JPS6119911B2 - - Google Patents
Info
- Publication number
- JPS6119911B2 JPS6119911B2 JP8983383A JP8983383A JPS6119911B2 JP S6119911 B2 JPS6119911 B2 JP S6119911B2 JP 8983383 A JP8983383 A JP 8983383A JP 8983383 A JP8983383 A JP 8983383A JP S6119911 B2 JPS6119911 B2 JP S6119911B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- exhaust gas
- resistant
- processing chamber
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 32
- 238000010438 heat treatment Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 21
- 238000002485 combustion reaction Methods 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 10
- 239000011261 inert gas Substances 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000011230 binding agent Substances 0.000 description 11
- 238000010304 firing Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 238000010926 purge Methods 0.000 description 6
- 229920000049 Carbon (fiber) Polymers 0.000 description 3
- 239000004917 carbon fiber Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 235000011194 food seasoning agent Nutrition 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Details (AREA)
- Inorganic Fibers (AREA)
Description
【発明の詳細な説明】
本発明は焼結金属、セラミツク、黒鉛、フエル
ト等可燃性物質を含有する処理材の熱処理炉に関
するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a heat treatment furnace for processing materials containing combustible materials such as sintered metals, ceramics, graphite, and felt.
たとえば、フエルトを焼成して炭素繊維とする
には、高純度の炉内雰囲気中でフエルトを焼成す
る必要がある。 For example, in order to fire felt into carbon fiber, it is necessary to fire the felt in a high-purity furnace atmosphere.
したがつて、従来、フエルトを焼成するのに、
大気圧付近に保持される雰囲気下で処理すること
がなされているが、処理材の装入時に、炉内に多
量のO2、H2Oが持込まれるため、焼成雰囲気条
件である炉内雰囲気中のO2、H2O濃度を数PPM
とするには、大量のパージガスが必要となるとと
もに、パージ時間が長くなり操業効率が悪いとい
う欠点を有する。また、前記雰囲気焼成炉におい
ては、操業停止時にも炉内雰囲気の確保のためパ
ージガスを炉内に供給して次期操業開始に備えて
おく必要があるという欠点を有する。 Therefore, conventionally, when firing felt,
Processing is carried out in an atmosphere maintained at near atmospheric pressure, but since a large amount of O 2 and H 2 O are brought into the furnace when processing materials are charged, the atmosphere inside the furnace, which is the firing atmosphere condition, is O 2 and H 2 O concentration in several PPM
However, this method requires a large amount of purge gas, and has the drawback that the purge time is long and operational efficiency is poor. Further, the above-mentioned atmosphere firing furnace has a drawback that even when the operation is stopped, it is necessary to supply purge gas into the furnace to ensure the atmosphere in the furnace in preparation for the next start of operation.
そのため、真空炉で処理する方法もあるが、こ
の場合、真空排気装置の保護のため、加熱初期に
発生する気化バインダを真空排気系に設けたコー
ルドトラツプで除去することが行なわれている
が、この方法では、排ガス中の気化バインダがタ
ール状で回収されるため、このタール状のバイン
ダの抽出作業、および抽出後の廃棄物処理に多大
な時間が掛るという欠点を有していた。 Therefore, there is a method of processing in a vacuum furnace, but in this case, in order to protect the vacuum evacuation equipment, the vaporized binder generated during the initial heating stage is removed with a cold trap installed in the evacuation system. However, this method has the disadvantage that the vaporized binder in the exhaust gas is recovered in the form of tar, and therefore it takes a lot of time to extract the tar-like binder and to dispose of the waste after extraction.
なおこの排ガス中に含まれる気化バインダの処
理は、雰囲気焼成処理では、排ガスを水に通すこ
とにより除去するものであるが、前記と同様な欠
点を有していた。 The vaporized binder contained in the exhaust gas is removed by passing the exhaust gas through water in the atmosphere firing process, but it has the same drawbacks as described above.
本発明は前記従来の欠点を除去するためになさ
れたもので、熱処理炉の処理室を耐真空構造とし
て、この処理室に耐真空開閉弁を介して不活性ガ
ス供給管を連通するとともに、前記処理室の排気
ダクトに、処理室側から順に、排ガス燃焼用空気
供給管を有する外熱式マツフル型燃焼筒、排ガス
冷却装置および耐真空開閉弁を配置し、かつ、前
記排ガス冷却装置と耐真空開閉弁との間に真空排
気装置を接続した構造とし、耐真空開閉弁の開閉
と真空排気装置の駆動とにより処理室を処理材あ
るいは処理条件に応じて、所定の炉内圧力を保持
しするとともに、初期加熱時に発生する可燃性物
質を排気ダクト中で空気の添加により焼却するこ
とにより後処理を不要とする一方、可燃性物質の
焼却により高温となつた排ガスを冷却することに
より真空排気装置の保護を図り、真空処理から雰
囲気処理まで一基の熱処理炉により行なうように
したものである。 The present invention has been made in order to eliminate the above-mentioned conventional drawbacks, and the processing chamber of a heat treatment furnace has a vacuum-resistant structure, and an inert gas supply pipe is connected to the processing chamber via a vacuum-resistant shut-off valve. In the exhaust duct of the processing chamber, in order from the processing chamber side, an external heating type combustion cylinder having an air supply pipe for exhaust gas combustion, an exhaust gas cooling device, and a vacuum-resistant shut-off valve are arranged, and the exhaust gas cooling device and the vacuum-resistant It has a structure in which a vacuum evacuation device is connected between the on-off valve and the processing chamber is maintained at a predetermined furnace pressure depending on the processing material or processing conditions by opening and closing the vacuum-resistant on-off valve and driving the vacuum evacuation device. At the same time, combustible substances generated during initial heating are incinerated by adding air in the exhaust duct, eliminating the need for post-treatment, while cooling the exhaust gas, which has reached a high temperature due to the incineration of flammable substances, can improve the vacuum exhaust system. In order to protect the heat treatment, a single heat treatment furnace is used for everything from vacuum treatment to atmosphere treatment.
つぎに本発明を一実施例である図面にしたがつ
て説明する。 Next, the present invention will be explained with reference to the drawings which are one embodiment.
本発明にかかる熱処理炉１は、大略、処理室
２、排気ダクト１０、外熱式マツフル型燃焼筒１
１、排ガス冷却装置１９、真空排気装置２０およ
び耐真空開閉弁２２とからなる。 The heat treatment furnace 1 according to the present invention generally includes a treatment chamber 2, an exhaust duct 10, an external heat type combustion tube 1
1, an exhaust gas cooling device 19, a vacuum evacuation device 20, and a vacuum-resistant on-off valve 22.
そして、前記処理室２は炉壁３の内面に耐熱真
空マツフル４が設けられ耐真空構造となつてお
り、処理室３内にはヒータ５および耐真空開閉弁
７を備えた不活性ガス供給管６が設けてある。８
は処理材Ｗの装入・抽出扉、９は処理材Ｗの支持
部材である。 The processing chamber 2 has a vacuum-resistant structure with a heat-resistant vacuum matfur 4 provided on the inner surface of the furnace wall 3, and an inert gas supply pipe equipped with a heater 5 and a vacuum-resistant shut-off valve 7 is provided inside the processing chamber 3. 6 is provided. 8
9 is a loading/extracting door for the processed material W, and 9 is a support member for the processed material W.
前記排気ダクト１０は、処理室２側から順に、
外熱式マツフル型燃焼筒１１、排ガス冷却装置１
９および耐真空開閉弁２２を有している。前記外
熱式マツフル型燃焼筒１１は、内方に耐真空マツ
フル筒１２、その外周に電熱ヒータ１３、最外周
に断熱材１４を設けてあり、かつ燃焼筒１１の処
理室２側に耐真空弁１７を介して排ガス燃焼用空
気供給管１８が開口してある。また、図面におい
ては、前記燃焼筒１１内に、円筒状鋼板の周面に
螺旋状フイン１６を有する排ガス整流部材１５が
配置されている。排ガス冷却装置１９は前記排気
ダクト１０内に冷却水蛇管を配設したもので、前
記外熱式マツフル型燃焼筒１１で可燃物質を焼却
して発生した高温排ガスが真空排気装置２０に至
り、真空排気装置２０を破損するのを防止する。 The exhaust duct 10 includes, in order from the processing chamber 2 side:
External heating type combustion tube 11, exhaust gas cooling device 1
9 and a vacuum-resistant on-off valve 22. The external heating type combustion tube 11 has a vacuum-resistant combustion tube 12 on the inside, an electric heater 13 on its outer periphery, a heat insulating material 14 on the outermost periphery, and a vacuum-resistant combustion tube 12 on the processing chamber 2 side of the combustion tube 11. An exhaust gas combustion air supply pipe 18 is opened through the valve 17 . Further, in the drawing, an exhaust gas rectifying member 15 having spiral fins 16 on the circumferential surface of a cylindrical steel plate is disposed within the combustion tube 11. The exhaust gas cooling device 19 has a cooling water pipe installed in the exhaust duct 10, and the high temperature exhaust gas generated by incinerating combustible materials in the external heat type combustion tube 11 reaches the vacuum evacuation device 20, where it is evacuated. This prevents the exhaust device 20 from being damaged.
前記真空排気装置２０は前記排気ダクト１０の
排ガス冷却装置１９の下流側に設けられ、耐真空
開閉弁２１，２１を備えている。なお、２３は前
記耐真空開閉弁２１の開閉と連動して閉開する耐
真空開閉弁２２を有する排気管部で、図示しない
炉圧調整用ダンパを有する。 The evacuation device 20 is provided downstream of the exhaust gas cooling device 19 in the exhaust duct 10, and includes vacuum-resistant on-off valves 21, 21. Note that 23 is an exhaust pipe section having a vacuum-resistant on-off valve 22 that opens and closes in conjunction with the opening and closing of the vacuum-resistant on-off valve 21, and has a damper (not shown) for adjusting the furnace pressure.
本発明にかかる熱処理炉１は、前記構成からな
るため、例えば、バインダ等可燃性物質を有する
フエルトを焼成する場合、処理材Ｗを装入・抽出
扉８から処理室２に装入し、真空排気装置２０の
開閉弁２１，２１を開、排気ダクト１０の開閉弁
２２を閉として、真空排気装置２０およびヒータ
５を作動させて処理室２内を真空パージする。そ
の後、不活性ガスを処理室２内に供給して、一旦
大気圧付近まで昇圧して、処理材Ｗに含有するバ
インダが気化しない温度域まで処理材Ｗを加熱
し、処理材Ｗ中のバインダが気化する温度に達す
れば、再び処理室２内を所定減圧に保持してバイ
ンダの気化を促進させ、焼成温度域まで加熱す
る。このとき、処理室２内に発生した可燃性物質
である気化バインダは、排ガスとともに外熱式マ
ツフル型燃焼筒１１に導入され、この燃焼筒１１
部で加熱される一方、排ガス燃焼用空気供給管１
８からの空気の供給により、燃焼し焼却される。
なお、空気の給供量は、バインダの含有量あるい
は、燃焼筒１１の下流側の排ガス中のO2量によ
り、最適量に制御されるものである。そして、前
記焼却により高温となつた排ガスは、排ガス冷却
装置１９により真空排気装置２０に悪影響のない
温度まで冷却され、真空排気装置２０から排気さ
れる。このようにして、処理材Ｗを焼成温度まで
加熱しながら処理材Ｗ中のバインダが除去される
と、処理室２内を復圧して、所定時間焼成し、処
理材Ｗを炉外に取出することにより所望の炭素繊
維を得るものである。 Since the heat treatment furnace 1 according to the present invention has the above configuration, for example, when firing felt containing a flammable substance such as a binder, the treatment material W is charged into the treatment chamber 2 through the charging/extraction door 8, and the The on-off valves 21 and 21 of the exhaust device 20 are opened, the on-off valve 22 of the exhaust duct 10 is closed, and the vacuum evacuation device 20 and heater 5 are operated to purge the inside of the processing chamber 2 under vacuum. After that, an inert gas is supplied into the processing chamber 2, and the pressure is once raised to near atmospheric pressure, and the processing material W is heated to a temperature range in which the binder contained in the processing material W does not vaporize. When the temperature at which the binder vaporizes is reached, the inside of the processing chamber 2 is maintained at a predetermined reduced pressure again to promote vaporization of the binder and heated to the firing temperature range. At this time, the vaporized binder, which is a combustible substance generated in the processing chamber 2, is introduced into the external heat type combustion tube 11 together with the exhaust gas.
Air supply pipe 1 for exhaust gas combustion
By supplying air from 8, it is combusted and incinerated.
Note that the amount of air supplied is controlled to an optimum amount depending on the content of the binder or the amount of O 2 in the exhaust gas on the downstream side of the combustion tube 11. Then, the exhaust gas that has reached a high temperature due to the incineration is cooled by the exhaust gas cooling device 19 to a temperature that does not adversely affect the evacuation device 20, and is exhausted from the evacuation device 20. In this way, when the binder in the treated material W is removed while heating the treated material W to the firing temperature, the pressure inside the processing chamber 2 is restored, firing is performed for a predetermined time, and the treated material W is taken out of the furnace. By doing so, desired carbon fibers can be obtained.
なお、前記実施例では、処理材Ｗとして炭素繊
維用フエルトについて、真空パージと減圧下昇温
工程を有する焼成処理を説明したが、本発明の熱
処理炉は、フエルトの焼成に限らず、粉末金属の
焼結炉あるいは、セラミツクや黒鉛の焼成炉にも
適用することができるものであり、その熱処理条
件は全工程を減圧下あるいは大気圧下、さらには
一部減圧下等処理材の熱処理条件に応じて任意に
選択できるものである。 In the above embodiments, carbon fiber felt was used as the treatment material W, and a firing process including a vacuum purge and a temperature raising step under reduced pressure was described. It can also be applied to sintering furnaces for ceramics and graphite, and the heat treatment conditions are such that the entire process is performed under reduced pressure or atmospheric pressure, and some parts are under reduced pressure, depending on the heat treatment conditions of the treated material. It can be selected arbitrarily depending on the situation.
以上の説明で明らかなように、本発明によれ
ば、処理材中の可燃性物質は排気ダクト中に設け
た外熱式マツフル型燃焼筒で焼却するため、ター
ル状物質の除去等面倒な後処理が不要である。し
かも、真空排気装置へは排ガス冷却装置により低
温となつた排ガスが導入されるため、排気ダクト
中で可燃性物質を焼却するにもかかわらず減圧処
理時に、真空排気装置を破損することはない。 As is clear from the above explanation, according to the present invention, combustible substances in the treated material are incinerated in an external heating type combustion tube installed in the exhaust duct. No processing required. Moreover, since the exhaust gas cooled by the exhaust gas cooling device is introduced into the vacuum evacuation device, the vacuum evacuation device will not be damaged during the depressurization process even though combustible substances are incinerated in the exhaust duct.
また、処理室は耐真空構造であり、真空排気装
置を有するため、停炉時においても処理室を真空
放置できる。したがつて、停炉時のパージ用不活
性ガスは不要である。 Furthermore, since the processing chamber has a vacuum-resistant structure and is equipped with a vacuum evacuation device, the processing chamber can be left under vacuum even when the reactor is shut down. Therefore, there is no need for inert gas for purging when the reactor is shut down.
さらに、炉補修後の再開にあたつても、熱間シ
ーズニングが採用でき、それだけシーズニング時
が短縮できる。 Furthermore, when restarting the furnace after repairs, hot seasoning can be used, which can shorten the seasoning time accordingly.
なお、雰囲気焼成炉で炉内O2を20p.p.mとする
のに不活性ガスを30m3／日必要とする場合、本発
明であれば処理室を減圧して行なえるので３m3／
日と不活性ガスの使用量を大巾に減らすことがで
きるばかりか、真空排気装置、耐真空開閉弁、図
示しないダンパを適宜操作することにより、処理
材あるいは処理条件に応じて、処理室の圧力を制
御し、処理材を最適圧力下で効率的に焼結あるい
は焼成処理することができる等の利点を有する。 Note that if an atmosphere firing furnace requires 30 m 3 /day of inert gas to bring the O 2 inside the furnace to 20 p.pm, the present invention can reduce the pressure in the processing chamber, so 3 m 3 /day can be used.
Not only can the amount of inert gas used be greatly reduced, but by appropriately operating the vacuum exhaust device, vacuum-resistant on-off valve, and damper (not shown), the processing chamber can be It has advantages such as being able to control the pressure and efficiently sinter or sinter the material to be treated under optimal pressure.
第１図は本発明にかかる可燃性物質を有する処
理材の熱処理装置を示す説明用一部断面図であ
る。
２……処理室、４……耐真空マツフル、５……
ヒータ、６……不活性ガス供給管、１０……排気
ダクト、１１……外熱式マツフル型燃焼筒、１２
……耐真空マツフル筒、１３……ヒータ、１５…
…排ガス整流部材、１６……フイン、１９……排
ガス冷却装置、２０……真空排気装置、７，２
１，２３……耐真空開閉弁。
FIG. 1 is an explanatory partial cross-sectional view showing a heat treatment apparatus for processing materials containing combustible substances according to the present invention. 2...Processing chamber, 4...Vacuum-resistant Matsufuru, 5...
Heater, 6...Inert gas supply pipe, 10...Exhaust duct, 11...External heating type combustion tube, 12
...Vacuum-resistant Matsufuru tube, 13...Heater, 15...
...Exhaust gas rectification member, 16...Fin, 19...Exhaust gas cooling device, 20...Vacuum exhaust device, 7, 2
1, 23...Vacuum resistant on/off valve.
Claims (1)
て不活性ガス供給管を連通するとともに、前記処
理室と接続する排気ダクトに、処理室側から順
に、排ガス燃焼用空気供給管を有する外熱式マツ
フル型燃焼筒、排ガス冷却装置および耐真空開閉
弁を配置し、かつ、前記排ガス冷却装置と耐真空
開閉弁との間に真空排気装置を接続したことを特
徴とする可燃性物質を含有する処理材の熱処理
炉。 ２ 前記外熱式マツフル型燃焼筒が、外周に電熱
ヒータ、排ガス上流側に排ガス燃焼用空気供給管
を有するとともに、内部中央に排ガス整流部材を
有することを特徴とする前記特許請求の範囲第１
項に記載の可燃性物質を含有する処理材の熱処理
炉。 ３ 前記排ガス整流部材が、円筒状鋼板からな
り、その周面に螺旋状フインを有することを特徴
とする前記特許請求の範囲第２項に記載の可燃性
物質を含有する処理材の熱処理炉。[Claims] 1. An inert gas supply pipe is communicated with a processing chamber having a vacuum-resistant structure via a vacuum-resistant shut-off valve, and an exhaust gas combustion pipe is connected to an exhaust duct connected to the processing chamber in order from the processing chamber side. An external heating type combustion cylinder having an air supply pipe, an exhaust gas cooling device, and a vacuum-resistant on-off valve are arranged, and a vacuum exhaust device is connected between the exhaust gas cooling device and the vacuum-resistant on-off valve. A heat treatment furnace for processing materials containing flammable substances. 2. Claim 1, wherein the externally heated pine-full type combustion tube has an electric heater on the outer periphery, an exhaust gas combustion air supply pipe on the upstream side of the exhaust gas, and an exhaust gas rectifying member in the center of the interior.
A heat treatment furnace for treating materials containing combustible substances as described in 2. 3. The heat treatment furnace for treating materials containing combustible substances as set forth in claim 2, wherein the exhaust gas rectifying member is made of a cylindrical steel plate and has spiral fins on its peripheral surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8983383A JPS59215582A (en) | 1983-05-20 | 1983-05-20 | Heat treatment furnace for material to be treated containingcombustible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8983383A JPS59215582A (en) | 1983-05-20 | 1983-05-20 | Heat treatment furnace for material to be treated containingcombustible |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59215582A JPS59215582A (en) | 1984-12-05 |
| JPS6119911B2 true JPS6119911B2 (en) | 1986-05-20 |
Family
ID=13981760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8983383A Granted JPS59215582A (en) | 1983-05-20 | 1983-05-20 | Heat treatment furnace for material to be treated containingcombustible |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59215582A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6346798U (en) * | 1986-09-12 | 1988-03-30 | ||
| JP2009263175A (en) * | 2008-04-25 | 2009-11-12 | Bridgestone Corp | Firing furnace and production method of silicon carbide powder |
-
1983
- 1983-05-20 JP JP8983383A patent/JPS59215582A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59215582A (en) | 1984-12-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1325694C (en) | Method and device for high temperature heat treatment and densification of carbon fiber by chemical vapor infiltration | |
| RU2319679C2 (en) | Method and installation used for manufacture of the carbonic products from the workpieces consisting of the parent substance concerning carbon | |
| JPS6119911B2 (en) | ||
| US3633891A (en) | Method and apparatus for heating annular workpieces | |
| JPH10310774A (en) | Carbonization furnace and equipment | |
| JP4020486B2 (en) | Externally heated rotary kiln | |
| JP2000137095A (en) | Processing method of graphite used in nuclear reactor | |
| JP3937232B2 (en) | Carbonization equipment | |
| JP2004277551A (en) | Pyrolysis gas piping | |
| JP2002181994A (en) | Radioactive waste volume reduction apparatus and its operation method | |
| JPH10238728A (en) | Waste heat treatment equipment and method | |
| JPH10102065A (en) | Firing equipment | |
| JPS5943970B2 (en) | Purging method for charging/extracting bestibles in an atmospheric heat treatment furnace | |
| JP2023000833A (en) | pyrolysis method | |
| US4743197A (en) | High temperature fan plug apparatus | |
| JP4021744B2 (en) | Recycling equipment | |
| JPS6234233Y2 (en) | ||
| JP2995312B2 (en) | Atmosphere heating furnace | |
| JP2004239687A (en) | Pyrolysis furnace | |
| JP2000274947A (en) | Method for processing gas from article to be heat treated and heating furnace therefor | |
| JP3017981B1 (en) | Sintering furnace for nuclear fuel | |
| SU1578424A1 (en) | Electric furnace for roasting carbon-containing materials | |
| JPS58147700A (en) | Burning machine for low level radioactive small animal | |
| JP3872418B2 (en) | Recycling equipment | |
| JPH0648316Y2 (en) | Heat treatment furnace |