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JPS6118729B2 - - Google Patents
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JPS6118729B2 - - Google Patents

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Publication number
JPS6118729B2
JPS6118729B2 JP53113244A JP11324478A JPS6118729B2 JP S6118729 B2 JPS6118729 B2 JP S6118729B2 JP 53113244 A JP53113244 A JP 53113244A JP 11324478 A JP11324478 A JP 11324478A JP S6118729 B2 JPS6118729 B2 JP S6118729B2
Authority
JP
Japan
Prior art keywords
scanning
light
incident
rotating mirror
reflective surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53113244A
Other languages
Japanese (ja)
Other versions
JPS5540457A (en
Inventor
Masahito Nakajima
Katsumi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11324478A priority Critical patent/JPS5540457A/en
Publication of JPS5540457A publication Critical patent/JPS5540457A/en
Publication of JPS6118729B2 publication Critical patent/JPS6118729B2/ja
Granted legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)

Description

【発明の詳細な説明】 本発明は、多面回転鏡を使用した光ビーム走査
装置に関し、その光利用効率の改善と走査周波数
の増大を図るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a light beam scanning device using a polygonal rotating mirror, and aims to improve its light utilization efficiency and increase its scanning frequency.

レーザ光を利用した情報の表示・記録や再生、
読取り装置として、例えばレーザプリンタ、レー
ザフアクシミリ、レーザデイスプレイ、バーコー
ドや文字読取り装置等がある。これらの装置にお
いてレーザ光を走査するために、回転の安定度や
角度精度、平面度にすぐれた多面体の回転鏡が広
く用いられている。
Displaying, recording, and reproducing information using laser light;
Examples of reading devices include laser printers, laser facsimiles, laser displays, barcode and character reading devices, and the like. In order to scan the laser beam in these devices, polyhedral rotating mirrors with excellent rotational stability, angular accuracy, and flatness are widely used.

第1図は、通常の多面回転鏡による光ビーム走
査方式を示す図である。1が回転多面鏡であり、
その反射面1aにレーザ光2が入射すると、該反
射面1aで反射され、投影レンズ3で走査面4上
に収束される。そして、回転鏡1が矢印方向に回
転すると、反射面1aの入射光2と成す角度が連
続的に変化するために、反射光21は、走査面4
上を矢印方向に移動し、走査面4を走査する。と
ころが多角形の回転鏡で走査するため、回転鏡が
例えば一点鎖線で示す位置にある場合は、入射光
2は、2つの面1a,1bにまたがつて照射し、
その場合反射面1aによつて反射された光ビーム
の形状は半円形状となつて光量も減り、走査面4
上でのスポツト径も異常な形状となるため情報の
読み書き用走査光としては、不充分である。この
角度から回転鏡がさらに回転して、実線で示すよ
うに入射光2のすべてが同一反射面1aに入射す
るようになつて初めて、情報の読み書きに適する
完全なビームスポツトが得られる。回転鏡1がさ
らに回転して、反射面1aと1c間の角が入射光
2の位置に来たときも、走査光21のスボツトは
不完全な形となる。そこで、このような光スポツ
トが不完全な走査光は遮断し、入射光のビーム径
の全体が同じ反射された完全な走査光のみが、走
査面4に達するように、スリツト5のあいたビー
ム選択板6を用い、走査方向の両端部の走査光を
カツトしている。この結果、光の利用効率が非常
に悪くなる。
FIG. 1 is a diagram showing a light beam scanning method using a normal polygonal rotating mirror. 1 is a rotating polygon mirror,
When the laser beam 2 is incident on the reflective surface 1a, it is reflected by the reflective surface 1a and is focused onto the scanning surface 4 by the projection lens 3. When the rotary mirror 1 rotates in the direction of the arrow, the angle between the reflective surface 1a and the incident light 2 changes continuously.
The scanning plane 4 is scanned by moving upward in the direction of the arrow. However, since scanning is performed using a polygonal rotating mirror, when the rotating mirror is located at the position shown by the dashed line, for example, the incident light 2 is irradiated across the two surfaces 1a and 1b,
In this case, the shape of the light beam reflected by the reflecting surface 1a becomes a semicircular shape, and the amount of light decreases.
The spot diameter at the top also has an abnormal shape, making it insufficient as a scanning light for reading and writing information. A complete beam spot suitable for reading and writing information is obtained only when the rotating mirror is further rotated from this angle so that all of the incident light 2 is incident on the same reflecting surface 1a, as shown by the solid line. Even when the rotating mirror 1 rotates further and the angle between the reflecting surfaces 1a and 1c comes to the position of the incident light 2, the spot of the scanning light 21 becomes incomplete. Therefore, a beam with a slit 5 is selected so that such a scanning light with an incomplete light spot is blocked and only the complete scanning light with the same entire beam diameter of the incident light reaches the scanning surface 4. A plate 6 is used to cut off the scanning light at both ends in the scanning direction. As a result, the light utilization efficiency becomes extremely poor.

また、情報の読み書き速度即ち光走査周波数を
増すために、回転鏡を高精度の空気軸受け等で支
持して、駆動モータを高速回転させたり、回転鏡
の面数を増やすことが行われている。しかしなが
ら、回転数を上げることは、駆動モータの回転軸
の精度や性能等から限界があり、ミラー面数を増
やすことは、前記の光利用効率の低下につなが
り、また回転ミラー用プリズムの製作上の問題も
現われてくる。
In addition, in order to increase the speed of reading and writing information, that is, the optical scanning frequency, the rotating mirror is supported with high-precision air bearings, etc. to rotate the drive motor at high speed, and the number of surfaces of the rotating mirror is increased. . However, increasing the number of rotations has a limit due to the precision and performance of the rotation axis of the drive motor, and increasing the number of mirror surfaces leads to a decrease in the above-mentioned light utilization efficiency. The problem also appears.

そこで、本発明はこれらの問題を一挙に解決す
ることを目的とするものであり、この目的を達成
するために本発明は、多面回転鏡の反射面に、複
数の光ビームを、走査方向と同じ面内において、
異なつた角度で入射させる手段を設け、 走査面の手前位置には、各光ビームが多面回転
鏡の各反射面の中央部で反射されているときの走
査光のみを透過可能とするスリツト手段を設け、 該スリツト手段の走査方向の長さをA、該スリ
ツト手段上における隣接光スポツトの間隔をbと
すると、A≦bとなるように、スリツト手段の長
さAを設定すること、を特徴とする構成を採つて
いる。
Therefore, the purpose of the present invention is to solve these problems all at once, and to achieve this purpose, the present invention provides a plurality of light beams on the reflective surface of a polygonal rotating mirror in the scanning direction. In the same plane,
Means for making the light incident at different angles is provided, and a slit means is provided at a position in front of the scanning surface to allow only the scanning light to pass through when each light beam is reflected at the center of each reflecting surface of the polygonal rotating mirror. The length A of the slit means is set so that A≦b, where A is the length of the slit means in the scanning direction, and b is the interval between adjacent light spots on the slit means. The structure is as follows.

次に本発明の詳細を図示実施例に基づいて説明
する。第2図は本発明の基本構成を示す図であ
り、多面回転鏡1が結像レンズ3等は、従来と変
わらない。本発明は、例えばα,β,γで示すよ
うに複数の入射光を回転鏡1に入射させるが、各
入射光α,β,γは夫々走査光の走査方向に面内
において、回転鏡1に異なつた角度で入射するよ
うに配置されている。即ち、複数の入射光α,
β,γ相互の成す角度を、走査方向の面内におい
て、例えば、+θ.−θのようにずらすと共に、途
中で一旦交差させている。
Next, details of the present invention will be explained based on illustrated embodiments. FIG. 2 is a diagram showing the basic configuration of the present invention, and the polygonal rotating mirror 1, the imaging lens 3, etc. are the same as in the prior art. In the present invention, a plurality of incident lights are made incident on the rotating mirror 1 as indicated by α, β, γ, and each of the incident lights α, β, γ is in-plane in the scanning direction of the scanning light, and the rotating mirror 1 is are arranged so that they are incident at different angles. That is, a plurality of incident lights α,
For example, if the angle between β and γ is +θ in the plane of the scanning direction. In addition to being shifted as shown by -θ, they are also crossed once in the middle.

この構成において、回転鏡1が矢印のように反
時計方向に回転すると、一つの反射面1aについ
て考えれば、まず先に入射光γ、次にβ,αの順
に、反射面1aに照射する。即ち、反射面1aが
鎖線で示す位置に1a′のように位置している場合
は、該反射面1a′の領域に入つているのは、入射
光γだけであり、その位置からある角度回転して
初めて入射光βが反射面1a′に入射し、更に回転
し実線で示す1aの位置に来て初めて、入射光α
が照射する。そしてこのときは、最初に入射した
光ビームγは、反射面1aから外れて次の反射面
1cに入射する直前にある。このように、入射光
は回転鏡の一つの反射面にγ・β・αの順に入射
し、同じ順序でその反射面から外れて次の反射面
の領域に入る。そしてこの場合も、ビーム選択板
6′を用いて、図の入射光γ・αのように、反射
面の端部に入射した光による走査光γ′・α′は遮
断し、真中の入射光βのように反射面の中央付近
の入射した光のみを走査面4に到達させ、走査に
使用する。
In this configuration, when the rotary mirror 1 rotates counterclockwise as indicated by the arrow, considering one reflective surface 1a, the incident light γ is first applied to the reflective surface 1a, then β and α are irradiated to the reflective surface 1a in this order. That is, when the reflective surface 1a is located at the position indicated by the chain line as 1a', only the incident light γ enters the area of the reflective surface 1a', and it is rotated by a certain angle from that position. The incident light β enters the reflecting surface 1a' for the first time, and it is not until it rotates further and reaches the position 1a shown by the solid line that the incident light α
irradiates. At this time, the first incident light beam γ is just before leaving the reflecting surface 1a and entering the next reflecting surface 1c. In this way, the incident light enters one reflective surface of the rotating mirror in the order of γ, β, and α, leaves the reflective surface in the same order, and enters the area of the next reflective surface. In this case as well, the beam selection plate 6' is used to block the scanning lights γ' and α' caused by the light incident on the ends of the reflective surface, as shown in the incident lights γ and α in the figure, and to block the scanning lights γ' and Only the light incident near the center of the reflecting surface, as indicated by β, reaches the scanning surface 4 and is used for scanning.

このようにして、各入射光α・β・γの反射面
で反射された反射光即ち走査光α′・β′・γ′
の、走査光として適した走査方向の中央部付近の
光のみを選択して使用する。そして、各走査光
α′・β′・γ′がスリツト5を通過して走査面4
を走査する間隔を、第3図のように設定すること
により、光を100%有効に利用できる。即ち、反
射鏡の反射面数をnとすると、1つの反射面の回
転角(2π/n)の間に、常時α′・β′・γ′の
いずれかの光が走査面を走査するように設定す
る。入射光の数mが図示例のように3本の場合で
あれば、回転鏡の回転角(2π/n)が3等分さ
れるように、スリツト5を選定する。
In this way, the reflected light, that is, the scanning light α′, β′, γ′ reflected on the reflecting surface of each incident light α, β, γ
, only the light near the center in the scanning direction that is suitable as the scanning light is selected and used. Each of the scanning lights α', β', and γ' passes through the slit 5 and passes through the scanning surface 4.
By setting the scanning interval as shown in Figure 3, the light can be used 100% effectively. In other words, if the number of reflective surfaces of a reflective mirror is n, then during the rotation angle (2π/n) of one reflective surface, one of the light beams α', β', and γ' always scans the scanning surface. Set to . If the number m of incident lights is three as in the illustrated example, the slits 5 are selected so that the rotation angle (2π/n) of the rotating mirror is divided into three equal parts.

こうして、入射光が3本の場合は、γ′・β′・
α′・γ′・β′・α′というように、3本の走査光
で順次走査することにより、1つの面の回転角
(2π/n)内において常にいずれかの光で走査
することができ、光の利用率を100%近くまで上
げることは容易である。また、回転角内におい
て、入射光の本数(m)と同じ数の走査光を得る
ことができるで、走査周波数はm倍になり、従来
の回転機構や反射面数を改善する努力に比べる
と、走査周波数は格段に改善される。
In this way, when there are three incident lights, γ', β',
By sequentially scanning with three scanning beams such as α', γ', β', and α', it is possible to always scan with one of the beams within the rotation angle (2π/n) of one surface. It is easy to increase the light utilization rate to nearly 100%. In addition, within the rotation angle, it is possible to obtain the same number of scanning lights as the number of incident lights (m), and the scanning frequency is m times higher than the conventional rotation mechanism and efforts to improve the number of reflective surfaces. , the scanning frequency is significantly improved.

次に以上の関係を数式的に検討する。結像レン
ズ3の焦点距離をf、回転鏡1の回転角をとす
ると、1本の走査光による走査面上での走査距離
Lは次のようになる。
Next, let us consider the above relationship mathematically. When the focal length of the imaging lens 3 is f and the rotation angle of the rotary mirror 1 is the rotation angle, the scanning distance L on the scanning plane by one scanning light is as follows.

L=f・ そして本発明により、複数の入射光夫々の入射
角度を走査方向へθだけずらした場合に、走査面
上における各光スポツトの間隔bは、 b=f・θ となる。したがつて、走査面上で同時に2以上の
ビームスポツトができないようにするには、第4
図に示すスリツト5の長さAが、 A≦b になるように、スリツトの大きさを設計すれば
よい。これにより光利用率が100%ないしは100%
近くまで改善される。なお、d……は走査ビーム
スポツトである。
L=f· According to the present invention, when the incident angles of each of the plurality of incident lights are shifted by θ in the scanning direction, the interval b between each light spot on the scanning plane becomes b=f·θ. Therefore, in order to prevent two or more beam spots from forming simultaneously on the scanning plane, the fourth
The size of the slit may be designed so that the length A of the slit 5 shown in the figure satisfies A≦b. This increases the light utilization rate to 100% or 100%.
It will be improved soon. Note that d... is a scanning beam spot.

次に各入射光α・β・γの回転鏡への入射角θ
は、 となる。即ち、第3図のように、複数の走査光
で一定の角度間隔をおいて連続的に走査するに
は、各入射光相互の角度をπ/nmずつずらせば
よい。
Next, the angle of incidence θ of each incident light α, β, and γ on the rotating mirror
teeth, becomes. That is, as shown in FIG. 3, in order to scan continuously with a plurality of scanning beams at constant angular intervals, the angles between the incident beams may be shifted by π/nm.

第2図に示す反射面上における各入射光スポツ
トのずれ量aは、回転鏡の半径をrとすると、次
の式で現わされる。
The amount of deviation a of each incident light spot on the reflecting surface shown in FIG. 2 is expressed by the following equation, where r is the radius of the rotating mirror.

a≒2πr/nm 以上のように光源系や光ビーム偏向系、走査光
選別手段を最適値に設計することで、最適な光利
用率、走査周波数が得られる。
a≈2πr/nm By designing the light source system, light beam deflection system, and scanning light selection means to optimal values as described above, the optimal light utilization rate and scanning frequency can be obtained.

走査ビーム径を細くして高分解能の走査を行う
には、それに応じて結像レンズへの入射光のビー
ム径が大きいことが必要であり、そのために入射
光の光路にエキスパンダレンズを置いてビーム径
を拡大することが行われている。ところが入射ビ
ーム径が拡大されると、回転鏡の反射面に対して
入射ビーム径が大きくなり、それだけ有効走査範
囲は短かくなり、光利用率がますます低下する。
回転鏡を大径にして、光利用率の低下をある程度
防止できるが、製作上あるいは駆動上の困難が発
生し、大きな効果は期待できない。本発明によれ
ば、入射ビームの径が太くなつても、それに応じ
て入射ビーム数を増やしていくだけで、常に光利
用率を100%近くまで確保できるので、高解像
度・高速走査を行いたい場合に、特に顕著な効果
を発揮できる。
In order to perform high-resolution scanning by reducing the scanning beam diameter, the beam diameter of the incident light to the imaging lens must be correspondingly large, and for this purpose an expander lens is placed in the optical path of the incident light. Efforts are being made to expand the beam diameter. However, when the diameter of the incident beam is expanded, the diameter of the incident beam becomes larger relative to the reflecting surface of the rotating mirror, and the effective scanning range becomes correspondingly shorter, further reducing the light utilization efficiency.
Although it is possible to prevent the light utilization efficiency from decreasing to some extent by increasing the diameter of the rotating mirror, it is difficult to manufacture or drive the mirror, and no great effect can be expected. According to the present invention, even if the diameter of the incident beam becomes thicker, the light utilization rate can always be maintained at nearly 100% by simply increasing the number of incident beams accordingly, so when high-resolution and high-speed scanning is desired. It can have a particularly remarkable effect.

結像レンズ3としては通常、走査光が結像レン
ズに入射する角度のいかんに拘わらず、常に一定
速度で走査面を移動できるようにf−θ特性を有
するf−θレンズが使用される。従つて本発明に
よつて、α・β・γの各々のビーム入射角度が異
なつても、いずれの走査でも一定の走査速度を得
る事ができる。
As the imaging lens 3, an f-theta lens having an f-theta characteristic is usually used so that the scanning light can always move on the scanning plane at a constant speed regardless of the angle at which the scanning light is incident on the imaging lens. Therefore, according to the present invention, even if the incident angles of the α, β, and γ beams are different, a constant scanning speed can be obtained in any scanning.

走査光の利用範囲を制御する手段として、図示
例ではスリツトを例示したが、これらに限らず、
例えば光路に光シヤツタを置いてそれを制御した
り、あるいは光変調器を利用する等、すでに知ら
れている各種の光制御手段を採用できる。
In the illustrated example, a slit is used as a means for controlling the range of use of the scanning light, but the method is not limited to this.
For example, various known light control means can be employed, such as placing an optical shutter in the optical path and controlling it, or using an optical modulator.

入射ビームを複数本得るには、第5図のように
レーザ光源を7,7′……のように増設してもよ
く、あるいは第6図のように1つのレーザ光源7
のビームを複数に分割してもよい。第6図の場
合、ハーフミラー8や反射鏡9で、1本のビーム
を分割すると共に回転鏡への入射角θを得ている
が、プリズムを使用して同様な操作をしてもよ
い。回転鏡への入射光は平行ビームであるから、
このように各入射光の光路長が異なつても一向に
差し支えない。なお10は、入射光のビーム径を
大きくするためのエキスパンダレンズ、11は回
転鏡駆動モータである。
To obtain multiple incident beams, the laser light sources 7, 7', etc. may be added as shown in Fig. 5, or one laser light source 7 may be added as shown in Fig. 6.
The beam may be divided into multiple beams. In the case of FIG. 6, the half mirror 8 and the reflecting mirror 9 are used to split one beam and obtain the incident angle θ to the rotating mirror, but a similar operation may be performed using a prism. Since the incident light on the rotating mirror is a parallel beam,
There is no problem even if the optical path lengths of the respective incident lights are different in this way. Note that 10 is an expander lens for increasing the beam diameter of incident light, and 11 is a rotating mirror drive motor.

以上のように本発明によれば、回転鏡への入射
光を複数にすると共に、夫々の回転鏡への入射角
度を走査方向の面内において異にするでけで、光
の利用効率を100%近くまで向上でき、走査周波
数も入射光の数に比例して整数倍で高速化でき
る。しかも構成や制御が特別に複雑化するわけで
もないので、各種のデータの読み取り・書き込み
あるいは記録に広く利用でき、汎用性にもすぐれ
ている。
As described above, according to the present invention, a plurality of lights are incident on the rotating mirror, and the angle of incidence on each rotating mirror is made different within the plane of the scanning direction, thereby increasing the light utilization efficiency by 100%. %, and the scanning frequency can be increased by an integral multiple in proportion to the number of incident lights. Moreover, since the structure and control are not particularly complicated, it can be widely used for reading, writing, or recording various types of data, and has excellent versatility.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のレーザビーム走査装置を示す
図、第2図は本発明によるレーザビーム走査装置
の基本構成を示す側面図、第3図は複数走査ビー
ムによる走査間隔を示すタイムチヤート、第4図
は走査ビーム選択スリツトの平面図、第5図・第
6図は複数の入射ビームを得る方法を例示する図
である。 図において、1は回転鏡、3は結像レンズ、4
は走査面、5はスリツト、α・β・γは入射光
(レーザビーム)、α′・β′・γ′は走査光であ
る。
FIG. 1 is a diagram showing a conventional laser beam scanning device, FIG. 2 is a side view showing the basic configuration of the laser beam scanning device according to the present invention, FIG. 3 is a time chart showing scanning intervals by multiple scanning beams, and FIG. This figure is a plan view of the scanning beam selection slit, and FIGS. 5 and 6 are diagrams illustrating a method for obtaining a plurality of incident beams. In the figure, 1 is a rotating mirror, 3 is an imaging lens, and 4 is a rotating mirror.
is a scanning surface, 5 is a slit, α, β, and γ are incident lights (laser beams), and α', β', and γ' are scanning lights.

Claims (1)

【特許請求の範囲】 1 多面回転鏡の反射面に、複数の光ビームを、
走査方向と同じ面内において、異なつた角度で入
射させる手段を設け、 走査面の手前位置には、各光ビームが多面回転
鏡の各反射面の中央部で反射されているときの走
査光のみを透過可能とするスリツト手段を設け、 該スリツト手段の走査方向の長さをA、該スリ
ツト手段上における隣接光スポツトの間隔をbと
すると、A≦bとなるように、スリツト手段の長
さAを設定すること、を特徴とする光ビーム走査
装置。
[Claims] 1. A plurality of light beams are directed onto the reflective surface of a multifaceted rotating mirror,
A means is provided to make the light enter at different angles in the same plane as the scanning direction, and only the scanning light when each light beam is reflected at the center of each reflective surface of the polygonal rotating mirror is placed in front of the scanning plane. Provided is a slit means that allows light to pass through, and if the length of the slit means in the scanning direction is A, and the interval between adjacent light spots on the slit means is b, then the length of the slit means is set so that A≦b. A light beam scanning device characterized in that A is set.
JP11324478A 1978-09-14 1978-09-14 Light beam scanner Granted JPS5540457A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11324478A JPS5540457A (en) 1978-09-14 1978-09-14 Light beam scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11324478A JPS5540457A (en) 1978-09-14 1978-09-14 Light beam scanner

Publications (2)

Publication Number Publication Date
JPS5540457A JPS5540457A (en) 1980-03-21
JPS6118729B2 true JPS6118729B2 (en) 1986-05-14

Family

ID=14607212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11324478A Granted JPS5540457A (en) 1978-09-14 1978-09-14 Light beam scanner

Country Status (1)

Country Link
JP (1) JPS5540457A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127016A (en) * 1983-01-12 1984-07-21 Konishiroku Photo Ind Co Ltd Picture information reader

Also Published As

Publication number Publication date
JPS5540457A (en) 1980-03-21

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