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JPS609100B2 - Pretreatment method for metal surfaces - Google Patents
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JPS609100B2 - Pretreatment method for metal surfaces - Google Patents

Pretreatment method for metal surfaces

Info

Publication number
JPS609100B2
JPS609100B2 JP10724081A JP10724081A JPS609100B2 JP S609100 B2 JPS609100 B2 JP S609100B2 JP 10724081 A JP10724081 A JP 10724081A JP 10724081 A JP10724081 A JP 10724081A JP S609100 B2 JPS609100 B2 JP S609100B2
Authority
JP
Japan
Prior art keywords
brushing
deposition
temperature
treated
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10724081A
Other languages
Japanese (ja)
Other versions
JPS5751261A (en
Inventor
ジ−グフリ−ド・シレル
ハリ−・フエルステル
ギユンテル・ヘツチユ
ギユンテル・イエシユ
ヨナタ−ン・レシユケ
ハインツ・ケルン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOMUBINAATO BEBU ROKOMOTEIFUBAUUEREKUTOROTEHINITSUSHE UERUKE HANSU BAIMURERU
Original Assignee
KOMUBINAATO BEBU ROKOMOTEIFUBAUUEREKUTOROTEHINITSUSHE UERUKE HANSU BAIMURERU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOMUBINAATO BEBU ROKOMOTEIFUBAUUEREKUTOROTEHINITSUSHE UERUKE HANSU BAIMURERU filed Critical KOMUBINAATO BEBU ROKOMOTEIFUBAUUEREKUTOROTEHINITSUSHE UERUKE HANSU BAIMURERU
Publication of JPS5751261A publication Critical patent/JPS5751261A/en
Publication of JPS609100B2 publication Critical patent/JPS609100B2/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Description

【発明の詳細な説明】 本発明は、後続の真空蒸着工程の為に、真空下に平坦な
物質またはプロフィール物質の金属表面を前処理する方
法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for pretreating metal surfaces of flat or profile materials under vacuum for subsequent vacuum deposition steps.

この方法は、殊に、真空蒸着装暦中で鋼製帯状物上に機
械的に緊密に固着する無孔の蒸着層を得るのに使用する
のが好ましい。金属基材、特に鋼製帯状物は真空蒸着装
置に導入する前に大気中で掃除する。
This method is particularly preferably used to obtain a mechanically tight, non-porous deposited layer on the steel strip in a vacuum deposition system. Metal substrates, especially steel strips, are cleaned in air before being introduced into the vacuum deposition apparatus.

基村表面は洗浄苛性アルカリ溶液によっておよび/また
は電気的方法で脂肪、油、乳化物等を除去する。しかし
ながらこれらの清浄化は機械的に緊密に固着する蒸着層
を得るにはまだ不満足なものである。それ故に蒸着前に
金属基材は更に前処理に委ねられる。この場合、水や吸
着したガスの如き揮発性の異物質の層状物の脱着並びに
基材格子の表面近辺の原子層の出釆る限り高い活性化を
達成しなけ机まならない。表面を大気中で機械的に前処
理することは公知である。
The Motomura surface is cleaned of fats, oils, emulsions, etc. by cleaning caustic solution and/or by electrical methods. However, these cleaning methods are still unsatisfactory in order to obtain a deposited layer that is mechanically tightly bonded. Therefore, prior to vapor deposition, the metal substrate is subjected to further pretreatment. In this case, it is necessary to achieve the desorption of a layer of volatile foreign substances such as water or adsorbed gases, as well as the activation as high as possible of the atomic layer near the surface of the substrate lattice. It is known to pretreat surfaces mechanically in air.

この前処理は回転するブラシによって行なわれる(米国
特許第3123493号明細書)。この場合には確かに
表面の汚れは充分に除かれるが、緊密に固着した蒸着層
を得る為に必要とされる脱着および表面の活性化は達成
されない。何故ならば、大気の影響によって表面が処理
直後に再び物理的に吸着したガス被覆物および化学的に
吸着したガス被覆物によって後続の真空蒸着に使用でき
なくなり、そして緊密に固着した層が得られないからで
ある。更に、特に鋼製帯状物に亜鉛を蒸着させる際に予
めのブラシ掛けを真空下に実施することも公知である。
This pretreatment is carried out by means of a rotating brush (US Pat. No. 3,123,493). In this case, the surface dirt is certainly sufficiently removed, but the desorption and surface activation required to obtain a tightly adhered deposited layer is not achieved. This is because the surface is rendered unusable for subsequent vacuum deposition due to the physically adsorbed gas coating and the chemically adsorbed gas coating again immediately after treatment due to atmospheric influences, and a tightly bonded layer is obtained. That's because there isn't. Furthermore, it is known to carry out pre-brushing under vacuum, especially when depositing zinc on steel strips.

(ドイツ特許第1932812号明細書)。この場合、
鉄製基材を亜鉛の蒸着後に232o0と合金(鉄/亜鉛
)化温度並びに亜鉛が鉄製基材から蒸発してしまう温度
との間の温度に保持するという教示が示されている。ブ
ラシ掛けは10‐2パスカルより小さいガス圧のもとで
行なう。機械的前処理と蒸着処理との間の時間は最高3
凪砂である必要がある。機械的前処理としての減圧下で
のブラシ掛けは、充分に高い加工密度の場合に、きれい
な吸着し易い表面をもたらし、この場合このことに結び
ついた表面近辺域における基材の変形が高濃度の格子欠
損を生ずる。これらの効果の全体が表面の機械的活性状
態をもたらす。後で緊密に固着した蒸着層を得る為の、
このブラシ掛け工程の場合に必要とされる鋼帯状物温度
が高過ぎ、容器中の圧力が低過ぎそしてブラシ掛けと蒸
着との間の時間が短か過ぎ、その結果経済性の問題およ
び逆蒸発による根本的な技術的困難が生ずる。真空状態
で行なうブラシ掛け工程を蒸着工程から真空下に分離す
ることも公知である(東ドイツ特許第138785号明
細書)。
(German Patent No. 1932812). in this case,
The teaching is to hold the ferrous substrate after zinc deposition at a temperature between 232o0 and the alloying (iron/zinc) temperature as well as the temperature at which the zinc evaporates from the ferrous substrate. Brushing is carried out under a gas pressure of less than 10-2 Pascals. The time between mechanical pretreatment and vapor deposition treatment is up to 3
It needs to be calm sand. Brushing under reduced pressure as a mechanical pretreatment results in a clean adsorbent surface in the case of sufficiently high working densities, in which case the associated deformation of the substrate in the near-surface region leads to Causes lattice defects. The totality of these effects results in a mechanically active state of the surface. In order to later obtain a tightly adhered deposited layer,
The steel strip temperature required for this brushing process is too high, the pressure in the vessel is too low and the time between brushing and deposition is too short, resulting in economic problems and back evaporation. fundamental technical difficulties arise. It is also known to separate the vacuum brushing step from the vapor deposition step (GDR 138 785).

この方法は、装置的経費が比較的に多いことおよびブラ
シ掛け工程と被覆工程との間の時間が1栃砂より少なく
成らねばならないという欠点を伴なう。本発明の目的は
、従来技術の欠点を回避する他に、僅かなエネルギー消
費のもとで大規模工業に適しており且つ大きな断面積の
ものおよび広い帯状物をも有利に前処理し得る方法を創
造することである。
This method has the disadvantage that the equipment outlay is relatively high and that the time between the brushing step and the coating step must be less than one ash. The object of the invention is, besides avoiding the disadvantages of the prior art, to provide a method which is suitable for large-scale industry with low energy consumption and which allows for the advantageous pretreatment of large cross-sectional areas and even wide strips. It is to create.

本発明は、大気中でまたは真空下に行なう後続の工程の
為に、真空下に金属表面を前処理する方法を見出すこと
を課題としている。
The object of the invention is to find a method for pretreating metal surfaces under vacuum for subsequent processing in air or under vacuum.

後続の真空蒸着工程に於て、機械的に緊密に固着する無
孔の蒸着層が低い前処理温度(室温近辺の温度)、高圧
および前処理と蒸着との間の長い時間(複数分の範囲内
)にて経済的に得られるべきである。大気中での例えば
塗装の如き後処理が、長い時間の経過後でも−前処理さ
れた物質がその時間の間に腐触することもないこ−可能
である。この方法は棒状物質および帯状物質の各務断面
および各太さにとって適しているべきである。
In the subsequent vacuum deposition step, a mechanically tight, non-porous deposited layer is formed using low pretreatment temperatures (near room temperature), high pressures and long times between pretreatment and deposition (in the range of several minutes). (within) should be economically obtainable. Post-treatment in the atmosphere, for example painting, is possible even after a long period of time - without the pre-treated material corroding during that time. This method should be suitable for each cross section and thickness of rods and strips.

更にこの方法は多くの材料の組み合せにも適しているべ
きである。か)る議題は殊に0.5〜2一mの材料剥削
を伴なう1段階または複数段階のブラシ掛け工程と蒸着
工程とを組み合せることによって解決される。
Furthermore, the method should also be suitable for many material combinations. This problem is solved in particular by combining a one-stage or multi-stage brushing process with material ablation of 0.5 to 21 m and a vapor deposition process.

蒸着工程は、黍着材料がブラシ掛け工程の際に表面に到
達しそして一部が機械的に合体されるように唯一のまた
は最後のブラシ掛け段階と組み合さっている。これによ
って表面が脱着され、活性化されそして芽形成される。
実験によると、ブラシ掛けによる剥削量の下限値は蒸着
層の充分な付着強度に必要とされる充分な機械的活性化
が得られる最小値の0.5wmである。
The vapor deposition step is combined with the only or last brushing step such that the deposited material reaches the surface during the brushing step and is partially mechanically incorporated. This causes the surface to be desorbed, activated and budded.
Experiments have shown that the lower limit of the amount of abrasion by brushing is 0.5 wm, which is the minimum value that provides sufficient mechanical activation required for sufficient adhesion strength of the deposited layer.

また剥削量が2山mより多く成ると、剥削くずの除去の
問題が生じるし且つ基材を不必要に剥削することになる
。ブラシ掛け工程の際に蒸着される材料は、後続の真空
蒸着工程の場合と同じものでもまた他のものでもよい。
Further, if the amount of scraping is more than 2 m, there will be a problem in removing scraps and the base material will be scraped unnecessarily. The material deposited during the brushing step may be the same as in the subsequent vacuum deposition step, or may be different.

ブラシ掛け工程は10‐2〜1ぴパスカルの圧力範囲内
で実施するのが有利である。
The brushing step is advantageously carried out in a pressure range of 10-2 to 1 pipascal.

この圧力範囲は、本方法全体が真空蒸発用器中で行なわ
れるので、被覆工程の真空状態によって制約され決めら
れた値である。本発明の他の有利な実施形態は、処理す
べき表面の温度が蒸着工程の間20〜8000であるよ
う構成されている。
This pressure range is a value constrained and determined by the vacuum conditions of the coating process, since the entire process is carried out in a vacuum evaporator. Another advantageous embodiment of the invention is designed such that the temperature of the surface to be treated is between 20 and 8000 °C during the deposition process.

この温度範囲は、更に高温の際の逆蒸発を回避する為に
、特に薄い層の場合の補償熱との関係で決められる。表
面と回転するブラシの剛毛とが反対方向の相対運動をす
るのが有利であることが判った。ブラシ掛け工程での蒸
着はその最後のブラシ掛け段階に特別な蒸発器によって
行なうかまたは本来の蒸着室での最後のブラシ掛け段階
の区分において頃霧蒸発することによって行なう。
This temperature range is determined in relation to the compensation heat, especially in the case of thin layers, in order to avoid back-evaporation at higher temperatures. It has been found to be advantageous for the surface and the bristles of the rotating brush to have relative movements in opposite directions. The deposition in the brushing process is carried out either by means of a special evaporator in the last brushing stage or by atomization in the section of the last brushing stage in the actual deposition chamber.

この組み合せられたブラシ掛け/黍着−工程は、ブラシ
掛けすることによって表面のこの様な機械的加工を行な
い、表面のこの緊密な加工が充分な脱着および活性化を
実現するように行なう。
This combined brushing/dusting process is carried out in such a way that, by brushing, such a mechanical working of the surface is carried out and that this intimate working of the surface achieves sufficient desorption and activation.

ブラシ掛けの際の蒸着によって蒸発微粒子がブラシ中に
あるいはブラシ掛け前の表面に到達しそして表面に一層
〜数層の原子層の厚さで機械的に合体される。回転する
ブラシによる表面の機械的加工によって、表面近辺城に
エネルギー的に有利な高い格子欠損濃度の状態が形成さ
れ、その結果合体される金属蒸気原子が、表面への吸着
あるいは合体の為の有利な前提条件である。
Due to the vapor deposition during brushing, the evaporated particulates reach the brush or the surface before brushing and mechanically coalesce on the surface in a thickness of one to several atomic layers. Mechanical processing of the surface by a rotating brush creates an energetically favorable state of high lattice vacancy concentration near the surface, so that the coalescing metal vapor atoms have favorable conditions for adsorption or coalescence onto the surface. This is a prerequisite.

層の固着は、蟹ろくべきことに、例えば鉄の場合にはそ
の温度に無関係でありまた層金属の溶融温度に無関係で
ある。何故ならば、亜鉛層、アルミニウム層および銅層
の場合の接合強度は均一で非常に良好であるからである
。金属を互に結合させる際に度々必要とされる如き熱的
に制限される惨出法は、ブラシ掛けによって機械的に加
工した表面の場合には明らかにあまりまたは全く役立た
ない。短時間−耐腐食性は、本発明の方法によって亜鉛
を複数の原子層の状態で合体する場合には、未処理の鋼
製帯状物に比較して2桁までのオーダーで長い。この確
認された短時間腐食効果に基づいてこの方法は、高い腐
食的攻撃に曝されていない特に鉄および鉄合金の腐食に
侵され易い工作材料の為に、後続する蒸着処理ないこも
または他の腐食防止方法、例えば塗料塗布またはプラス
チック被覆、によって後に保護することができる。ブラ
シ掛けと蒸着処理とを単一の工程に組み合せることの効
果には驚ろくべさものがある。
The adhesion of the layer is surprisingly independent of its temperature, for example in the case of iron, and also independent of the melting temperature of the layer metal. This is because the bonding strength of the zinc layer, aluminum layer and copper layer is uniform and very good. Thermally limited bonding methods, such as those often required in bonding metals together, are clearly of little or no use in the case of surfaces that have been mechanically worked by brushing. The short-term corrosion resistance is up to two orders of magnitude longer when zinc is incorporated in multiple atomic layers by the method of the invention compared to untreated steel strips. On the basis of this confirmed short-term corrosion effect, the method is suitable for workpiece materials susceptible to corrosion, especially iron and iron alloys, which are not exposed to high corrosive attack, and the subsequent vapor deposition process is free from corrosion or other Subsequent protection can be provided by anti-corrosion methods, such as paint applications or plastic coatings. The effectiveness of combining brushing and deposition into a single process is amazing.

ブラシ掛けだけでも金属光択のある表面が生ずるが、こ
のものは、公知のように、大気中で非常に短い時間使用
しても物理的−および化学的吸着によって腐触される。
真空状態の低い圧のもとでも高い気体微粒子の付着確率
の場合には1パスカルの範園に於て1秒後に表面は1ぴ
原子層の気体微粒子で再び被覆されている。しかし確か
に、この様にブラシ掛けされ且つ蒸着された試料がブラ
シ掛けされただけの試料よりもはるかに高い耐腐食性を
有していることが認められる。この組み合せによって明
らかに一方に於ては腐食が抑制されそしてもう一方では
、しっかり固着した蒸着層をもたらす良好な条件が得ら
れる。実施例 本発明の重要な用途分野は、後続する亜鉛での真空蒸着
工程の為に鋼帯状物を前処理することである。
Brushing alone produces a metal-selective surface, which, as is known, is corroded by physical and chemical adsorption even after very short periods of use in the atmosphere.
If the probability of adhesion of gas particles is high even under the low pressure of a vacuum state, the surface will be covered again with 1 patomic layer of gas particles after 1 second in the range of 1 Pascal. However, it is certainly observed that the samples brushed and deposited in this way have a much higher corrosion resistance than the samples that are only brushed. This combination clearly provides, on the one hand, corrosion inhibition and, on the other hand, good conditions leading to a well-adhered deposited layer. EXAMPLE An important field of application of the invention is the pretreatment of steel strips for a subsequent vacuum deposition step with zinc.

このことを以下に詳述する。真空下での前処理の為に準
備した容器中に、多数のブラシより成るブラシ・システ
ムを配設する。
This will be explained in detail below. A brush system consisting of a number of brushes is placed in a container prepared for pretreatment under vacuum.

Claims (1)

【特許請求の範囲】 1 処理するべき材料を1段階またはそれ以上の段階数
の工程において機械的にブラシ掛けして0.5〜2μm
を剥削しそしてブラシ掛け工程の最後の段階または唯一
の段階において蒸着させる材料を処理するべき材料に1
層から複数層までの原子層の厚さでブラシ掛けと同時的
に蒸発付着させることを特徴とする、後続の真空蒸着工
程の為の、真空下での金属表面の前処理方法。 2 蒸着により後処理する場合のブラシ掛け工程の間に
蒸着させる材料が同じ材料または他の材料である特許請
求の範囲第1項記載の方法。 3 ブラシ掛け工程を、10^−^2〜10^2パスカ
ルの圧力のもとで実施する特許請求の範囲第1項または
第2項記載の方法。 4 蒸着の時点まで処理すべき物質の表面の温度を20
〜80℃から選択する特許請求の範囲第1〜3項のうち
のいずれか1つに記載の方法。
[Scope of Claims] 1. The material to be treated is mechanically brushed in one or more stages to a thickness of 0.5 to 2 μm.
1 on the material to be treated to remove and deposit the material in the last or only step of the brushing process.
A method for pretreating metal surfaces under vacuum for a subsequent vacuum deposition step, characterized by brushing and simultaneous evaporative deposition of layers up to several atomic layers thick. 2. A method according to claim 1, wherein the material deposited during the brushing step in the case of post-treatment by vapor deposition is the same material or another material. 3. The method according to claim 1 or 2, wherein the brushing step is carried out under a pressure of 10^-^2 to 10^2 Pascals. 4 The temperature of the surface of the material to be treated up to the point of vapor deposition is
4. The method according to any one of claims 1 to 3, wherein the temperature is selected from -80<0>C.
JP10724081A 1980-07-10 1981-07-10 Pretreatment method for metal surfaces Expired JPS609100B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD22252980A DD151969A1 (en) 1980-07-10 1980-07-10 METHOD FOR PREAMBING METALLIC SURFACES
DD23C/222529 1980-07-10

Publications (2)

Publication Number Publication Date
JPS5751261A JPS5751261A (en) 1982-03-26
JPS609100B2 true JPS609100B2 (en) 1985-03-07

Family

ID=5525252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10724081A Expired JPS609100B2 (en) 1980-07-10 1981-07-10 Pretreatment method for metal surfaces

Country Status (2)

Country Link
JP (1) JPS609100B2 (en)
DD (1) DD151969A1 (en)

Also Published As

Publication number Publication date
DD151969A1 (en) 1981-11-11
JPS5751261A (en) 1982-03-26

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