JPS6132836B2 - - Google Patents
Info
- Publication number
- JPS6132836B2 JPS6132836B2 JP56150287A JP15028781A JPS6132836B2 JP S6132836 B2 JPS6132836 B2 JP S6132836B2 JP 56150287 A JP56150287 A JP 56150287A JP 15028781 A JP15028781 A JP 15028781A JP S6132836 B2 JPS6132836 B2 JP S6132836B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric substrate
- piezoelectric
- slit
- displacement
- displacement element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 28
- 230000005684 electric field Effects 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
Landscapes
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】
本発明は電圧印加によつて伸縮変位する圧電式
変位素子の構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the structure of a piezoelectric displacement element that expands and contracts when a voltage is applied.
従来、圧電式変位素子としては圧電基板の一端
を固定し、電界基板の伸縮による他端の変位を用
いるものである。この場合の変位量は、圧電基板
の圧電定数ｄ、圧電基板の変位部の長さを、印
加電圧をＥとしたとき、ｄＥで表わされる。ｄ
とＥは圧電基板の材料により一定の値以下に限定
されるので、大きな変位量を得るにはを大きく
する必要がある。しかしながら、を大きくする
と、変位素子全体の長さが著しく大きくなるの
で、比較的小さい形状で大きな変位量を得ること
を従来不可能であつた。 Conventionally, as a piezoelectric displacement element, one end of a piezoelectric substrate is fixed, and the displacement of the other end due to expansion and contraction of an electric field substrate is used. The amount of displacement in this case is expressed as dE, where the piezoelectric constant d of the piezoelectric substrate, the length of the displaced portion of the piezoelectric substrate and the applied voltage are E. d
Since and E are limited to below a certain value depending on the material of the piezoelectric substrate, it is necessary to increase E to obtain a large amount of displacement. However, increasing the length of the displacement element significantly increases the length of the entire displacement element, so it has conventionally been impossible to obtain a large amount of displacement with a relatively small shape.
本発明は上記の欠点を除去し、比較的小さな形
状で大きな変位量の得られる圧電式変位素子を提
供することを目的とする。すなわち、本発明は圧
電基板に少なくとも一つ以上の片側が開放された
スリツトを設け、スリツトを境界として、電圧印
加時のスリツトに平行な方向の圧電基板の変位を
逆方向としたことを特徴とする変位素子を提供す
るものであり、これにより小形で変位量の大きい
変位素子が得られる。以下に本発明の実施例につ
いて説明する。 SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and provide a piezoelectric displacement element capable of obtaining a large amount of displacement with a relatively small shape. That is, the present invention is characterized in that a piezoelectric substrate is provided with at least one slit that is open on one side, and with the slit as a boundary, the displacement of the piezoelectric substrate in a direction parallel to the slit when a voltage is applied is in the opposite direction. This provides a displacement element that is small and has a large amount of displacement. Examples of the present invention will be described below.
図は本発明の一実施例を示す圧電式変位素子の
構造を示す。図において、１，３は電極、２は圧
電基板、４は支持台、５，６はスリツトである。
矢印Ｐは分極方向を示す。電極１，３間に直流電
圧を印加すると、圧電基板２のスリツト５と側面
との間の部分２ａではの方向に伸び（または縮
む）スリツト５，６間の部分２ｂでは縮み（また
は伸びる）、スリツト６と側面との間の部分２ｃ
は伸びる（縮む）。圧電基板１として長さ＝50
mm、幅40mm、厚さ0.5mmのチタン酸ジルコン酸鉛
系磁器を用いて、幅２mmで長さ45mmのスリツト
５，６を２本図のように設けたのち、圧電基板に
スリツトを境界として逆方向に分極処理した。そ
の後、図のように電極（Au蒸着）１，３を設け
たのち、素子の一端を支持台に固定した。電極
１，３間に500Vの直流電圧を印加した。その場
合の方向の変位量は25μｍであつた。電界の方
向を逆にすることより伸びと縮みが逆になるが、
変位量は同じであつた。一方、上記の圧電基板で
スリツトがない場合では、方向の変位量は９μ
ｍであり、スリツトとつけた素子に比べて変位量
は著しく小さかつた。 The figure shows the structure of a piezoelectric displacement element showing one embodiment of the present invention. In the figure, 1 and 3 are electrodes, 2 is a piezoelectric substrate, 4 is a support base, and 5 and 6 are slits.
Arrow P indicates the polarization direction. When a DC voltage is applied between the electrodes 1 and 3, the portion 2a between the slit 5 and the side surface of the piezoelectric substrate 2 expands (or contracts), and the portion 2b between the slits 5 and 6 contracts (or expands). Part 2c between slit 6 and side surface
expands (shrinks). Length = 50 as piezoelectric substrate 1
Using lead zirconate titanate porcelain with a width of 40 mm and a thickness of 0.5 mm, two slits 5 and 6 with a width of 2 mm and a length of 45 mm are provided as shown in the figure, and the slits are used as boundaries on the piezoelectric substrate. Polarized in the opposite direction. After that, electrodes (Au vapor deposited) 1 and 3 were provided as shown in the figure, and one end of the element was fixed to a support stand. A DC voltage of 500V was applied between electrodes 1 and 3. The amount of directional displacement in that case was 25 μm. Reversing the direction of the electric field reverses the expansion and contraction, but
The amount of displacement was the same. On the other hand, in the case of the above piezoelectric substrate without slits, the amount of directional displacement is 9μ
m, and the amount of displacement was significantly smaller than that of the element with a slit.
なお、実施例ではスリツトを境とした分極方向
を逆としたが、分極方向を同じにし電界の方向を
逆にしても（スリツトを境として分極を分離させ
る）効果は同じである。また、分極方向をに平
行な方向とし、その方向に駆動電界を加えてもよ
い。本発明でスリツトで分離されていない圧電基
板の部分は変位に寄与しないので、その部分は分
極処理がされなくてもよく、電極がなくてもよ
い。また、実施例ではスリツトは２本であるが、
１本以上であればよい。さらには、圧電基板の材
質は実施例に限定されることなく、印加電界によ
り、方向に伸縮する種々の圧電材料を用いるこ
とができる。また、圧電基板の形状も平板にかぎ
られずに円筒状でもよい。なお、スリツトの開放
端を交互に逆にすることは変位量を大きくする上
で重要である。複数のスリツトは互いに平行であ
る方が大きな変位を得る上でもよい。 In the embodiment, the polarization direction with the slit as the boundary was reversed, but the effect is the same even if the polarization direction is the same and the direction of the electric field is reversed (separating the polarization with the slit as the boundary). Alternatively, the polarization direction may be set parallel to , and a driving electric field may be applied in that direction. In the present invention, the portions of the piezoelectric substrate that are not separated by the slits do not contribute to displacement, so these portions do not need to be polarized or have no electrodes. In addition, although there are two slits in the example,
It is sufficient if there is one or more. Furthermore, the material of the piezoelectric substrate is not limited to the embodiments, and various piezoelectric materials that expand and contract in directions depending on the applied electric field can be used. Further, the shape of the piezoelectric substrate is not limited to a flat plate, but may be cylindrical. Note that it is important to alternately reverse the open ends of the slits in order to increase the amount of displacement. It is better for the plurality of slits to be parallel to each other in order to obtain a larger displacement.
以上のように本発明の圧電式変位素子では比較
的小さな形状で大きな変位量を得ることができる
ため、ビデオテープレコードのオートトラツキン
グ用ヘツド駆動素子等に用いることができる。本
発明の圧電式変位素子は変位が直線的であるとと
もに、スリツトの数を増すことにより、同じ圧電
基板の長さで、変位量を著しく大きくすることが
できるため応用範囲が広い。 As described above, the piezoelectric displacement element of the present invention can obtain a large amount of displacement with a relatively small shape, and therefore can be used as a head drive element for auto-tracking of video tape records. The piezoelectric displacement element of the present invention has a wide range of applications because its displacement is linear, and by increasing the number of slits, the amount of displacement can be significantly increased with the same length of piezoelectric substrate.
図は本発明の一実施例の圧電式変位素子の構造
を示す斜視図である。
１，３……電極、２……圧電基板、４……支持
台、５，６……スリツト。
The figure is a perspective view showing the structure of a piezoelectric displacement element according to an embodiment of the present invention. 1, 3... Electrode, 2... Piezoelectric substrate, 4... Support base, 5, 6... Slit.
Claims (1)
が開放されたスリツトを設け、前記スリツトを境
界として、電圧印加時の前記スリツトに平行な方
向の前記圧電基板の変位を逆方向としたことを特
徴とする圧電式変位素子。 ２ 圧電基板は互いに平行な複数個のスリツトを
有し、前記スリツトの開放端が交互に逆向きであ
ることを特徴とする特許請求の範囲第１項記載の
圧電式変位素子。 ３ 圧電基板において、スリツトを境界として分
極処理の方向を互いに逆にしたことを特徴とする
特許請求の範囲第１項記載の圧電式変位素子。 ４ 圧電基板において、少なくとも前記圧電基板
の側面と隣接するスリツトで囲まれた部分と相隣
接するスリツトで囲まれた部分が分極処理されて
いることを特徴とする特許請求の範囲第１項、第
２項または第３項記載の圧電式変位素子。 ５ 圧電基板において、少なくとも前記圧電基板
の側面と隣接するスリツトで囲まれた部分と相隣
接するスリツトで囲まれた部分に電極を設けたこ
とを特徴とする特許請求の範囲第１項、第２項ま
たは第３項に記載の圧電式変位素子。 ６ スリツトで分割された圧電基板の開放端の少
なくとも一つが固定されていることを特徴とする
特許請求の範囲第１項、第２項または第３項記載
の圧電式変位素子。[Scope of Claims] 1. A single piezoelectric substrate is provided with at least one slit that is open on one side, and the displacement of the piezoelectric substrate in a direction parallel to the slit when a voltage is applied is controlled using the slit as a boundary. A piezoelectric displacement element characterized by having a reverse direction. 2. The piezoelectric displacement element according to claim 1, wherein the piezoelectric substrate has a plurality of slits parallel to each other, and the open ends of the slits are alternately oriented in opposite directions. 3. The piezoelectric displacement element according to claim 1, wherein the piezoelectric substrate is polarized in opposite directions with respect to the slit as a boundary. 4. In the piezoelectric substrate, at least a portion surrounded by a slit adjacent to the side surface of the piezoelectric substrate and a portion surrounded by a slit adjacent to the side surface of the piezoelectric substrate are polarized. The piezoelectric displacement element according to item 2 or 3. 5. In the piezoelectric substrate, electrodes are provided at least in a portion surrounded by a slit adjacent to a side surface of the piezoelectric substrate and a portion surrounded by a slit adjacent to the side surface of the piezoelectric substrate. The piezoelectric displacement element according to item 1 or 3. 6. The piezoelectric displacement element according to claim 1, 2, or 3, wherein at least one of the open ends of the piezoelectric substrate divided by slits is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56150287A JPS5851578A (en) | 1981-09-22 | 1981-09-22 | Piezoelectric displacement element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56150287A JPS5851578A (en) | 1981-09-22 | 1981-09-22 | Piezoelectric displacement element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5851578A JPS5851578A (en) | 1983-03-26 |
| JPS6132836B2 true JPS6132836B2 (en) | 1986-07-29 |
Family
ID=15493676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56150287A Granted JPS5851578A (en) | 1981-09-22 | 1981-09-22 | Piezoelectric displacement element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5851578A (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197929A (en) * | 1984-03-22 | 1985-10-07 | Toshiba Corp | Head device of magnetic recording and reproducing device |
| JPS61148885A (en) * | 1984-12-21 | 1986-07-07 | Japan Storage Battery Co Ltd | Piezoelectric displacement device |
| JPS61148886A (en) * | 1984-12-21 | 1986-07-07 | Japan Storage Battery Co Ltd | Piezoelectric displacement device |
| JPH02108353U (en) * | 1989-02-15 | 1990-08-29 | ||
| JPH0361360U (en) * | 1989-10-18 | 1991-06-17 | ||
| JP2958263B2 (en) * | 1995-10-19 | 1999-10-06 | 株式会社荏原製作所 | High temperature regenerator |
| WO1998007183A2 (en) * | 1996-07-25 | 1998-02-19 | Materials Systems Incorporated | Serpentine cross section piezoelectric actuator |
| US6107726A (en) * | 1997-07-25 | 2000-08-22 | Materials Systems, Inc. | Serpentine cross-section piezoelectric linear actuator |
| WO2002045181A1 (en) * | 2000-11-28 | 2002-06-06 | Sae Magnetics (H.K.) Ltd. | Head gimbal assembly with piezoelectric microactuator |
-
1981
- 1981-09-22 JP JP56150287A patent/JPS5851578A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5851578A (en) | 1983-03-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6118637A (en) | Piezoelectric assembly for micropositioning a disc drive head | |
| US4752712A (en) | Piezoelectric laminate stack | |
| US6359370B1 (en) | Piezoelectric multiple degree of freedom actuator | |
| US5901031A (en) | Variable capacitor | |
| JPS6132836B2 (en) | ||
| US5508580A (en) | Vibration wave driven motor | |
| JPH07335951A (en) | Piezoelectric actuator | |
| JP2645832B2 (en) | Vertical effect type monomorph element and driving method thereof | |
| JPH0455355B2 (en) | ||
| JPS5866380A (en) | Electrostriction substrate | |
| JPS61183981A (en) | Piezoelectric displacement device | |
| JPH039633B2 (en) | ||
| US4413886A (en) | Optical switch | |
| JPS5930543Y2 (en) | Stacked electrostrictive drive device | |
| JPH0436231Y2 (en) | ||
| JPH0524749B2 (en) | ||
| JPS61148886A (en) | Piezoelectric displacement device | |
| JPH0443684A (en) | Laminated bimorph type piezoelectric element | |
| JPH0339388U (en) | ||
| JP2651824B2 (en) | Vertical effect bimorph device and driving method thereof | |
| JPH0453008Y2 (en) | ||
| JPH0736462U (en) | Multilayer electrostrictive element | |
| JPH076716Y2 (en) | Cylindrical piezoelectric actuator | |
| JPS61148885A (en) | Piezoelectric displacement device | |
| JPS6039848Y2 (en) | light switch |