JPS6059992B2 - Continuous vacuum evaporation equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for continuously depositing metals such as Zn and Al on a long metal material, particularly a steel strip, in a vacuum.

Conventionally, in this type of apparatus, the width of the evaporation crucible 3 is equal to or slightly larger than the entire width of the steel strip 2 in order to obtain a uniform evaporated film thickness over the entire width of the steel strip 2, as shown in FIG. ing.

Moreover, in order to track the steel strip, it is necessary that the high-speed steel strip (the direction of movement of the steel strip is perpendicular to the plane of the paper) does not come into contact with the crucible. A gap must necessarily be formed between the parts.
Therefore, some of the evaporated metal 25, 26 evaporated from the evaporation molten metal 4 in the crucible 3 passes through this gap and reaches the inner wall surface of the evaporation chamber 1, where it is deposited as a metal solid and becomes a lump. The deposits 27-28 gradually grow and eventually come into contact with the side edges of the steel strip 2 or fall off, interfering with the normal movement of the steel strip. If such a situation occurs, it is necessary to stop the operation of the evaporation equipment/equipment, break the vacuum in the vacuum chamber, and remove this deposit, which will significantly reduce the operating rate of the equipment and reduce productivity. There was a drawback that it deteriorated. The present invention
This device is provided to eliminate such drawbacks of the conventional device, and a movable leakage evaporation metal collector plate is provided to cover the clearance formed between the end of the steel strip and the upper end of the crucible. By installing a continuous device that removes the evaporated metal adhering to the collector plate in the atmosphere and then reintroduces it into the evaporation chamber, it becomes possible to continuously recover the leaked evaporated metal, resulting in a continuous process with excellent productivity. A vacuum evaporation device is provided.

Hereinafter, the present invention will be explained in detail with reference to FIGS. 2 to 4.

In FIG. 2, 1 is a vacuum deposition chamber, 2 is a steel strip, 3 is an evaporation crucible, and 4 is an evaporation metal bath.

5 indicates a shielding plate for reducing the amount of leaked evaporated metal.

In other words, as is clear from FIG. 3 showing the horizontal (A-A) cross section in FIG. As the clearance increases, the amount of leaked evaporated metal increases. Therefore, by moving the shielding plate 5 to near the end of the steel strip, the clearance can be made smaller and the amount of leaked evaporated metal can be reduced. Reference numeral 6 denotes a collector made of a material with good peelability from the deposited metal. Stainless steel is suitable as the material, but to further improve the peelability, it is recommended to use a material with good peelability such as Ta, MO or BN. Coating with substances is also effective.

11-13 are differential pressure chambers for introducing the collector plate into the vacuum chamber, and 14-16 are differential pressure chambers for taking out the collector plate into the atmosphere.

Rolls 7 to 10 and 17 and 18 are for driving the collector plates, and it is desirable that all of these have a cooling structure.

In other words, if the collector plate is cooled by cooling the roll and maintained at a low temperature, when leaked evaporated metal flies to the collector plate, it will be difficult to re-evaporate and the adhesion efficiency (collection efficiency) will be increased. This has the advantage that thermal stress is generated in the adhesive layer on the collector, making it easier for the adhesive layer to peel off. Cooling of the collector plate is particularly important in the case of vapor deposition of a metal that easily reevaporates, such as Zn. Active cooling is also effective. The collector plate 6 is
It is preferable to place it as close to the steel strip as possible, as shown in FIG.

That is, the closer the leaked evaporated metal is to the steel strip, the less it spreads, which has the advantage of increasing the adhesion efficiency (collection efficiency) to the collector plate, and also contributes to the cooling effect of the steel strip. Further, in the case of a metal such as Zn, which has a large tendency for vapor to wrap around, it is also possible to prevent the vapor from flowing around to the back surface, which is effective in the case of single-sided vapor deposition. However, if preventing the metal from going around to the back surface or cooling the steel strip is not a problem, it is possible to further increase the efficiency of collecting leaked evaporated metal by tilting the collector plate as shown in Figure 4. It is. A roll with a wire brush or the like is suitable for the peeling device 19. In order to increase the peeling efficiency, it is also effective to provide rolls shown in 22 to 24 to bend the collector plate before peeling. Reference numeral 20 denotes a container for collecting peeling powder, which is replaced with a new container at regular intervals to collect leaked evaporated metal.

As described above, the device of the present invention makes it possible to continuously collect and recover evaporated metal leaking from the clearance formed between the end of the steel strip and the upper end of the crucible, resulting in excellent productivity. Continuous vacuum deposition can be performed.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view showing a schematic structure of a conventional device, FIGS. 2 and 3 are longitudinal and horizontal sectional views showing a schematic structure of an embodiment of the device of the present invention, and FIG. 4 is a cross-sectional view showing a schematic structure of a conventional device. FIG. 3 is a cross-sectional view showing a schematic structure of another embodiment of the device of the present invention. 1... Vacuum deposition chamber, 2... Steel strip, 3.
... Crucible, 4 ... Molten metal for evaporation, 5
....shielding plate, 6 ....collector board, 7~
10, 17, 18... Drive roll, 11-16
... Differential pressure chamber, 19 ... Peeling device, 20.
... Peeling powder receiver, 21 ... Cooling device, 22 -
24... Roll for bending, 25, 26...
...Leaked evaporated metal, 27,28... Massive deposits.

Claims (1)

[Scope of Claims] 1. In an apparatus for continuously vapor depositing a metal such as Zn or Al on a long metal material such as a steel strip in vacuum, the upper end of an evaporation crucible in a vapor deposition chamber and the top of the crucible A movable leakage evaporation metal collector plate is provided so as to cover the clearance formed by the end of the steel strip passing through the collector plate, and the collector plate is introduced into the atmosphere through a differential pressure chamber. 1. A continuous vacuum evaporation apparatus comprising a device for peeling off and removing evaporated metal adhering to the evaporation chamber and then continuously introducing the metal into the evaporation chamber through a differential pressure chamber. 2. The apparatus according to claim 1, further comprising a device for cooling the collector plate introduced into the atmosphere in the atmosphere. 3. The above, characterized in that a shielding plate movable in the width direction of the object to be evaporated is provided at the upper end of the evaporation crucible, and a device for adjusting the position of the shielding plate according to the width of the object to be evaporated is provided. The device according to claim 1.