a gas atmosphere, but brazing is performed using a flux that does not contain ZnCl2 in N2 gas or air, or
The high vacuum brazing (10-
4T0rr or less) cannot be applied, but low vacuum brazing that introduces a small amount of N2 gas (10-3T0rr or more) is applicable to some extent.
以下、発明アルミニウム材を実施例について詳細に説明
する。第1表に示す組成のNを溶製して金型に鋳造し、
直径18−、長さ40hのビレツトを得た。Examples of the invention aluminum material will be described in detail below. N having the composition shown in Table 1 is melted and cast into a mold,
A billet with a diameter of 18 mm and a length of 40 hours was obtained.
これを550℃の温度に加熱し、500゜Cの温度で押
出加工して第1図に示す肉厚1.0Tr0rL1巾30
7110!、高さ5?の多穴チューブを製造した。これ
等のチューブをトリクレンで脱脂した後、液が内部に入
らないようにチューブの穴をテープで密封し、ZnO5
Oy/′、NaOH37Oq/fからなる液温35℃の
ジンケート処理液液中で5分間処理した。This was heated to a temperature of 550°C and extruded at a temperature of 500°C to obtain a wall thickness of 1.0Tr0rL1 width 30mm as shown in Figure 1.
7110! , height 5? A multi-hole tube was manufactured. After degreasing these tubes with Triclean, seal the holes in the tubes with tape to prevent the liquid from entering inside, and then remove the ZnO5
The sample was treated for 5 minutes in a zincate treatment solution containing Oy/' and NaOH37Oq/f at a temperature of 35°C.
これ等についてZn析出量を調べると共にろう付けを想
定してチューブをN2ガス雰囲気中600℃の温度で5
分間加熱処理した後、キヤス試験と乾湿交互試験を行な
い孔食を測定した。これ等の結果を第1表に併記した。
Zn析出量は室温の10%HNO3溶液中に1分間浸漬
してZnを溶出し、その前後の重量を秤量することによ
り求めた。In addition to investigating the amount of Zn precipitated in these cases, the tubes were heated at a temperature of 600°C in an N2 gas atmosphere for 55 minutes to simulate brazing.
After heat treatment for a minute, pitting corrosion was measured by conducting a casing test and an alternating wet/dry test. These results are also listed in Table 1.
The amount of Zn precipitated was determined by immersing the sample in a 10% HNO3 solution at room temperature for 1 minute to elute Zn, and then weighing the weight before and after that.
またキヤス試験は72CRi!間行ない、乾湿交互試験
は5%NaCl溶液中に1吟間浸漬した後、50℃の温
度で5C@間乾燥することを1サイクルとして1000
サイクル行なつた後、それぞれ孔食の発生を調べ、孔食
がZn拡散層(約0.15Tm1n)内で止まつている
ものを犠牲陽極効果が十分であるとしてO印で表わし、
Zn拡散層を超えて孔食が進んでいるものを犠牲陽極効
果が不十分でもるとして×印で表わした。第1表から明
らかなように、本発明A1材(NO.l〜NO.7)は
Zn析出量が12〜18y/d1即ち154±3y/R
flの範囲内にあり、何れもろう付け後の耐孔食性が優
れていることが判る。Also, the Ciyasu test is 72CRi! In the intermittent dry/wet alternating test, one cycle was immersion in a 5% NaCl solution for 1 min, followed by drying at a temperature of 50°C for 5°C @ 1000°C.
After each cycle, the occurrence of pitting corrosion was examined, and those in which pitting corrosion stopped within the Zn diffusion layer (approximately 0.15 Tm1n) were marked with an O symbol, indicating that the sacrificial anode effect was sufficient.
Those in which pitting corrosion has progressed beyond the Zn diffusion layer are marked with an x mark, indicating that the sacrificial anode effect is insufficient. As is clear from Table 1, the present invention A1 materials (NO.1 to NO.7) have a Zn precipitation amount of 12 to 18y/d1, that is, 154±3y/R.
fl is within the range, and it can be seen that the pitting corrosion resistance after brazing is excellent in both cases.
これに対し、本発明A1材よりN純度の高い比較A1材
(NO68)、Fe含有量が少ない比較合金(NO.l
O)、Cu含有量の少ない比較合金(NO.l2)では
何れもZn析出量が増大すると共にフクレ等による異常
析出により、ろう付けのために加熱してもZnが拡散に
十分寄与せず、耐孔食性が悪くなり、また本発明AI材
よりA1純度の低い比較A1材(NO.9)、Fe含有
量の多い比較合金(NOll)、Cu含有量の多い比較
合金(NOl3)及び1100111当の従来合金(N
O.l4)、3003111当の従来合金では何れもZ
n析出量が減少し、ろう付け後の耐孔食性も悪いことが
判る。On the other hand, the comparative A1 material (NO68), which has a higher N purity than the present invention A1 material, and the comparative alloy (NO.1), which has a lower Fe content,
In the comparative alloys (NO.l2) with low Cu content, the amount of Zn precipitated increases and abnormal precipitation due to blistering causes Zn to not contribute sufficiently to diffusion even when heated for brazing. Comparative A1 material (NO.9) with poor pitting corrosion resistance and lower A1 purity than the present invention AI material, comparative alloy with high Fe content (NOll), comparative alloy with high Cu content (NO13), and 1100111 material. Conventional alloy (N
O. l4), conventional alloys of 3003111 are all Z.
It can be seen that the amount of n precipitation decreases and the pitting corrosion resistance after brazing is also poor.
このように本発明アルミニウム材によれば、亜鉛置換メ
ッキ、特にジンケート処理によりZn析出量を15±3
ダ/dの範囲内に十分管理てきるた”め、その後のろう
付けにより犠牲陽極となるZn拡散層を形成し、ろう付
け後の耐食性を向上する顕著な効果を奏するものである
。As described above, according to the aluminum material of the present invention, the amount of Zn precipitation can be reduced to 15±3 by zinc displacement plating, especially zincate treatment.
Since the Zn diffusion layer can be sufficiently controlled within the range of d/d, a Zn diffusion layer which becomes a sacrificial anode is formed during subsequent brazing, which has a remarkable effect of improving corrosion resistance after brazing.
第1図は押出加工により形成した熱交換器用多9穴チュ
ーブを示す斜視図である。FIG. 1 is a perspective view showing a multi-9-hole tube for a heat exchanger formed by extrusion.
Claims (1)
0.10Wt%、Al99.30〜99.70Wt%、
残部不可避的不純物からなる亜鉛置換メッキ性の優れた
ろう付け用アルミニウム材。1 Fe0.15~0.50Wt%, Cu0.005~
0.10 Wt%, Al99.30-99.70 Wt%,
An aluminum material for brazing with excellent zinc displacement plating properties, with the remainder being unavoidable impurities.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP819782A JPS6050861B2 (en) | 1982-01-21 | 1982-01-21 | Aluminum material for brazing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP819782A JPS6050861B2 (en) | 1982-01-21 | 1982-01-21 | Aluminum material for brazing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58144449A JPS58144449A (en) | 1983-08-27 |
| JPS6050861B2 true JPS6050861B2 (en) | 1985-11-11 |
Family
ID=11686541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP819782A Expired JPS6050861B2 (en) | 1982-01-21 | 1982-01-21 | Aluminum material for brazing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6050861B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110923729A (en) * | 2019-12-17 | 2020-03-27 | 芜湖通潮精密机械股份有限公司 | Stripping liquid and stripping method for dry etching of anodic oxide film of upper electrode plate |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07115164B2 (en) * | 1987-08-13 | 1995-12-13 | 昭和アルミニウム株式会社 | Method for manufacturing heat exchanger made of aluminum alloy |
-
1982
- 1982-01-21 JP JP819782A patent/JPS6050861B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110923729A (en) * | 2019-12-17 | 2020-03-27 | 芜湖通潮精密机械股份有限公司 | Stripping liquid and stripping method for dry etching of anodic oxide film of upper electrode plate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58144449A (en) | 1983-08-27 |
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