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JPS6113563B2 - - Google Patents
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JPS6113563B2 - - Google Patents

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Publication number
JPS6113563B2
JPS6113563B2 JP7655177A JP7655177A JPS6113563B2 JP S6113563 B2 JPS6113563 B2 JP S6113563B2 JP 7655177 A JP7655177 A JP 7655177A JP 7655177 A JP7655177 A JP 7655177A JP S6113563 B2 JPS6113563 B2 JP S6113563B2
Authority
JP
Japan
Prior art keywords
thin film
lens
optical waveguide
film optical
curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7655177A
Other languages
Japanese (ja)
Other versions
JPS5411757A (en
Inventor
Takeomi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP7655177A priority Critical patent/JPS5411757A/en
Publication of JPS5411757A publication Critical patent/JPS5411757A/en
Publication of JPS6113563B2 publication Critical patent/JPS6113563B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lenses (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)

Description

【発明の詳細な説明】 本発明は薄膜光導波路に形成するレンズに関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a lens formed in a thin film optical waveguide.

薄膜光導波路に光束を入射させて伝播させる場
合、一端に集光させる必要があるときは、光導波
路内にレンズ作用を成す部分を形成しなくてはな
らない。このようなレンズ作用を成す部分は、例
えば薄膜光導波路の一部を球面状に突出または陥
没させることにより、この部分にレンズ作用を持
たせることができるが、この場合その球面部分を
単球面とすると極めて大きな収差が発出する。そ
こで、この場合の収差を除去する方法として、特
開昭50−57255号公報、Applied Optics
Vol.13、No.9、pp2105〜2108には凹部(または
凸部)の膜厚もしくは屈折率を中心部から外周部
にかけて変化させることが提案されている。しか
し、このように膜厚や屈折率を収差が補正される
ように中心部から外周部にかけて変化させてその
値の制御を行なうことは、製造上極めて困難であ
り、高価となる欠点がある。
When a light beam is incident on a thin-film optical waveguide and propagated, if it is necessary to condense the light at one end, a portion that acts as a lens must be formed within the optical waveguide. The part that has such a lens effect can be made to have a lens effect by, for example, protruding or recessing a part of the thin film optical waveguide into a spherical shape. In this case, the spherical part can be made into a unispherical surface. This results in extremely large aberrations. Therefore, as a method for removing aberrations in this case, Japanese Patent Laid-Open No. 50-57255, Applied Optics
Vol. 13, No. 9, pp 2105-2108 proposes changing the film thickness or refractive index of the concave portions (or convex portions) from the center to the outer periphery. However, controlling the film thickness and refractive index by changing them from the center to the outer periphery so as to correct aberrations is extremely difficult in terms of manufacturing and has the disadvantage of being expensive.

本発明の目的は上述した欠点を除去し、構成が
簡単で安価に製造でき、しかも収差が極めて小さ
い薄膜光導波路レンズを提供しようとするもので
ある。
SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks, to provide a thin film optical waveguide lens that has a simple structure, can be manufactured at low cost, and has extremely small aberrations.

本発明の薄膜光導波路レンズは、薄膜光導波路
の一部に凹部または凸部を形成し、該薄膜光導波
路内で伝播する光束に屈折作用を与えるレンズで
あつて、前記凹部または凸部と平面部において光
束を伝播する中間薄膜の膜厚を同じにし、前記凹
部または凸部における前記中間薄膜の形状を二以
上の異なる曲率面を有する球面状に形成したこと
を特徴とするものである。
The thin-film optical waveguide lens of the present invention is a lens in which a concave portion or a convex portion is formed in a part of a thin-film optical waveguide, and provides a refraction effect on a light beam propagating within the thin-film optical waveguide, and the lens has a flat surface with the concave portion or convex portion. It is characterized in that the thickness of the intermediate thin film that propagates the light flux is the same in the concave portions or the convex portions, and the shape of the intermediate thin film in the concave portions or convex portions is formed into a spherical shape having two or more different surfaces of curvature.

以下図面を参照して本発明を詳細に説明する。 The present invention will be described in detail below with reference to the drawings.

第1図は本発明の薄膜光導波路レンズの一例の
構成を断面で示す図であり、薄膜光導波路1は、
三層の薄膜2,3および4を以つて構成され、中
間薄膜3は少なくとも光透過性のもので、その屈
折率は両側の薄膜2および4の屈折率よりも大き
い。したがつて、中間薄膜3中に入射した光束は
両薄膜との境界面で多重反射を繰り返して伝播す
る。本例ではこの薄膜光導波路1にその厚さを変
えることなく球面状の凹部を形成してレンズ5を
構成する。このレンズ5は深部を大きな曲率半径
Rとし周辺を小さな曲率半径R′として、これら
の曲率中心O・O′を凹部の中心に立てた垂線上
に置いている。
FIG. 1 is a cross-sectional view showing the configuration of an example of the thin film optical waveguide lens of the present invention.
It is composed of three layers of thin films 2, 3 and 4, with the intermediate thin film 3 being at least light-transmissive and having a refractive index greater than the refractive index of the thin films 2 and 4 on both sides. Therefore, the light beam incident on the intermediate thin film 3 undergoes multiple reflections at the interface between the two thin films and propagates. In this example, the lens 5 is formed by forming a spherical concave portion in the thin film optical waveguide 1 without changing its thickness. This lens 5 has a large radius of curvature R at the deep part and a small radius of curvature R' at the periphery, and the centers of curvature O and O' are placed on a perpendicular line to the center of the concave part.

第2図AおよびBは第1図に示した本実施例の
薄膜光導波路レンズの拡大平面図および断面図を
示し、第3図AおよびBは従来の単球面より成る
薄膜光導波路レンズの平面図および断面図を示
す。第3図Bから明らかなように、従来の薄膜光
導波路レンズにおいては、それが単球面で構成さ
れるため、その形状は曲率半径Rと、曲率中心O
からレンズ中心およびそのヘリにそれぞれ引いた
半径線の成す角度θとの2つのパラメータで決定
される。このため、焦点距離fおよび開口数NA
は一義的に決まるが、球面収差を自由にコントロ
ールすることができない。
2A and 2B show an enlarged plan view and a sectional view of the thin film optical waveguide lens of this embodiment shown in FIG. Figures and cross-sections are shown. As is clear from FIG. 3B, the conventional thin film optical waveguide lens is composed of a single spherical surface, so its shape has a radius of curvature R and a center of curvature O.
It is determined by two parameters: the angle θ formed by the radius line drawn from the center of the lens and the edge of the lens. Therefore, focal length f and numerical aperture NA
is uniquely determined, but spherical aberration cannot be freely controlled.

これに対し、本実施例の薄膜光導波路レンズに
おいては、それが二つの球面をもつて構成される
から、その形状を決定するパラメータは第2図B
から明らかなように、第1の球面に関する曲率半
径Rおよび角度βと、第2の球面に関する曲率半
経R′および角度αとの少く共4つのパラメータ
で決定される。したがつて、球面収差をある程度
自由にコントロールすることができる。ここで、
本実施例において、第2図Aに示すように入射光
6における焦点距離fは、次式で表わされる。
On the other hand, since the thin film optical waveguide lens of this example has two spherical surfaces, the parameters that determine its shape are as shown in Figure 2B.
As is clear from the above, it is determined by at least four parameters: the radius of curvature R and angle β regarding the first spherical surface, and the semi-radius of curvature R' and angle α regarding the second spherical surface. Therefore, spherical aberration can be controlled to some extent. here,
In this embodiment, as shown in FIG. 2A, the focal length f of the incident light 6 is expressed by the following equation.

f/R′=−sinαsinφ/sin(2φ×ΔB) ただし、R′、α、φ、φ、ΔBは第2図
A,Bに示す通りである。
f/R'=- sinαsinφ1 /sin ( 2φ2 ×ΔB) However, R', α, φ1 , φ2 , and ΔB are as shown in FIGS. 2A and B.

上式から明らかなように、R′、α、φ、Δ
BすなわちR′、α、β、γ(γは第2の球面の
曲率中心O′からレンズ中心および第1の球面と
の境界にそれぞれ引いた半経線の成す角度)を適
切に設定すれば、φが変化してもfの変化を微
小とすることができ、したがつて球面収差の小さ
い薄膜光導波路レンズを得ることができる。
As is clear from the above equation, R′, α, φ 2 , Δ
If B, that is, R', α, β, and γ (γ is the angle formed by the semi-meridian drawn from the center of curvature O' of the second spherical surface to the lens center and the boundary with the first spherical surface, respectively), Even if φ1 changes, the change in f can be made small, and therefore a thin film optical waveguide lens with small spherical aberration can be obtained.

なお、本発明レンズの球面の配置は深部を小さ
な曲率半径とし、周辺を大きな曲率半径としても
よく(R<R′)、更に別の球面を追加してもよ
い。また平面部から球面へ、一球面から他球面へ
の境界での光束の伝播に際して、漏光による光損
失、光モード変換、逆方向への反射等を防止する
ためには、これら各境界を緩やかに連続する曲
面、または近似するための面取り状平面、若しく
は曲面とすると好適である。
The spherical surfaces of the lens of the present invention may be arranged such that the deep part has a small radius of curvature and the periphery has a large radius of curvature (R<R'), or another spherical surface may be added. In addition, in order to prevent light loss due to light leakage, optical mode conversion, reflection in the opposite direction, etc. when propagating the luminous flux at the boundaries from a flat part to a spherical surface or from one spherical surface to another spherical surface, these boundaries must be made gentle. It is preferable to use a continuous curved surface, a chamfered plane for approximation, or a curved surface.

第4図AおよびBは大型計算機による球面収差
の計算結果を示すもので、第4図Bは単球面をも
つて構成した従来の薄膜光導波路レンズの球面収
差を表わす。また、第4図Aは本発明に従つて収
差補正のなされた薄膜光導波路レンズを設計する
にあつたて、周辺光線が近軸焦点を通ることと
し、縦収差の極大を極小にする条件のもとで二つ
の球面の曲率半径等の値を決定して得られた、本
発明に係る薄膜光導波路レンズの球面収差を表わ
す。図から明らならように、本発明レンズにおけ
る球面収差は従来レンズにおける球面収差よりも
遥かに小さいものとなる。すなわち、本発明によ
れば上述したところから明らかなように、第2図
AおよびBにおいてR′α、β、γを適切に設定
することによつて負の方向の球面収差が得られ、
全体として球面収差が良好に補正された薄膜光導
波路レンズが得られることがわかつた。
4A and 4B show the results of calculations of spherical aberration by a large computer, and FIG. 4B shows the spherical aberration of a conventional thin film optical waveguide lens constructed with a single spherical surface. In addition, FIG. 4A shows the conditions for minimizing the maximum longitudinal aberration when designing a thin-film optical waveguide lens with aberration correction according to the present invention, with peripheral rays passing through the paraxial focus. This figure represents the spherical aberration of the thin film optical waveguide lens according to the present invention, which was obtained by determining the values of the radius of curvature, etc. of two spherical surfaces. As is clear from the figure, the spherical aberration in the lens of the present invention is much smaller than that in the conventional lens. That is, according to the present invention, as is clear from the above, by appropriately setting R′α, β, and γ in FIGS. 2A and B, negative spherical aberration can be obtained.
It was found that a thin film optical waveguide lens in which spherical aberration was well corrected as a whole could be obtained.

なお、異なる曲率半径を有する曲面が多くなる
程、収差は良好となるが、この場合にはそれだけ
非球面に近づくことになり製作が面倒となる。し
かも曲面を多くしても増加させただけの効果は少
なくなる。したがつて何個の異なる曲率半径の曲
面を以つて球面状のレンズを構成するかは、製造
上の問題と効果との兼ね合いで決定されたが、実
用的には二、三個の曲面を以つて構成するが好適
である。
Note that as the number of curved surfaces having different radii of curvature increases, the aberration becomes better, but in this case, the surface becomes closer to an aspheric surface, making manufacturing more troublesome. Furthermore, even if the number of curved surfaces is increased, the effect of increasing the number of curved surfaces will be reduced. Therefore, how many curved surfaces with different radii of curvature should be used to construct a spherical lens was determined based on manufacturing issues and effects, but in practice it is best to use two or three curved surfaces. It is preferable to configure the following.

上述したように本発明による薄膜光導波路レン
ズは、異なる曲率半径の曲面を二以上有する球面
状のものであるから、単一の曲面より成るレンズ
よりもその球面収差を小さくできる。また、膜厚
や屈折率を中心部から外周部にかけて変化させる
場合に比べ構成が簡単でかつ安価に製造できる利
点がある。
As described above, since the thin film optical waveguide lens according to the present invention has a spherical shape having two or more curved surfaces with different radii of curvature, its spherical aberration can be made smaller than that of a lens consisting of a single curved surface. Further, it has the advantage that the structure is simpler and can be manufactured at a lower cost than in the case where the film thickness and refractive index are changed from the center to the outer periphery.

なお、本発明は上述した例にのみ限定されるも
のではなく幾多の変更または変形が可能である。
例えば異なる曲率面のそれぞれの曲率中心は、必
ずしも一つの曲面に立てた垂線上に置く必要はな
い。
Note that the present invention is not limited to the above-mentioned examples, and can be modified or modified in many ways.
For example, the centers of curvature of different surfaces of curvature do not necessarily have to lie on a perpendicular line to one curved surface.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の薄膜光導波路レンズの一例の
構成を示す断面図、第2図AおよびBは第1図に
示す薄膜光導波路レンズの拡大平面図および断面
図、第3図AおよびBは従来の単球面より成る薄
膜光導波路レンズの平面図および断面図、第4図
AおよびBは本発明の薄膜光導波路レンズと従来
の薄膜光導波路レンズとの球面収差を比較して示
す線図である。 1……薄膜光導波路、2,3,4……薄膜、5
……レンズ、6……入射光。
FIG. 1 is a sectional view showing the structure of an example of the thin film optical waveguide lens of the present invention, FIGS. 2A and B are enlarged plan views and sectional views of the thin film optical waveguide lens shown in FIG. 1, and FIGS. 3A and B 4A and 4B are graphs showing a comparison of spherical aberration between the thin film optical waveguide lens of the present invention and a conventional thin film optical waveguide lens. It is. 1... Thin film optical waveguide, 2, 3, 4... Thin film, 5
...Lens, 6...Incoming light.

Claims (1)

【特許請求の範囲】[Claims] 1 薄膜光導波路の一部に凹部をまたは凸部を形
成し、該薄膜光導波路内で伝播する光束に屈折作
用を与えるレンズにおいて、前記凹部または凸部
と平面部とで光束を伝播する中間薄膜の膜厚を同
一とし、前記凹部または凸部における中間薄膜の
形状を二以上の異なる曲率面を有する球面状に形
成したことを特徴とする薄膜光導波路レンズ。
1. In a lens in which a concave portion or a convex portion is formed in a part of a thin film optical waveguide, and a refracting effect is applied to a light beam propagating within the thin film optical waveguide, an intermediate thin film in which the light beam propagates between the concave portion or convex portion and a flat portion. 1. A thin film optical waveguide lens, characterized in that the thickness of the intermediate thin film is the same, and the shape of the intermediate thin film in the concave portion or convex portion is formed into a spherical shape having two or more different surfaces of curvature.
JP7655177A 1977-06-29 1977-06-29 Lens for thin-film optical guide Granted JPS5411757A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7655177A JPS5411757A (en) 1977-06-29 1977-06-29 Lens for thin-film optical guide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7655177A JPS5411757A (en) 1977-06-29 1977-06-29 Lens for thin-film optical guide

Publications (2)

Publication Number Publication Date
JPS5411757A JPS5411757A (en) 1979-01-29
JPS6113563B2 true JPS6113563B2 (en) 1986-04-14

Family

ID=13608387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7655177A Granted JPS5411757A (en) 1977-06-29 1977-06-29 Lens for thin-film optical guide

Country Status (1)

Country Link
JP (1) JPS5411757A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0179355U (en) * 1987-11-16 1989-05-29

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830711A (en) * 1981-08-18 1983-02-23 Nippon Telegr & Teleph Corp <Ntt> Manufacture of waveguide type lens

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0179355U (en) * 1987-11-16 1989-05-29

Also Published As

Publication number Publication date
JPS5411757A (en) 1979-01-29

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