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JPS6054892B2 - Method for manufacturing optical fiber glass - Google Patents
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JPS6054892B2 - Method for manufacturing optical fiber glass - Google Patents

Method for manufacturing optical fiber glass

Info

Publication number
JPS6054892B2
JPS6054892B2 JP21478A JP21478A JPS6054892B2 JP S6054892 B2 JPS6054892 B2 JP S6054892B2 JP 21478 A JP21478 A JP 21478A JP 21478 A JP21478 A JP 21478A JP S6054892 B2 JPS6054892 B2 JP S6054892B2
Authority
JP
Japan
Prior art keywords
glass
optical fiber
rod
sintered body
soot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21478A
Other languages
Japanese (ja)
Other versions
JPS5494047A (en
Inventor
信 佐藤
巌 松山
康夫 佃
庸雄 菅沼
俊夫 勝山
衛 杉江
宏司 石田
憲三 須佐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21478A priority Critical patent/JPS6054892B2/en
Publication of JPS5494047A publication Critical patent/JPS5494047A/en
Publication of JPS6054892B2 publication Critical patent/JPS6054892B2/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/20Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/28Doped silica-based glasses doped with non-metals other than boron or fluorine doped with phosphorus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

【発明の詳細な説明】 本発明は、光ファイバの製造法に関するものである。[Detailed description of the invention] The present invention relates to a method of manufacturing an optical fiber.

光ファイバの製造方法は次の4つに大別される。1)
出発円筒部材(通常石英パイプが使用され る)の内
壁面に、これより屈折率の高いガラス 膜を形成し、加
熱溶着後、線引きする方法2) 中実円柱部材(通常高
純度石英が使用され る)の外壁に、これより屈折率の
低いガラスを 形成し、線引きする方法3) 溶融ガラ
スを多重のルツボで直接線引きし、屈折率が中心部で高
い多層構造の光ファイバとする方法4) ソースガスを
火炎加水分解し、種ロッド上にロッド状ガラススートを
堆積した後、脱泡ガラス化し、線引きして光ファイバと
する方法がある。
Optical fiber manufacturing methods can be broadly classified into the following four types. 1)
Method 2) A glass film with a higher refractive index is formed on the inner wall surface of the starting cylindrical member (usually a quartz pipe is used), and then wire-drawn after heat welding 2) Solid cylindrical member (usually high-purity quartz is used) 3) A method of forming glass with a lower refractive index on the outer wall of the molten glass and drawing it. 3) A method of directly drawing molten glass in multiple crucibles to create a multilayered optical fiber with a high refractive index in the center. 4) There is a method in which a source gas is flame-hydrolyzed to deposit a rod-shaped glass soot on a seed rod, which is then defoamed and vitrified, and drawn to form an optical fiber.

3)はガラス溶融ルツボの耐熱材料および高温加熱した
ときのルツボからの汚染などから低軟化多成分ガラスに
よる光ファイバ作製に用いられている。
3) is used in the production of optical fibers using low-softening multi-component glass due to the heat-resistant material of the glass melting crucible and the contamination from the crucible when heated to high temperatures.

本発明に直接関連した従来技法は上記4)であり、以下
4)の方法における特徴を述べ、本発明の詳細な説明す
る。
The conventional technique directly related to the present invention is the above 4), and the features of the method 4) will be described below to provide a detailed explanation of the present invention.

第1図は4)の方法における装置の概念図である。FIG. 1 is a conceptual diagram of an apparatus used in method 4).

通常ノズル11から出る酸水素炎中に原料を混入しガラ
ス微粒子を作り、回転しながら上昇する出発材の先端に
堆積させ、光ファイバにしたときのコア(光の伝播領域
)とする。ここで焼結体16の作製は通常257!r!
n〜35TfrIf1の直径で50醜〜80W&/Hr
の成長速度である。つづいて同様なノズル12によりク
ラッド(コア外周部屈折率の低い部分)用のガラス微粒
子を吹き付け焼結体17とし、これを約1600℃の電
気炉1牡および局所加熱用カーボンヒータ15で脱泡ガ
ラス化する。この焼結体17の線収縮率は0.3〜0.
5で、例えば直径257mの焼結体は約10Tmの透明
ガラス棒18となる。このようにして作製した光ファイ
バ用ガラスロッド(以下ではプリフォームと言う)を線
引きし、外径約130μm1コア径約60pmの光ファ
イバを作製する。上記従来法の困難は焼結体ロッドの脱
泡と長手.方向の外径変動を少くすることである。
Normally, a raw material is mixed into the oxyhydrogen flame emitted from the nozzle 11 to create glass particles, which are deposited on the tip of the starting material that rises while rotating, and are used as the core (light propagation region) when made into an optical fiber. Here, the production time of the sintered body 16 is usually 257! r!
n~35TfrIf1 diameter 50ugly~80W&/Hr
growth rate. Next, fine glass particles for the cladding (the part of the outer periphery of the core with a low refractive index) are blown into a sintered body 17 using the same nozzle 12, and this is degassed in an electric furnace at approximately 1600°C and a carbon heater 15 for local heating. Vitrify. The linear shrinkage rate of this sintered body 17 is 0.3 to 0.
5, the sintered body with a diameter of 257 m, for example, becomes a transparent glass rod 18 of about 10 Tm. The thus produced glass rod for optical fiber (hereinafter referred to as preform) is drawn to produce an optical fiber having an outer diameter of about 130 μm and a core diameter of about 60 pm. Difficulties with the conventional method mentioned above are degassing and long length of the sintered rod. The objective is to reduce the variation in the outer diameter in the direction.

光伝送路としての光ファイバは光の伝送損失が低いこと
が望まれる。脱泡が完全でないと気泡とガラスの境界で
光散乱を生じ伝播光の損失となる。また外径変動が伝送
特性に悪影響を及ぼすことは明らかで−ある。本発明の
目的は脱泡を容易にし、かつ外径変動をより少くした光
ファイバの製造方法を提供するものである。逆に同じ脱
泡効率に対してはより径の大きなプリフォーム作製を可
能ならしめるものである。脱泡は焼結体の連結した気相
をつたわつて行なわれる。
Optical fibers used as optical transmission lines are desired to have low optical transmission loss. If defoaming is not complete, light scattering occurs at the boundary between the bubbles and the glass, resulting in a loss of propagating light. Furthermore, it is clear that variations in the outer diameter have an adverse effect on transmission characteristics. An object of the present invention is to provide a method for manufacturing an optical fiber that facilitates degassing and reduces variation in outer diameter. Conversely, it is possible to produce a preform with a larger diameter for the same defoaming efficiency. Defoaming is carried out through the connected gas phase of the sintered body.

したがつて透明ガラス化部分と焼結体部分との境界はで
きるだけクリアーでなければならない。例えば透明ガラ
ス化が部分的に進行すると、外気相に対して、しや断さ
れた焼結体の気泡がガラス内部に残留することになり、
脱泡が困難となる。このため透明ガラス化を行なう電気
炉の温度分布は、透明ガラス化していく部分では温度勾
配の大きいすなわち、焼結部とガラス化部の境界がはつ
きりと別れるよう急峻なものが望ましい。また焼結体の
径が大きくなると、脱泡するロッドの移動速度に伴なつ
てロッドの内部と外周部で温度勾配が生ずる。すなわち
、ロッドの径によノつて電気炉の温度分布ならびに脱泡
速度の整合が必要であり、一般的には焼結体ロッドの径
が大きくなるとともに、脱泡の困難さは増大する。この
困難を解決すべく、円筒状のガラス焼結体を作製し、こ
れを脱泡することによつて、不純物および気泡の少ない
、コア用および、クラッド用ガラスを形成し、光ファイ
バとする方法が本発明の主要部である。ロッド状焼結体
における脱泡が、ロッド外周部をして行なわれるに対し
て、円筒状焼結体では、円筒の内、外周部両方からの脱
泡が可能であり、また、同じ脱泡条件、すなわち同じ円
筒焼結体肉厚でもその径を大きくすることによつて、ム
ク棒状のコアあるいはクラッドロッドにしたときの体積
(外径)を任意に大きくできることから、本発明の有効
さは明らかであろう。以下、本発明を実施例を参照して
詳細に説明する。
Therefore, the boundary between the transparent vitrified portion and the sintered body portion must be as clear as possible. For example, when transparent vitrification progresses partially, the air bubbles of the shattered sintered body remain inside the glass in contact with the outside air phase.
Defoaming becomes difficult. For this reason, it is desirable that the temperature distribution of the electric furnace for transparent vitrification has a large temperature gradient in the area where the transparent vitrification is to be performed, that is, it is steep so that the boundary between the sintered part and the vitrified part is sharply separated. Furthermore, as the diameter of the sintered body increases, a temperature gradient occurs between the inside and the outer circumference of the rod as the degassing rod moves at a faster speed. That is, it is necessary to match the temperature distribution of the electric furnace and the degassing rate depending on the diameter of the rod, and generally, as the diameter of the sintered rod increases, the difficulty of degassing increases. In order to solve this difficulty, a cylindrical glass sintered body is produced and degassed to form core and cladding glass with few impurities and bubbles, which is then used as an optical fiber. is the main part of the present invention. Defoaming in a rod-shaped sintered body is performed from the outer periphery of the rod, whereas in a cylindrical sintered body, defoaming is possible from both the inside and the outer periphery of the cylinder, and the same defoaming The effectiveness of the present invention is that the volume (outer diameter) of a solid rod-shaped core or clad rod can be arbitrarily increased by increasing the diameter even if the wall thickness of the cylindrical sintered body remains the same. It should be obvious. Hereinafter, the present invention will be explained in detail with reference to Examples.

実施例1 第2図は本発明に用いた装置の概要を示す断面図である
Example 1 FIG. 2 is a sectional view showing an outline of the apparatus used in the present invention.

21からSiCI4および屈折率制御用ドーパントとし
てのソースガスPOCl3の混合ガスを酸水素バーナと
ともに噴出し、火炎加水反応でできたSiO2−P2O
.ガラス微粒子を、回転する円筒出発材端部に焼結堆積
させた。
A mixed gas of SiCI4 and source gas POCl3 as a dopant for controlling the refractive index is ejected from 21 with an oxyhydrogen burner, and SiO2-P2O formed by a flame hydration reaction is produced.
.. Glass particles were sintered deposited on the end of a rotating cylindrical starting material.

この焼結体25を回転ロール23で上方に移動させつつ
、電気炉22で脱泡して透明な円筒ガラス26とし、さ
らに電気炉24で加熱溶着して、コア用高純度ガラス2
7を作製した。ノズル28から流す希ガス02.N2は
脱泡を助けるとともに円筒焼結体端部の形状制御に有効
である。このときの焼結体は外径14φ、内径10Wr
1!lであり、透明ガラス化しさらに溶着した後のガラ
ス棒外径は7.1T!nであつた。外径約10w0nの
ムク棒状焼結体を脱泡ガラス化(ガラス化後の外径〜7
Tfr!Ft)する速度は約2.5wft/Minであ
るのに対して、本方法で作製した焼結体の脱泡速度は6
〜1Cyrfr1n/Minと2〜4倍速くすることが
できた。作製したガラス棒をコア材とした石英をクラッ
ド材とした光ファイバを、ロッド・イン・チューブ法(
石英バイブ内にコア用ムク棒を挿入後加熱溶密着しフリ
フオームとする方法)で作製したところ、GaAsレー
ザ光波長(8300A)における光伝送損失は約5dB
/―とかなり低損失であつたが波長9500A附近での
0H高調振動による吸収が見られた。これを酸水素バー
ナからのHの混入が原因と考えられる。実施例2 第3図は、高純度ガラスチューブ作製装置の概要である
This sintered body 25 is moved upward by a rotating roll 23 and degassed in an electric furnace 22 to form a transparent cylindrical glass 26, which is then heated and welded in an electric furnace 24 to form a high-purity glass 26 for the core.
7 was produced. Rare gas 02 flowing from the nozzle 28. N2 helps defoaming and is effective in controlling the shape of the end of the cylindrical sintered body. The sintered body at this time had an outer diameter of 14φ and an inner diameter of 10Wr.
1! 1, and the outer diameter of the glass rod after being made into transparent glass and further welded is 7.1T! It was n. A solid rod-shaped sintered body with an outer diameter of about 10 w0n is defoamed and vitrified (outer diameter after vitrification is ~7
Tfr! Ft) is approximately 2.5 wft/min, whereas the degassing rate of the sintered body produced by this method is approximately 6 wft/min.
It was possible to increase the speed by 2 to 4 times to 1 Cyrfr1n/Min. The rod-in-tube method (
When fabricated using the method of inserting a solid core rod into a quartz vibrator and heating and melting it to form a free form, the optical transmission loss at the GaAs laser light wavelength (8300A) was approximately 5 dB.
/-, which was a fairly low loss, but absorption due to 0H harmonic vibration at a wavelength of around 9500A was observed. This is thought to be caused by the incorporation of H from the oxyhydrogen burner. Example 2 FIG. 3 is an outline of a high-purity glass tube manufacturing apparatus.

35から出発円管31を通して水素を含まない可燃性ガ
ス(例えばNO,COなど)を導入し、一方36からソ
ースガスを酸素とともに(出発円管31の外周部分に)
送り込む。
A combustible gas not containing hydrogen (for example, NO, CO, etc.) is introduced from 35 through the starting circular pipe 31, while a source gas is introduced from 36 along with oxygen (into the outer peripheral part of the starting circular pipe 31).
Send it in.

31の端部で可燃ガスを燃焼させ、その燃焼熱でソース
ガスを分解酸化させて形成された焼結ガ)ス33を円管
31の端部に成長させた。
A sintered gas 33 was grown at the end of the circular tube 31 by burning combustible gas at the end of the tube 31 and decomposing and oxidizing the source gas using the combustion heat.

このようにして形成した焼結ガラス33は白色の多孔性
焼結ガラス管であり、その成長とともに下方に出発部材
とともに引下げ、電気炉37で脱泡ガラス化し、高純度
ガラスチューブ32を順次成長させた。可燃性ガスの流
量すなわち、燃焼させたときの火力の大きさは、ガラス
焼結体33の焼結性および形成速度に、またソースガス
量はガラス焼結体33の形成速度に、さらに可燃ガス流
量と36より導入する(ソースガス+02)の流量のバ
ランスは33の(外内径)形状制御に重要な因子である
。この方法で作製した高純度ガラスチューブを溶着し、
棒状のロッドにしたところ、その体積は第1図に示した
従来のロッド作製法ど比較して、5〜1@であつた。し
たがつて、チューブ状にすることによつて、脱泡が非常
に容易になり、ロッドの実効的な成長速度を速くするこ
とができた。また本方法によれば、Ge,B,P,Sn
などの酸化物の1種以上を含む石英系ガラスチューブを
作製できる。実施例1において、スート源としてのバー
ナを多数法配置することにより、任意の屈折率分布を有
するプレフォームを作製できることは、従来法を示す第
1図の場合と同様である。
The sintered glass 33 thus formed is a white porous sintered glass tube, and as it grows, it is pulled downward together with the starting material, defoamed and vitrified in an electric furnace 37, and high-purity glass tubes 32 are successively grown. Ta. The flow rate of the combustible gas, that is, the magnitude of the firepower when it is combusted, depends on the sinterability and formation speed of the glass sintered body 33, and the amount of source gas depends on the formation speed of the glass sintered body 33. The balance between the flow rate and the flow rate of (source gas +02) introduced from 36 is an important factor in controlling the shape of 33 (outer and inner diameter). High-purity glass tubes made using this method are welded,
When it was made into a bar-like rod, its volume was 5 to 1@ compared to the conventional rod manufacturing method shown in FIG. Therefore, by forming the rod into a tube shape, defoaming becomes very easy and the effective growth rate of the rod can be increased. Furthermore, according to this method, Ge, B, P, Sn
A quartz-based glass tube containing one or more oxides such as oxides can be manufactured. In Example 1, by arranging multiple burners as soot sources, a preform having an arbitrary refractive index distribution can be produced, as in the case of FIG. 1 showing the conventional method.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の光ファイバロッドの作製装置の説明図、
第2図は本発明の一実施例における光ファイバロッド作
製装置の概要を示す断面図、第3図は本発明の他の実施
例における高純度ガラスチ・ユーブ作製装置の概要を示
す断面図である。
Fig. 1 is an explanatory diagram of a conventional optical fiber rod manufacturing apparatus;
FIG. 2 is a cross-sectional view showing an overview of an optical fiber rod manufacturing apparatus in one embodiment of the present invention, and FIG. 3 is a cross-sectional view showing an overview of a high-purity glass tube manufacturing apparatus in another embodiment of the present invention. .

Claims (1)

【特許請求の範囲】 1 火炎加水分解法あるいは熱分解反応によるCVD法
を用いて光ファイバ用ガラスを作成する工程において、
該工程中にスートの堆積のみで構成されたスート状中空
円筒部材を形成する工程が含まれることを特徴とする光
ファイバ用ガラスの製造方法。 2 上記スート状中空円筒部材を、加熱により、脱泡、
ガラス化して、中空円筒状ガラス部材を作製することを
特徴とする特許請求の範囲第1項に記載の光ファイバ用
ガラスの製造方法。 3 上記スート状中空円筒部材を加熱により脱泡、光フ
ァイバ化した後、加熱、溶着して中実円筒状ガラス部材
を作製することを特徴とする特許請求の範囲第1項に記
載の光ファイバ用ガラスの製造方法。
[Claims] 1. In the step of producing optical fiber glass using a flame hydrolysis method or a CVD method using a thermal decomposition reaction,
A method for manufacturing optical fiber glass, characterized in that the step includes a step of forming a soot-like hollow cylindrical member composed only of soot deposition. 2 The soot-like hollow cylindrical member is degassed by heating.
2. The method of manufacturing optical fiber glass according to claim 1, wherein the glass member is vitrified to produce a hollow cylindrical glass member. 3. The optical fiber according to claim 1, wherein the soot-like hollow cylindrical member is degassed by heating to form an optical fiber, and then heated and welded to produce a solid cylindrical glass member. A method of manufacturing glass for use.
JP21478A 1978-01-06 1978-01-06 Method for manufacturing optical fiber glass Expired JPS6054892B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21478A JPS6054892B2 (en) 1978-01-06 1978-01-06 Method for manufacturing optical fiber glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21478A JPS6054892B2 (en) 1978-01-06 1978-01-06 Method for manufacturing optical fiber glass

Publications (2)

Publication Number Publication Date
JPS5494047A JPS5494047A (en) 1979-07-25
JPS6054892B2 true JPS6054892B2 (en) 1985-12-02

Family

ID=11467698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21478A Expired JPS6054892B2 (en) 1978-01-06 1978-01-06 Method for manufacturing optical fiber glass

Country Status (1)

Country Link
JP (1) JPS6054892B2 (en)

Also Published As

Publication number Publication date
JPS5494047A (en) 1979-07-25

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