JPS6119093B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the structure of a superconducting magnet device that generates a highly uniform or highly accurate magnetic field distribution.

Conventionally, the structures of superconducting magnet devices used in electron lenses, electron beam transfer devices, etc. that create a predetermined magnetic field distribution through the interaction of magnetic fields generated by two or more superconducting magnets are shown in Figures 1 and 2. The situation was as shown in the figure below. That is, two superconducting magnets 1,
2 are housed in separate cold containers 4 and 5 containing liquid helium 3, and a passage 6 is provided to connect the respective cold containers 4 and 5.
A refrigerant 3 flows through this passage 6, and an electric wiring 7 connecting the superconducting magnets 1 and 2 is provided. On the other hand, the cold storage containers 4, 5 are composed of outer tanks 8, 9 and inner tanks 10, 11 containing the refrigerant 3, and radiation shield plates 12, 13 are provided between the inner tanks 10, 11 and the outer tanks 8, 9. The shield plates 12 and 13 are provided with shield tubes 14 and 15 through which a refrigerant flows to enhance the shielding effect. The electromagnetic force acting on the superconducting magnet 1 is applied to the support rods 16, 17, 18, and the superconducting magnet 2
The electromagnetic force acting on the support rods 19, 20, and 21 is supported by support rods 19, 20, and 21, respectively. Furthermore, a support device 22 is attached to hold the cold containers 1 and 2. FIG. 2 shows a perspective view of the superconducting magnet device described above.

In the superconducting magnet device configured as described above, the relative positions of the superconducting magnets 1 and 2 and the cold containers 4 and 5 are fixed. Therefore, when generating a highly uniform or highly accurate magnetic field distribution, that is, when operating the cold storage containers 4, 5 by cooling them from room temperature to the refrigerant temperature, the electromagnets 1, 2 and the support rods 16, 1
Even if the relative positions of electromagnets 1 and 2 deviate from the set positions due to heat shrinkage of 7, 18, 19, 20, and 21, and the electromagnetic force between electromagnets 1 and 2, the relative positions cannot be adjusted, resulting in high uniformity. , it was not possible to generate a highly accurate magnetic field.

An object of the present invention was to provide a superconducting magnet device capable of generating highly uniform or highly accurate magnetic field distribution by having a structure in which the relative positions between superconducting magnets are movable. It is about providing.

The present invention accommodates a plurality of superconducting magnets in a plurality of cold storage containers so that their positions can be changed using a support device, and allows the refrigerant in the plurality of cold storage containers to flow and the wiring between the superconducting magnets to be connected to each other. A superconducting magnet device is constructed by providing a storage passageway between the plurality of cold storage containers, and the relative position between the superconducting magnets can be adjusted.

Hereinafter, typical embodiments of the present invention will be described with reference to the drawings.

FIG. 3 shows a schematic cross section of a superconducting device according to the present invention, and the same parts as in FIG. 1 are denoted by the same reference numerals and have the same structure. The passage 6 connecting the cold containers 4 and 5 has the same structure as the cold containers 4 and 5, and has a double insulation structure, and includes an outer tank 30, an inner tank 31, and a radiation shield plate 32. A shield tube 33 is provided to flow a refrigerant such as liquid helium or liquid nitrogen to enhance the shielding effect. The cold containers 4 and 5 are fixed in position and supported by a holding device 22.

Next, the support device 4 that supports the superconducting magnets 1 and 2
1, 42...46, the support device 44, 4
Support rods 5 and 46 fix the superconducting magnet 2, and support devices 41, 42, and 43 allow the position of the superconducting magnet 1 to be movable within the cold storage container 4. The support devices 41, 42, 43 include support rods 47, 48, 49 that support the superconducting magnet 1, support rods 47, 48,
Bellows members 50, 51, 52 provided in the inner tank 10 so that the bellows 49 can penetrate through the inner tank 10 and the outer tank 8, and bellows members 53, 54, 55 provided in the outer tank 8. and bellows member 5
Covers 56, 57, 58 that cover 3, 54, 55
As moving means for moving the support rods 47, 48, 49, screws 59, 60, 61 and nuts 62, provided on the covers 56, 57, 58 are used.
63 and 64, respectively.

Further, the superconducting magnets 1 and 2 housed in the cold storage containers 4 and 5, respectively, are connected by a wire 7 having at least a portion formed in the shape of an expandable and contractable spring.

Next, the operation of the superconducting magnet device will be explained.
In order to operate this device, the refrigerant 3 is supplied to the cold containers 4 and 5, and then the superconducting magnets 1 and 2 are excited.
The relative positions of the support rods 44, 45, 46, 47, 48,
Misalignment occurs due to heat shrinkage such as 49. Therefore,
Nuts 62 of support devices 41, 42, 43 supporting superconducting magnet 1 housed in cold container 4,
By sliding bolts 63 and 64, bolts 59 and 6 are removed.
0,61 moves. The bellows members 53, 54, 55 provided on the outer tank 8 of the cold container 4 are connected to the support rods 47, 54 in conjunction with the bolts 59, 60, 61.
Move 8,49. The support rods 47, 48, 49 are bellows members 50, 51, 5 provided in the inner tank 10.
The superconducting magnet 1 is moved through the magnet 2. Thereby, the relative position of superconducting magnet 1 to superconducting magnet 2 can be adjusted.

Note that the support device 4 that supports the superconducting magnet 1 described above
1, 42, 43 may be constructed using motors or the like instead of screws 59, 60, 61 and nuts 62, 63, 64.

Further, although only the superconducting magnet 1 is made movable, the supporting devices 44, 45, and 46 may be configured so that the superconducting magnet 2 is also movable.

As is clear from the above explanation, by using the superconducting magnet device according to the present invention, the relative positions between the superconducting magnets can be adjusted, so that the relative positional deviation between the superconducting magnets due to thermal contraction and electromagnetic force can be corrected. It has excellent effects such as being able to generate a highly uniform and highly accurate magnetic field distribution.

[Brief explanation of the drawing]

FIG. 1 is a sectional view schematically showing a conventional superconducting magnet device, FIG. 2 is a perspective view thereof, and FIG. 3 is a sectional view schematically showing a superconducting magnet device according to the present invention. 1, 2...Superconducting magnet, 3...Refrigerant, 4, 5...
...Cold container, 6...Aisle, 7...Wiring, 41,4
2, 43, 44, 45, 46...support device, 4
7, 48, 49...Support rod, 50, 51, 52,
53, 54, 55... bellows member, 59, 6
0,61...Natsuto (transportation means), 62,63,
64...Bolt (movement means).

Claims (1)

[Scope of Claims] 1. A plurality of superconducting magnets, a plurality of cold containers containing a refrigerant and housing the superconducting magnets, each of the superconducting magnets being supported in the cold container, and at least one of which is variable. a plurality of support devices for holding the cold storage container, a holding device provided on the cold storage container, and a passageway through which a refrigerant flows between the plurality of cold storage containers and in which wiring between the superconducting magnets is housed. A superconducting magnet device comprising: 2. At least one variable support device provided on a superconducting magnet includes a support rod that supports the superconducting magnet, a moving means for moving this support rod, and a bellows member that is provided on a cold container and interlocks with the support rod. A superconducting magnet device according to claim 1, characterized in that the superconducting magnet device comprises: