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JPS6129906B2 - - Google Patents
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JPS6129906B2 - - Google Patents

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Publication number
JPS6129906B2
JPS6129906B2 JP58252200A JP25220083A JPS6129906B2 JP S6129906 B2 JPS6129906 B2 JP S6129906B2 JP 58252200 A JP58252200 A JP 58252200A JP 25220083 A JP25220083 A JP 25220083A JP S6129906 B2 JPS6129906 B2 JP S6129906B2
Authority
JP
Japan
Prior art keywords
clay
kaolin
weight
amount
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58252200A
Other languages
Japanese (ja)
Other versions
JPS60145964A (en
Inventor
Nobuhiko Watanabe
Takashi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toto Ltd filed Critical Toto Ltd
Priority to JP58252200A priority Critical patent/JPS60145964A/en
Publication of JPS60145964A publication Critical patent/JPS60145964A/en
Publication of JPS6129906B2 publication Critical patent/JPS6129906B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】[Detailed description of the invention]

本発明は多孔質の窒化珪素質焼結体を安価に製
造する方法に関する。反応焼結窒化珪素は熱膨脹
係数が小さい、耐熱衝撃性に優れている。溶融金
属に対する耐蝕性が良い、高温で強度低下がない
など優れた性質を持つているため、高温機械部
品、金属工業用耐火物をはじめとする多くの分野
で使用されつつある。本発明者らは複雑な形状を
有する反応焼結窒化珪素成形品を安価で且つ短時
間に製造する方法について研究し、鋳込み成形法
において素地に、粘土量20〜45重量%、カオリン
5〜30重量%で両者の合量25〜50重量%を添加し
て得た成形体を非酸化性含窒素雰囲気において
1400℃〜1500℃で焼成することによつて焼成性質
や可塑性を損うことなしに鋳込成形時の着肉速度
の低下や乾燥クラツクの発生を解消して上記目的
を満し得ることを見出し本発明に至つた。 即ち本発明はSi30〜75重量%、粘土20〜45重量
%、カオリン5〜30重量%で両者の合量が25〜50
重量%、残部がSi3N4より成る混合粉末を成形
し、該成形体を非酸化性含窒素雰囲気において
1400℃〜1500℃で焼成することを特徴とするもの
である。 以下本発明を詳細に説明する。本発明において
Si量は30〜75重量%におさえることが必要であ
る。Siは窒化してSi3N4ボンドを形成するため満
足できる強度を得るのに必要な最低必要量があ
り、その値は30重量%である。Si量増すにつれて
Si3N4ボンドの量が多くなり焼結体強度は増大す
るが、Si量が多くなるにつれて成形体内で均一な
窒化反応を進行させることが難しくなる。この理
由は珪素の窒化が著しい発熱反応であることにあ
り、反応熱によつて反応が急激に進行し、成形体
内部の温度が上昇するため、未反応の珪素が溶融
して気孔を閉塞し、それ以上の窒化を阻害した
り、大きな気孔を生じ組織を不均一にしたりす
る。このためSi量の多いものでは炉の昇温速度や
窒素の供給速度に細心の注意を払う必要があり、
窒化焼成に長時間を要するようになる。安価な窒
化珪素質焼結体を製造する見地からは短時間で焼
成できることが望ましく、Si量は75重量%以下に
おさえる必要がある。 本発明における粘土及びカオリンの添加には
下記の効果がある。その第1の効果は焼成工程
において粘土及びカオリンに、Siの窒素化によ
る発熱を吸収し且つSiの溶融による焼成体組織
の不均一化を抑制する作用のあることを見出し
た結果焼成工程の短縮化が可能になつたことで
ある。 乾燥した成形体N2ガス又はN2+H2ガス、
NH3ガスなど非酸化性含窒素雰囲気中1150〜
1400℃域で徐々に昇温して窒化反応を進行さ
せ、さらに反応を完結させるため最高1500℃ま
で昇温させる。この過程で粘土及びカオリンは
Siと反応してSi3N4、O′相、X相などを形成す
る。粘土及びカオリンはSiが窒化する際にフイ
ラーとして反応熱を吸収するだけでなく、
Si3N4、O′相、X相が生成する際にも吸熱し、
Si窒化による以上温度上昇を抑制する。 従来、粘土は一般的に可塑性を素地に付与す
る結果、鋳込成形において脱型、仕上げ、乾燥
工程を容易化し、併せて複雑形状品の成形を可
能にする機能をもつていた。 ところが、本製法においては粘土及びカオリ
ンに、Siの窒化時の発熱を吸収し且つSi溶融に
よる焼成体組織の不均一化を抑制する作用のあ
ることを見出すことによつて、Siの発熱反応に
よつて生じる、未反応のSiの溶融による気孔の
発生や、組織を不均一にする大きな気孔の発生
を阻止して、窒化焼結を短時間で可能にした。 尚、焼成温度は1400〜1500℃が適当である。
1500℃以上では焼成体は発泡し均質な焼結体が
得られない。逆に1400℃以下では上述した窒化
反応が完結しにくい。 粘土及びカオリン添加の第2の効果は素地に
可塑性を付与する結果、鋳込成形において脱
型、仕上げ、乾燥工程を容易化して複雑形状品
を成形可能にすることである。Si,Si3N4のみ
からなり粘土及びカオリンを含まない素地を鋳
込成形した場合には脱型した成形体を均一に乾
燥させることが重要で、少しでも不均一乾燥が
生じるとクラツクが発生する。この理由は素地
が可塑性をほとんど有しないためで、たとえば
成形体表面の水分減少量が内部よりも少しでも
大きくなると、表面が内部より大きく収縮する
ため応力が生じクラツクが発生する。したがつ
てこのような素地では脱型した成形体を直ちに
飽和湿温雰囲気中に置いて表面乾燥をおさえ、
先ず成形体内の水分を均一化した後、徐々に湿
度を低下させ、成形体の水分を均一に低下させ
ていくことが必要である。このため乾燥に細心
の注意を要し、乾燥時間が長くなる欠点があ
る。さらに粘土を含まない素地では可塑性が小
さいために脱型時にクラツクが生じ易く、脱型
が容易な単純形状のものしか成形ができない問
題もある。又成形体がもろいため、その加工に
細心の注意が必要である。 これらの問題はSi、Si3N4素地に粘土とカオ
リンを添加することによつて解決でき、その添
加量の下限は10重量%である。粘土及びカオリ
ン量の増大につれて素地の可塑性は大きくな
る。このような素地では乾燥工程で成形体内に
多少の水分差が生じ収縮差による応力が発生し
ても、素地の可塑変形によつて応力が緩和され
るため、脱型時にクラツクが発生しにくい。従
つて成形体を加熱空気中で乾燥してもクラツク
の発生がなく、乾燥工程が簡略になるだけでな
く時間の短縮が可能になる。又成形体がある程
度の変形に耐えるため、より複雑な形状のもの
でクラツクを生じることなく脱型が可能で、鋳
込成形可能な形状範囲が著しく拡大できる。し
かも、粘土量のみが増大すると素地中の微粒子
量が多くなりすぎ着肉速度の低下や乾燥クラツ
クが発生し易くなるも粘土に比べると粒径が大
きく且つ粘土と同一な化学組成を有するカオリ
ンを添加する為可塑性を犠性にすることなく着
肉速度の低下、乾燥クラツクの発生の防止が可
能となる。しかし、カオリンは粘土に比べると
可塑性が小さいから、着肉速度が小さい、クラ
ツクが生じやすいという問題を解決できる範囲
で、できるだけ使用量を押えるべきである。粘
土量は少なくとも全重量の20重量%は含まれて
いることが好ましく、カオリン量は粘土、カオ
リン合量が25〜50重量%範囲内では30重量%が
上限である。仮に粘土、カオリンの合量が50重
量%を越すと焼成素地の熱膨脹係数が大きくな
り、耐熱衝撃性が低下し好ましくない。 第3の効果は、原料コストの低廉化を図るこ
とである。これは粘土及びカオリンの価格が
Si、Si3N4に比べて1/10以下と安価なことであ
る。 第4の効果は粉砕時間が短縮できることであ
る。鋳込成形では素地中に1μ以下の粒子が20
%以上あることが優れた成形体を得る為に必要
であるが、粘土とカオリンは1μ以下の微粒子
の凝集体であり、水中で撹拌すると容易に分散
するからSi、Si3N4を微粉砕する必要がなくな
り、粉砕工程の簡略化、短縮化が可能である。 粘土添加の次の効果は焼結体性質に及ぼす粘
土及びカオリン添加の影響についてである。こ
れは粘土、カオリンと共に、Siが30重量%以上
存在することにより小さくできる。これは焼成
工程でSiが粘土Al2Si2O5(OH)4を還元して反
応を促進し、Si3N4、O′相、X相を生成させる
ためと思われる。成形体をN2中1500℃で焼成
した場合、粘土、カオリン添加素地は反応焼結
Si3N4素地とほぼ同じ気孔率・曲げ強度を示
す、耐熱衝撃性も大差なく、耐酸化性について
は優れた性質さえ示した。このような性質が得
られる理由は焼結体が主として反応焼結品と同
じSi3N4結晶から成つており、この他にSi−Al
−O−N原子より成るO′相、X相が少量加わ
るにすぎないためである。 次に本発明の理解を深めるため具体的な実施例
について説明する。 実施例 1 市販の金属珪素(平均径6μ、純度98.5%)
42.3重量%と、Si3N4(60mesh純度98.5%)17.7
重量%を各々ボールミルに入れ、エタノールを加
えて4hrおよび40hr粉砕し平均径3μおよび1.5μ
の粉体を得た。エタノールを除去した後空気中、
150℃で乾燥したSi、Si3N4及び粘土(伊賀蛙目粘
土)、カオリン(北鮮カオリン)を表1のように
調合し、水およびアクリル酸ソーダを加えてポツ
トで16hr撹拌し水分55%の泥漿を調製した。10×
5×40mmのテストピースを鋳込成形し、その性質
を調べたところ表1のような成形性質が得られ
た。 カオリン量を粘土量に比べて徐々に増量するに
つれて可塑性係数を減少させることなく着肉速度
が大きくなることが認められる。
The present invention relates to a method for manufacturing a porous silicon nitride sintered body at low cost. Reactive sintered silicon nitride has a small coefficient of thermal expansion and excellent thermal shock resistance. Because it has excellent properties such as good corrosion resistance against molten metal and no loss of strength at high temperatures, it is being used in many fields including high-temperature mechanical parts and metal industrial refractories. The present inventors have researched a method for manufacturing reaction-sintered silicon nitride molded products with complex shapes at low cost and in a short time. A molded product obtained by adding 25 to 50% by weight of both in a non-oxidizing nitrogen-containing atmosphere.
It has been discovered that by firing at 1400°C to 1500°C, the above objectives can be achieved by eliminating the decrease in the deposition rate and the occurrence of drying cracks during cast molding without impairing the firing properties or plasticity. This led to the present invention. That is, in the present invention, Si is 30 to 75% by weight, clay is 20 to 45% by weight, and kaolin is 5 to 30% by weight, and the total amount of both is 25 to 50%.
% by weight, the balance being Si 3 N 4 was molded, and the molded body was placed in a non-oxidizing nitrogen-containing atmosphere.
It is characterized by being fired at 1400°C to 1500°C. The present invention will be explained in detail below. In the present invention
It is necessary to suppress the amount of Si to 30 to 75% by weight. Since Si is nitrided to form a Si 3 N 4 bond, there is a minimum amount necessary to obtain satisfactory strength, and the value is 30% by weight. As the amount of Si increases
As the amount of Si 3 N 4 bond increases, the strength of the sintered body increases, but as the amount of Si increases, it becomes difficult to proceed with a uniform nitriding reaction within the compact. The reason for this is that nitriding silicon is a significantly exothermic reaction, and the heat of reaction causes the reaction to proceed rapidly, raising the temperature inside the compact, causing unreacted silicon to melt and close the pores. , inhibiting further nitridation or producing large pores and making the structure non-uniform. For this reason, for products with a large amount of Si, it is necessary to pay close attention to the heating rate of the furnace and the nitrogen supply rate.
Nitriding firing takes a long time. From the standpoint of producing an inexpensive silicon nitride sintered body, it is desirable to be able to fire it in a short time, and the amount of Si must be kept at 75% by weight or less. The addition of clay and kaolin in the present invention has the following effects. The first effect is that clay and kaolin have the effect of absorbing the heat generated by the nitrogenization of Si during the firing process and suppressing the unevenness of the structure of the fired body due to the melting of Si, resulting in a reduction in the firing process. This means that it has become possible to Dry compact N2 gas or N2 + H2 gas,
1150 ~ in non-oxidizing nitrogen-containing atmosphere such as NH3 gas
The temperature is gradually raised in the 1400°C range to allow the nitriding reaction to proceed, and then the temperature is raised to a maximum of 1500°C to complete the reaction. In this process, clay and kaolin are
It reacts with Si to form Si 3 N 4 , O' phase, X phase, etc. Clay and kaolin not only absorb reaction heat as fillers when Si is nitrided, but also
It also absorbs heat when Si 3 N 4 , O′ phase, and X phase are generated.
This suppresses the temperature rise caused by Si nitriding. Conventionally, clay has generally had the function of imparting plasticity to the base material, thereby facilitating the demolding, finishing, and drying processes in casting molding, and at the same time, making it possible to mold products with complex shapes. However, in this manufacturing method, we discovered that clay and kaolin have the ability to absorb the heat generated during nitriding of Si and suppress the non-uniformity of the structure of the fired product due to Si melting, thereby reducing the exothermic reaction of Si. This prevents the generation of pores due to the melting of unreacted Si and the generation of large pores that make the structure non-uniform, making it possible to perform nitriding sintering in a short time. Incidentally, the firing temperature is suitably 1400 to 1500°C.
At temperatures above 1500°C, the fired body foams and a homogeneous sintered body cannot be obtained. On the other hand, below 1400°C, the above-mentioned nitriding reaction is difficult to complete. The second effect of adding clay and kaolin is that as a result of imparting plasticity to the base material, demolding, finishing, and drying steps in casting molding are facilitated, thereby making it possible to mold products with complex shapes. When casting and molding a base material made only of Si, Si 3 N 4 and containing no clay or kaolin, it is important to dry the demolded molded product uniformly; even the slightest uneven drying will cause cracks. do. The reason for this is that the base material has almost no plasticity; for example, if the amount of moisture loss on the surface of the molded product is even slightly greater than that on the inside, the surface will shrink more than the inside, creating stress and causing cracks. Therefore, for such base materials, the demolded molded product must be immediately placed in a saturated humid temperature atmosphere to prevent surface drying.
First, it is necessary to equalize the moisture content in the molded body, and then gradually lower the humidity to uniformly reduce the moisture content in the molded body. For this reason, there is a drawback that careful attention is required for drying and the drying time is long. Furthermore, since clay-free base materials have low plasticity, they tend to crack when demolded, and there is also the problem that only simple shapes that can be easily demolded can be molded. Furthermore, since the molded product is fragile, great care must be taken when processing it. These problems can be solved by adding clay and kaolin to the Si, Si 3 N 4 matrix, and the lower limit of the amount added is 10% by weight. The plasticity of the matrix increases as the amount of clay and kaolin increases. In such a base material, even if some moisture difference occurs in the molded body during the drying process and stress is generated due to the difference in shrinkage, the stress is alleviated by plastic deformation of the base material, so cracks are less likely to occur during demolding. Therefore, no cracks occur even when the molded product is dried in heated air, which not only simplifies the drying process but also shortens the time. In addition, since the molded product can withstand deformation to a certain extent, it is possible to demold even more complex shapes without causing cracks, and the range of shapes that can be cast can be significantly expanded. Moreover, if only the amount of clay increases, the amount of fine particles in the base material will become too large, resulting in a decrease in the deposition rate and the occurrence of dry cracks. Because it is added, it is possible to reduce the deposition speed and prevent the occurrence of dry cracks without sacrificing plasticity. However, since kaolin has less plasticity than clay, the amount used should be kept as low as possible within the range that can solve the problems of slow inking speed and easy cracking. The amount of clay is preferably at least 20% by weight of the total weight, and the upper limit of the amount of kaolin is 30% by weight when the total amount of clay and kaolin is within the range of 25 to 50% by weight. If the total amount of clay and kaolin exceeds 50% by weight, the coefficient of thermal expansion of the fired base material will increase and the thermal shock resistance will decrease, which is not preferable. The third effect is to reduce raw material costs. This is because the price of clay and kaolin is
It is cheaper, less than 1/10 compared to Si and Si 3 N 4 . The fourth effect is that the grinding time can be shortened. In casting molding, there are 20 particles of 1μ or less in the base material.
% or more is necessary to obtain an excellent molded product, but since clay and kaolin are aggregates of fine particles of 1μ or less and easily disperse when stirred in water, it is necessary to finely pulverize Si and Si 3 N 4 . This eliminates the need for pulverization, making it possible to simplify and shorten the pulverization process. The next effect of clay addition is the effect of clay and kaolin addition on the properties of the sintered body. This can be reduced by the presence of 30% by weight or more of Si together with clay and kaolin. This seems to be because Si reduces the clay Al 2 Si 2 O 5 (OH) 4 during the firing process and promotes the reaction, producing Si 3 N 4 , O' phase, and X phase. When the compact is fired at 1500℃ in N2 , the clay and kaolin-added base material undergoes reaction sintering.
It showed almost the same porosity and bending strength as the Si 3 N 4 base material, had no significant difference in thermal shock resistance, and even showed excellent oxidation resistance. The reason why such properties are obtained is that the sintered body is mainly composed of Si 3 N 4 crystals, which are the same as the reaction sintered products, and in addition, Si-Al
This is because only a small amount of O' phase and X phase consisting of -O-N atoms are added. Next, specific examples will be described in order to better understand the present invention. Example 1 Commercially available metallic silicon (average diameter 6μ, purity 98.5%)
42.3wt%, Si3N4 ( 60mesh purity 98.5%) 17.7
Put each weight% into a ball mill, add ethanol and grind for 4 hours and 40 hours to obtain average diameters of 3 μ and 1.5 μ.
of powder was obtained. In the air after removing ethanol,
Si, Si 3 N 4 dried at 150℃, clay (Iga Frogme clay), and kaolin (North Korean kaolin) were mixed as shown in Table 1, water and sodium acrylate were added, and the mixture was stirred in a pot for 16 hours to reduce the moisture content to 55 % slurry was prepared. 10×
A 5 x 40 mm test piece was cast and its properties investigated, and the molding properties shown in Table 1 were obtained. It is observed that as the amount of kaolin is gradually increased compared to the amount of clay, the inking rate increases without decreasing the plasticity coefficient.

【表】 実施例 2 実施例1の試料をアルミナルツボに入れ、タン
マン炉で焼成した。真空置換により炉内をN2
囲気にした後、1150℃までは400℃/hrで昇温
し、1150〜1350℃間は100℃/hrで昇温し窒化反
応を進行させた。 さらに1500℃まで400℃/hrで昇温し電流を切
り放冷した。焼結体性質は次の通り。
[Table] Example 2 The sample of Example 1 was placed in an alumina crucible and fired in a Tammann furnace. After creating a N 2 atmosphere in the furnace by vacuum displacement, the temperature was raised at a rate of 400°C/hr up to 1150°C, and at a rate of 100°C/hr from 1150 to 1350°C to advance the nitriding reaction. The temperature was further increased to 1500°C at a rate of 400°C/hr, and the current was then turned off and allowed to cool. The properties of the sintered body are as follows.

【表】 カオリン添加量の増大に対して気孔率、強度は
範囲内で一定であるが熱膨脹係数が若干大きくな
る。又粘土及びカオリン添加により、α,β
Si3N4の他にO′相、X相の生成が見られた。 実施例 3 実施例2と同様な行程で表2中に示す試料を焼
結せしめて焼結体を焼成した。焼結体の性質は次
の通り。
[Table] As the amount of kaolin added increases, the porosity and strength remain constant within the range, but the coefficient of thermal expansion slightly increases. Also, by adding clay and kaolin, α, β
In addition to Si 3 N 4 , the formation of O' phase and X phase was observed. Example 3 The samples shown in Table 2 were sintered to produce sintered bodies in the same manner as in Example 2. The properties of the sintered body are as follows.

【表】 この実施例の場合、粘土とカオリンを添加する
とα、βSi3N4の他にO′相、X相の生成が見られ
る。粘土及びカオリン添加量0%の反応焼結素地
のものに比べカオリン及び粘土を添加すると添加
量50%までは気孔率、強度、熱膨脹係数について
バラツキの範囲で、大差はないが、添加量が60重
量%をこすと、熱膨脹係数が著しく大きくなり、
好ましくない。 本発明は以上のように、Si30〜75重量%、粘土
20〜45重量%、カオリン5〜30重量%で両者の合
量が25〜50重量%、残部がSi3N4より成る混合粉
末を成形し、該成形体を非酸化性含窒素雰囲気に
おいて1400℃〜1500℃で焼成したので、焼結体性
質を損うことなしに可塑性向上による成形の容易
化、窒化工程の短縮化、コストの低減化、粉砕工
程の簡略化等様々な利点を有するばかりか、粘土
量のみが増大すると素地中の微粒子量が多くなり
すぎ着肉速度の低下や乾燥クラツクが発生し易く
なるも粘土に比べると粒径が大きく且つ粘土と同
一な化学組成を有するカオリンを添加する為可塑
性を犠性にすることなく着肉速度の低下、乾燥ク
ラツクの発生の防止が可能となり、歩留りの向上
をより図ることが可能となり、窒化珪素質焼結体
を安価且つ短時間に製造できる目的を達成でき
る。
[Table] In the case of this example, when clay and kaolin are added, in addition to α and βSi 3 N 4 , O' phase and X phase are observed to be formed. Compared to the reaction sintered base with 0% clay and kaolin added, when kaolin and clay are added, the porosity, strength, and thermal expansion coefficient vary within the range up to 50%, and there is no major difference, but when the added amount is 60%. When straining the weight%, the coefficient of thermal expansion becomes significantly large,
Undesirable. As described above, the present invention is based on 30 to 75% by weight of Si and clay.
A mixed powder consisting of 20 to 45% by weight of kaolin, 5 to 30% by weight of kaolin for a total of 25 to 50% by weight, and the balance of Si 3 N 4 was molded, and the molded body was heated in a non-oxidizing nitrogen-containing atmosphere for 1400 min. Since it is fired at temperatures between ℃ and 1500℃, it has various advantages such as easier molding due to improved plasticity, shorter nitriding process, lower cost, and simpler crushing process without impairing the properties of the sintered body. Alternatively, if only the amount of clay increases, the amount of fine particles in the base material will become too large, resulting in a decrease in the deposition rate and the occurrence of dry cracks. Because of this addition, it is possible to reduce the deposition rate and prevent the occurrence of drying cracks without sacrificing the plasticity, making it possible to further improve the yield, making it possible to produce silicon nitride sintered bodies at low cost and in a short time. The purpose of manufacturing can be achieved.

Claims (1)

【特許請求の範囲】[Claims] 1 Si30〜75重量%、粘土20〜45重量%、カオリ
ン5〜30重量%で両者の合量が25〜50重量%、残
部がSi3N4より成る混合粉末を成形し、該成形体
を非酸化性含窒素雰囲気において1400℃〜1500℃
にて焼成することを特徴とする窒化珪素質焼結体
の製造方法。
1 A mixed powder consisting of 30 to 75% by weight of Si, 20 to 45% by weight of clay, and 5 to 30% by weight of kaolin in a total amount of 25 to 50% by weight, with the balance being Si 3 N 4 is molded, and the molded body is 1400℃~1500℃ in non-oxidizing nitrogen atmosphere
1. A method for producing a silicon nitride sintered body, the method comprising: firing a silicon nitride sintered body.
JP58252200A 1983-12-29 1983-12-29 Manufacture of silicon nitride sintered body Granted JPS60145964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58252200A JPS60145964A (en) 1983-12-29 1983-12-29 Manufacture of silicon nitride sintered body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58252200A JPS60145964A (en) 1983-12-29 1983-12-29 Manufacture of silicon nitride sintered body

Publications (2)

Publication Number Publication Date
JPS60145964A JPS60145964A (en) 1985-08-01
JPS6129906B2 true JPS6129906B2 (en) 1986-07-10

Family

ID=17233889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58252200A Granted JPS60145964A (en) 1983-12-29 1983-12-29 Manufacture of silicon nitride sintered body

Country Status (1)

Country Link
JP (1) JPS60145964A (en)

Also Published As

Publication number Publication date
JPS60145964A (en) 1985-08-01

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