JPS6056797B2 - Method for removing surface oxide film of Zr and Hf and their alloys - Google Patents
Method for removing surface oxide film of Zr and Hf and their alloysInfo
- Publication number
- JPS6056797B2 JPS6056797B2 JP15787382A JP15787382A JPS6056797B2 JP S6056797 B2 JPS6056797 B2 JP S6056797B2 JP 15787382 A JP15787382 A JP 15787382A JP 15787382 A JP15787382 A JP 15787382A JP S6056797 B2 JPS6056797 B2 JP S6056797B2
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- Prior art keywords
- oxide film
- concentration
- alloys
- ammonium
- ammonium fluoride
- Prior art date
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- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
【発明の詳細な説明】
この発明は、Zr..Zr基合金、Hf..Hf基合金
等の■a族金属、或いはそれらの合金の表面酸化被膜を
除去する方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION This invention relates to Zr. .. Zr-based alloy, Hf. .. The present invention relates to a method for removing a surface oxide film of group ①a metals such as Hf-based alloys, or alloys thereof.
一般に、ほとんどの金属又は合金は、鋳造、鍛造、熱処
理、あるいは腐食性環境での使用等によつてその表面に
酸化被膜を形成するので、通常の場合、つぎの工程に供
するために表面酸化被膜除去処理を施す必要があつた。In general, most metals or alloys form an oxide film on their surface due to casting, forging, heat treatment, or use in corrosive environments. It was necessary to carry out removal treatment.
ところで、近年、航空産業、原子力産業、あるいは海水
利用産業等のめざましい発展にともない、Zr..Zr
基合金、或いはHf..Hf基合金に対する需要が急増
しており、特に表面酸化被膜を形成しやすいこれらの合
金においては、その酸化被膜除去処理が、製品品質や製
品加工処理工程全体の能率に重要な位置を占めるように
なつてきた。従来、Zr..Zr基合金、Hflおよび
Hf基合金から成る材料等に生じた表面酸化被膜の除去
は、機械的な表面研削、あるいはLiF..ZrF4等
のフッ化物溶融塩浸漬処理によるのが一般的であつたが
、前者の場合には、狭隘部や小さな凹部、あるいは隅部
の被膜除去か困難てあり、また地金もかなり削O込んで
しまうために歩留りの低下を招くうえ、酸化被膜が極め
て硬いので研削機の刃の損耗が著しいものであつた。By the way, in recent years, with the remarkable development of the aviation industry, nuclear power industry, seawater utilization industry, etc., Zr. .. Zr
Base alloy or Hf. .. Demand for Hf-based alloys is rapidly increasing, and oxide film removal treatment has become important for product quality and overall efficiency of the product processing process, especially for these alloys that are prone to forming oxide films on their surfaces. I'm getting old. Conventionally, Zr. .. Surface oxide films formed on materials made of Zr-based alloys, Hfl, and Hf-based alloys can be removed by mechanical surface grinding or LiF. .. Generally, fluoride molten salt immersion treatment such as ZrF4 was used, but in the former case, it was difficult to remove the coating from narrow areas, small recesses, or corners, and the bare metal also required considerable cutting. In addition, the oxide film was extremely hard, causing significant wear and tear on the blades of the grinding machine.
一方、後者の場合には、高腐食性の溶融塩を高塩て使用
するため、安全面あるいはコスト面て問題があるほか、
地金の溶解速度も極めて大きいので歩留りが低くなり、
さらに被膜除去処理後、金属表面に付着してくる塩の除
去作業が必要である等の不都合を有していた。そこで、
このような表面酸化被膜の除去方法のほかに、1硝フッ
酸処理法
2叩ガス処理法
3N1I1F中での交流電解処理法
等が試みられたが、「硝フッ酸処理法」では、酸化被膜
より地金の溶解速度の方が著しく大きいために極めて薄
い被覆(イ).1μm程度以下)の除去にしか利用てき
ず、かつ地金の溶解量も大きいという欠点があつた。On the other hand, in the latter case, highly corrosive molten salt is used, which poses safety and cost problems.
The melting rate of the metal is also extremely high, resulting in low yields.
Furthermore, after the film removal process, it is necessary to remove salts that adhere to the metal surface. Therefore,
In addition to such methods for removing the surface oxide film, attempts have been made to use 1 nitric hydrofluoric acid treatment, 2 blowing gas treatment, 3N1I1F alternating current electrolytic treatment, etc.; The dissolution rate of the base metal is significantly higher than that of the base metal, so the coating is extremely thin (a). It has the disadvantage that it can only be used to remove particles (approximately 1 μm or less) and that it also dissolves a large amount of metal.
また、「渾ガス処理法」とは、被処理物を、まず証含有
ガス流中にて500〜600℃に加熱し、酸化被膜と地
金の間にフッ素化合物の層を形成せしめ、然る後、シユ
ウ酸アンモニウムニ0.4モル、クエン酸アンモニウム
ニ0.16モル、フッ化アンモニウムニ0.1モル、及
び過酸化水素:0.3モルの混合液(90〜95℃)中
に浸漬してフッ素化合物を溶出させることにより酸化被
膜を剥離する方法てあるが、この方法では、高温におい
てHFを用いるため安全対策費がかさみ、処理コストが
高くなるという問題点があつた。In addition, the "humidus gas treatment method" means that the object to be treated is first heated to 500 to 600°C in a gas flow containing gas to form a layer of fluorine compound between the oxide film and the base metal, and then After that, it was immersed in a mixed solution (90 to 95°C) of 0.4 mol of ammonium oxalate, 0.16 mol of ammonium citrate, 0.1 mol of ammonium fluoride, and 0.3 mol of hydrogen peroxide. There is a method of removing the oxide film by eluting the fluorine compound, but this method uses HF at high temperatures, which increases the cost of safety measures and increases the processing cost.
そして、「NH4F中での交流電解処理法」は、酸化被
膜の生成しているジルカロイ合金溶解の前処理法として
開発されたもので、2モルのフッ化アンモニウム溶液中
にて0.1AIc71iの電流密度で交流電解を行い、
地金をある程度溶出させることによつて酸化被膜を剥離
する方法であるが、この方法は、本来、金属全体の溶解
を目的としたプロセスの前処理であるため、局部腐食が
激しく、酸化被膜のみの除去という目的に使用するには
酸化被膜の残留部分と地金の大量腐食部分が混在するよ
うになるという難点があつた。The "AC electrolytic treatment method in NH4F" was developed as a pretreatment method for dissolving a zircaloy alloy in which an oxide film is formed. Perform AC electrolysis at density,
This method removes the oxide film by eluting the base metal to some extent, but since this method is originally a pretreatment for a process that aims to melt the entire metal, local corrosion is severe and only the oxide film is removed. When used for the purpose of removing metal, there was a problem in that the residual oxide film and the heavily corroded base metal were mixed together.
本発明者等は、上述のような観点から、安全上や過剰な
地金損失による歩留り低下という問題を生ずることなく
、しかも複雑な形状の物品であつても完全な処理が実施
でき、そして処理コストも低い■a族金属基合金の表面
酸化被膜除去方法を見出すべく研究を行つた結果、以下
(a)〜(e)に示す如き知見を得るに至つたのである
。From the above-mentioned viewpoints, the inventors of the present invention have discovered that even products with complex shapes can be completely processed without causing problems of safety or yield reduction due to excessive metal loss. As a result of conducting research to find a low-cost method for removing the surface oxide film of group a metal-based alloys, we came to the knowledge shown in (a) to (e) below.
すなわち、(a)Zr.Zr基合金、Hf.Hf基合金
の表面酸化被膜は、電気的には絶縁性が大であるけれど
も、電解質溶液中て200V以下の交流電圧を印加する
と絶縁破壊が表面全体にわたつて生じ、表面酸化被膜に
、地金にまで達する直径10〜100μmの小孔が1ケ
/d程度の密度て生成すること。第1図は、ジルカロイ
ー4の酸化被膜がフッ化アンモニウム水溶液中での電圧
印加によつて絶縁破壊される反応が始まつてから5分後
の表面の様子を示す写真図であり、すでに酸化膜が脱落
した部分と、絶縁破壊によつて生じた微細孔(黒点状に
見える)が認められる。That is, (a) Zr. Zr-based alloy, Hf. Although the surface oxide film of Hf-based alloys has high electrical insulating properties, when an AC voltage of 200 V or less is applied in an electrolyte solution, dielectric breakdown occurs over the entire surface, and the surface oxide film is damaged by the base metal. Small pores with a diameter of 10 to 100 μm are generated at a density of about 1 pore/d. FIG. 1 is a photograph showing the state of the surface of Zircaloy 4 5 minutes after the dielectric breakdown reaction of the oxide film of Zircaloy 4 started due to the voltage application in the ammonium fluoride aqueous solution; Parts where the metal has fallen off and micropores (which look like black dots) caused by dielectric breakdown can be seen.
しかも、この現象は、地金露出部が予め存在していても
その表面が空気中で直ちに薄く酸化されてしまうため、
該露出部の存在しないものと同様に発生する。Moreover, this phenomenon occurs because even if bare metal is already present, its surface is immediately oxidized to a thin layer in the air.
This occurs in the same manner as in the case where the exposed portion does not exist.
そして、被膜の厚さが5μm程度以上となつても、保護
性を有する部分の厚さはせいぜい5μmに止まり、それ
以外の部分は多数のクラックや細孔に富むため、絶縁破
壊のための印加電圧は、被膜厚が増大しても前記以上に
は増大することがなく、また、通常の電解と異なり絶縁
破壊が主な目的であるため、被処理物が複雑な形状をし
ていても全表面に均一に細孔を形成できること。))フ
ッ化アンモニウム溶液が■a族金属基合金を溶解するこ
とは良く知られているが、これにクエン酸、シユウ酸、
あるいは酒石酸のアンモニウム塩、ナトリウム塩、カリ
ウム塩、またはこれらの混合物の水溶液を加え、PHを
5〜6に維持できるようにすると、地金自身の溶解速度
が極めて低く抑えられ、むしろ、地金と酸化被被膜の界
面付近の、境界層部分の溶解速度が大きくなること。Even if the thickness of the film is about 5 μm or more, the thickness of the protective part is only 5 μm at most, and the other parts have many cracks and pores, so it is difficult to apply an electric current to cause dielectric breakdown. The voltage does not increase beyond the above level even if the coating thickness increases, and unlike ordinary electrolysis, the main purpose is dielectric breakdown, so even if the object to be treated has a complex shape, it will not increase Pores can be formed uniformly on the surface. )) It is well known that ammonium fluoride solution dissolves Group A metal-based alloys, but it also contains citric acid, oxalic acid,
Alternatively, if an aqueous solution of ammonium salt, sodium salt, potassium salt of tartaric acid, or a mixture thereof is added to maintain the pH at 5 to 6, the dissolution rate of the metal itself is kept extremely low, and rather, the dissolution rate of the metal itself is reduced. The rate of dissolution of the boundary layer near the interface of the oxide film increases.
第2図は、処理液による腐食進行の様子を示す写真図て
あり、左上が地金、そのほかは酸化被膜である。FIG. 2 is a photograph showing the progression of corrosion due to the treatment solution, with the upper left showing the bare metal and the rest showing the oxide film.
そして、酸化被膜で白く見える部分は、その下部がすで
に腐食されて地金との結合を失つている領域である。:
)したがつて、フッ化アンモニウ1・水溶液に、クエン
酸、シユウ酸、あるいは酒石酸のアンモニウム塩、ナト
リウム塩、カリウム塩、またはこれらの混合物の水溶液
を加えて、PHを5〜6に維持できるようにした電解質
溶液中で、ZrlZr基及びHf.Hf基合金の表面酸
化被膜に特定電流密度で交流を流すと、前記酸化被膜に
地金に達する均一な細孔を形成することでき、さらに、
これら細孔を介して境界層を溶解することによつて、結
果的に酸化被膜と地金との結合が無くなり、酸化被膜が
地金から剥離すること。The white part of the oxide film is an area where the lower part has already been corroded and has lost its bond with the base metal. :
) Therefore, add an aqueous solution of ammonium salt, sodium salt, potassium salt of citric acid, oxalic acid, or tartaric acid, or a mixture thereof to an aqueous solution of ammonium fluoride 1 to maintain the pH at 5 to 6. ZrlZr groups and Hf. When an alternating current is passed through the surface oxide film of the Hf-based alloy at a specific current density, uniform pores reaching the base metal can be formed in the oxide film, and further,
By dissolving the boundary layer through these pores, the bond between the oxide film and the base metal is lost, and the oxide film is peeled off from the base metal.
】)前記電解質溶液中に硝酸アンモニウムのわずかを存
在させると、特にSnを含有する合金の場合に酸化被膜
剥離能力がさらに向上すること。〕)以上のようなメカ
ニズムであるから、通電によつて水素ガスを地金表面て
発生させたり、電解質溶液中に超音波振動を印加したり
すると、境界層部分への新しい反応液の補給や、溶出し
た金層イオンの間隙部から外部への拡散促進、あるいは
結合のゆるくなつた酸化被膜の剥離促進等の効果が得ら
れること。]) The presence of a small amount of ammonium nitrate in the electrolyte solution further improves the oxide film stripping ability, especially in the case of Sn-containing alloys. ]) Because of the mechanism described above, when hydrogen gas is generated on the surface of the metal by applying electricity or when ultrasonic vibration is applied to the electrolyte solution, new reaction liquid is replenished into the boundary layer. , the effect of promoting the diffusion of eluted gold layer ions from the gap to the outside, or promoting the peeling of an oxide film with loose bonds, etc. can be obtained.
そして\水素ガスの発生は、過酸化水素め添加によつて
より増大されること。この発明は、上記知見に基づいて
なされたものCあり、酸化被膜を有するZr.Zr基合
金、または(F,.Hf基合金をミフツ化アンモニウム
濃膜:0.1〜0.5モル、あるいはさらに、該フッ化
アンモニウムの11100〜115の濃度の硝酸アンモ
ニウムおよびフッ化アンモニウムの1110〜112の
濃度の過酸化水素の1種以上を含み、かつ、クエン酸、
シユウ酸、または酒石酸のアンモニウム塩、ナトリウム
塩、及びカリウム塩の1種以上を加えることによつてP
H5〜6を維持せしめた電解水溶液中にて、そのまま、
あるいは超音波振動の該電解水溶液に印加しながら、電
流密度:0.2〜0.5A1c#fで交流電解すること
により、地金の過度の溶解なしに表面酸化被膜を能率良
く除去することに特徴を有するものである。つぎに、こ
の発明の方法において、処理液の組成およびPH、並び
に電流密度を前記のように限定した理由を説明する。And the generation of hydrogen gas is further increased by the addition of hydrogen peroxide. This invention was made based on the above findings, and includes Zr. Zr-based alloy, or (F,. 112 concentration of one or more hydrogen peroxides, and citric acid,
P by adding one or more of ammonium salt, sodium salt, and potassium salt of oxalic acid or tartaric acid.
In an electrolytic aqueous solution maintaining H5-6, as it is,
Alternatively, by performing alternating current electrolysis at a current density of 0.2 to 0.5A1c#f while applying ultrasonic vibration to the electrolytic aqueous solution, the surface oxide film can be efficiently removed without excessively dissolving the base metal. It has characteristics. Next, the reason why the composition and pH of the treatment liquid and the current density are limited as described above in the method of the present invention will be explained.
5フッ化アンモニウム濃度
第3図は、ジルカロイー4を被処理材として使用した場
合に、同一の電流密度を得るのに必要な印加電圧に対す
る水溶液中のフッ化アンモニウム濃度の影響を示す線図
であり、第4図は、同じ被処理材の溶解速度に対する液
濃度の影響を示す線図であるが、これらの線図からも明
らかなように、フッ化アンモニウム濃度が0.1モル未
満では印加電圧が高くなるうえ、処理液の劣化速度も速
くなつて処理作業が困難となる。Ammonium pentafluoride concentration Figure 3 is a diagram showing the influence of ammonium fluoride concentration in an aqueous solution on the applied voltage required to obtain the same current density when Zircaloy 4 is used as the material to be treated. , FIG. 4 is a diagram showing the influence of liquid concentration on the dissolution rate of the same treated material, and as is clear from these diagrams, when the ammonium fluoride concentration is less than 0.1 mol, the applied voltage Not only does this increase the rate of deterioration of the treatment liquid, but the rate of deterioration of the treatment liquid also increases, making treatment work difficult.
一方、フッ化アンモニウム濃度が0.5モルを越えると
、腐食速度が過大となつて局部腐食を生じ易くなり、ま
た、同時に添加する緩衝剤がかなりの高温まで過飽和と
なつて析出するので好ましくない。このようなことから
、電解液中のフッ化アンモニウム濃度を0.1〜0.5
モルと定めた。(Xi)PH値
第5図は、溶解速度に対するPHの影響を示す線図、第
6図は同一の電流密度を得るのに必要な印加電圧に対す
るPHの影響を示す線図であるが、これらの図からも、
PHが5未満では腐食速度が過大になるとともに局部腐
食が発生し、PHが6を越えると腐食速度が低下するに
もかかわらず消費電力量が大きくなつて、いずれも好ま
しくないのてPH値を5〜6と定めた。On the other hand, if the ammonium fluoride concentration exceeds 0.5 mol, the corrosion rate becomes excessive and local corrosion tends to occur, and the buffer agent added at the same time becomes supersaturated at a considerably high temperature and precipitates, which is not preferable. . For this reason, the ammonium fluoride concentration in the electrolyte should be set at 0.1 to 0.5.
It was determined as mole. (Xi) PH value Figure 5 is a diagram showing the influence of PH on the dissolution rate, and Figure 6 is a diagram showing the influence of PH on the applied voltage required to obtain the same current density. From the figure,
If the pH is less than 5, the corrosion rate becomes excessive and local corrosion occurs, and if the pH exceeds 6, the corrosion rate decreases but the power consumption increases, both of which are unfavorable. It was set as 5-6.
なお、第5図および第6図に示す実験を行うにあたつて
PH値を5未満にする場合にはクエン酸アンモニウムと
シユウ酸アンモニウムの濃度の低下により、また5を越
える場合にはアンモニアの添加によつて、目的のPH値
となるように調整した。Note that when conducting the experiments shown in Figures 5 and 6, if the pH value is less than 5, the concentration of ammonium citrate and ammonium oxalate is decreased, and if it exceeds 5, the concentration of ammonia is decreased. By addition, the desired pH value was adjusted.
う 緩衝剤の濃度
硝酸アンモニウム、過酸化水素、および、クエン酸、シ
ユウ酸または酒石酸のアンモニウム塩、ナトリウム塩及
びカリウム塩等の緩衝剤の濃度については、処理液を用
いて酸化被膜を除去するのに必要な上限時間てある60
〜12紛の間、液のPH値を5〜6の間に保つためには
第7図に示すようにフッ化アンモニウム濃度の1.5倍
以上であれば十分である。Concentration of buffering agents The concentration of buffering agents such as ammonium nitrate, hydrogen peroxide, and ammonium, sodium, and potassium salts of citric acid, oxalic acid, or tartaric acid should be determined when removing an oxide film using a processing solution. There is a required upper limit of 60 hours.
In order to maintain the pH value of the liquid between 5 and 6 during the period of 12 to 12 hours, it is sufficient that the concentration is 1.5 times or more the ammonium fluoride concentration, as shown in FIG.
特に、硝酸アンモニウム濃度を、フッ化アンモニウムの
11100〜115の濃度と定めたのは、ジルカロイ等
、Snを含有する合金の場合、その含有率がせいぜい1
〜2%に止まるためである。In particular, the ammonium nitrate concentration was determined to be 11,100 to 115 of ammonium fluoride because, in the case of alloys containing Sn such as Zircaloy, the content is at most 1.
This is because it remains at ~2%.
また、過酸化水素濃度を、フッ化アンモニウムの111
0〜112の濃度と定めたのは、その濃度がフッ化アン
モニウム濃度の1ハ昧満では被処理物表面における発泡
効果が必要な時間だけ維持することが困難てあり、一方
112を越えると被処理物表面における発泡が過大とな
り、発泡による液面上昇が過大となる。In addition, the concentration of hydrogen peroxide was changed to 111% of ammonium fluoride.
The reason for setting the concentration to be between 0 and 112 is that if the concentration is less than 1% of the ammonium fluoride concentration, it will be difficult to maintain the foaming effect on the surface of the treated object for the necessary time, whereas if it exceeds 112, the foaming effect will be difficult to maintain for the necessary time. Foaming on the surface of the treated object becomes excessive, and the liquid level rises excessively due to the foaming.
わ 電流密度
電流密度が0.02AIc71f未満ては、処理時の気
泡発生量が少なくて酸化被膜剥離の促進効果が弱くなり
、一方0.5A1dを越えると発泡過大で液面上昇がか
なり大きくなるうえ、通電による液温上昇も大きく、7
0℃以上の温度にまでなつて冷却の必要を生ずるように
なり、さらに、地金の溶出量も大きくなつて歩留り低下
を来たすことから、電流密度を0.2〜0.5A1cr
1と定めた。Current Density If the current density is less than 0.02Alc71f, the amount of bubbles generated during treatment will be small and the effect of promoting oxide film peeling will be weak.On the other hand, if it exceeds 0.5A1d, foaming will be excessive and the liquid level will rise considerably. , the liquid temperature rises significantly due to energization, and 7
As the temperature reaches 0°C or higher, cooling becomes necessary, and the amount of metal eluted also increases, resulting in a decrease in yield.
It was set as 1.
処理液の温度については、第8図の溶解速度に対する液
温度の影響を示す線図からも明らかなように、その上昇
とともに腐食速度も増大するものであるが、70℃を越
えると発泡が過大となり、80′C以上になるとこの現
象が極めて激しくなることもあつて、70℃以下に抑え
るのが好ましい。なお、以上に示した各データはジルカ
ロイー4ユついてのものであるが、その他のZr,.Z
r基合臥およびHf,.Hf基合金についても同様の結
果ノ≦得られた。Regarding the temperature of the treatment liquid, as is clear from the diagram showing the influence of liquid temperature on the dissolution rate in Figure 8, the corrosion rate increases as the temperature increases, but if the temperature exceeds 70°C, foaming will be excessive. If the temperature exceeds 80'C, this phenomenon becomes extremely severe, so it is preferable to keep the temperature below 70°C. Note that the data shown above is for Zircaloy 4U, but for other Zr, . Z
r base combination and Hf, . Similar results were obtained for the Hf-based alloy.
ところで、この発明を実施するにあたつて、電解処理の
前処理として被処理材に熱衝撃あるいは機械的衝撃を与
えれば、酸化被膜に微細なりラックが生じて酸化被膜剥
離が容易となるので好ましく、またこの発明の方法を実
施した後に、何らかの原因で一部酸化被膜が残留してし
まつた場合には、後処理として硝フッ酸溶液に浸漬する
か、金属ブラシやヤスリがけによつて残留被膜を容易に
除去することができる。そして、硝フッ酸溶液に浸漬す
る場合には、処理液中に超音波を発振するとより良い効
果が得られることも確認した。ついで、この発明を実施
例により説明する。実施例1まず、成分組成が、Sn:
1.50重量%、Fe:0.20重量%、Cr:0.1
0重量%、Ni:0.002重量%、Zr:残り、であ
るジルカロイー4管(外径:10.7Wrft1肉厚:
0.62Wfm1長さ:100顛、酸化被膜厚:部分に
よつて異なるが3〜5μ7TL.)を用意し、第9図に
示したような交流電解表面除染実験装置によつて交流電
解を実施した。By the way, in carrying out this invention, it is preferable to apply thermal shock or mechanical shock to the material to be treated as a pretreatment for electrolytic treatment, since fine racks are formed in the oxide film and the oxide film is easily peeled off. In addition, if some oxide film remains for some reason after carrying out the method of this invention, the remaining film can be removed by immersion in a nitric-hydrofluoric acid solution as a post-treatment or by sanding with a metal brush or sanding. can be easily removed. It was also confirmed that when immersing in a nitric-hydrofluoric acid solution, better effects can be obtained by oscillating ultrasonic waves into the treatment solution. Next, the present invention will be explained with reference to examples. Example 1 First, the component composition was Sn:
1.50% by weight, Fe: 0.20% by weight, Cr: 0.1
0% by weight, Ni: 0.002% by weight, Zr: remainder, 4 tubes of Zircaloy (outer diameter: 10.7Wrft1 wall thickness:
0.62Wfm1 Length: 100cm, Oxide film thickness: 3~5μ7TL, although it varies depending on the part. ) was prepared, and AC electrolysis was carried out using an AC electrolysis surface decontamination experimental apparatus as shown in FIG.
第9図において、1はフッ素樹脂製ビーカー、2は被処
理材、3はフッ素樹脂被覆ヒータ、4はフッ素樹脂被覆
温度計、5は超音波洗浄機、6は電圧計、7は電流計、
8はスライダツクである。そして、このときの電解条件
は下記のとおりであつた。In FIG. 9, 1 is a fluororesin beaker, 2 is a material to be treated, 3 is a fluororesin-coated heater, 4 is a fluororesin-coated thermometer, 5 is an ultrasonic cleaner, 6 is a voltmeter, 7 is an ammeter,
8 is a slider. The electrolysis conditions at this time were as follows.
処理液組成:フツ化アンモニウム・・・・・・0.5モ
ル、硝酸アンモニウム・・・・・・0.05モル、シユ
ウ酸アンモニウム・・・・・・0.1モル、クエン酸ア
ンモニウム・・・・・・1モル、過酸化水素・・・・・
・0.1モル、液量:700m11
液のPH:5、
電流密度:0.1AIcI,、
液温度:70゜C1
処理時間:4吟。Treatment liquid composition: ammonium fluoride...0.5 mol, ammonium nitrate...0.05 mol, ammonium oxalate...0.1 mol, ammonium citrate... ...1 mole, hydrogen peroxide...
・0.1 mol, liquid volume: 700 ml, liquid PH: 5, current density: 0.1 AIcI, liquid temperature: 70°C1, processing time: 4 gin.
電解処理後、被処理材たるジルカロイー4管の表面を観
察したところ、酸化被膜が完全に剥離除去されているこ
とが確認された。After the electrolytic treatment, the surface of the Zircaloy 4 tube as the material to be treated was observed, and it was confirmed that the oxide film had been completely peeled off and removed.
実施例2
電解条件が、
処理液組成:フツ化アンモニウム・・・・・・0.1モ
ル、クエン酸アンモニウム◆●・・・・0.5モル、液
量:700m1、液のPH:5、
電流密度:0.03AIcIt1
液温度:70℃、
処理時間:9紛、
とした以外は実施例1と同様にしてシルカロイー4管を
処理したところ、やはり酸化被膜が完全に剥離除去され
ていることが確認された。Example 2 Electrolysis conditions were as follows: Treatment liquid composition: ammonium fluoride...0.1 mol, ammonium citrate ◆●...0.5 mol, liquid volume: 700 ml, liquid PH: 5, Current density: 0.03AIcIt1 Liquid temperature: 70°C Treatment time: 9 powders When four tubes of Silcaloy were treated in the same manner as in Example 1, it was found that the oxide film was completely peeled off and removed. confirmed.
実施例3
Hfの板材(幅:20咽、厚さ:2T!Rln、長さ:
100″順、酸化皮膜厚:6μm)を用意し、第9図に
示したような交流電解表面除染実験装置によつて交流電
解を実施した。Example 3 Hf plate material (width: 20mm, thickness: 2T!Rln, length:
100'' order, oxide film thickness: 6 μm) was prepared, and AC electrolysis was performed using an AC electrolysis surface decontamination experimental apparatus as shown in FIG.
このときの電解条件は下記のとおりであつた。The electrolysis conditions at this time were as follows.
処理液組成:フツ化アンモニウム・・・・・・0.5モ
ル、クエン酸アンモニウム・・・・・・1.5モル、液
量:700m1、液のPH:5、
電流密度:0.5AId1
液温度:70℃、
処理時間:6吟。Treatment liquid composition: ammonium fluoride...0.5 mol, ammonium citrate...1.5 mol, liquid volume: 700 ml, liquid PH: 5, current density: 0.5 AId1 liquid Temperature: 70℃, Processing time: 6 Gin.
電解処理後の被処理材を観際したところ、酸化被膜が完
全に剥離除去されていることが確認された。When the material to be treated after the electrolytic treatment was observed, it was confirmed that the oxide film had been completely peeled off and removed.
実施例4
酸化被膜厚が6μmのジルカロイー4管を用い、電解条
件を、液温:65℃、
電流密度:0.1AIcIを維持(但し、印加電圧は、
初期が130V1末期が60Vとなつた)、超音波:電
解処理中発振、としたほかは、実施例1と同様の条件で
電解処理を実施した。Example 4 Using 4 Zircaloy tubes with an oxide film thickness of 6 μm, the electrolytic conditions were maintained at liquid temperature: 65°C and current density: 0.1 AIcI (however, the applied voltage was
The electrolytic treatment was carried out under the same conditions as in Example 1, except that the initial voltage was 130 V and the final stage was 60 V), and ultrasonic waves were oscillated during the electrolytic treatment.
処理後のジルカロイー4管には、光沢のない灰褐色のス
ケール(主としてジルコニウム酸化物から成る)が表面
に付着しているのが認められた。After the treatment, it was observed that matte gray-brown scale (mainly composed of zirconium oxide) was attached to the surface of the Zircaloy 4 tube.
このスケールは、初めの黒色酸化被膜と異なり、ワイヤ
ブラシでこする等の処理でも容易に除去できるような、
地金とゆるい結合を持つスケールであつた。そこで、後
処理として、これを、硝酸:8モル、フッ酸:0.5モ
ルの溶液中に、超音波振動発振下で3吟間浸漬したとこ
ろ、管の内面、外面とも酸化被膜が完全に除去された。Unlike the initial black oxide film, this scale can be easily removed by scrubbing with a wire brush, etc.
It was a scale that was loosely connected to the base metal. Therefore, as a post-treatment, this tube was immersed for 3 minutes in a solution of 8 mol of nitric acid and 0.5 mol of hydrofluoric acid under ultrasonic vibration oscillation, and the oxide film was completely removed from both the inner and outer surfaces of the tube. removed.
なお、酸化被膜の剥離と、地金の溶出とを込みて計算し
た腐食速度は、第1段処理:61.4m91dイImi
nl後処理:45.4m91ddImin1であつた。In addition, the corrosion rate calculated including the peeling of the oxide film and the elution of the base metal is: 1st stage treatment: 61.4 m 91 d Imi
nl post-treatment: 45.4m91ddImin1.
実施例5
処理中に超音波振動を印加しなかつた以外は実施例4と
同一の条件てジルカロイー4管を処理した。Example 5 Zircaloy 4 tubes were treated under the same conditions as in Example 4, except that no ultrasonic vibration was applied during the treatment.
その結果、腐食速度は、
第1段処理:53.7m91drTI,Im1n1後処
理:43.8mg1dイIminlと低下し、黒色酸化
被膜のスポットの残留が認められた。As a result, the corrosion rate decreased to 1st stage treatment: 53.7m91drTI, Im1n1 post-treatment: 43.8mg1dIminl, and spots of black oxide film remained.
実施例6
処理液組成として過酸化水素を加えない以外は実施例4
と同一の条件てジルカロイー4管を処理した。Example 6 Example 4 except that hydrogen peroxide is not added to the treatment liquid composition
Four tubes of Zircaloy were treated under the same conditions.
その結果、腐食速度は
第1段処理:45.8m91dイノMinlに低下し、
気泡発生の低下が認められた。As a result, the corrosion rate decreased to 45.8 m91d Inno Minl in the first stage treatment,
A decrease in bubble generation was observed.
実施例7
実施例4におけると同様のジルカロイー4管を、ます、
600゜Cに保持した電気炉内に挿入し、該温度に達し
た後、室温の水中に投入する操作を3回反復した。Example 7 Zircaloy 4 tubes similar to those in Example 4 were
The procedure of inserting the sample into an electric furnace maintained at 600°C and, after reaching that temperature, placing it into water at room temperature was repeated three times.
その結果、酸化被膜表面には第10図として示す写真図
のような細かいクラックが発生し、実施例4におけると
同じ処理条件であつても、印加電圧:80V(初期)〜
40■(末期)でも1A1cイの電流密度を与えること
ができた。そして、4紛の処理時間で酸化被膜を除くこ
とができ、後処理を要することなく、金属光沢のある清
浄な表面を得ることができた。上述のように、この発明
によれば、Zr..Zr基合金、またはHf.Hf基合
金の酸化被膜除去に際して、(1)狭隘部や凹部の酸化
被膜も容易に除去できる、(Ii)地金の損失量が少な
く、歩留りが向上する。As a result, fine cracks were generated on the surface of the oxide film as shown in the photograph shown in Figure 10, and even under the same treatment conditions as in Example 4, the applied voltage: 80 V (initial) -
A current density of 1A1c could be given even at 40cm (final stage). The oxide film could be removed in a treatment time of 4 powders, and a clean surface with metallic luster could be obtained without the need for post-treatment. As mentioned above, according to the invention, Zr. .. Zr-based alloy, or Hf. When removing an oxide film from an Hf-based alloy, (1) the oxide film in narrow parts and recesses can be easily removed, and (Ii) the amount of loss of metal is small and the yield is improved.
すなわち、地金の溶出は、厚さにして40〜80μmの
範囲に収まる、(Iii)安価な装置と材料で処理でき
る、(Iv)入手容易な50Hzまたは60Hzの交流
電源がそのまま利用できる、(v)操作の安全性が高い
、
(Vi)例えば第9図に示したように、同時に2体の被
処理物が処理できる、等のすぐれた効果を得ることがで
き、
1Zr..Zr基合金、またはHf.Hf基合金鋳造の
際に鋳塊表面に形成される酸化被膜の除去、5同じく、
鍛造の際に鍛造品の表面上に形成される酸化被膜の除去
、[相] 同じく、熱処理によつて表面に形成される酸
化被膜の除去、[株] 同じく、腐食性環境における使
用期間中に生成した表面酸化被膜の除去、9表面酸化被
膜が形成されているZr..Zr基合金、またはHf.
.Hf基合金のスクラップ材回収の前処理としての酸化
被膜の除去、等に適用して、すぐれた成果を得ることが
できるなど、工業上有用な効果がもたらされるのであ”
る。That is, the elution of the base metal falls within the range of 40 to 80 μm in terms of thickness; (iii) it can be processed with inexpensive equipment and materials; (iv) an easily available 50Hz or 60Hz AC power source can be used as is; v) High operational safety; (Vi) Excellent effects such as the ability to process two objects at the same time, as shown in FIG. 9, can be obtained; 1Zr. .. Zr-based alloy, or Hf. Removal of oxide film formed on the ingot surface during Hf-based alloy casting, 5.
Removal of an oxide film formed on the surface of a forged product during forging, [Phase] Similarly, removal of an oxide film formed on the surface of a forged product during heat treatment, [Co.] Similarly, during use in a corrosive environment. Removal of generated surface oxide film, Zr.9 on which surface oxide film is formed. .. Zr-based alloy, or Hf.
.. It can be applied to the removal of oxide films as a pre-treatment for recovering scrap materials from Hf-based alloys, producing excellent results and producing industrially useful effects.
Ru.
第1図は電解液中ての電圧印加によつて金属酸化被膜の
絶縁破壊反応が始まつた様子を示す電子顕微鏡写真図、
第2図は電解液による腐食進行の様子を示す電子顕微鏡
写真図、第3図は同一電流密度を得るのに必要な印加電
圧に対する液濃度の影響を示す線図、第4図は溶解速度
に対する液濃度の影響を示す線図、第5図は溶解速度に
対するPHの影響を示す線図、第6図は同一の電流密度
をl得るのに必要な印加電圧に対するPHの影響を示す
線図、第7図はPH値の変化に対する液組成の影響を示
す線図、第8図は溶解速度に対する液温度の影響を示す
線図、第9図は交流電解表面除染装置の概略構成図、第
10図は前処理によつてクラツ・クが発生した酸化被膜
を示す電子顕微鏡写真図である。
図面において、1・・・・・・フッ素樹脂製ビーカー、
2・・・・・・処理材、3・・・・・・フッ素樹脂被覆
ヒータ、4・・・・・フッ素樹脂被覆温度計、5・・・
・・・超音波洗浄ノ機、6・・・・・・電圧計、7・・
・・・・電流計、8・・・・・・スラィダツク。Figure 1 is an electron micrograph showing how the dielectric breakdown reaction of the metal oxide film begins due to voltage application in the electrolyte;
Figure 2 is an electron micrograph showing how corrosion progresses due to the electrolytic solution, Figure 3 is a diagram showing the influence of solution concentration on the applied voltage required to obtain the same current density, and Figure 4 is a diagram showing the effect of solution concentration on the dissolution rate. A diagram showing the influence of liquid concentration, FIG. 5 a diagram showing the influence of PH on dissolution rate, and FIG. 6 a diagram showing the influence of PH on the applied voltage required to obtain the same current density. Figure 7 is a diagram showing the influence of liquid composition on changes in pH value, Figure 8 is a diagram showing the influence of liquid temperature on dissolution rate, Figure 9 is a schematic diagram of the AC electrolytic surface decontamination equipment, FIG. 10 is an electron micrograph showing an oxide film in which cracks were generated due to the pretreatment. In the drawings, 1... fluororesin beaker,
2... Treated material, 3... Fluorine resin coated heater, 4... Fluorine resin coated thermometer, 5...
...Ultrasonic cleaning machine, 6...Voltmeter, 7...
... Ammeter, 8 ... Slider.
Claims (1)
合金を、フッ化アンモニウム濃度:0.1〜0.5モル
、で、かつ、クエン酸、シユウ酸、または酒石酸のアン
モニウム塩、ナトリウム塩、及びカリウム塩の1種以上
を加えることによつてPH5〜6を維持せしめた電解水
溶液中にて、電流密度:0.02〜0.5A/cm^2
で交流電解することを特徴とする、ZrおよびHf並び
にそれらの合金の表面酸化被膜除去方法。 2 酸化皮膜を有するZrおよびHf、並びにそれらの
合金を、フッ化アンモニウム濃度:0.1〜0.5モル
、硝酸アンモニウム濃度:フツ化アンモニウムの1/1
00〜1/5の濃度、で、かつ、クエン酸、シユウ酸、
または酒石酸のアンモニウム塩、ナトリウム塩、及びカ
リウム塩の1種以上を加えることによつてPH5〜6を
維持せしめた電解水溶液中にて、電流密度:0.02〜
0.5A/cm^2で交流電解することを特徴とする、
ZrおよびHf並びにそれらの合金の表面酸化被膜除去
方法。 3 酸化被膜を有するZrおよびHf、並びにそれらの
合金を、フッ化アンモニウム濃度:0.1〜0.5モル
、過酸化水素濃度:フツ化アンモニウムの1/10〜1
/2の濃度、で、かつ、クエン酸、シユウ酸、または酒
石酸のアンモニウム塩、ナトリウム塩、及びカリウム塩
の1種以上を加えることによつてPH5〜6を維持せし
めた電解水溶液中にて、電流密度:0.02〜0.5A
/cm^2で交流電解することを特徴とする、Zrおよ
びHf並びにそれらの合金の表面酸化被膜除去方法。 4 酸化被膜を有するZrおよびHf、並びにそれら合
金を、フッ化アンモニウム濃度:0.1〜0.5モル、
硝酸アンモニウム濃度:フツ化アンモニウムの1/10
0〜1/5の濃度、過酸化水素濃度:フツ化アンモニウ
ムの1/10〜1/2の濃度、で、かつ、クエン酸、シ
ユウ酸、または酒石酸のアンモニウム塩、ナトリウム塩
、及びカリウム塩の1種以上を加えることによつてPH
5〜6を維持せしめた電解水溶液中にて、電流密度:0
.02〜0.5A/cm^2で交流電解することを特徴
とする、ZrおよびHf並びにそれらの合金の表面酸化
被膜除去方法。 5 酸化被膜を有するZrおよびHf、並びにそれらの
合金を、フッ化アンモニウム濃度:0.1〜0.5モル
、で、かつ、クエン酸、シユウ酸、または酒石酸のアン
モニウム塩、ナトリウム塩、及びカリウム塩の1種以上
を加えることによつてPH5〜6を維持せしめるととも
に、超音波振動を印加した電解水溶液中にて、電流密度
:0.02〜0.5A/cm^2で交流電解することを
特徴とする、ZrおよびHf並びにそれらの合金の表面
酸化被膜除去方法。 6 酸化被膜を有するZrおよびHf、並びにそれらの
合金を、フッ化アンモニウム濃度:0.1〜0.5モル
、硝酸アンモニウム濃度:フツ化アンモニウムの1/1
00〜1/5の濃度、で、かつ、クエン酸、シユウ酸、
または酒石酸のアンモニウム塩、ナトリウム塩、及びカ
リウム塩の1種以上を加えることによつてPH5〜6を
維持せしめるとともに、超音波振動を印加した電解水溶
液中にて、電流密度:0.02〜0.5A/cm^2で
交流電解することを特徴とする、ZrおよびHf並びに
それらの合金の表面酸化被膜除去方法。 7 酸化被膜を有するZrおよびHf、並びにそれらの
合金を、フッ化アンモニウム濃度:0.1〜0.5モル
、過酸化水素濃度:フツ化アンモニウムの1/10〜1
/2の濃度、で、かつ、クエン酸、シユウ酸、または酒
石酸のアンモニウム塩、ナトリウム塩、及びカリウム塩
の1種以上を加えることによつてPH5〜6を維持せし
めるとともに、超音波振動を印加した電解水溶液中にて
、電流密度:0.02〜0.5A/cm^2で交流電解
することを特徴とする、ZrおよびHf並びにそれらの
合金の表面酸化被膜除去方法。 8 酸化被膜を有するZrおよびHf、並びにそれらの
合金を、フッ化アンモニウム濃度:0.1〜0.5モル
、硝酸アンモニウム濃度:フツ化アンモニウムの1/1
00〜1/5の濃度、過酸化水素濃度:フツ化アンモニ
ウムの1/10〜1/2の濃度、で、かつ、クエン酸、
シユウ酸、または酒石酸のアンモニウム塩、ナトリウム
塩、及びカリウム塩の1種以上を加えることによつてP
H5〜6を維持せしめるとともに、超音波振動を印加し
た電解水溶液中にて、電流密度:0.02〜0.5A/
cm^2で交流電解することを特徴とする、Zrおよび
Hf並びにそれらの合金の表面酸化被膜除去方法。[Scope of Claims] 1. Zr and Hf having an oxide film, and their alloys, at an ammonium fluoride concentration of 0.1 to 0.5 mol, and an ammonium salt of citric acid, oxalic acid, or tartaric acid. In an electrolytic aqueous solution whose pH is maintained at 5 to 6 by adding one or more of sodium salt, and potassium salt, current density: 0.02 to 0.5 A/cm^2
A method for removing a surface oxide film of Zr, Hf, and alloys thereof, the method comprising performing alternating current electrolysis. 2 Zr and Hf having an oxide film, and their alloys, ammonium fluoride concentration: 0.1 to 0.5 mol, ammonium nitrate concentration: 1/1 of ammonium fluoride
00 to 1/5 concentration, and citric acid, oxalic acid,
Or, in an electrolytic aqueous solution whose pH is maintained at 5 to 6 by adding one or more of ammonium salt, sodium salt, and potassium salt of tartaric acid, current density: 0.02 to
Characterized by AC electrolysis at 0.5A/cm^2,
A method for removing a surface oxide film of Zr, Hf, and alloys thereof. 3 Zr and Hf having an oxide film, and their alloys, ammonium fluoride concentration: 0.1 to 0.5 mol, hydrogen peroxide concentration: 1/10 to 1 of ammonium fluoride.
/2 concentration, and in an electrolytic aqueous solution whose pH was maintained at 5 to 6 by adding one or more of ammonium salt, sodium salt, and potassium salt of citric acid, oxalic acid, or tartaric acid, Current density: 0.02-0.5A
A method for removing a surface oxide film of Zr, Hf, and alloys thereof, characterized by carrying out alternating current electrolysis at /cm^2. 4 Zr and Hf having an oxide film, and their alloys, ammonium fluoride concentration: 0.1 to 0.5 mol,
Ammonium nitrate concentration: 1/10 of ammonium fluoride
0 to 1/5 concentration, hydrogen peroxide concentration: 1/10 to 1/2 concentration of ammonium fluoride, and ammonium salt, sodium salt, and potassium salt of citric acid, oxalic acid, or tartaric acid. pH by adding one or more
Current density: 0 in an electrolytic aqueous solution maintained at 5 to 6.
.. A method for removing a surface oxide film of Zr, Hf, and alloys thereof, characterized by carrying out alternating current electrolysis at 02 to 0.5 A/cm^2. 5 Zr and Hf having an oxide film, and their alloys, with ammonium fluoride concentration: 0.1 to 0.5 mol, and ammonium salt, sodium salt, and potassium of citric acid, oxalic acid, or tartaric acid. AC electrolysis at a current density of 0.02 to 0.5 A/cm^2 in an electrolytic aqueous solution to which pH 5 to 6 is maintained by adding one or more types of salts and ultrasonic vibrations are applied. A method for removing a surface oxide film of Zr, Hf, and alloys thereof, characterized by: 6 Zr and Hf having an oxide film, and their alloys, ammonium fluoride concentration: 0.1 to 0.5 mol, ammonium nitrate concentration: 1/1 of ammonium fluoride
00 to 1/5 concentration, and citric acid, oxalic acid,
Or, by adding one or more of ammonium salt, sodium salt, and potassium salt of tartaric acid, the pH is maintained at 5 to 6, and in an electrolyte solution to which ultrasonic vibration is applied, the current density is 0.02 to 0. A method for removing a surface oxide film of Zr and Hf and their alloys, the method comprising performing alternating current electrolysis at .5 A/cm^2. 7 Zr and Hf having an oxide film, and their alloys, ammonium fluoride concentration: 0.1 to 0.5 mol, hydrogen peroxide concentration: 1/10 to 1 of ammonium fluoride
/2 concentration, and by adding one or more of ammonium salt, sodium salt, and potassium salt of citric acid, oxalic acid, or tartaric acid, the pH is maintained at 5 to 6, and ultrasonic vibration is applied. A method for removing surface oxide films of Zr, Hf, and alloys thereof, characterized by carrying out alternating current electrolysis in an electrolytic aqueous solution at a current density of 0.02 to 0.5 A/cm^2. 8 Zr and Hf having an oxide film, and their alloys, ammonium fluoride concentration: 0.1 to 0.5 mol, ammonium nitrate concentration: 1/1 of ammonium fluoride
00 to 1/5 concentration, hydrogen peroxide concentration: 1/10 to 1/2 concentration of ammonium fluoride, and citric acid,
P by adding one or more of ammonium salt, sodium salt, and potassium salt of oxalic acid or tartaric acid.
Current density: 0.02 to 0.5 A/
A method for removing a surface oxide film of Zr, Hf, and alloys thereof, characterized by performing alternating current electrolysis at cm^2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15787382A JPS6056797B2 (en) | 1982-09-10 | 1982-09-10 | Method for removing surface oxide film of Zr and Hf and their alloys |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15787382A JPS6056797B2 (en) | 1982-09-10 | 1982-09-10 | Method for removing surface oxide film of Zr and Hf and their alloys |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5947400A JPS5947400A (en) | 1984-03-17 |
| JPS6056797B2 true JPS6056797B2 (en) | 1985-12-11 |
Family
ID=15659268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15787382A Expired JPS6056797B2 (en) | 1982-09-10 | 1982-09-10 | Method for removing surface oxide film of Zr and Hf and their alloys |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6056797B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6593282B1 (en) | 1997-10-21 | 2003-07-15 | Lam Research Corporation | Cleaning solutions for semiconductor substrates after polishing of copper film |
| US6165956A (en) * | 1997-10-21 | 2000-12-26 | Lam Research Corporation | Methods and apparatus for cleaning semiconductor substrates after polishing of copper film |
| US6303551B1 (en) | 1997-10-21 | 2001-10-16 | Lam Research Corporation | Cleaning solution and method for cleaning semiconductor substrates after polishing of cooper film |
| US6479443B1 (en) | 1997-10-21 | 2002-11-12 | Lam Research Corporation | Cleaning solution and method for cleaning semiconductor substrates after polishing of copper film |
-
1982
- 1982-09-10 JP JP15787382A patent/JPS6056797B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5947400A (en) | 1984-03-17 |
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