JPS6128939B2 - - Google Patents
Info
- Publication number
- JPS6128939B2 JPS6128939B2 JP57010028A JP1002882A JPS6128939B2 JP S6128939 B2 JPS6128939 B2 JP S6128939B2 JP 57010028 A JP57010028 A JP 57010028A JP 1002882 A JP1002882 A JP 1002882A JP S6128939 B2 JPS6128939 B2 JP S6128939B2
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical
- piezoelectric element
- crystal
- medium
- focusing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007787 solid Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 239000000523 sample Substances 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 239000013078 crystal Substances 0.000 description 40
- 238000010586 diagram Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000030808 detection of mechanical stimulus involved in sensory perception of sound Effects 0.000 description 1
- -1 epoxy resin Chemical class 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 description 1
- 229910001947 lithium oxide Inorganic materials 0.000 description 1
- INHCSSUBVCNVSK-UHFFFAOYSA-L lithium sulfate Inorganic materials [Li+].[Li+].[O-]S([O-])(=O)=O INHCSSUBVCNVSK-UHFFFAOYSA-L 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- RBTVSNLYYIMMKS-UHFFFAOYSA-N tert-butyl 3-aminoazetidine-1-carboxylate;hydrochloride Chemical compound Cl.CC(C)(C)OC(=O)N1CC(N)C1 RBTVSNLYYIMMKS-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/221—Arrangements for directing or focusing the acoustical waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Obtaining Desirable Characteristics In Audible-Bandwidth Transducers (AREA)
Description
【発明の詳細な説明】
本発明は、一般に顕微鏡、特に高周波エネルギ
ーを用いる顕微鏡等に用いられる音波集束手段に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates generally to a sound wave focusing means used in a microscope, and particularly in a microscope using high frequency energy.
近年、1GHZに及ぶ高周波音波の発生、検出が
可能となつた為に水中での音波波長として約１ミ
クロンが得られ、従つて音波エネルギーを用いた
顕微鏡が検討される様になつた。 In recent years, it has become possible to generate and detect high-frequency sound waves up to 1 GHZ, resulting in a sound wave wavelength of about 1 micron underwater, and therefore, a microscope using sound wave energy has been considered.
この様な装置では如何にして細い集束音波ピー
ムを作成するかが要となるが、第１図を参照して
従来例について説明する。即ち、サフアイア等の
円柱状の結晶２０は一端面は光学的研麿された平
面で他端面には凹面状の穴がうがつてある。平板
面に作成された圧電素子１０にRF電気信号を印
加し、結晶２０内に平面波のRF音波を放射す
る。この平面音波は前記の凹面穴に形成される結
晶―媒質３０の界面で構成された正のレンズによ
り、その所定焦点に集束される。周知の様に焦点
距離と開口の比、即ちレンズのＦナンバが充分小
さいと、この構成により著しく狭い音波ビームを
作成する事が出来る。焦点付近におかれた試料に
より、この集束音波は反射、散乱、透過減衰とい
つたじよう乱を受けるから、このじよう乱音波エ
ネルギーを検出する事により試料の弾性的性質を
反映した電気信号を得る事が出来るわけである。
音波エネルギーの検出には上述の結晶系を再び利
用したり、又は同様の結晶系を共焦点に対向させ
ても良い。 The key to such a device is how to create a narrow focused acoustic beam, and a conventional example will be explained with reference to FIG. That is, the cylindrical crystal 20, such as sapphire, has one end surface that is an optically polished plane and the other end surface that has a concave hole. An RF electric signal is applied to the piezoelectric element 10 formed on a flat plate surface, and a plane wave RF sound wave is emitted into the crystal 20. This plane sound wave is focused to a predetermined focus by a positive lens formed at the crystal-medium 30 interface formed in the concave hole. As is well known, if the ratio of the focal length to the aperture, ie, the F-number of the lens, is sufficiently small, this configuration can produce a significantly narrower acoustic beam. Due to the sample placed near the focal point, this focused sound wave is subject to disturbances such as reflection, scattering, and transmission attenuation, so by detecting the energy of these disturbed sound waves, an electrical signal reflecting the elastic properties of the sample can be obtained. It is possible to obtain.
For the detection of sound wave energy, the above-mentioned crystal system may be used again, or a similar crystal system may be placed opposite the confocal area.
上記記述から明らかな様に従来例は、固体媒質
（結晶）と液体媒質の音速差を利用した正の球面
レンズをその集束原理としている。従つて、結晶
に半球面状の凹面穴を形成する事が要となるが、
レンズ面から焦点までの媒質（通常、水）の音波
減衰が著しく大きい為低いＦナンバのレンズを作
る為には例えば0.2mmφといつた微小球穴を作成
せざるを得ない事情があり、この様な作業は一般
に極めて困難である。従つて、この様な事情を軽
減し、しかも集束法として球面レンズに劣らない
他の集束法があれば、音波エネルギーを用いた顕
微鏡を実現する上に大きな効果が期待できる。 As is clear from the above description, the conventional example uses a positive spherical lens as its focusing principle, which utilizes the difference in sound speed between a solid medium (crystal) and a liquid medium. Therefore, it is important to form a hemispherical concave hole in the crystal.
Because the sound wave attenuation of the medium (usually water) from the lens surface to the focal point is extremely large, in order to create a lens with a low F number, it is necessary to create a microspherical hole with a diameter of, for example, 0.2 mm. Such tasks are generally extremely difficult. Therefore, if there is a focusing method that alleviates this situation and is as good as a spherical lens, a great effect can be expected in realizing a microscope using acoustic energy.
本発明は、以上の点を鑑みてなされたもので、
その目的は音波の減衰が少なく、しかも各部のア
ライメントの調整が不要であり、よつて高効率で
かつ製作の容易な音波探触子を提供するにある。
球面集束と類似した集束系を製作・加工上容易に
構成する事にある。 The present invention has been made in view of the above points, and
The purpose is to provide a sonic probe that has low attenuation of sound waves, does not require alignment adjustment of each part, is highly efficient, and is easy to manufacture.
The objective is to easily construct a focusing system similar to spherical focusing in terms of manufacturing and processing.
即ち、結晶に円筒状の加工を行う事は一般に球
面加工より簡単で精密に出来るから、２つの円筒
状の一軸集束系を直交して配列し、しかも従来例
の様に収差的に一番良好な球面状の二軸集束系と
類似した集束音波を得ようとするのである。 In other words, machining a crystal into a cylindrical shape is generally easier and more precise than machining a spherical surface, so two cylindrical uniaxial focusing systems are arranged orthogonally, and, like the conventional example, it is best in terms of aberrations. The aim is to obtain a focused sound wave similar to a spherical biaxial focusing system.
まず、本発明の要旨たる、２つの円筒集束系を
直交配列した場合の、集束特性について述べる。 First, we will discuss focusing characteristics when two cylindrical focusing systems are orthogonally arranged, which is the gist of the present invention.
第２図は２枚の円筒集束系を直交して配した様
子を模式的に示したものである。音波の送出方向
をＺ軸として図の様に座標軸をとる。第１の円筒
レンズはその円筒軸がＹ軸と直交していて、その
一断面Ｌ１は、ｘ＝x0で表わされるＹ，Ｚ軸と平
行な平面Ｐ１内にあり、第２の円筒レンズはその
円筒軸がＸ軸と直交していて、その一断面Ｌ２
は、ｙ＝y0で表わされるＸ，Ｙ軸と平行な平面Ｐ
２内にある。このレンズ系に図面左側より、Ｚ軸
方向へむけて平面音波が入ると円筒レンズＬ１に
よりYZ面内で集束（以下縦集束と呼ぶ）され又
レンズＬ２によりXY面内で集束され（以下横集
束と呼ぶ）るからＺ軸上の所定焦点に集束音波が
形成されるわけである。周知の様に、レンズ作用
の本質はレンズ内を通過する事による音路長にあ
るから、音路長の様子をもつてレンズの性質とす
る事ができる。 FIG. 2 schematically shows how two cylindrical focusing systems are arranged orthogonally. The coordinate axes are taken as shown in the figure, with the direction of sound wave transmission being the Z axis. The first cylindrical lens has its cylindrical axis perpendicular to the Y axis, and its cross section L1 lies within a plane P1 parallel to the Y and Z axes expressed by x= x0 , and the second cylindrical lens The cylindrical axis is perpendicular to the X axis, and one cross section L2
is a plane P parallel to the X and Y axes represented by y=y 0
It is within 2. When a plane sound wave enters this lens system from the left side of the drawing toward the Z-axis direction, it is focused in the YZ plane by the cylindrical lens L1 (hereinafter referred to as longitudinal focusing), and focused in the XY plane by lens L2 (hereinafter referred to as lateral focusing). Therefore, a focused sound wave is formed at a predetermined focal point on the Z-axis. As is well known, the essence of lens action lies in the length of the sound path that passes through the lens, so the appearance of the sound path length can be taken as a property of the lens.
今、図面左側から音波線がＺ軸方向に点（x0，
y0，ｏ）を通過する様に入射したとすれば、音路
長は図に示す如く′なる線分となる。円筒レ
ンズＬ１，Ｌ２はそれぞれ
y2＋（Ｚ＋ａ）２＝a2（Ｌ１につき） (1)
x2＋（Ｚ−ａ）２＝a2（Ｌ２につき） (2)
で与えられる。ここで、ａは集束円の半径であ
る。 Now, from the left side of the drawing, the sound wave line points in the Z-axis direction (x 0 ,
If the light is incident so as to pass through y 0 , o), the sound path length will be a line segment ' as shown in the figure. The cylindrical lenses L1 and L2 are each given by y 2 +(Z+a) 2 =a 2 (per L1) (1) x 2 +(Z-a) 2 =a 2 (per L2) (2). Here, a is the radius of the focusing circle.
(1)，(2)より
o′＝ａ−√2−0 2 (3)
o′′＝ａ−√2−0 2 (4)
故に音路長′は（ａ≫x0，y0）即ち近軸付近で
′＝o′＋o′′＝（x0 2＋y0 2）／2a (5)
で与えられる。他方、図の原点ｏにある球面レン
ズ即ち
x2＋y2＋（Ｚ−ａ）２＝a2 (6)
を考え、上例と同じ（x0，y0，ｏ）を通る音線の
音波長はａ−√2−0 2−0 2で与えられるから、
ａ≫x0，y0即ち近軸部では、音路長は
′＝（x0 2＋y0 2）／2a (7)
となる。 From (1) and (2), o′=a−√ 2 − 0 2 (3) o′′=a−√ 2 − 0 2 (4) Therefore, the sound path length′ is (a≫x 0 , y 0 ) That is, near the paraxial area, it is given by ′=o′+o′′=(x 0 2 +y 0 2 )/2a (5). On the other hand , considering a spherical lens located at the origin o in the figure , i.e. Since the length is given by a−√ 2 − 0 2 − 0 2 ,
At a≫x 0 , y 0 , that is, in the paraxial portion, the sound path length is ′=(x 0 2 +y 0 2 )/2a (7).
(5)，(8)より近軸付近では、２枚の円筒集束系を
直交させたものは、一枚の球面集束系と集束作用
が等価である事が理解されよう。 From (5) and (8), it can be understood that in the paraxial vicinity, two cylindrical focusing systems orthogonally crossed have the same focusing action as a single spherical focusing system.
第３図Ａ及び第３図Ｂは、本発明の一実施例を
示す図である。第３図Ａに於て、固体媒質５０は
例えば、サフアイア、石英、溶融石英、水晶、勿
論エポキシ樹脂等の高分子化合物やアルミニウム
等の金属などから成る。以下これを結晶と略称す
る。この結晶５０は半円柱状に加工され、その平
板面にこの円柱軸と直交して円筒穴６０が作成さ
れている。又、その円柱面には円筒穴６０に対向
して圧電素子６０が貼付されておりRF電気信号
が印加出来るようリード線等が配置してある。円
筒穴の前に水等の音波を放射しようとする液体媒
質（以下媒質と略称する）が満たしてあるのであ
る。この様な構成において、圧電振動子にRF電
気信号を印加すると、この圧電素子は円柱面に貼
付されているから第３図Ｂに示すように、所定の
焦点をもつた円筒振動子として発生した音波は、
横集束される。この動作は先の第２図に於ける円
筒レンズＬ１と同じである。この横集束された音
波は結晶５０内を伝播した後、結晶と媒質の円筒
状の界面で今度は縦集束されるわけである。これ
は、結晶の方が媒質より音速が早い事によるもの
で、この部分は第２図に於ける円筒レンズＬ２に
対応した動作をしている事は明らかであろう。こ
の様に本実施例では円筒形の音源とそれと直交す
る円筒形の正のレンズを配置した事により本発明
を具現させたのである。本実施例に於ける圧電素
子としては、酸化亜鉛や硫化カドミウム又はニオ
ブ酸リチウム等の圧電薄膜を用いても良いし、
PVDF等有機圧電フイルムを用いても良い。又、
本実施例では円筒集束を用いたが、光学部門で知
られている様に収差等の改善の為、放物柱や楕円
柱の一部を用いても良い。 FIG. 3A and FIG. 3B are diagrams showing one embodiment of the present invention. In FIG. 3A, the solid medium 50 is made of, for example, sapphire, quartz, fused silica, crystal, a polymer compound such as epoxy resin, or a metal such as aluminum. Hereinafter, this will be abbreviated as a crystal. This crystal 50 is processed into a semi-cylindrical shape, and a cylindrical hole 60 is formed in the flat surface of the crystal 50 perpendicular to the cylinder axis. Further, a piezoelectric element 60 is attached to the cylindrical surface facing the cylindrical hole 60, and lead wires and the like are arranged so that an RF electric signal can be applied. The front of the cylindrical hole is filled with a liquid medium (hereinafter abbreviated as medium) such as water that attempts to radiate sound waves. In this configuration, when an RF electric signal is applied to the piezoelectric vibrator, the piezoelectric element is attached to a cylindrical surface, so it is generated as a cylindrical vibrator with a predetermined focus, as shown in Figure 3B. The sound waves are
Laterally focused. This operation is the same as that of the cylindrical lens L1 in FIG. 2 above. After this horizontally focused sound wave propagates within the crystal 50, it is then longitudinally focused at the cylindrical interface between the crystal and the medium. This is because the speed of sound is faster in the crystal than in the medium, and it is clear that this part operates in a manner corresponding to the cylindrical lens L2 in FIG. 2. As described above, in this embodiment, the present invention is realized by arranging a cylindrical sound source and a cylindrical positive lens perpendicular to the cylindrical sound source. As the piezoelectric element in this example, a piezoelectric thin film of zinc oxide, cadmium sulfide, lithium niobate, etc. may be used,
An organic piezoelectric film such as PVDF may also be used. or,
Although cylindrical focusing is used in this embodiment, a part of a parabolic cylinder or an elliptical cylinder may be used to improve aberrations and the like, as is known in the optical field.
又、本実施例で、２枚の円筒レンズの曲率は独
立に選んでも良いが、両者の所定焦点が一致する
様に選ぶ事が望ましい。 Further, in this embodiment, the curvatures of the two cylindrical lenses may be selected independently, but it is preferable to select them so that the predetermined focal points of both lenses coincide.
第４図Ａ及び第４図Ｂは本発明の他の実施例を
示す図である。本実施例では、円筒形反射鏡と正
の円筒形レンズを直交配列する事により本発明を
実現するのである。 FIGS. 4A and 4B are diagrams showing other embodiments of the present invention. In this embodiment, the present invention is realized by orthogonally arranging a cylindrical reflecting mirror and a positive cylindrical lens.
第４図Ａにおいて結晶８０は、その一部が円柱
面８５である様な柱状をしており、他の２面は平
板状になつており、平板面８１にはこの柱状結晶
の軸と直交して円筒穴９０が作成され、又他の平
板面８２には圧電素子７０が貼付されてあり、円
筒穴９０の前に音波を放射しようとする媒質が満
たしてある物である。圧電素子７０に配置された
リード線等を介して、RF電気信号を圧電素子に
印加した場合を考えると、発生したRF平面波は
Ｘ軸上負の方向に結晶８０内に放射される。この
平面音波は円柱面８５によつて反射され、この円
柱面の曲率で決まる所定焦点へ向けて横集束され
る。この動作は先の第２図に於ける円筒レンズＬ
１と同じである。この横集束された音波は第４図
Ｂに示すように結晶８０内を伝播した後、結晶と
媒質の円筒状の界面で今度は縦集束されるわけで
ある。この部分は第２図に於ける円筒レンズＬ２
に対応した動作をしている事は又明らかであろ
う。本実施例では、曲率や圧電素子の材料につい
ては前実施例と同様であるが、圧電素子を貼付す
る面８２が平板であるから、板状圧電素子（例え
ば、PZTや水晶、硫酸リチウム、ニオブ酸リチウ
ム等からなる）が使える。以上のいずれの実施例
においても、第１，第２の円筒集束系が単一の結
晶の界面にて形成されるので両者のアライメント
の調整は不要であろう。さらに圧電素子も結晶の
表面に一体化して形成されるので圧電素子と結晶
の間のアライメントの調整も不要であり、また圧
電素子、結晶間での音波減衰が少なく高効率の探
触子が得られる。 In FIG. 4A, a crystal 80 has a columnar shape with a part of it being a cylindrical surface 85, and the other two surfaces are flat, and the flat surface 81 is perpendicular to the axis of this columnar crystal. A cylindrical hole 90 is created, a piezoelectric element 70 is attached to the other flat plate surface 82, and the front of the cylindrical hole 90 is filled with a medium from which sound waves are to be emitted. Considering the case where an RF electric signal is applied to the piezoelectric element through a lead wire or the like placed on the piezoelectric element 70, the generated RF plane wave is radiated into the crystal 80 in the negative direction on the X-axis. This plane sound wave is reflected by the cylindrical surface 85 and laterally focused toward a predetermined focal point determined by the curvature of this cylindrical surface. This operation is similar to that of the cylindrical lens L in Fig. 2.
Same as 1. After this horizontally focused sound wave propagates within the crystal 80 as shown in FIG. 4B, it is then vertically focused at the cylindrical interface between the crystal and the medium. This part is the cylindrical lens L2 in Figure 2.
It is also clear that the behavior corresponds to that. In this example, the curvature and the material of the piezoelectric element are the same as those in the previous example, but since the surface 82 on which the piezoelectric element is pasted is a flat plate, a plate-shaped piezoelectric element (for example, PZT, crystal, lithium sulfate, niobium (composed of lithium oxide, etc.) can be used. In any of the above embodiments, since the first and second cylindrical focusing systems are formed at the interface of a single crystal, adjustment of their alignment may not be necessary. Furthermore, since the piezoelectric element is formed integrally with the surface of the crystal, there is no need to adjust the alignment between the piezoelectric element and the crystal, and a highly efficient probe with low acoustic attenuation between the piezoelectric element and the crystal can be obtained. It will be done.
第５図は上記の実施例と比較するための参考例
を示す図である。この例では、２つの円筒形レン
ズを直交配列する。即ち、結晶１００は基本的に
は４角柱で一端面に円柱穴１０２が作られてお
り、他端面にこの円柱穴の軸と直交して円柱穴１
０４が作られておる。円柱穴に対向して圧電素子
１０６があり、この圧電素子と円柱穴１０２の間
及び円柱穴１０４は水等の媒質で満たされてい
る。この様な構成の場合、圧電素子１０６より発
した平面音波は水と結晶との円柱状の界面１０２
により横集束され、しかる後に界面１０４の結晶
―媒質により縦集束されるのである。なお矢印
は、この結晶系内での進行の様子を示す。この例
では圧電素子と結晶とが一体化されておらず探触
子として両者のアライメントの調査が必要とな
る。また圧電素子から発する音波は液体媒質
（水）を介して結晶に入射するのでこの間の減衰
が大きく、第３図、第４図の実施例と比較して変
換効率（感度）が低下するとの欠点を有する。 FIG. 5 is a diagram showing a reference example for comparison with the above embodiment. In this example, two cylindrical lenses are arranged orthogonally. That is, the crystal 100 is basically a square prism with a cylindrical hole 102 formed on one end surface, and a cylindrical hole 102 perpendicular to the axis of the cylindrical hole formed on the other end surface.
04 is being made. There is a piezoelectric element 106 facing the cylindrical hole, and the space between the piezoelectric element and the cylindrical hole 102 and the cylindrical hole 104 is filled with a medium such as water. In such a configuration, the plane sound waves emitted from the piezoelectric element 106 reach the cylindrical interface 102 between the water and the crystal.
The light is laterally focused by the crystal-medium interface 104, and then longitudinally by the crystal-medium interface 104. Note that the arrows indicate the progress within this crystal system. In this example, the piezoelectric element and the crystal are not integrated, and it is necessary to investigate the alignment of the two as a probe. In addition, since the sound waves emitted from the piezoelectric element enter the crystal through the liquid medium (water), the attenuation during this period is large, resulting in a reduction in conversion efficiency (sensitivity) compared to the embodiments shown in Figures 3 and 4. has.
第６図は本発明の第３の実施例を示す図であ
る。本実施例では、円柱状音源と円柱状反射鏡を
直交して配置する事により本発明を具現する。 FIG. 6 is a diagram showing a third embodiment of the present invention. In this embodiment, the present invention is implemented by arranging a cylindrical sound source and a cylindrical reflecting mirror orthogonally.
即ち、結晶１１０は、その一端１１４が円柱状
を成しており、又他端１１２，１１８はそれぞれ
円柱状、平板状をなしているのである。円柱状の
面１１４には、圧電素子１１６が貼付され、リー
ド線の結線がなされており、平板状面１１８の前
は音波を放射すべき媒質で満たされている。円筒
形圧電素子１１６より放射された縦集束された音
波は結晶１１０内を伝播した後、界面１１２即ち
円筒反射鏡により反射、横集束され平板界面１１
８を通つて媒質内へ放射されるわけである。図中
破線矢印は、一音線につき結晶内での進行の様子
を示したものである。 That is, one end 114 of the crystal 110 has a cylindrical shape, and the other ends 112 and 118 have a cylindrical shape and a flat plate shape, respectively. A piezoelectric element 116 is attached to the cylindrical surface 114 and lead wires are connected thereto, and the area in front of the flat surface 118 is filled with a medium from which sound waves are to be emitted. The vertically focused sound waves emitted from the cylindrical piezoelectric element 116 propagate within the crystal 110, and then are reflected by the interface 112, that is, the cylindrical reflector, and are laterally focused to reach the flat plate interface 11.
8 and is radiated into the medium. The broken line arrow in the figure shows the progress of the one-tone line within the crystal.
第７図は第６図の実施例と比較するための参考
例を示す図である。本実施例では円筒形の正のレ
ンズと円筒形反射鏡を直交して配置する事により
本考案を具現化する。即ち、結晶１２０は、その
一部が円柱面１２４であつて、更に他の一面１２
２にはこの円柱軸と直交して円柱状の穴が作成し
てあり、この円柱穴１２２と他の一平板面１２６
は媒質で満たされているのである。図中、左側か
らＺ軸の正の方向へ入射した平面音波は、媒質と
結晶との円柱状界面１２２で横集束される。この
横集束された音波は結晶１２０内を伝播した後、
円柱状界面１２４によつて反射、縦集束され、平
板面１２６を介して媒質中に集束音波を放射する
わけである。図中、破線矢印は、一音線につきこ
の結晶内を伝播する様子を示したものである。こ
の例でも、第６図に実施例と比較して、圧電素子
と結晶とのアライメントの調整が必要である。液
体媒質中での減衰により変換効率が低下するなど
の欠点を有している。 FIG. 7 is a diagram showing a reference example for comparison with the embodiment shown in FIG. In this embodiment, the present invention is realized by arranging a cylindrical positive lens and a cylindrical reflecting mirror orthogonally. That is, a part of the crystal 120 is a cylindrical surface 124, and another surface 124 is a cylindrical surface 124.
2 has a cylindrical hole made perpendicular to this cylindrical axis, and this cylindrical hole 122 and another flat plate surface 126
is filled with a medium. In the figure, a plane sound wave incident from the left side in the positive direction of the Z axis is laterally focused at the cylindrical interface 122 between the medium and the crystal. After this transversely focused sound wave propagates within the crystal 120,
It is reflected and longitudinally focused by the cylindrical interface 124, and radiates a focused sound wave into the medium via the flat plate surface 126. In the figure, the broken arrow indicates how a single tone ray propagates within this crystal. In this example as well, it is necessary to adjust the alignment between the piezoelectric element and the crystal compared to the embodiment shown in FIG. It has drawbacks such as reduced conversion efficiency due to attenuation in the liquid medium.
第８図は本発明の第４の実施例を示す図であ
る。本実施例では２つの円筒形反射鏡を直交して
配置する事により本考案を具現化したものであ
る。即ち、結晶１３０は４つの面、平板面１３
８，１３６及び互いにその軸が直交した1/4円柱
面１３２，１３４からなる。平板面１３６は媒質
と接しており、平板面１３８には圧電素子１３８
が貼付されている。圧電素子１３８につけられた
リード線等により、この圧電素子にRF電気信号
を加えると、結晶１３０中にｘ軸の負の方向に平
面音波が放射される。この平面音波は円柱状界面
１３２で反射、横集束され、しかる後に円柱状界
面１３４で反射、縦集束され平板面１３６を介し
て媒質中に集束音波を放射するわけである。図
中、破線矢印は一音線のこの結晶内での伝播の様
子を示している。 FIG. 8 is a diagram showing a fourth embodiment of the present invention. In this embodiment, the present invention is realized by arranging two cylindrical reflecting mirrors orthogonally. That is, the crystal 130 has four planes, a flat plate plane 13
8, 136 and 1/4 cylindrical surfaces 132, 134 whose axes are perpendicular to each other. The flat plate surface 136 is in contact with the medium, and the flat plate surface 138 has a piezoelectric element 138.
is attached. When an RF electric signal is applied to the piezoelectric element 138 through a lead wire or the like attached to the piezoelectric element 138, a plane sound wave is radiated into the crystal 130 in the negative direction of the x-axis. This plane sound wave is reflected at the cylindrical interface 132 and focused laterally, and then reflected at the cylindrical interface 134 and focused vertically, and the focused sound wave is radiated into the medium via the flat plate surface 136. In the figure, the dashed arrow indicates the propagation of the one-tone ray within this crystal.
以上の実施例に於ては、説明の為集束音波を送
出する際の働きについて述べたが、発散音波を集
束する受信の場合も全く同様に利用する事は明ら
かであろう。 In the above embodiment, the function when transmitting focused sound waves has been described for the sake of explanation, but it is obvious that the function can be used in exactly the same way when receiving focused diverging sound waves.
以上説明した如く本発明によれば、比較的加工
が容易な円柱状集束系を２つ直交させて配置する
事により球面集束系と同様の集束ビームを得る事
が出来るから、集束される音波エネルギーを用い
る諸装置、例えば音波顕微鏡等において装置の製
作、加工上の容易さにおいて大きな効果を発揮
し、その工業的価値は大なるものがある。 As explained above, according to the present invention, a focused beam similar to that of a spherical focusing system can be obtained by arranging two cylindrical focusing systems, which are relatively easy to process, orthogonally, so that the focused sound wave energy It has a great effect on the ease of manufacturing and processing of various devices that use it, such as sonic microscopes, and has great industrial value.
第１図は従来の音波集束法を示す図、第２図は
本発明の原理を説明する図、第３図Ａと第３図Ｂ
は本発明の実施例を示す為の図、第４図Ａと第４
図Ｂ、第６図及び第８図はそれぞれ本発明の他の
実施例を示す図、第５図及び第７図は本発明の実
施例と比較する参考例を示す図である。
Figure 1 is a diagram showing the conventional sound wave focusing method, Figure 2 is a diagram explaining the principle of the present invention, Figures 3A and 3B
Figures 4A and 4 are diagrams for showing embodiments of the present invention.
FIG. B, FIG. 6, and FIG. 8 are views showing other embodiments of the present invention, and FIGS. 5 and 7 are views showing reference examples for comparison with the embodiments of the present invention.
Claims (1)
体媒質に送波し、該液体媒質上の所定焦点に音波
を集束し、あるいは前記焦点からの発散音波を前
記固体媒質を介して前記圧電素子に集束する音波
探触子において、前記圧電素子は前記固体媒質の
第１の界面に形成された円筒集束効果を有する圧
電素子であり、該圧電素子から前記液体媒質に至
る音波が通過もしくは反射する前記固体媒質の第
２の界面は前記圧電素子の集束効果の方向と直交
する方向の集束効果を有する円筒集束系を成すこ
とを特徴とする音波探触子。 ２ 前記圧電素子は、前記固体媒質の円筒状をな
す面に形成された円筒振動子であることを特徴と
する特許請求の範囲第１項に記載の音波探触子。[Claims] 1. A method of transmitting sound waves emitted by a piezoelectric element to a liquid medium via a solid medium, and focusing the sound waves on a predetermined focal point on the liquid medium, or directing a diverging sound wave from the focal point to the solid medium. In the acoustic wave probe that focuses on the piezoelectric element via the piezoelectric element, the piezoelectric element is a piezoelectric element having a cylindrical focusing effect formed at the first interface of the solid medium, and the acoustic wave from the piezoelectric element to the liquid medium is A second interface of the solid medium through which the solid medium passes or is reflected forms a cylindrical focusing system having a focusing effect in a direction perpendicular to the direction of the focusing effect of the piezoelectric element. 2. The sonic probe according to claim 1, wherein the piezoelectric element is a cylindrical vibrator formed on a cylindrical surface of the solid medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57010028A JPS57141553A (en) | 1982-01-27 | 1982-01-27 | Sound wave probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57010028A JPS57141553A (en) | 1982-01-27 | 1982-01-27 | Sound wave probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57141553A JPS57141553A (en) | 1982-09-01 |
| JPS6128939B2 true JPS6128939B2 (en) | 1986-07-03 |
Family
ID=11738936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57010028A Granted JPS57141553A (en) | 1982-01-27 | 1982-01-27 | Sound wave probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57141553A (en) |
-
1982
- 1982-01-27 JP JP57010028A patent/JPS57141553A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57141553A (en) | 1982-09-01 |
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