JPS6125646B2 - - Google Patents
Info
- Publication number
- JPS6125646B2 JPS6125646B2 JP4251878A JP4251878A JPS6125646B2 JP S6125646 B2 JPS6125646 B2 JP S6125646B2 JP 4251878 A JP4251878 A JP 4251878A JP 4251878 A JP4251878 A JP 4251878A JP S6125646 B2 JPS6125646 B2 JP S6125646B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- reactor
- voltage
- power factor
- series
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Description
【発明の詳細な説明】
この発明は交流電源で駆動され無声放電によつ
てオゾンを生成する装置に関し、特に放電空隙を
狭くして放電期間を非放電期間より長くした装置
の高力率化を図つたものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device that is driven by an AC power source and generates ozone through silent discharge, and particularly to a device that narrows the discharge gap and makes the discharge period longer than the non-discharge period to increase the power factor of the device. It's a diagram.
第1図は無声放電を用いた従来のオゾン発生装
置の原理的構成を示す図、第2図はその電極部分
の平面図で、1は接地電極、2は高電圧電極3に
密着し、十分に大きく構成された誘電体、4は酸
素含有気体が流される放電空隙で、1〜4で無声
放電極系5を構成する。6は交流電源で、放電間
隙4には誘電体2の存在によりアーク放電への移
行が抑制された無声放電を発生し、酸素含有気体
を効率よくオゾンに変換する。 Fig. 1 is a diagram showing the basic structure of a conventional ozone generator using silent discharge, and Fig. 2 is a plan view of the electrode part. 1 is a ground electrode, 2 is in close contact with a high voltage electrode 3, and 4 is a discharge gap through which oxygen-containing gas flows, and 1 to 4 constitute a silent discharge electrode system 5. Reference numeral 6 denotes an AC power supply, which generates silent discharge in the discharge gap 4 whose transition to arc discharge is suppressed due to the presence of the dielectric 2, and efficiently converts oxygen-containing gas into ozone.
第3図は従来のオゾン発生装置の等価回路図
で、Caは放電空隙4の静電容量、7はツエナー
ダイオードの逆直列体、Cgは誘電体2による静
電容量で、無声放電極系5の放電電圧特性は、ツ
エナーダイオードの逆直列体(以下単にダイオー
ドと略称する)7のツエナー電圧VZを、
VZ=Vs+Ve/2
但し、VS:放電空隙4の放電開始電圧
Ve:放電空隙4の放電消減電圧
に選定することにより置換できる。 Figure 3 is an equivalent circuit diagram of a conventional ozone generator, where C a is the capacitance of the discharge gap 4, 7 is the anti-series Zener diode, C g is the capacitance due to the dielectric 2, and the silent discharge electrode The discharge voltage characteristics of the system 5 are as follows: Zener voltage V Z of an anti-series Zener diode (hereinafter simply referred to as diode) 7 is expressed as follows: V Z =V s +V e /2, where V S is the start of discharge in the discharge gap 4. Voltage V e : Can be replaced by selecting the discharge extinction voltage of the discharge gap 4.
なお、この発明を適用する装置では、CgはCa
の数倍の値となるように構成し、又放電期間が非
放電期間より大となるように構成される。 In addition, in the device to which this invention is applied, C g is C a
The discharge period is configured to be several times the value of , and the discharge period is configured to be longer than the non-discharge period.
第4図は電源電圧Vと電流Iとの関係を示す波
形図で、同図aは正弦波電圧Vを、同図bは負荷
電流Iを示し、期間イはダイオード7が非導通、
即ち、非放電期間を示し、期間ロはダイオード7
が導通、即ち放電期間を示す。 FIG. 4 is a waveform diagram showing the relationship between the power supply voltage V and the current I, where a shows the sine wave voltage V, and b shows the load current I. During period A, the diode 7 is non-conducting;
That is, it indicates a non-discharge period, and period RO is the period when the diode 7
indicates conduction, ie, discharge period.
この図から明らかなように、電源電圧Vがピー
ク値に達したときダイオード7は非導通状態とな
り、印加電圧がほぼ2VZになつたときダイオード
7に逆向の電圧VZが加わり導通状態となる。従
つて負荷電流Iは、期間イは、容量CaとCgの直
列インピーダンスで定まり、期間ロは、容量Cg
のインピーダンスで定まるから第4図bのよう
に、2段階に変化する波形となる。しかし、いず
れかの場合も電圧に比し電流の位相が進んでお
り、力率が低いという欠点がある。 As is clear from this figure, when the power supply voltage V reaches its peak value, the diode 7 becomes non-conducting, and when the applied voltage reaches approximately 2V Z , a reverse voltage V Z is applied to the diode 7, making it conductive. . Therefore, the load current I is determined by the series impedance of capacitance C a and C g during period A, and by the capacitance C g during period B.
Since it is determined by the impedance of , the waveform changes in two stages as shown in FIG. 4b. However, in either case, the phase of the current is ahead of that of the voltage, and there is a drawback that the power factor is low.
第5図はこの力率の改善を図つた従来の装置の
等価回路図で、8は無声放電極系5に並列接続さ
れたインダクタンスLPのリアクトルで、負荷電
流Iは、無声放電極系5を流れる電流IDZと、リ
アクトル8を流れる電流ILの和となる。 FIG. 5 is an equivalent circuit diagram of a conventional device designed to improve the power factor. 8 is a reactor with an inductance L P connected in parallel to the silent discharge electrode system 5, and the load current I is the same as that of the silent discharge electrode system 5. It is the sum of the current I DZ flowing through the reactor 8 and the current I L flowing through the reactor 8.
第6図a〜cは第5図の回路におけるV,I,
IDZ,ILの関係を示す波形図で、負荷電流Iは
IDZ(第4図bのIに相当する)より小さくなる
ので力率が改善される。 6a to 6c show V, I, and
This is a waveform diagram showing the relationship between I DZ and I L. Since the load current I is smaller than I DZ (corresponding to I in FIG. 4b), the power factor is improved.
第7図はリアクトル8を接続しない場合の力率
が30%である無声放電極系5にリアクトル8を接
続し、そのインダクタンスLPの値を変化させた
ときの力率の変化を実測した特性図で、力率は70
%を超える程度まで改善できる。なおこの実測例
は、リアクタンス8には抵抗分があるため、第6
図の等価回路から計算により求めた値とは相違す
る。 Figure 7 shows the measured characteristics of the change in power factor when the reactor 8 is connected to the silent discharge electrode system 5, which has a power factor of 30% when the reactor 8 is not connected, and the value of the inductance L P is changed. In the figure, the power factor is 70
It can be improved to an extent exceeding %. Note that in this actual measurement example, reactance 8 has a resistance component, so the 6th
This is different from the value calculated from the equivalent circuit shown in the figure.
この発明は力率の更に大きな改善を目的として
なされたもので、並列リアクトルに代え、直列に
リアクトルを挿入するようにしたものである。 This invention was made for the purpose of further improving the power factor, and instead of parallel reactors, reactors were inserted in series.
第8図はこの発明の一実施例の等価回路図で、
9はインダクタンスLSの直列リアクトルであ
る。 FIG. 8 is an equivalent circuit diagram of an embodiment of this invention.
9 is a series reactor with an inductance L S .
無声放電極系5に直列にリアクトル9を接続す
ると、負荷への電圧がリアクトルより供給され、
電圧が補償される(電源電圧Vより高電圧が印加
される)ため、力率が大きくなる。この場合、無
声放電極系5に印加される電圧VDZおよび直列リ
アクトル9に印加される電圧VLが電源電圧Vよ
り大きくなるため、絶縁設計の面から、それらの
値を正確に把握しておく必要があるが、無声放電
極系5の等価回路は非線形抵抗であるツエナーダ
イオードを含む回路となるため、直列にリアクト
ルを挿入した場合の各部の電圧、電流を解析的に
求めることができず、従つて従来は直列リアクト
ルを用いることは試みられていなかつた。 When a reactor 9 is connected in series to the silent discharge electrode system 5, voltage to the load is supplied from the reactor,
Since the voltage is compensated (a voltage higher than the power supply voltage V is applied), the power factor increases. In this case, the voltage V DZ applied to the silent discharge electrode system 5 and the voltage V L applied to the series reactor 9 are larger than the power supply voltage V, so from the standpoint of insulation design, these values must be accurately grasped. However, since the equivalent circuit of the silent discharge electrode system 5 is a circuit that includes a Zener diode, which is a nonlinear resistance, it is not possible to analytically determine the voltage and current of each part when a reactor is inserted in series. Therefore, no attempt has been made to use a series reactor.
発明者等は直列リアクトル9による力率補償の
効果を実験的に求めた結果、インダクタンスLS
を適当な範囲に設定することにより、力率を大幅
に改善し得ることを見出し、この発明を完成した
ものである。 As a result of experimentally determining the effect of power factor compensation by the series reactor 9, the inventors found that the inductance L S
The present invention was completed based on the discovery that the power factor could be significantly improved by setting the power factor within an appropriate range.
第9図a〜cは、直列リアクトル9のインダク
タンスLSを、LS=1/(2πf)2Cg (但し、f
:電
源周波数)に選定した場合のV,VL,VDZ、お
よびIの関係を示す波形図で、無声放電極系5の
諸元は、Ca:Cg=1:6、VDZのピーク電圧を
1.5×2VZに選定し、放電空隙4を狭くして放電
期間ロを非放電期間イに比べて長くしたもので、
リアクトル補償を行なわないときの力率は30%前
後と極めて低いものである。 9a to 9c show the inductance L S of the series reactor 9 as L S =1/(2πf) 2 C g (however, f
: Power supply frequency) is a waveform diagram showing the relationship between V, V L , V DZ , and I. The specifications of the silent discharge electrode system 5 are C a :C g =1:6, V DZ peak voltage
1.5×2V Z was selected, the discharge gap 4 was narrowed, and the discharge period B was made longer than the non-discharge period A.
The power factor without reactor compensation is extremely low at around 30%.
このような無声放電極系5をもつ装置に、この
発明に係る直列リアクトルによる補償を行うと極
めて有効である。即ち、第9図cに示すように、
負荷電流Iが正弦波からずれるのは非放電期間イ
の間だけであり、かつ電源電圧Vとの位相のずれ
も解消できるからである。 It is extremely effective to perform compensation using the series reactor according to the present invention in a device having such a silent discharge electrode system 5. That is, as shown in FIG. 9c,
This is because the load current I deviates from the sine wave only during the non-discharge period A, and the phase shift with the power supply voltage V can also be eliminated.
第10図は直列リアクトル9のインダクタンス
LSの値を変えた場合の力率の変化を示す特性図
で、LSの値が前式の計算値より、若かに大きな
値のとき最大力率となるが、実用的には上記計算
値に設定して大差はなく、一方直列リアクトルの
値は小さい方が安価になるので、実用上は上記計
算値の−20〜+30%の範囲内が適当である。 Figure 10 is a characteristic diagram showing the change in power factor when the value of the inductance L S of the series reactor 9 is changed. When the value of L S is slightly larger than the value calculated using the previous equation, the maximum power factor However, in practice, there is not much difference when setting the above calculated value, and on the other hand, the smaller the value of the series reactor, the cheaper it is, so in practice, it is appropriate to set it within the range of -20 to +30% of the above calculated value. It is.
この発明は非放電期間を短くした無声放電によ
りオゾンを生成させるように構成されたものにお
いて、交流電源と無声放電極系との間に直列リア
クトルを挿入することにより力率を大幅に改善す
るので、実用上大きな効果がある。 This invention is configured to generate ozone by silent discharge with a short non-discharge period, and the power factor is greatly improved by inserting a series reactor between the AC power source and the silent discharge electrode system. , which has a great practical effect.
第1図は無声放電を用いた従来のオゾン発生装
置の原理的構成図、第2図はその電極部の平面
図、第3図はその等価回路図、第4図a,bはそ
の電源電圧と負荷電流の波図、第5図は従来の並
列リアクトルを備えたオゾン発生器の等価回路
図、第6図a,b,cはその電源電圧、負荷電流
及び各部の電流を示す波形図、第7図はその並列
リアクトルタンスのインピーダンスを変えた場合
の力率の変化を示す特性図、第8図はこの発明の
一実施例の等価回路図、第9図a,b,cはその
電源電圧、各部の電圧および負荷電流を示す波形
図、第10図は直列リアクトルのインダクタンス
を変えた場合の力率の変化を示す特性図である。
図において1は接地電極、2は誘電体、3は高
圧電極、4は放電空隙、5は無声放電極系、6は
交流電源、7はツエナーダイオードの逆直列体、
9は直列リアクトルである。なお図中同一符号は
それぞれ同一または相当部分を示す。
Figure 1 is a basic configuration diagram of a conventional ozone generator using silent discharge, Figure 2 is a plan view of its electrode section, Figure 3 is its equivalent circuit diagram, and Figures 4 a and b are its power supply voltage. Figure 5 is an equivalent circuit diagram of an ozone generator equipped with a conventional parallel reactor, Figure 6 a, b, and c are waveform diagrams showing the power supply voltage, load current, and current of each part. Fig. 7 is a characteristic diagram showing the change in power factor when the impedance of the parallel reactor is changed, Fig. 8 is an equivalent circuit diagram of an embodiment of the present invention, and Fig. 9 a, b, and c are its power supply. FIG. 10 is a waveform diagram showing the voltage, voltage at each part, and load current. FIG. 10 is a characteristic diagram showing the change in power factor when the inductance of the series reactor is changed. In the figure, 1 is a ground electrode, 2 is a dielectric, 3 is a high voltage electrode, 4 is a discharge gap, 5 is a silent discharge electrode system, 6 is an AC power supply, 7 is an inverse series Zener diode,
9 is a series reactor. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
間に正弦波交流電圧を印加して放電期間が非放電
期間より長い無声放電を発生させ、当該空間内を
流れる酸素含有気体中にオゾンを発生させるよう
に構成されたものにおいて、上記交流源と電極と
の間に直列にリアクトルを接続し、このリアクト
ルのインダクタンスLsを、 0.8/(2πf)2Cg<LS<1.3/(2π
f)2Cg 但し、f ;電源周波数 Cg;誘電体の静電容量 の範囲内に選定したことを特徴とするオゾン発生
装置。[Claims] 1 A sinusoidal AC voltage is applied between electrodes facing each other through a dielectric and a narrow gap to generate a silent discharge in which the discharge period is longer than the non-discharge period, and oxygen flowing in the space is generated. In a device configured to generate ozone in a contained gas, a reactor is connected in series between the AC source and the electrode, and the inductance L s of this reactor is 0.8/(2πf) 2 C g <L S <1.3/(2π
f) 2 C g However, an ozone generator characterized in that f; power frequency C g ; selected within the range of the capacitance of the dielectric.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4251878A JPS54134089A (en) | 1978-04-11 | 1978-04-11 | Ozon generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4251878A JPS54134089A (en) | 1978-04-11 | 1978-04-11 | Ozon generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54134089A JPS54134089A (en) | 1979-10-18 |
| JPS6125646B2 true JPS6125646B2 (en) | 1986-06-17 |
Family
ID=12638289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4251878A Granted JPS54134089A (en) | 1978-04-11 | 1978-04-11 | Ozon generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54134089A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010168241A (en) * | 2009-01-22 | 2010-08-05 | Mitsubishi Electric Corp | Ozone generating apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08253862A (en) * | 1995-03-16 | 1996-10-01 | Toppan Printing Co Ltd | CVD equipment |
-
1978
- 1978-04-11 JP JP4251878A patent/JPS54134089A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010168241A (en) * | 2009-01-22 | 2010-08-05 | Mitsubishi Electric Corp | Ozone generating apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54134089A (en) | 1979-10-18 |
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