JPS607605A - Magnetic head - Google Patents

Abstract

PURPOSE:To obtain a head having improved hardness, magnetic characteristic, wear resistance characteristic, etc. by providing a magnetic layer in which >=1 element among transition elements, metallic elements and semiconductor elements are ion-implanted on either top or bottom surface or both surfaces of an Fe-Ni alloy core. CONSTITUTION:A magnetic layer 2' (the figure shows the example of the layer formed on the lower side alone of a core 1) is formed on either top or bottom or both surfaces of a core 2' consisting of an Fe-Ni (''Permalloy'') alloy by implanting the ions of >=1 kind elements among transition metals having unpaired electrons such as Ti, V, Cr, Mn, Zr, Nb, Mo, etc. or metallic elements such as Al, Zn, Ga, Pb or semiconductor elements such as B, C, Si, P, Ge and As thereto in a vacuum. The acceleration voltage and the depth of ion implantation are properly selected according to the implanted elements respectively. The magnetic layer is subjected to a heating treatment for a suitable time according to the implanted elements. The hardness of the magnetic layer 2' is thus improved and the wear resistance and durability of the head are improved without spoiling the magnetic characteristic in particular.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic head used in, for example, a tape recorder.

In general, the conditions that a magnetic material must meet include (1) high magnetic permeability, (2) low coercive force, (3) low energy loss, and (4) tearing at a high saturation value. required. A magnetic material that satisfies these requirements includes a permalloy alloy (a trade name of an iron-nickel based high magnetic permeability alloy commercially available from Western Electric) as a high magnetic permeability material.

By the way, Nokuumalloy alloy is also used as a manufacturing material for magnetic heads used for recording on magnetic recording media such as magnetic tapes. However, although iron-nickel alloys exhibit relatively excellent magnetism even in an annealed state, they have problems in terms of wear resistance. Furthermore, when other elements were added to improve wear resistance, the amount of impurities increased, making it impossible to sufficiently improve magnetism. Therefore, strict conditions must be met during manufacturing.
Manufacturing techniques were required, leading to high costs.

In view of these considerations, as a means of measuring the wear resistance of the tape sliding surface of a magnetic head, for example, as shown in Figs. A non-oxidized film 2 such as At203, SiO2, etc. is formed on at least one of the upper or lower surfaces of the core material 1,
The core material 1 thus formed is laminated to form a core half body 3, and the core halves 3, 3 are joined at the center of the front surface via a magnetic gap 4 to manufacture a magnetic field 5. Ta. However, since the magnetic head 5 manufactured as described above has a non-oxidized film 2 formed on the core material 1 in order to exhibit wear resistance, the crosstalk characteristics deteriorate and the recording/playback sensitivity deteriorates due to the wear resistance. lower than that of untreated core material. Furthermore, the difference in hardness between the core material 1 made of an iron-nickel alloy and the non-oxidized film 2 was large, which easily caused uneven wear. Therefore, there is a drawback that recording cannot be performed reliably on a magnetic recording medium such as a tape.

This invention was created in view of the above-mentioned points, and its object is to form a permalloy alloy,
It is desirable to provide a magnetic head having a magnetic layer that has excellent magnetic properties, improved wear resistance, no deterioration of crosstalk properties, and improved recording sensitivity and reproduction sensitivity.

The present invention will be explained below with reference to the drawings.

First, the outline of this invention is as follows: At least one of the upper or lower surfaces of a core material 1 formed of an iron-nickel alloy (in the drawing, the lower surface) is injected with a transition element having unpaired electrons, but not yet with unpaired electrons, by ion implantation. After implanting the metal element or semiconductor element that has or may have, from several tens of minutes to several hours,
A wear-resistant magnetic layer 2' is formed by heat treatment. At this time, by changing the accelerating voltage of the ions to be implanted, the amount of ions implanted into the core material 1 can be adjusted to easily and reliably control the concentration distribution, thereby improving the hardness and magnetic properties of the magnetic layer 2'. , uneven wear characteristics, etc. can be freely set. The transition element is Ti.

V,, Or, Mn, Fe,, Go, N1, Zr,
Examples of the metal elements include Nb and Mo, and examples of the metal elements include At, Zn, and Ga.

Examples include Sn and Pb, and further semiconductor elements include B.
, 0, S engineering, PXGθ, and human S.

The details of the present invention will be explained below with reference to Examples.

Example 1 One ion of a transition element was implanted into the lower surface of a core moon 1 formed using an iron-nickel alloy with a composition ratio of Fe:Ni (1:4 parts by weight) at an acceleration voltage of 20 ~
By accelerating at 500 KV approximately I x 10” (
In step 4), ions were implanted, and then heated in a hydrogen atmosphere at a temperature in the range of 250 to 350° C. for approximately 1 hour to form a magnetic layer 2' having a thickness of approximately 4 μm. In this case, T
By changing the accelerating voltage of the i ions, the amount of ions implanted into the core material 1 is controlled, and the concentration of Ti ions is controlled and uniformly implanted.

When the hardness distribution of the thus obtained magnetic layer 2' in the depth and thickness direction of the core material 1 is shown, a characteristic diagram A as shown in FIG. 6 is obtained. As is clear from FIG. 6, the depth of the amorphous magnetic layer 2' formed by ion implantation into the iron-nickel alloy core material 1 and the Vickers hardness are inversely proportional; is about 1 μ, the Vickers hardness is about 800, and as the depth of the magnetic layer 2' increases to 4 μ, the Vickers hardness decreases to 200 or less.

The magnetic layer 2' formed in this manner has a high Vickers hardness of 800 or more even though its thickness is as thin as 1 μm. As such, it is wear resistant. Further, since Ti ions are uniformly injected into the iron-nickel alloy by the ion implantation method and the concentration distribution can be easily controlled, uneven wear on the tape sliding surface (cap forming side) can be prevented. Moreover, Ti is lightweight and has corrosion resistance.

Furthermore, since T1 is a transition element with two unpaired electrons present in the 3d orbit of M grain, it exhibits paramagnetism and does not impair the magnetic properties of the core material 1 formed of an iron-nickel alloy. do not have.

Example 2 By ion implantation, ■
When ions are accelerated at an acceleration voltage of 50 to 500 KV, approximately 5×10 10 (%; 711) ions are implanted. Thereafter, it is heated in a hydrogen atmosphere at a temperature range of 400 to 500°C to form a film with a thickness of about 5 μm.

A magnetic layer 2' was formed in the surrounding area.

The hardness distribution of the thus obtained amorphous magnetic layer 2' in the depth and thickness directions of the core material 1 is as shown in FIG. As can be seen from FIG. 7, the amorphous magnetic layer 2' made of an iron-nickel alloy has a high Vickers hardness and is wear resistant. Further, since V ions are injected into the core material 1 made of an iron-nickel alloy by an ion implantation method, the concentration distribution can be easily controlled, thereby preventing uneven wear on the tape sliding surface. Further, the magnetic layer 2' into which V ions are implanted has corrosion resistance. Since V is a transition element having three unpaired electrons in the 3d orbit, it exhibits paramagnetic properties and is excellent without impairing the magnetic properties of the core material 1 made of an iron-nickel alloy.

Similarly, other transition elements such as 0rXZr, Nb, etc.

For MO, each ion was implanted in a high vacuum atmosphere to create an iron:nickel composition ratio of approximately 1:
The hardness distribution of the magnetic layer 2' in the depth direction of the core material 1 when injected into the core material 1 formed from the iron-nickel alloy No. 4 is shown in FIGS. 8, 9, and 10, respectively. , 11th
The characteristics shown in the figure were obtained.

Among these, the magnetic layer 2' into which Or ions are implanted by the ion implantation method has a high Vickers hardness of about 700 or more and is highly wear resistant even if the film thickness is as thin as 1 μm, for example, as shown in FIG. In addition, since Or is a transition element in which five unpaired electrons exist in the 3d orbit of the M grain, it exhibits paramagnetism and does not impair the magnetic properties of the core material 1 formed of an iron-nickel alloy. Are better.

Further, as shown in FIG. 9, the magnetic layer 2' into which Zr ions are implanted by the ion implantation method has a high Vickers hardness of about 600 and is wear resistant even if the film thickness is as thin as 1 μm, for example. Since the Zr ion is a transition element with two unpaired electrons in the 4f orbit of N and l, it exhibits paramagnetism, and the magnetic properties of the core material 1 made of iron-2, Kel system alloy are The magnetic layer 2' in which Nb ions are implanted by the ion implantation method has a film thickness of, for example, 1 μm, as shown in Fig. 10.
Even though it is thin, it has a high Vickers hardness of about 800 and has high abrasion resistance. Moreover, since the Nb ion is a transition element with four unpaired electrons in the 4f orbit of the N grain, it exhibits paramagnetism, without impairing the magnetic properties of the core material 1 made of an iron-nickel alloy. You can improve.

Furthermore, as shown in FIG. 15, the magnetic layer 2' into which Mo ions are implanted by ion implantation has a high Vickers hardness of about 700 and is wear resistant even if the film thickness is as thin as 1 μm, for example. Furthermore, since Mo ions are transition elements with four unpaired electrons in the 4f orbit of N grain, they exhibit paramagnetic properties, improving the magnetic properties of the core material 1 made of iron-nickel alloy without impairing them. can.

Furthermore, ions of B, Si, and P semiconductors were injected into the core material 1 made of an iron-nickel alloy with an iron:nickel composition ratio of 1:4 (parts by weight) by ion implantation.
Figures 12 to 1 show the hardness distribution in the depth and thickness direction of the core material 1 when heated at a heating temperature range of 300 to 400°C after injection.
The characteristics shown in FIG. 4 were obtained, and it is clear that the Vickers hardness is higher than that of the core material 1 simply made of an iron-nickel alloy. Among these, the magnetic layer 2' formed by implanting Si ions and P ions has improved magnetic properties. In each of the above embodiments, a case was explained in which ions of transition elements, metal elements, and semiconductor elements were implanted into the core material 1, but the wear resistance of the core material 1 also improved when ions of 01 or more of these elements were implanted. It goes without saying that it is possible to improve In addition to the above-mentioned elements, Mn, Fe
, C01NiXAt.

Elements such as ZnXGa, Sn, PbXCXGe, and As may be ion-implanted.

As described above, the present invention improves wear resistance on the tape sliding surface and prevents deterioration of crosstalk characteristics by ion-implanting elements into permalloy alloy (iron-nickel alloy) by ion implantation method. 〜Thus, the recording sensitivity map can improve the playback sensitivity. Furthermore, it is possible to improve the magnetic properties of the tape sliding surface without impairing it.

Further, the concentration distribution of ions in the wear-resistant magnetic layer formed by being injected into the core material by the ion implantation method can be easily and reliably controlled. Therefore, the hardness, magnetic properties, uneven wearability, etc. of the magnetic layer can be freely set.

[Brief explanation of the drawing]

FIG. 1 is a partially cutaway front view showing a conventional magnetic head, FIG. 2 is a bottom view showing an example of the core material constituting the head, FIG. 3 is a front view, and FIG. 4 is a front view of the present invention. A bottom view showing an example of the core material constituting the magnetic head, FIG. 5 is a front view of the same, and FIG. 6 is a first embodiment of the present invention showing the hardness of the magnetic layer when Ti ions are implanted. Characteristic diagram of
Fig. 1 is a characteristic diagram of the second embodiment showing the hardness of the magnetic layer when V ions are implanted, and Fig. 8 is the same (the third embodiment showing the hardness of the magnetic layer when Or ions are implanted). The characteristic diagram of the fourth embodiment, FIG. 8 is the same (the characteristic diagram of the fourth example showing the hardness of the magnetic layer when Zr ions are implanted, and FIG.
The characteristic diagram of the fifth embodiment showing the hardness of the magnetic layer when Mo ions are implanted, and FIG. 11 are the same (the characteristic diagram of the sixth embodiment showing the hardness of the magnetic layer when Mo ions are implanted, 1st
Figure 2 is a characteristic diagram of the seventh embodiment showing the hardness of the magnetic layer when B ions are implanted, and Figure 13 is the same (eighth embodiment showing the hardness of the magnetic layer when Si ions are implanted). FIG. 14 is a characteristic diagram of the ninth embodiment showing the hardness of the magnetic layer when P ions are implanted. 1...Core material, 2'...Magnetic layer. Patent application People Pioneer Co., Ltd. Figure 3 Figure 4 Figure 5 Figure 6 Core front force (μ) (, U) Figure 9: Core age 6 hours after age (, v) Figure 10: Core age 6 hours. <p> Figure 11 Core details. Atsushigo (,4) 31- A rice bowl from 1711 items (〃)

Claims (1)

[Claims] A magnetic head is formed using an iron-nickel alloy as a core material, and at least one of the upper or lower surfaces of the core material made of the iron-nickel alloy is coated with a transition element, a metal element, or a semiconductor element. A wear-resistant magnetic head characterized by having a magnetic layer formed by ion-implanting one or more elements.