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JPS6126506B2 - - Google Patents
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JPS6126506B2 - - Google Patents

Info

Publication number
JPS6126506B2
JPS6126506B2 JP56058625A JP5862581A JPS6126506B2 JP S6126506 B2 JPS6126506 B2 JP S6126506B2 JP 56058625 A JP56058625 A JP 56058625A JP 5862581 A JP5862581 A JP 5862581A JP S6126506 B2 JPS6126506 B2 JP S6126506B2
Authority
JP
Japan
Prior art keywords
gas
optical fiber
fluoride
raw material
burner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56058625A
Other languages
Japanese (ja)
Other versions
JPS57175743A (en
Inventor
Naryuki Mitachi
Tadashi Myashita
Teruhisa Kanamori
Yasutake Ooishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56058625A priority Critical patent/JPS57175743A/en
Publication of JPS57175743A publication Critical patent/JPS57175743A/en
Publication of JPS6126506B2 publication Critical patent/JPS6126506B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/0142Reactant deposition burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C13/00Fibre or filament compositions
    • C03C13/04Fibre optics, e.g. core and clad fibre compositions
    • C03C13/041Non-oxide glass compositions
    • C03C13/042Fluoride glass compositions
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/32Non-oxide glass compositions, e.g. binary or ternary halides, sulfides or nitrides of germanium, selenium or tellurium
    • C03C3/325Fluoride glasses
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/80Non-oxide glasses or glass-type compositions
    • C03B2201/82Fluoride glasses, e.g. ZBLAN glass
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/30For glass precursor of non-standard type, e.g. solid SiH3F
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/30For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32Non-halide
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/50Multiple burner arrangements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Compositions (AREA)

Description

【発明の詳細な説明】 本発明は2〜6μm帯の赤外線を伝送すること
ができるフツ化物ガラス光フアイバ用プリフオー
ムの製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a preform for a fluoride glass optical fiber capable of transmitting infrared rays in the 2-6 μm band.

従来の光フアイバ用プリフオームは、酸化ケイ
素系(SiO2)ガラスを主構成素材としているがこ
のガラス素材はSi―O結合の振動に起因する赤外
吸収を有するため、レイリー散乱損失と赤外吸収
損失との谷間に存在する低損失の波長域は、可視
域から近赤外域(波長0.6〜1.7μm)に限られ、
それより長波長の波長領域においては低損失の光
フアイバを得ることができなかつた。一方、先行
技術によれば、レイリー散乱は波長の4乗に逆比
例して低減することが知られており、酸化ケイ素
に比べて赤外吸収端が長波長側に位置するガラス
素材でプリフオームを形成し、それを線引きして
光フアイバを作製することにより一層低損失化を
図ることができることが分つているので、このよ
うな光フアイバ用プリフオームの形成法の出現が
要望されている。
Conventional optical fiber preforms are mainly composed of silicon oxide (SiO 2 ) glass, but this glass material has infrared absorption caused by the vibration of Si—O bonds, so Rayleigh scattering loss and infrared absorption The low-loss wavelength range that exists between the loss and the loss is limited to the visible range to the near-infrared range (wavelength 0.6 to 1.7 μm).
It has not been possible to obtain an optical fiber with low loss in a wavelength range longer than that. On the other hand, according to prior art, it is known that Rayleigh scattering is reduced in inverse proportion to the fourth power of the wavelength, and the preform is made of a glass material whose infrared absorption edge is located on the long wavelength side compared to silicon oxide. It has been found that it is possible to further reduce the loss by forming an optical fiber and drawing it to produce an optical fiber, so there is a desire for a method for forming such a preform for an optical fiber.

通信用の光フアイバは屈折率の高いコアをより
屈折率の低いクラツドで被覆する導波構造を有し
ているが、現在、導波構造を有する赤外線伝送用
光フアイバとして知られているものは、Ag
(ClBr)コアーAgClクラツド及びTl(BrI)コア
ープラスチツククラツド等多結晶質光フアイバで
あるがこれらの多結晶質光フアイバの場合には、
粒界散乱損失の影響のため極低損失光フアイバの
作製は本質的に不可能である。またC2Cl4液体コ
アーSiO2クラツド光フアイバも知られている
が、長尺光フアイバの作製及びその接続の点で大
きな問題がある。
Optical fibers for communications have a waveguide structure in which a core with a high refractive index is covered with a cladding with a lower refractive index, but currently, optical fibers for infrared transmission that have a waveguide structure are known as ,Ag
(ClBr) core AgCl clad and Tl(BrI) core plastic clad polycrystalline optical fibers.
The production of ultra-low loss optical fibers is essentially impossible due to the effects of grain boundary scattering loss. C 2 Cl 4 liquid core SiO 2 clad optical fibers are also known, but there are major problems in producing long optical fibers and connecting them.

また、フツ化物ガラスは上記各種のフアイバ材
料がもつ欠点を解消し、2〜6μmの赤外線波長
領域で極低損失光フアイバを実現できる可能性が
高い材料として注目されているが、導波構造を有
する光フアイバ用プリフオームの製造方法につい
ては特に紹介されておらず、また酸化ケイ素系光
フアイバ用プリフオームの製造方法である内付け
法又は軸付け法がそのまま適用できないことは明
らかである。
In addition, fluoride glass is attracting attention as a material that eliminates the drawbacks of the various fiber materials mentioned above and has a high possibility of realizing an ultra-low loss optical fiber in the infrared wavelength region of 2 to 6 μm. There is no particular introduction to the manufacturing method of the optical fiber preform, and it is clear that the internal mounting method or shaft mounting method, which is the manufacturing method of the silicon oxide optical fiber preform, cannot be applied as is.

本発明は前記現状に鑑みてなされたもので、そ
の目的は、先行技術の欠点を解決した波長2〜6
μmの赤外線を伝送し得、かつ極低損失化の可能
なフツ化物ガラスを素材とする光フアイバ用プリ
フオームを簡易に製造できる方法を提供するにあ
る。
The present invention has been made in view of the above-mentioned current situation, and its purpose is to solve the shortcomings of the prior art and to solve the problems of the prior art.
It is an object of the present invention to provide a method for easily manufacturing an optical fiber preform made of fluoride glass that can transmit μm infrared rays and has extremely low loss.

前記目的を達成する本発明の赤外線伝送光フア
イバ用プリフオームの製造方法は、原料の金属化
合物を加熱気化し、ガス流として供給し、この金
属化合物をフツ素(F2)ガス、あるいは水素
(H2)とフツ素(F2)の反応により発生したフツ化
水素(HF)で反応させ、かつ反応時に発生する
熱によつて、フツ素化、ガラス化し、生成したフ
ツ化物微粒子あるいはガラス微粒子を堆積させて
フツ化物光フアイバ用多孔質母材を製造すること
を特徴としている。
The method for manufacturing an infrared transmission optical fiber preform of the present invention that achieves the above object heats and vaporizes a raw metal compound, supplies it as a gas stream, and converts this metal compound into fluorine (F 2 ) gas or hydrogen (H 2 ) and fluorine (F 2 ), and the heat generated during the reaction is used to fluorinate and vitrify the resulting fluoride particles or glass particles. The present invention is characterized in that it is deposited to produce a porous matrix for a fluoride optical fiber.

本発明で使用される金属としては、Li,Na,
Be,Mg,Ca,Sr,Ba,Al,Sn,Pb,Sb,Bi,
Zn,Cd,La,Gd,Lu,Zr,Hf等の単体金属、
またはそれら金属の化合物であるアルコレート化
合物、ハロゲン化物(フツ化物、塩化物、臭素化
物、ヨウ化物等)あるいは金属と炭素間の結合を
持つ〔例えばテトラエチル鉛:Pb(CH2CH34
有機金属等の化合物を用いることが望ましい。ま
た、反応系としてはフツ素樹脂等のフツ素に対し
侵されにくい材料で被覆されたガラス容器で構成
し、閉管系とし、酸素の混入を防止しながら作業
が行なわれることが望ましい。
The metals used in the present invention include Li, Na,
Be, Mg, Ca, Sr, Ba, Al, Sn, Pb, Sb, Bi,
Single metals such as Zn, Cd, La, Gd, Lu, Zr, Hf,
or compounds of these metals, such as alcoholate compounds, halides (fluorides, chlorides, bromides, iodides, etc.), or bonds between metals and carbon [e.g., tetraethyl lead: Pb(CH 2 CH 3 ) 4 ]
It is desirable to use a compound such as an organic metal. Furthermore, it is desirable that the reaction system be constructed of a glass container coated with a material that is not easily attacked by fluorine, such as a fluororesin, and that the reaction system be a closed tube system, so that the work can be carried out while preventing the contamination of oxygen.

本発明によるプリフオームの製造方法は、基本
的には予め用意された炭素棒やフツ化物ガラスロ
ツド(以下種棒と言う)を垂直に立て、30rpm程
度の回転速度で回転しながら、その下端の周辺に
設置した気化した原料とF2とH2ガスを噴出する
バーナ、あるいは気化した原料とF2ガスを噴出
するバーナによつて、F2とH2ガスの混合気体を
噴出させ、加熱して着火した後にその炎の中に気
化した原料を通じるか、あるいは原料とF2ガス
とを噴出させ、直接反応させるかしてフツ素化と
ガラス化を同時に進行させ、この炎を上記種棒の
先端に吹きつけ、生成したフツ化物微粒子、ガラ
ス微粒子を堆積させて、フツ化物の多孔質母材を
形成する。
The method of manufacturing a preform according to the present invention basically involves vertically standing a carbon rod or fluoride glass rod (hereinafter referred to as a seed rod) prepared in advance, and rotating it at a rotational speed of about 30 rpm, around the lower end of the rod. A mixed gas of F 2 and H 2 gas is ejected using an installed burner that spouts vaporized raw materials and F 2 and H 2 gas, or a burner that spouts vaporized raw materials and F 2 gas , heated, and ignited. After that, fluorination and vitrification proceed simultaneously by passing the vaporized raw material into the flame, or by blowing out the raw material and F 2 gas and causing a direct reaction, and this flame is passed through the tip of the seed rod. and deposit the generated fluoride fine particles and glass fine particles to form a porous fluoride matrix.

このときに、コア用の原料を送るバーナと、ク
ラツド用の原料を送るバーナを空間的に配置し、
種棒の中心にコア用ガラス微粒子を、種棒の周辺
にクラツド用ガラス微粒子を堆積させ、導波構造
を有する多孔質母材を形成する。
At this time, the burners that send raw materials for the core and the burners that send raw materials for the cladding are spatially arranged,
Glass fine particles for the core are deposited at the center of the seed rod, and glass fine particles for the cladding are deposited around the seed rod to form a porous base material having a waveguide structure.

以下本発明を実施例によつて詳細に説明するが
本発明はこれによりなんら限定されるものではな
い。
EXAMPLES The present invention will be explained in detail below with reference to Examples, but the present invention is not limited thereto in any way.

実施例―1 第1図は本発明の製造方法に使用する装置の一
構成例を示す模式図である。
Example-1 FIG. 1 is a schematic diagram showing an example of the configuration of an apparatus used in the manufacturing method of the present invention.

2の炭素製種棒を24の回転コレツトチヤツク
にてつかみ、25の電動モーターにて30rpmの速
度で回転する。この種棒2の下端の周辺に12の
クラツド用バーナと11のコア用バーナをセツト
した。これに21の減圧バルブのついた13のフ
ツ素樹脂のチユーブにより18のアルゴン
(Ar)ガスボンベよりArキヤリアガスを流し、1
4のサチユレータにジルコニウムテトラブトキサ
イド〔Zr(OC4H94〕,15のサチユレータにバ
リウムノナデカノエート〔Ba(OC9H192〕,16
のサチユレータにトリイソブチルアルミ〔Al
(i―C4H93〕を入れ17のマントルヒータで加
熱気化されたそれぞれの原料ガスを27のフツ素
樹脂のチユーブで12および11のバーナに運ん
だ。この時に、19のF2ガスボンベ、20のH2
ガスボンベより11および12のバーナにF2
H2ガスを流し、これを加熱して着火した。酸素
の影響を除去するため、3のフツ素樹脂をコート
したガラス製容器で閉管系を構成した。この時に
発生するHFガスと発熱により、11のコア用バ
ーナではジルコニウムテトラブトキサイドとバリ
ウムノナデカノエートをフツ素化し、12のクラ
ツド用バーナではトリイソブチルアルミをフツ素
化し、空間的にアルミニウムの分布を連続的に変
化させて、屈折率分布を生じさせた。このときに
BaF2―AlF3―ZrF4系のガラス微粒子が2の種棒
の先端に付着し、6の架台に付設した9の支柱及
び26の電動モータ22の回転用ギヤで回転させ
られた10の昇降用ギヤによつて、8の母材回転
コレツトチヤツク支持台が上昇し、1の母材が
30rpmで回転しながら対称形を保つて長手方向に
成長した。反応によつて生じたブタノールやイソ
ブタン、ノナデカノール、フツ化水素は23の廃
気孔より4の塩化ビニル製廃気パイプにより5の
ガス洗浄器によつてトラツプした。このとき7の
パイプによつて吸引し、廃気を促進した。このよ
うにして、50mmφ×300mmのフツ化物の多孔質母
材が得られた。
The carbon seed rod No. 2 is held by the rotating collect chuck No. 24, and rotated by the electric motor No. 25 at a speed of 30 rpm. Twelve crud burners and eleven core burners were set around the lower end of this seed rod 2. Ar carrier gas was flowed into this from 18 argon (Ar) gas cylinders through 13 fluororesin tubes with 21 pressure reducing valves, and 1
Zirconium tetrabutoxide [Zr(OC 4 H 9 ) 4 ] in saturator 4, barium nonadecanoate [Ba(OC 9 H 19 ) 2 ] in saturator 15, 16
triisobutyl aluminum [Al
(i-C 4 H 9 ) 3 ] was heated and vaporized by the mantle heater 17, and the raw material gases were conveyed to the burners 12 and 11 by the 27 fluororesin tubes. At this time, 19 F 2 gas cylinders, 20 H 2
F2 from the gas cylinder to burners 11 and 12.
It was heated and ignited by flowing H2 gas. In order to eliminate the influence of oxygen, a closed tube system was constructed using a glass container coated with fluororesin (3). Due to the HF gas and heat generated at this time, zirconium tetrabutoxide and barium nonadecanoate are fluorinated in the 11th core burner, and triisobutylaluminum is fluorinated in the 12th clad burner. A refractive index distribution was created by changing the distribution continuously. At this time
BaF 2 ― AlF 3 ― ZrF 4 glass fine particles are attached to the tip of the seed rod 2, and the vertical movement 10 is rotated by the column 9 attached to the frame 6 and the rotating gear of the electric motor 22 26. The rotating gear for the base material 8 raises the base material rotation collect chuck support base, and the base material 1 is lifted up.
While rotating at 30 rpm, it maintained a symmetrical shape and grew in the longitudinal direction. Butanol, isobutane, nonadecanol, and hydrogen fluoride produced by the reaction were trapped from the exhaust hole 23 through the vinyl chloride exhaust pipe 4 and the gas washer 5. At this time, suction was carried out through pipe No. 7 to promote exhaust gas. In this way, a porous fluoride matrix of 50 mmφ×300 mm was obtained.

この母材を360℃で加熱し、透明化して約25mm
φ×150mmのフツ化物光フアイバ用母材を得た。
この母材28の断面の屈折率分布を第2図に示す
が、Al3+のイオンが周辺のクラツド部に多く、中
心のコア部に向うほど少なく分布しているため、
2乗分布に近い形の連続的に変化する屈折率分布
30に近くなつており、最大比屈折率差は、0.6
%であつた。
This base material is heated to 360℃ and becomes transparent to approximately 25mm.
A base material for a fluoride optical fiber with a diameter of 150 mm was obtained.
The refractive index distribution of the cross section of this base material 28 is shown in FIG. 2, and since Al 3+ ions are more abundant in the peripheral cladding and less distributed toward the central core,
The refractive index distribution is close to a continuously changing refractive index distribution 30 with a shape close to a square law distribution, and the maximum specific refractive index difference is 0.6.
It was %.

実施例―2 実施例―1おいて、12のクラツド用バーナと
11のコア用バーナとの距離を、炎がまじり合わ
ないように離して用い、実施例―1と同様に2の
炭素製種棒を24の回転コレツトチヤツクにてつ
かみ、25の電動モータにて30rpmの速度で回転
し、この種棒の下端の周辺に12のクラツド用バ
ーナと11のコア用バーナをセツトした。これに
21の減圧バルブのついた13のフツ素樹脂のチ
ユーブにより18のボンベよりArキヤリアガス
を流し、14のサチユレータにジルコニウムテト
ラブトキサイド〔Zr(OC4H94〕,15のサチユ
レータにバリウムノナデカノエート〔Ba
(OC9H192〕,16のサチユレータにトリイブチ
ルアルミ〔Al(i―C4H93〕を入れ17のマント
ルヒータで加熱気化されたそれぞれの原料ガスを
27のフツ素樹脂のチユーブで12および11の
バーナに運んだ。この時に、19のF2ガスボン
ベ、20のH2ガスボンベより11および12の
バーナにF2とH2ガスを流し、これを加熱して着
火した。この時に発生するHFガスと発熱により
11のコア用バーナではジルコニウムテトラブト
キサイドとバリウムノナデカノエートをフツ素化
し、12のクラツド用バーナではトリイソブチル
アルミをフツ素化し、空間的にアルミニウムの分
布をクラツドに集中させて、屈折率分布を生じさ
せた。このときにBaF2―AlF3―ZnF4系のガラス
微粒子が2の種棒の先端に付着し、9の支柱、2
6の電動モータで回転させられた10の昇降用ギ
ヤによつて、8の母材回転コレツトチヤツク支持
台が上昇し、1の多孔質母材が30rpmで回転し、
対称形を保ちながら長手方向に成長した。反応に
よつて生じたブタノールやイソブタン、ノナデカ
ノール、フツ化水素は23の廃気孔より4の塩化
ビニル製廃気パイプにより5のガス洗浄器によつ
てトラツプした。このとき7のパイプによつて吸
引し、廃気を促進した。このようにして、50mmφ
×250mmのフツ化物の多孔質母材が得られた。
Example 2 In Example 1, the distance between the 12 clad burners and the 11 core burners was set apart so that the flames would not mix, and carbon type 2 was used in the same manner as in Example 1. The rod was gripped by a rotating collect chuck No. 24 and rotated at a speed of 30 rpm by an electric motor No. 25, and 12 burners for the cladding and 11 burners for the core were set around the lower end of this seed rod. To this, Ar carrier gas was flowed from a cylinder 18 through 13 fluororesin tubes equipped with 21 pressure reducing valves, zirconium tetrabutoxide [Zr(OC 4 H 9 ) 4 ] was introduced into a saturator 14, and barium was introduced into a saturator 15. Nonadecanoate [Ba
(OC 9 H 19 ) 2 ], tributylaluminum [Al(i-C 4 H 9 ) 3 ] is placed in the saturator 16, heated and vaporized by the mantle heater 17, and the respective raw material gases are injected into the fluororesin 27. The tubes carried them to burners 12 and 11. At this time, F 2 and H 2 gases were flowed from the F 2 gas cylinder 19 and the H 2 gas cylinder 20 to the burners 11 and 12, which were heated and ignited. Using the HF gas and heat generated at this time, the 11 core burners fluorinate zirconium tetrabutoxide and barium nonadecanoate, and the 12 clad burners fluorinate triisobutylaluminum, spatially distributing the aluminum. was concentrated on the cladding to produce a refractive index distribution. At this time, BaF 2 -AlF 3 -ZnF 4 type glass particles adhere to the tip of the seed rod 2, and the column 9 and the 2
By the lifting gear 10 rotated by the electric motor 6, the base material rotating collect chuck support base 8 is raised, the porous base material 1 is rotated at 30 rpm,
It grew longitudinally while maintaining a symmetrical shape. Butanol, isobutane, nonadecanol, and hydrogen fluoride produced by the reaction were trapped from the exhaust hole 23 through the vinyl chloride exhaust pipe 4 and the gas washer 5. At this time, suction was carried out through pipe No. 7 to promote exhaust gas. In this way, 50mmφ
A fluoride porous matrix of ×250 mm was obtained.

この母材を360℃で加熱し、透明化して約25mm
φ×120mmのフツ化物光フアイバ用母材を得た。
この母材31の断面の屈折率分布を第3図に示す
が、Al3+のイオンが周辺のクラツド部に集中し、
階段型に近い屈折率分布33をしていることがわ
かつた。比屈折率差は0.6%であつた。
This base material is heated to 360℃ and becomes transparent to approximately 25mm.
A base material for a fluoride optical fiber with a diameter of 120 mm was obtained.
The refractive index distribution of the cross section of this base material 31 is shown in FIG.
It was found that the refractive index distribution 33 was close to a step-like shape. The relative refractive index difference was 0.6%.

本実施例において、20のH2ガスボンベより
のH2ガスの供給を中止し、F2と原料との反応に
よつて本実施例と同様のフツ化物フアイバ用母材
が得られた。
In this example, the supply of H 2 gas from the 20 H 2 gas cylinders was stopped, and the same fluoride fiber base material as in this example was obtained by reacting F 2 with the raw material.

応用例 実施例―1及び実施例―2で得られたプリフオ
ームを第4図に示すような方法で線引きした。す
なわち、34の透明フツ化物光フアイバ母材を3
5のフツ素樹脂チユーブに挿入し、39の電気炉
台に乗せた36の小型電気炉を0.1cm/minで上昇
させ37の巻取りボビンに38のフツ化物光フア
イバを巻取つた。実施例―1の母材からはフツ素
樹脂コートグレーデツドインデツクス型・実施例
―2の母材からはフツ素樹脂コートステツプイン
デツクス型の光フアイバ(外径500μm・クラツ
ド径200μm)が得られた。これらの光フアイバ
はいずれも2.5μm及び3.5μm帯で0.3dB/m以下
の低損失の窓を有する赤外線伝送の可能な光フア
イバであつた。
Application Example The preforms obtained in Example-1 and Example-2 were drawn by the method shown in FIG. That is, 34 transparent fluoride optical fiber matrix materials are
The fluoride optical fiber was inserted into the fluororesin tube No. 5, and the small electric furnace No. 36 placed on the electric furnace stand No. 39 was raised at a rate of 0.1 cm/min, and the fluoride optical fiber No. 38 was wound onto the winding bobbin No. 37. The base material of Example 1 produced a fluororesin coated grade index type optical fiber, and the base material of Example 2 produced a fluororesin coated step index type optical fiber (outer diameter 500 μm, cladding diameter 200 μm). Obtained. All of these optical fibers were capable of transmitting infrared rays and had a low loss window of 0.3 dB/m or less in the 2.5 μm and 3.5 μm bands.

以上説明したように、本発明によればコアーク
ラツドの導波構造を内部に有するプリフオームが
簡単に作製でき、また屈折率分布もステツプイン
デツクス型あるいはグレーデツド型と任意の形に
設定でき、これらを線引きして得られる光フアイ
バは2.5μmあるいは3.5μmに低損失な窓を有す
る赤外線伝送用光フアイバとして使用できるとい
う利点がある。また、軸方向に母材を成長させ、
フツ素あるいはフツ化水素雰囲気下でガラスの堆
積を行なうことから、大型でOH基の極めて少な
いフツ化物光フアイバ用の母材作製ができる利点
がある。
As explained above, according to the present invention, a preform having a core clad waveguide structure inside can be easily manufactured, and the refractive index distribution can be set to any shape such as step index type or graded type, and these can be drawn. The obtained optical fiber has the advantage that it can be used as an optical fiber for infrared transmission having a low-loss window of 2.5 μm or 3.5 μm. In addition, by growing the base material in the axial direction,
Since the glass is deposited in a fluorine or hydrogen fluoride atmosphere, it has the advantage of being able to produce a base material for large-sized fluoride optical fibers with extremely few OH groups.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の製造方法に使用する装置の一
構成例を示す模式図、第2図は本発明の実施例―
1により得られた母材の屈折率分布を示す図、第
3図は本発明の実施例―2により得られた母材の
屈折率分布を示す図、第4図は実施例―1及び実
施例―2で得られた母材の線引きの模式図であ
る。 1…母材(多孔質母材)、2…種棒、3…フツ
素樹脂被覆ガラス製容器(反応管)、4…廃気パ
イプ、11…コア用バーナ、12…クラツド用バ
ーナ、14,15,16…サチユレータ、17…
マントルヒータ、18…Arガスボンベ、19…
F2ガスボンベ、20…H2ガスボンベ、28,3
1…フツ化物光フアイバ母材、29,32…屈折
率分布に対応する母材上の位置、30,33…屈
折率分布、34…透明フツ化物光フアイバ母材、
35…フツ素樹脂チユーブ、36…電気炉、38
…フツ化物光フアイバ。
FIG. 1 is a schematic diagram showing an example of the configuration of an apparatus used in the manufacturing method of the present invention, and FIG. 2 is an embodiment of the present invention.
FIG. 3 is a diagram showing the refractive index distribution of the base material obtained in Example-2 of the present invention, and FIG. 4 is a diagram showing the refractive index distribution of the base material obtained in Example-1 and Example-2 of the present invention. FIG. 2 is a schematic diagram of the drawing of the base material obtained in Example-2. DESCRIPTION OF SYMBOLS 1... Base material (porous base material), 2... Seed rod, 3... Fluorine resin coated glass container (reaction tube), 4... Exhaust pipe, 11... Burner for core, 12... Burner for cladding, 14, 15, 16...Saturator, 17...
Mantle heater, 18...Ar gas cylinder, 19...
F 2 gas cylinder, 20...H 2 gas cylinder, 28,3
1... Fluoride optical fiber base material, 29, 32... Position on the base material corresponding to refractive index distribution, 30, 33... Refractive index distribution, 34... Transparent fluoride optical fiber base material,
35... Fluorine resin tube, 36... Electric furnace, 38
...Fluoride optical fiber.

Claims (1)

【特許請求の範囲】 1 気相反応系に、原料物質である金属もしくは
金属化合物を加熱気化させて形成した原料ガス、
およびフツ素(F2)ガス、もしくは反応によつて
フツ化水素(HF)ガスを生成するフツ素(F2
ガスと水素(H2)ガスとの混合ガスを導入して発
熱反応を行なわしめ、上記原料ガスと反応して生
成したフツ化物微粒子あるいはガラス微粒子を、
所定形状の種棒に堆積させて、フツ化物系ガラス
からなる光フアイバ用多孔質母材を形成させるこ
とを特徴とするフツ化物光フアイバ用母材の製造
方法。 2 原料物質である金属もしくは金属化合物が、
Li,Na,Be,Mg,Ca,Sr,Ba,Al,Sn,Pb,
Sb,Bi,Zn,Cd,La,Gd,Lu,Zr,Hfの金
属、または上記金属のアルコレート化合物、ハロ
ゲン族元素化合物、上記金属と炭素間の結合を持
つ有機金属化合物の群より選ばれる少なくとも1
種を含むことを特徴とする特許請求の範囲第1項
に記載のフツ化物光フアイバ用母材の製造方法。 3 気相反応系が、原料ガスとフツ素(F2)ガス
とを噴出し着火燃焼させるバーナ、または原料ガ
スとフツ素(F2)ガスと水素(H2)ガスとを噴出
し着火燃焼させるバーナによつて構成されること
を特徴とする特許請求の範囲第1項または第2項
に記載のフツ化物光フアイバ用母材の製造方法。 4 気相反応系が、バーナによつてフツ素
(F2)ガスと水素(H2)ガスとを噴出し着火燃焼さ
せて火炎を形成し、上記火炎の中に原料ガスを導
入することを特徴とする特許請求の範囲第1項ま
たは第2項に記載のフツ化物光フアイバ用母材の
製造方法。 5 気相反応系が、コア用の原料ガスを噴出し着
火燃焼させるバーナと、クラツド用の原料ガスを
噴出し着火燃焼させるバーナとによつて構成され
ることを特徴とする特許請求の範囲第1項ないし
第4項のいずれか1項に記載のフツ化物光フアイ
バの製造方法。
[Claims] 1. A raw material gas formed by heating and vaporizing a metal or metal compound as a raw material in a gas phase reaction system;
and fluorine (F 2 ) gas, or fluorine (F 2 ) that produces hydrogen fluoride (HF) gas by reaction.
A mixed gas of gas and hydrogen (H 2 ) gas is introduced to cause an exothermic reaction, and the fluoride particles or glass particles generated by the reaction with the raw material gas are
1. A method for producing a fluoride optical fiber preform, which comprises depositing it on a seed rod of a predetermined shape to form a porous preform for an optical fiber made of fluoride glass. 2 The metal or metal compound that is the raw material is
Li, Na, Be, Mg, Ca, Sr, Ba, Al, Sn, Pb,
Selected from the group of metals Sb, Bi, Zn, Cd, La, Gd, Lu, Zr, Hf, alcoholate compounds of the above metals, halogen group element compounds, and organometallic compounds having bonds between the above metals and carbon. at least 1
The method for producing a base material for a fluoride optical fiber according to claim 1, which comprises a seed. 3 The gas phase reaction system is a burner that ejects and ignites and burns raw material gas and fluorine (F 2 ) gas, or a burner that ejects and ignites and burns raw material gas, fluorine (F 2 ) gas, and hydrogen (H 2 ) gas. 3. A method for producing a preform for a fluoride optical fiber according to claim 1 or 2, characterized in that the method comprises a burner for causing a fluoride optical fiber. 4. The gas phase reaction system ejects fluorine (F 2 ) gas and hydrogen (H 2 ) gas by a burner, ignites and burns them to form a flame, and introduces the raw material gas into the flame. A method for producing a base material for a fluoride optical fiber according to claim 1 or 2. 5. Claim No. 5, characterized in that the gas phase reaction system is constituted by a burner that ejects and ignites and burns the raw material gas for the core, and a burner that ejects and ignites and burns the raw material gas for the cladding. A method for producing a fluoride optical fiber according to any one of Items 1 to 4.
JP56058625A 1981-04-20 1981-04-20 Preparation of base material for fluoride optical fiber Granted JPS57175743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56058625A JPS57175743A (en) 1981-04-20 1981-04-20 Preparation of base material for fluoride optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56058625A JPS57175743A (en) 1981-04-20 1981-04-20 Preparation of base material for fluoride optical fiber

Publications (2)

Publication Number Publication Date
JPS57175743A JPS57175743A (en) 1982-10-28
JPS6126506B2 true JPS6126506B2 (en) 1986-06-20

Family

ID=13089754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56058625A Granted JPS57175743A (en) 1981-04-20 1981-04-20 Preparation of base material for fluoride optical fiber

Country Status (1)

Country Link
JP (1) JPS57175743A (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965495A (en) * 1982-10-06 1984-04-13 共信商事株式会社 Method of fixing additional wirings or the like of back sur-face of printed circuit board
IT1168841B (en) * 1983-09-15 1987-05-20 Cselt Centro Studi Lab Telecom PROCEDURE FOR THE PRODUCTION OF LOW ATTENUATION OPTICAL FIBERS IN THE MEDIUM INFRARED
JPS60231430A (en) * 1984-03-21 1985-11-18 Furukawa Electric Co Ltd:The Manufacture of soot for optical fiber
IT1183791B (en) * 1985-04-03 1987-10-22 Cselt Centro Studi Lab Telecom PROCESS FOR THE PRODUCTION OF HALIDE-BASED GLASS
JPH0753591B2 (en) * 1985-08-14 1995-06-07 住友電気工業株式会社 Method for manufacturing base material for optical fiber
US5069701A (en) * 1987-07-13 1991-12-03 Hughes Aircraft Company Preparation of fluoride glass by chemical vapor deposition
US5071460A (en) * 1988-03-04 1991-12-10 Nippon Telegraph And Telephone Corporation Process for the preparation of fluoride glass and process for the preparation of optical fiber preform using the fluoride glass
US5145508A (en) * 1988-03-04 1992-09-08 Nippon Telegraph And Telephone Corporation Method of making fluoride glass using barium β-diketones
JPH02243521A (en) * 1989-03-16 1990-09-27 Nippon Telegr & Teleph Corp <Ntt> Fluoride glass rod lens, its production and apparatus therefor
US5211731A (en) * 1991-06-27 1993-05-18 The United States Of Americas As Represented By The Secretary Of The Navy Plasma chemical vapor deposition of halide glasses

Also Published As

Publication number Publication date
JPS57175743A (en) 1982-10-28

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