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JPS6053454B2 - Manufacturing method of sintered capacitor element - Google Patents
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JPS6053454B2 - Manufacturing method of sintered capacitor element - Google Patents

Manufacturing method of sintered capacitor element

Info

Publication number
JPS6053454B2
JPS6053454B2 JP7291279A JP7291279A JPS6053454B2 JP S6053454 B2 JPS6053454 B2 JP S6053454B2 JP 7291279 A JP7291279 A JP 7291279A JP 7291279 A JP7291279 A JP 7291279A JP S6053454 B2 JPS6053454 B2 JP S6053454B2
Authority
JP
Japan
Prior art keywords
powder
metal
sintered
capacitor element
binder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7291279A
Other languages
Japanese (ja)
Other versions
JPS55165621A (en
Inventor
宏 鎌田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
Original Assignee
NEC Home Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd filed Critical NEC Home Electronics Ltd
Priority to JP7291279A priority Critical patent/JPS6053454B2/en
Publication of JPS55165621A publication Critical patent/JPS55165621A/en
Publication of JPS6053454B2 publication Critical patent/JPS6053454B2/en
Expired legal-status Critical Current

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Description

【発明の詳細な説明】 本発明は弁作用を有する金属粉末を多孔質形状に焼結
した電解コンデンサ用コンデンサ素子の製造方法に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a capacitor element for an electrolytic capacitor in which metal powder having a valve action is sintered into a porous shape.

一般に、電解コンデンサの素子は例えばタンタル、ニ
オブ、アルミニウムなどのように弁作用を有する金属粉
末を多孔質形状に成形・焼結して製造される。
Generally, an electrolytic capacitor element is manufactured by molding and sintering a metal powder having a valve action, such as tantalum, niobium, or aluminum, into a porous shape.

例えばこの製造を従来は次のように行つていた。 ます
前記金属粉末に樟脳等の有機質のバインダーを約1叩対
3重量%の割合で溶剤を介して混合しておく。
For example, this manufacturing was conventionally performed as follows. First, an organic binder such as camphor is mixed with the metal powder at a ratio of about 1 part to 3% by weight via a solvent.

そして、この混合物粉末を円柱状の空洞を持つ成形型の
中に所定量を入れ、更に空洞内の混合物粉末に弁作用を
有する金属線を植立させる。次に、空洞内の混合物粉末
を成形用上下パンチで加圧成形すると、第1図に示すよ
うに、金属線1に混合物粉末を加圧成形してなるコンデ
ンサ素子2が得られる。尚、金属粉末でけでは流動性が
悪く、従つて金属粉末だけを成形型の空洞に一定量を自
動的に入れることは非常に難しい。しかし、金属粉末に
バインダーを混合すると流動性が良くなり、上記作業が
スムーズになる。
Then, a predetermined amount of this mixture powder is put into a mold having a cylindrical cavity, and a metal wire having a valve action is planted in the mixture powder in the cavity. Next, the mixture powder in the cavity is press-molded using upper and lower molding punches, and as shown in FIG. 1, a capacitor element 2 formed by press-molding the mixture powder onto a metal wire 1 is obtained. Note that metal powder alone has poor fluidity, and therefore it is very difficult to automatically introduce a certain amount of metal powder alone into the cavity of a mold. However, if a binder is mixed with the metal powder, the fluidity will improve and the above operations will become smoother.

これが金属粉末にバインダーを混合させる1つの理由で
ある。 次に加圧成形されたコンデンサ素子2は約70
00〜800℃の低温で予備焼結され、ここでバインダ
ーや溶剤の大部分が飛散して除去される。
This is one reason why a binder is mixed into the metal powder. Next, the pressure-molded capacitor element 2 has a diameter of approximately 70 mm.
It is pre-sintered at a low temperature of 00 to 800°C, during which most of the binder and solvent are scattered and removed.

そして、真空中で1400〜2000’Cの高温下で本
焼結されて、金属粉末による多孔質の結焼体が得られる
。つまり、バインダーが飛散することにより、それまで
在つたバインダーの部分が空孔となり、これにより多孔
質の焼結体が得られる。これがバインダーを金属粉末に
混合するもう1つの理由である。 後は上記焼結体を化
成液に浸漬して通電することにより、焼結体の全表面に
酸化皮膜を形成し、次に硝酸マンガン液等の半導体母液
に浸漬してから熱分解を行い、前記酸化皮膜上に半導体
層を形成する。
Then, main sintering is performed in vacuum at a high temperature of 1400 to 2000'C to obtain a porous sintered body made of metal powder. In other words, as the binder scatters, the portions of the binder that were present become pores, thereby obtaining a porous sintered body. This is another reason to mix the binder into the metal powder. After that, the sintered body is immersed in a chemical liquid and energized to form an oxide film on the entire surface of the sintered body, then immersed in a semiconductor mother liquor such as manganese nitrate solution, and then thermally decomposed. A semiconductor layer is formed on the oxide film.

更に、この半導体層上にグラファイト層と銀ペースト層
の重合層からなる電極引出し層を形成し、この電極引出
し層にマイナス外部リード線を半田付けし、又上記した
金属線1にプラス外部リード線を溶接し、然る後にコン
デンサ素子全体を樹脂外装する。 ところで、上記焼成
から化成、熱分解を経たコンデンサ素子は第2図に示す
ような焼結体構造となる。
Furthermore, an electrode lead layer consisting of a polymerized layer of a graphite layer and a silver paste layer is formed on this semiconductor layer, a negative external lead wire is soldered to this electrode lead layer, and a positive external lead wire is soldered to the metal wire 1 described above. are welded, and then the entire capacitor element is sheathed with resin. By the way, the capacitor element which has undergone the above-mentioned firing, chemical formation and thermal decomposition has a sintered structure as shown in FIG.

即ち、弁作用を有するTa等の金属焼結体3の表面にT
a2O5等を酸化皮膜4が形成され、更にその上にMn
O2等の半導体層5が被着される。又、第2図の6はバ
インダーが飛散した後の空孔で、この空孔6によつて化
成液や半導体母液が内部まで浸透し、酸化皮膜4や半導
体層5が内部まで形成されることになる。しかし、実際
上は全てのバインダーが焼結時に飛散することはなく、
特に素子・内部のバインダーは第3図に示すように、本
焼結時にカーボン7の不純物となつて金属焼結体3上に
付着する場合があつた。この場合、金属の表面に酸化皮
膜4が形成されず、半導体層5だけが形成されることが
あるため、このカーボン7のところでマイナス電極側の
半導体層5とプラス電極側の金属焼結体3のショートが
起り、コンデンサの漏^電流特性を悪くしていた。又、
この漏れ電流を改善するため、例えば真空度を上げ高温
で長時間焼結する必要があり、設備能力を低下させてい
た。又高温で焼くために容量が少なくなるという欠点が
あつた。このような問題を解決するために、例えば特公
昭52−50381号公報には弁作用を有する金属粉末
と酸化アルミニウム、二酸化珪素、酸化チタンなどの絶
縁性酸化物粉末とを混合してブレス成形し、焼結するこ
となく化成処理する電解コンデンサの製造方法が開示さ
れている。
That is, T is applied to the surface of the metal sintered body 3, such as Ta, which has a valve action.
An oxide film 4 is formed on a2O5, etc., and Mn is further formed on it.
A semiconductor layer 5, such as O2, is deposited. In addition, 6 in FIG. 2 are pores after the binder has been scattered, and the chemical solution and semiconductor mother liquid penetrate into the interior through these pores 6, and the oxide film 4 and semiconductor layer 5 are formed inside. become. However, in reality, all binders do not scatter during sintering.
In particular, as shown in FIG. 3, the binder inside the element sometimes became an impurity of carbon 7 and adhered to the metal sintered body 3 during the main sintering. In this case, the oxide film 4 may not be formed on the surface of the metal, and only the semiconductor layer 5 may be formed, so at this carbon 7, the semiconductor layer 5 on the negative electrode side and the metal sintered body 3 on the positive electrode side. A short circuit occurred, which worsened the capacitor's leakage current characteristics. or,
In order to improve this leakage current, it is necessary, for example, to increase the degree of vacuum and perform sintering at high temperature for a long time, which reduces equipment capacity. Another drawback was that the capacity was reduced due to baking at high temperatures. In order to solve these problems, for example, Japanese Patent Publication No. 52-50381 discloses a method in which a metal powder having a valve action is mixed with an insulating oxide powder such as aluminum oxide, silicon dioxide, titanium oxide, etc., and the mixture is press-molded. , discloses a method for manufacturing an electrolytic capacitor that undergoes chemical conversion treatment without sintering.

この方法によれば、バインダーの代りに除去する必要の
ない酸化物粉末が使用されているために、コンデンサの
静電容量を増大できる上、漏洩電流も改善できるなどの
効果が得られるものの、コンデンサ素子が焼結されてい
ないために、製造工程において割れ、欠けなどが生じ易
いという解一決すべき問題が残されている。
According to this method, since oxide powder that does not need to be removed is used instead of the binder, it is possible to increase the capacitance of the capacitor and improve leakage current. Since the element is not sintered, cracks and chips are likely to occur during the manufacturing process, which remains a problem that must be resolved.

本発明は上記従来の欠点に鑑み、これを改良したもので
、以下説明する。
The present invention is an improvement on the above-mentioned conventional drawbacks, and will be described below.

本発明はバインダーを全く使用しない方法で、原料粉末
として弁作用を有する金属粉末と、弁作=用を有する金
属の酸化物粉末を混合したものを用いる方法である。
The present invention is a method in which no binder is used at all, and a mixture of a metal powder having a valve action and a metal oxide powder having a valve action is used as the raw material powder.

この金属粉末とその酸化物粉末との比は1対0.1〜0
.5重量比にする。いま金属粉末をTa(タンタル)粉
末とし、その金属酸化物粉末を千1入粉末とした場合の
本発明の方法を次′に説明する。まずTa粉末対Ta2
O5粉末の重量比を1対0.1〜0.5にして混合する
The ratio of this metal powder to its oxide powder is 1:0.1~0
.. 5 weight ratio. The method of the present invention will now be described in the case where the metal powder is Ta (tantalum) powder and the metal oxide powder is powder. First, Ta powder vs. Ta2
The O5 powder is mixed at a weight ratio of 1:0.1 to 0.5.

尚、Ta粉末だけでは流動性が悪いが、これに′Ta2
O5粉末を混合することによつて混合粉末の流動性は良
くなる。従つて、成形型に金属粉末の一定量を自動供給
することが容易になる。つまり、Ta2O5粉末は従来
のバインダーと同様な作用をする。次に、混合粉末の加
圧成形が完了すると、その成形物を予備焼結なしに一気
に本焼結、即ち、真空中で例えば約1700Cで約30
分間本焼結する。この時にTa2O,粉末は還元されて
酸素が飛散し、残つたTa成分だけが先のTa粉末と一
体となつて焼結される。そして、Ta2O5粉l末から
飛び出した酸素の占めていた部分が空間として残り、こ
こが空孔の一部として形成される。実際、このTa2O
5粉末を焼結して還元させると、還元後に残つた焼結体
は還元前の体積より約2割ばかり減少し、この減少した
分が空孔として残り、従来製法のものより空孔度が向上
し、かつ機械的強度も格段に向上した。又、仮にTa2
α粉末の一部が還元されずにそのままTa2O5として
残つても絶縁体であるから、後工程でその表面に半導体
層が被着してもショートの問題は発生しない。尚、後工
程である化成処理や熱分解処理などは従来同様に行う。
いまTa粉末100に対し、Ta2O5粉末20の重量
比で混合した粉末を直径が1.論φ、高さが1.8mの
大きさで0.5mφの金属線を植立して加圧成形し、焼
結して製品化したコンデンサの漏れ電流と、成形後の素
子の欠け等による不良発生率を同寸法の従来コンデンサ
(バインダーを用いたもの)ど比較すると次表の結果を
得た。
In addition, although Ta powder alone has poor fluidity, 'Ta2
By mixing O5 powder, the fluidity of the mixed powder is improved. Therefore, it becomes easy to automatically supply a certain amount of metal powder to the mold. In other words, Ta2O5 powder acts in the same way as a conventional binder. Next, when the pressure molding of the mixed powder is completed, the molded product is main sintered at once without pre-sintering, that is, in a vacuum at about 1700C for about 30 minutes.
Sinter for a minute. At this time, the Ta2O powder is reduced and oxygen is scattered, and only the remaining Ta component is sintered together with the previous Ta powder. Then, the portion occupied by the oxygen ejected from the Ta2O5 powder remains as a space, and this space is formed as a part of the pore. In fact, this Ta2O
When the 5 powder is sintered and reduced, the volume of the sintered body that remains after reduction is reduced by about 20% compared to the volume before reduction, and this reduced volume remains as pores, resulting in a porosity that is lower than that of the conventional method. and the mechanical strength has also been significantly improved. Also, if Ta2
Even if a part of the α powder is not reduced and remains as Ta2O5, it is still an insulator, so even if a semiconductor layer is deposited on its surface in a later step, no short circuit problem will occur. Incidentally, post-processes such as chemical conversion treatment and thermal decomposition treatment are performed in the same manner as conventional methods.
Now, the powder is mixed at a weight ratio of 100 parts of Ta powder to 20 parts of Ta2O5 powder, and the diameter is 1. Due to the leakage current of the capacitor manufactured by planting a 0.5mφ metal wire with a height of 1.8m, pressure forming, and sintering, and chipping of the element after forming. When comparing the defect rate with conventional capacitors of the same size (using a binder), we obtained the results shown in the table below.

この表から明らかなように、本発明の場合は本焼結時に
カーボン等の不純物ができないため、漏れ電流が従来の
約1′3に減つた。
As is clear from this table, in the case of the present invention, since impurities such as carbon are not produced during the main sintering, the leakage current is reduced to about 1'3 compared to the conventional method.

又、Ta2O5のような金属酸化物の還元で空孔を作る
ため、加圧成形時の加圧力が比較的大きくでき、そのた
め焼結されたコンデンサ素子の機械的強度が増し、不良
率が従来の約113になつた。尚、金属粉末ど金属酸化
物粉末は1対0.1〜0.5重量比で混合させることが
最良で、仮に金属酸化物粉末の重量比が0.1未満だと
少な過ぎて、混合粉末の良好な流動性が得られない。
In addition, since pores are created by the reduction of metal oxides such as Ta2O5, the pressure during pressure molding can be relatively large, which increases the mechanical strength of the sintered capacitor element and lowers the defective rate compared to conventional methods. It became about 113. In addition, it is best to mix the metal powder and metal oxide powder at a weight ratio of 1:0.1 to 0.5. If the weight ratio of the metal oxide powder is less than 0.1, it is too small and the mixed powder Good fluidity cannot be obtained.

又、金属酸化物粉末の重量比が0.5を越えると、焼結
後の素子の機械的強度が弱くなり特性劣下を引き起しや
すくなる。又、弁作用を有する金属粉末とこれに混入す
る弁作用を有する金属の酸化物粉末とは上述のようにT
aとTa2O5の組合せの他Taとニオブの酸化物、チ
タンの酸化物のように異種の組合せとすることもできる
。以上説明したように、本発明によれば金属酸化物粉末
を従来のバインダーの代りに用いるため、本焼結の前の
予備焼結のような脱バインダー工程が省け、工数の簡略
化が図れる。
Furthermore, if the weight ratio of the metal oxide powder exceeds 0.5, the mechanical strength of the element after sintering will be weakened and properties will likely deteriorate. Furthermore, as mentioned above, the metal powder having a valve action and the metal oxide powder having a valve action mixed therein are T.
In addition to the combination of a and Ta2O5, different combinations such as Ta and niobium oxide or titanium oxide may be used. As explained above, according to the present invention, since metal oxide powder is used in place of the conventional binder, a binder removal process such as preliminary sintering before main sintering can be omitted, and the number of steps can be simplified.

又、金属酸化物は絶縁体であるため、これが焼結時に還
元されて金属になるものの、仮に一部が還元されず金属
酸化物が残留してもバインダーのようなショート発生の
恐れがなく、従つて漏れ電流の改善が図れる。又、金属
酸化物が金属に還元されると、その後が空孔となり、た
めに従来より空孔度の大きい多孔質のコンデンサ素子の
作製が可能となる。更に、バインダーを用いないから、
加圧成形時の加圧力を大きくすることができ、従つて成
形後に欠けや割れ等のトラブルが減少し、不良率を小さ
くできる。
In addition, since metal oxides are insulators, they are reduced to metals during sintering, but even if some of the metal oxides are not reduced and remain, there is no risk of short circuiting as with binders. Therefore, leakage current can be improved. Furthermore, when a metal oxide is reduced to a metal, pores are formed in the pores that remain, making it possible to produce a porous capacitor element with a higher degree of porosity than conventional capacitor elements. Furthermore, since no binder is used,
It is possible to increase the pressure applied during pressure molding, thereby reducing problems such as chipping and cracking after molding, and reducing the defective rate.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は焼結形コンデンサ素子の断面図、第2図は熱分
解後の正常な場合の素子内部説明図、第3図は第2図の
従来製法による異常個所の内部説明図である。
FIG. 1 is a cross-sectional view of a sintered capacitor element, FIG. 2 is an explanatory view of the inside of the element in a normal state after thermal decomposition, and FIG. 3 is an explanatory view of the inside of an abnormal location according to the conventional manufacturing method shown in FIG.

Claims (1)

【特許請求の範囲】[Claims] 1 弁作用を有する金属粉末と、弁作用を有する金属の
酸化物粉末とを1対0.1〜0.5重量比で混合したも
のをプレス成形した後、焼結して形成し、かつ焼結時に
酸化物粉末を還元することを特徴とする焼結形コンデン
サ素子の製造方法。
1 A mixture of a metal powder having a valve action and an oxide powder of a metal having a valve action at a weight ratio of 1 to 0.1 to 0.5 is press-molded and then sintered. A method for manufacturing a sintered capacitor element characterized by reducing oxide powder during sintering.
JP7291279A 1979-06-08 1979-06-08 Manufacturing method of sintered capacitor element Expired JPS6053454B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7291279A JPS6053454B2 (en) 1979-06-08 1979-06-08 Manufacturing method of sintered capacitor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7291279A JPS6053454B2 (en) 1979-06-08 1979-06-08 Manufacturing method of sintered capacitor element

Publications (2)

Publication Number Publication Date
JPS55165621A JPS55165621A (en) 1980-12-24
JPS6053454B2 true JPS6053454B2 (en) 1985-11-26

Family

ID=13503024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7291279A Expired JPS6053454B2 (en) 1979-06-08 1979-06-08 Manufacturing method of sintered capacitor element

Country Status (1)

Country Link
JP (1) JPS6053454B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6368353A (en) * 1986-09-10 1988-03-28 Dainippon Toryo Co Ltd polishing tools

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5621609A (en) * 1994-12-09 1997-04-15 The United States Of America As Represented By The Secretary Of The Army Composite electrode materials for high energy and high power density energy storage devices
JP6461794B2 (en) * 2013-08-05 2019-01-30 東洋アルミニウム株式会社 Electrode material for aluminum electrolytic capacitor and method for producing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6368353A (en) * 1986-09-10 1988-03-28 Dainippon Toryo Co Ltd polishing tools

Also Published As

Publication number Publication date
JPS55165621A (en) 1980-12-24

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