JPS6118419B2 - - Google Patents
Info
- Publication number
- JPS6118419B2 JPS6118419B2 JP54137949A JP13794979A JPS6118419B2 JP S6118419 B2 JPS6118419 B2 JP S6118419B2 JP 54137949 A JP54137949 A JP 54137949A JP 13794979 A JP13794979 A JP 13794979A JP S6118419 B2 JPS6118419 B2 JP S6118419B2
- Authority
- JP
- Japan
- Prior art keywords
- high voltage
- voltage
- output terminal
- present
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/02—Conversion of AC power input into DC power output without possibility of reversal
- H02M7/04—Conversion of AC power input into DC power output without possibility of reversal by static converters
- H02M7/06—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
- H02M7/10—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode arranged for operation in series, e.g. for multiplication of voltage
- H02M7/103—Containing passive elements (capacitively coupled) which are ordered in cascade on one source
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
- Direct Current Feeding And Distribution (AREA)
- Rectifiers (AREA)
Description
【発明の詳細な説明】
本発明は高電圧出力ターミナルに、高電圧に重
畳して発生する正弦波状脈動電圧を除去する高電
圧発生装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a high voltage generator for removing sinusoidal pulsating voltage superimposed on high voltage at a high voltage output terminal.
一般に電子顕微鏡等に用いられる直流高電圧発
生装置に於いては、分解能等の性能を向上させる
為に高い安定度を必要とし、その為にその出力に
於ける脈動電圧を出来るだけ小さく抑えることが
要求される。 In general, DC high voltage generators used in electron microscopes etc. require high stability in order to improve performance such as resolution, and for this reason, it is necessary to keep the pulsating voltage in the output as low as possible. required.
その為第１図に示す如き二つのコンデンサカラ
ム（コンデンサC11…Ｃ1(o-1)，Ｃ1oからなるカラ
ムとC21，…，Ｃ2(o-1)，2oからなるカラム）、二つ
の整流器群（整流器D11，…Ｄ1(o-1)，Ｄ1oからな
る整流器群とD21，…，Ｄ2(o-1)，Ｄ2oからなる整
流器群）及びバランス抵抗R1，R2からなる平衡
コツククロフト型昇圧整流回路（以下コツククロ
フト回路と略称）と該コツククロフト回路の電源
E1，E2から成る対称型の高電圧発生装置が使用
されている。斯くの如き装置において、電源電圧
E1，E2が完全にバランスがとれていても、各整
流器に並列に分布容量が存在し、該分布容量が必
ずしも一定ではなく、又各コンデンサの値が一定
でないので、バランス抵抗R1，R2各々に印加さ
れる電圧のバランスが崩れ高電圧出力ターミナル
Ｔに正弦波脈動電圧が発生する。 Therefore, two capacitor columns (a column consisting of capacitors C 11 ...C 1(o-1) , C 1o and a column consisting of capacitors C 21 , ..., C 2(o-1) , 2o ) as shown in Fig. 1 are used. Two rectifier groups (a rectifier group consisting of rectifiers D 11 ,...D 1(o-1) , D 1o and a rectifier group consisting of D 21 ,..., D 2(o-1) , D 2o ) and a balance resistor R 1 , R 2 (hereinafter referred to as the Kotskucroft circuit) and the power supply for the Kotskucroft circuit.
A symmetrical high voltage generator consisting of E 1 and E 2 is used. In such equipment, the power supply voltage
Even if E 1 and E 2 are perfectly balanced, there is a distributed capacitance in parallel with each rectifier, and the distributed capacitance is not necessarily constant, and the value of each capacitor is not constant, so the balance resistor R 1 , The voltages applied to each R2 are unbalanced and a sine wave pulsating voltage is generated at the high voltage output terminal T.
本発明は斯くの如き点に鑑みてなされたもの
で、高電圧出力ターミナルに発生する脈動電圧を
大略完全に除去し得る新規な高電圧発生装置を提
供するものである。 The present invention has been made in view of the above-mentioned problems, and it is an object of the present invention to provide a novel high-voltage generator that can almost completely eliminate the pulsating voltage generated at the high-voltage output terminal.
第２図は本発明の一実施例を示した高電圧発生
装置の既略図で、第１図にて用いた番号と同じ番
号を付したものは同一構成要素を示す。 FIG. 2 is a schematic diagram of a high voltage generator showing an embodiment of the present invention, and the same numbers as used in FIG. 1 indicate the same components.
本発明ではコツククロフト回路の出力端Ａ，Ｂ
と中性点Ｏの各々の間に（バランス抵抗R1，R2
に各々並列に）バランス抵抗R1，R2各々に並列
に存在する分布容量ＣP，ＣQの値に近似した値の
可変コンデンサＣA，ＣBを設け、（１−Ｘ）Ｃ＝
ＣA，XC＝ＣBとおいた時（但し、Ｃは初めに設
定したコンデンサの容量）、（１−Ｘ）Ｃ＋XC＝
一定（但し、ＸはＯから１の間で変化する変
数）、即ち、ＣA＋ＣB＝一定の関係を保つて連動
可変する様に構成している。而して、コツククロ
フト回路のバランス抵抗R1，R2の各々の両端子
に表わされる交流電圧をコントロールして両電圧
の絶対値を等しくするので、中性点Ｏの交流電圧
が零ボルトになり結果的に高電圧出力ターミナル
Ｔには正弦波脈動電圧が発生しない。 In the present invention, the output terminals A and B of the Kotscroft circuit are
and the neutral point O (balance resistance R 1 , R 2
Variable capacitors C A and C B with values approximate to the distributed capacitances C P and C Q are provided in parallel with the balance resistors R 1 and R 2 respectively, and (1-X)C=
When C A , XC = C B (where C is the capacitance of the capacitor set at the beginning), (1-X) C + XC =
It is configured to be variable while maintaining a constant relationship (where X is a variable varying between O and 1), that is, C A +C B = constant. Since the AC voltages expressed at both terminals of the balance resistors R 1 and R 2 of the Kotscroft circuit are controlled to equalize the absolute values of both voltages, the AC voltage at the neutral point O becomes zero volts. As a result, no sinusoidal pulsating voltage is generated at the high voltage output terminal T.
本発明によれば高電圧出力ターミナルに発生す
る脈動電圧を大略完全に除去し得る。 According to the present invention, the pulsating voltage generated at the high voltage output terminal can be almost completely eliminated.
第１図は従来の対称型高電圧発生装置の概略
図、第２図は本発明の一実施例を示した高電圧発
生装置の概略図である。
R1，R2：バランス抵抗、E2，E5：コツククロ
フト回路の電源、Ｔ：高電圧出力ターミナル、Ｃ
A，ＣB：可変コンデンサ。
FIG. 1 is a schematic diagram of a conventional symmetrical high voltage generator, and FIG. 2 is a schematic diagram of a high voltage generator showing an embodiment of the present invention. R 1 , R 2 : Balance resistor, E 2 , E 5 : Power supply of Kotskucroft circuit, T : High voltage output terminal, C
A , C B : Variable capacitor.
Claims (1)
圧整流し、直流高電圧を得るように成した装置に
おいて、前記昇圧整流回路の各出力端と中性点の
間各々に、和が一定に維持される様に互いに連動
させて可変出来るコンデンサを設けた事を特徴と
する高電圧発生装置。1. In a device configured to step-up and rectify the voltage from an AC power supply using a step-up rectifier circuit to obtain a DC high voltage, the sum is maintained constant between each output terminal of the step-up rectifier circuit and the neutral point. A high voltage generator characterized by having capacitors that can be varied in conjunction with each other so that the voltage can be varied.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794979A JPS5662069A (en) | 1979-10-25 | 1979-10-25 | Generating device for high voltage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794979A JPS5662069A (en) | 1979-10-25 | 1979-10-25 | Generating device for high voltage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5662069A JPS5662069A (en) | 1981-05-27 |
| JPS6118419B2 true JPS6118419B2 (en) | 1986-05-12 |
Family
ID=15210469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13794979A Granted JPS5662069A (en) | 1979-10-25 | 1979-10-25 | Generating device for high voltage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5662069A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6077679A (en) * | 1983-09-30 | 1985-05-02 | Toshiba Corp | Multi-voltage rectifier circuit |
| JPS60131074A (en) * | 1983-12-16 | 1985-07-12 | Toshiba Corp | Multiple voltage rectifier circuit |
| JPS61208740A (en) * | 1985-03-12 | 1986-09-17 | Jeol Ltd | Focused ion beam device |
| JPS61208739A (en) * | 1985-03-12 | 1986-09-17 | Jeol Ltd | Focused ion beam device |
-
1979
- 1979-10-25 JP JP13794979A patent/JPS5662069A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5662069A (en) | 1981-05-27 |
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