JPS6139614B2 - - Google Patents
Info
- Publication number
- JPS6139614B2 JPS6139614B2 JP57033461A JP3346182A JPS6139614B2 JP S6139614 B2 JPS6139614 B2 JP S6139614B2 JP 57033461 A JP57033461 A JP 57033461A JP 3346182 A JP3346182 A JP 3346182A JP S6139614 B2 JPS6139614 B2 JP S6139614B2
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- sensitive
- humidity
- boron
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 17
- 238000010304 firing Methods 0.000 claims description 11
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 10
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 9
- 239000004327 boric acid Substances 0.000 claims description 8
- 230000004044 response Effects 0.000 claims description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 7
- 229910052810 boron oxide Inorganic materials 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000010407 anodic oxide Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- FZQSLXQPHPOTHG-UHFFFAOYSA-N [K+].[K+].O1B([O-])OB2OB([O-])OB1O2 Chemical compound [K+].[K+].O1B([O-])OB2OB([O-])OB1O2 FZQSLXQPHPOTHG-UHFFFAOYSA-N 0.000 claims description 2
- UQGFMSUEHSUPRD-UHFFFAOYSA-N disodium;3,7-dioxido-2,4,6,8,9-pentaoxa-1,3,5,7-tetraborabicyclo[3.3.1]nonane Chemical compound [Na+].[Na+].O1B([O-])OB2OB([O-])OB1O2 UQGFMSUEHSUPRD-UHFFFAOYSA-N 0.000 claims description 2
- 239000002344 surface layer Substances 0.000 claims description 2
- QTKJRSOAQNKAKN-UHFFFAOYSA-O N.[OH2+]B1OB2OB([O-])OB(O1)O2 Chemical compound N.[OH2+]B1OB2OB([O-])OB(O1)O2 QTKJRSOAQNKAKN-UHFFFAOYSA-O 0.000 claims 1
- 229910021538 borax Inorganic materials 0.000 claims 1
- 239000004328 sodium tetraborate Substances 0.000 claims 1
- 235000010339 sodium tetraborate Nutrition 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 description 9
- 150000004706 metal oxides Chemical class 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 235000010338 boric acid Nutrition 0.000 description 6
- 239000008188 pellet Substances 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 239000007858 starting material Substances 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- AETFVXHERMOZAM-UHFFFAOYSA-N B(O)(O)O.N.N Chemical compound B(O)(O)O.N.N AETFVXHERMOZAM-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Description
【発明の詳細な説明】
本発明は、酸化アルミニウムと酸化ホウ素又は
ホウ素との化学結合体を感湿材として用いた感湿
抵抗素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a moisture-sensitive resistance element using a chemical combination of aluminum oxide and boron oxide or boron as a moisture-sensitive material.
雰囲気中の湿度に感心して電気抵抗値が変化す
る感湿抵抗素子としては、従来より既に酸化錫
（SnO2）、酸化鉄（Fe2O3又はFe3O4）、酸化チタ
ン（TiO2）などの金属酸化物或はこれらの複合金
属酸化物の焼結体を用いたもの、アルミニウム
などの金属を陽極酸化して得られる多孔質の金属
酸化膜を用いたもの、塩化リチウム（LiCl）な
どの電解質塩を用いたもの、その他吸湿性樹
脂、有機高分子膜、サーミスタを用いたものなど
が知られている。 Humidity-sensitive resistance elements whose electrical resistance changes depending on the humidity in the atmosphere have traditionally been made of tin oxide (SnO 2 ), iron oxide (Fe 2 O 3 or Fe 3 O 4 ), and titanium oxide (TiO 2 ). Those using metal oxides such as or sintered bodies of these composite metal oxides, those using porous metal oxide films obtained by anodizing metals such as aluminum, lithium chloride (LiCl), etc. Other known methods include those using electrolyte salts, as well as those using hygroscopic resins, organic polymer membranes, and thermistors.
一般に、金属酸化物或は複合金属酸化物を用い
た感湿抵抗素子は感湿範囲が広く、かつ耐熱性に
優れているという長所を有する反面、金属酸化物
特有の不安定性を有するため、感湿特性の再現性
に乏しく、常温、常湿にても応々にして経時変化
を生じ易いという欠点を持つていた。ことに、こ
れら金属酸化物焼結体に於いては、材料自身の性
質はもとより、その細孔径分布や気孔率などの微
視的構造によつても、感度や応答速度などの感湿
特性が左右されるために、良好な感湿特性を持つ
た素子を再現性良く製造することは必ずしも容易
ではない。又、金属酸化物表面への水の化学吸着
による水酸化物の形成、或は汚れによる感湿表面
積の低下などに起因して、感湿特性が比較的短時
間に劣化するという問題を生じていた。このため
感湿素子を定期的に加熱することによつて、化学
吸着水及びその他の付着物を除去する方法が提案
され、実施されている。又、更に、従来の方法で
は全湿度範囲に渡つて良好な指数関数特性を持つ
た感湿素子を得ることは必ずしも容易ではない。 In general, moisture-sensitive resistance elements using metal oxides or composite metal oxides have the advantage of having a wide moisture sensitivity range and excellent heat resistance, but on the other hand, they have instability peculiar to metal oxides. It has the drawback of poor reproducibility of humidity characteristics, and tends to change over time even at room temperature and humidity. In particular, in these metal oxide sintered bodies, moisture-sensitive characteristics such as sensitivity and response speed are affected not only by the properties of the material itself but also by its microscopic structure such as pore size distribution and porosity. Therefore, it is not always easy to manufacture devices with good moisture sensitivity characteristics with good reproducibility. In addition, there is a problem in that the moisture-sensing properties deteriorate in a relatively short period of time due to the formation of hydroxide due to chemical adsorption of water on the metal oxide surface or a reduction in the moisture-sensitive surface area due to dirt. Ta. For this reason, a method has been proposed and implemented in which chemically adsorbed water and other deposits are removed by periodically heating the humidity sensing element. Furthermore, with conventional methods, it is not always easy to obtain a humidity sensitive element having good exponential characteristics over the entire humidity range.
本発明は、上に述べたような従来の金属酸化物
或はこれらの複合焼結体からなる感湿抵抗素子が
有していた欠点を解消するためになされたもの
で、特に、粒度のそろつた酸化アルミニウムとホ
ウ素酸化物とを焼成して細孔のそろつた焼結体を
得ると同時に、ホウ素と酸化アルミニウムとから
なる網目状の化学結合体を生成することによつ
て、経時変化が少く、良好な指数関数特性を有
し、且つ再現性に富んだ感湿特性を有することを
特徴とした感湿抵抗素子を提供するものである。
以下に実施例に従つて本発明を詳細に説明する。 The present invention was made in order to eliminate the drawbacks of the conventional moisture-sensitive resistance elements made of metal oxides or composite sintered bodies thereof as described above. By firing aluminum oxide and boron oxide to obtain a sintered body with uniform pores, at the same time, by creating a network-like chemical bond consisting of boron and aluminum oxide, there is little change over time. The present invention provides a moisture-sensitive resistance element characterized by having good exponential characteristics and moisture-sensitive characteristics with high reproducibility.
The present invention will be described in detail below with reference to Examples.
第１図に本発明になる感湿抵抗素子の構造模式
図を示す。 FIG. 1 shows a schematic structural diagram of a moisture-sensitive resistance element according to the present invention.
図において、１は少なくとも表面に酸化アルミ
ニウムと酸化ホウ素又はホウ素との化学結合体が
形成された感湿抵抗体で、例えば次に説明する工
程を経て作成される。感湿抵抗体１を挟んで両面
に透湿性電極２が形成され、リード線３が引き出
されている。 In the figure, reference numeral 1 denotes a moisture-sensitive resistor in which a chemical bond of aluminum oxide and boron oxide or boron is formed on at least the surface thereof, and is produced, for example, through the steps described below. Moisture permeable electrodes 2 are formed on both sides of the moisture sensitive resistor 1, and lead wires 3 are drawn out.
上記感湿抵抗体１は出発原料として粒度のそろ
つた（300メツシユ）酸化アルミニウム粒子（活
性アルミナ）とホウ酸（H3BO3）を用い、B2O3換
算で15wt％になるように両者を混合する。更に
蒸留水を加えて充分混合した後、まず湯浴上で乾
燥する。次にこれを110〜120℃の温度で約20時
間、空気中で熱処理を行つた後、200〜400Kg／cm2
の圧力で加圧成型して厚さ0.3mm、面積５×５mm2
のペレツトとする。更にこのペレツトを600〜
1000℃の温度で約３時間、空気中で焼成すること
によつて作成した。 The above-mentioned moisture-sensitive resistor 1 uses aluminum oxide particles (activated alumina) of uniform particle size (300 mesh) and boric acid (H 3 BO 3 ) as starting materials, and both are mixed so that the amount of B 2 O 3 is 15 wt%. Mix. After adding distilled water and mixing thoroughly, the mixture is first dried on a hot water bath. Next, this was heat-treated in air at a temperature of 110-120℃ for about 20 hours, and then 200-400Kg/cm 2
Pressure molded with a pressure of 0.3 mm, area 5 x 5 mm 2
pellets. Furthermore, this pellet is 600~
It was created by firing in air at a temperature of 1000°C for about 3 hours.
このようにして得られた感湿抵抗体１の両面
に、透湿性電極２として面積４×４mm2の金蒸着膜
を形成し、これにリード線３をつけて感湿抵抗素
子とした。 A gold vapor deposited film having an area of 4×4 mm 2 was formed as a moisture-permeable electrode 2 on both sides of the moisture-sensitive resistor 1 thus obtained, and a lead wire 3 was attached to this to form a moisture-sensitive resistor element.
第２図に、本実施例に従つて作成しれた感湿抵
抗素子の、雰囲気温度15℃に於ける感湿特性（直
流抵抗値対相対湿度特性）の一例を示す。第２図
中の曲線ａ及びｂは、夫々ペレツトの焼成温度を
600℃及び800℃とし、共に３時間焼成して得た感
湿焼結体からなる感湿特性を示すものである。こ
の図に見られる如く、いずれもほぼ全湿度範囲に
渡つて感心し、相対湿度変化に対し極めて安定且
つ良好な指数関数特性を有することが確認され
た。 FIG. 2 shows an example of the humidity-sensing characteristics (DC resistance value vs. relative humidity characteristics) at an ambient temperature of 15° C. of the humidity-sensitive resistance element produced according to this example. Curves a and b in Figure 2 indicate the pellet firing temperature, respectively.
The moisture-sensitive sintered bodies obtained by firing at 600°C and 800°C for 3 hours exhibit moisture-sensitive properties. As seen in this figure, all of them were impressed over almost the entire humidity range, and it was confirmed that they were extremely stable and had good exponential function characteristics against changes in relative humidity.
これは、上記感湿抵抗体１が、酸化アルミニウ
ムにホウ素酸化物（上記実施例に於いてはホウ
酸）を添加し焼結する工程を経て作成されること
によつて、含有されているアルミニウム原子とホ
ウ素原子（又はイオン）とが酸素原子を介して化
学結合した網目構造体を酸化アルミニウム粒子の
表面に形成していることによるものと考えられ
る。即ち、酸化アルミニウム粒子の表面層にこの
ような網目構造体を形成したことによつて、水の
化学吸着が大幅に抑制された結果、従来問題とな
つていた水の化学吸着による感湿特性への悪影響
が解消されたためと解される。このような効果に
よつて、上記実施例になる感湿抵抗素子は、その
感湿焼結体内に含まれる物理吸着水のみに感応し
て動作するために、感湿特性は相対湿度に対し極
めて良好な指数関数特性を示し、且つ経時変化が
少なく安定したものとなつている。 This is because the moisture-sensitive resistor 1 is created through a process of adding boron oxide (boric acid in the above example) to aluminum oxide and sintering it. This is thought to be due to the formation of a network structure on the surface of the aluminum oxide particles in which atoms and boron atoms (or ions) are chemically bonded via oxygen atoms. In other words, by forming such a network structure on the surface layer of aluminum oxide particles, the chemical adsorption of water is significantly suppressed, resulting in improved moisture sensitivity due to chemical adsorption of water, which had been a problem in the past. This is understood to be because the negative effects of Due to these effects, the moisture-sensitive resistance element of the above embodiment operates in response to only the physically adsorbed water contained in the moisture-sensitive sintered body, so its moisture-sensitive characteristics are extremely sensitive to relative humidity. It shows good exponential function characteristics and is stable with little change over time.
ちなみに、ホウ酸を添加せずに酸化アルミニウ
ム粒子のみを出発原料として、上記実施例と同一
方法で作成した感湿抵抗素子の雰囲気温度15℃に
於ける感湿特性を第３図に参考として示す。第３
図に於いて曲線ｃ及びｄは、夫々ペレツトの焼成
温度を600℃及び1000℃として、共に３時間焼成
を行つたものの特性である。このように、ホウ酸
を添加していないものの感湿特性は、大幅に指数
関数特性からはずれ且つ、常温常湿雰囲気にて
も、その感湿特性は、比較的短時間に変化するこ
とが他の実験によつて確認された。又、第２図と
第３図に示した特性を比較しても判るように、上
記実施例になる感湿抵抗素子の感湿感度は、極め
て高く、全湿度範囲に対し６〜７桁の抵抗変化を
示す。そして感湿感度はペレツトの焼成温度が高
い程増す傾向にある。又、別の実験によつて、感
湿応答速度もペレツトの焼成温度が高い程速くな
る事実が確認されており、焼成温度が800℃以上
に於いて感湿応答速度は60秒以下となる。 For reference, Figure 3 shows the humidity-sensitive characteristics of a moisture-sensitive resistance element produced in the same manner as in the above example using only aluminum oxide particles as a starting material without adding boric acid at an ambient temperature of 15°C. . Third
In the figure, curves c and d are the characteristics of pellets fired for 3 hours at a firing temperature of 600°C and 1000°C, respectively. In this way, the moisture-sensitive characteristics of products to which boric acid is not added significantly deviate from the exponential characteristics, and even in an atmosphere of normal temperature and humidity, the moisture-sensitive characteristics change in a relatively short period of time. This was confirmed by an experiment. Furthermore, as can be seen by comparing the characteristics shown in Figures 2 and 3, the humidity sensitivity of the humidity-sensitive resistance element of the above example is extremely high, reaching 6 to 7 digits over the entire humidity range. Indicates resistance change. The moisture sensitivity tends to increase as the pellet firing temperature increases. Further, in another experiment, it has been confirmed that the higher the firing temperature of pellets, the faster the humidity response speed becomes.When the firing temperature is 800°C or higher, the humidity response speed is 60 seconds or less.
上記実施例に於いては、一方の出発原料として
酸化アルミニウム粒子を用いたが、予め焼結され
た酸化アルミニウム板或はアルミニウムの陽極酸
化膜を用いても良い。但し、この場合には酸化ア
ルミニウム板或はアルミニウムの陽極酸化膜をホ
ウ酸の飽和水溶液中に充分浸漬（約一昼夜浸漬）
した後、水洗し110〜120℃の温度で約20時間空気
中熱処理を行う。この後、上記実施例と同様の方
法で高温焼成を行い、透湿性電極を蒸着して感湿
抵抗素子としても同様の特性が得られる。 In the above embodiment, aluminum oxide particles were used as one of the starting materials, but a pre-sintered aluminum oxide plate or an anodic oxide film of aluminum may also be used. However, in this case, the aluminum oxide plate or aluminum anodic oxide film must be sufficiently immersed in a saturated aqueous solution of boric acid (soaked for about a day and night).
After that, it is washed with water and heat treated in air at a temperature of 110 to 120°C for about 20 hours. Thereafter, high-temperature firing is performed in the same manner as in the above embodiment, and a moisture-permeable electrode is deposited to obtain the same characteristics as a moisture-sensitive resistance element.
又、他方の出発原料もホウ酸（H3BO3）に限定
されるものではなく、四ホウ酸カリウム
（K2B4O7）、四ホウ酸ナトリウム（Na2B4O7）、四
ホウ酸水素アンモニウム（HNH4B4O7）などのホ
ウ酸塩を用いても良い。 Furthermore, the other starting material is not limited to boric acid (H 3 BO 3 ), but may include potassium tetraborate (K 2 B 4 O 7 ), sodium tetraborate (Na 2 B 4 O 7 ), and A borate such as ammonium hydrogen borate (HNH 4 B 4 O 7 ) may also be used.
又、本発明になる感湿抵抗素子の応答速度は、
ホウ酸又はホウ酸塩の量及び焼結温度に左右され
る。応答速度が１分以下の特性を得るためには、
ホウ酸又はホウ酸塩の量を、酸化ホウ素
（B2O3）の量に換算して重量比30wt％以下、焼結
温度を600℃以上1000℃以下とするのが好まし
い。 Moreover, the response speed of the moisture-sensitive resistance element according to the present invention is
It depends on the amount of boric acid or borate and the sintering temperature. In order to obtain characteristics with a response speed of 1 minute or less,
It is preferable that the amount of boric acid or borate is 30 wt% or less by weight in terms of the amount of boron oxide (B 2 O 3 ), and the sintering temperature is 600° C. or more and 1000° C. or less.
以上に詳述した様に、本発明によつて全湿度範
囲に渡つて安定且つ優れた感湿特性を有する感湿
抵抗素子を容易且つ再現性良く作成することがで
きる。 As detailed above, according to the present invention, a moisture-sensitive resistance element having stable and excellent moisture-sensitive characteristics over the entire humidity range can be easily produced with good reproducibility.
第１図は本発明になる感湿抵抗素子の構造模式
図である。第２図は本発明の１実施例に於ける感
湿抵抗素子の感湿特性例である。第３図は本発明
によらない感湿抵抗素子の感湿特性例である。
１：感湿抵抗体、２：透湿性電極、３：リード
線。
FIG. 1 is a schematic structural diagram of a moisture-sensitive resistance element according to the present invention. FIG. 2 shows an example of the humidity-sensitive characteristics of a humidity-sensitive resistance element in one embodiment of the present invention. FIG. 3 shows an example of the humidity-sensitive characteristics of a humidity-sensitive resistance element not according to the present invention. 1: Moisture-sensitive resistor, 2: Moisture-permeable electrode, 3: Lead wire.
Claims (1)
が変化する感湿体を備えてなる感湿抵抗素子に於
いて、前記感湿体の全部又は表面層に、酸化アル
ミニウムと酸化ホウ素又はホウ素との化学結合体
を形成したことを特徴とする感湿抵抗素子。 ２ 相対湿度又は絶対湿度に感心して電気抵抗値
が変化する感湿体を備えてなる感湿抵抗体の製造
方法において、酸化アルミニウムと酸化ホウ素又
はホウ素との混合物を高温焼成してなることを特
徴とする感湿抵抗体の製造方法。 ３ 前記酸化アルミニウムは、酸化アルミニウム
粒子、酸化アルミニウム焼結体又はアルミニウム
の陽極酸化膜が用いられてなることを特徴とする
特許請求の範囲第２項記載の感湿抵抗素子の製造
方法。 ４ 前記酸化ホウ素又はホウ素は、ホウ酸又は四
ホウ酸カリウム、四ホウ酸ナトリウム、若しくは
四ホウ酸水素アンモニウム等のホウ酸塩が用いら
れてなることを特徴とする特許請求の範囲第２項
記載の感湿抵抗素子の製造方法。 ５ 前記ホウ酸又はホウ酸塩の添加量は、酸化ホ
ウ素（B2O3）に量に換算して重量比30％以下であ
ることを特徴とする特許請求の範囲第４項記載の
感湿抵抗素子の製造方法。 ６ 前記高温焼成の温度は、600℃以上1000℃以
下に設定することを特徴とする特許請求の範囲第
２項記載の感湿抵抗体の製造方法。[Scope of Claims] 1. In a moisture-sensitive resistance element comprising a moisture-sensitive element whose electrical resistance value changes in response to relative humidity or absolute humidity, the entirety or surface layer of the moisture-sensitive element contains aluminum oxide. 1. A moisture-sensitive resistance element characterized by forming a chemical bond between and boron oxide or boron. 2. A method for manufacturing a humidity-sensitive resistor comprising a humidity-sensitive resistor whose electrical resistance changes in response to relative humidity or absolute humidity, characterized in that it is produced by firing a mixture of aluminum oxide and boron oxide or boron at a high temperature. A method for manufacturing a moisture-sensitive resistor. 3. The method of manufacturing a moisture-sensitive resistance element according to claim 2, wherein the aluminum oxide is formed by using aluminum oxide particles, an aluminum oxide sintered body, or an anodic oxide film of aluminum. 4. The boron oxide or boron is obtained by using boric acid or a borate such as potassium tetraborate, sodium tetraborate, or ammonium hydrogen tetraborate, according to claim 2. A method for manufacturing a moisture-sensitive resistance element. 5. The moisture sensitive device according to claim 4, wherein the amount of boric acid or borate added is 30% or less by weight in terms of boron oxide (B 2 O 3 ). A method of manufacturing a resistive element. 6. The method of manufacturing a moisture-sensitive resistor according to claim 2, wherein the temperature of the high-temperature firing is set to 600°C or more and 1000°C or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57033461A JPS58148948A (en) | 1982-03-02 | 1982-03-02 | Humidity sensing resistance element and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57033461A JPS58148948A (en) | 1982-03-02 | 1982-03-02 | Humidity sensing resistance element and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58148948A JPS58148948A (en) | 1983-09-05 |
| JPS6139614B2 true JPS6139614B2 (en) | 1986-09-04 |
Family
ID=12387174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57033461A Granted JPS58148948A (en) | 1982-03-02 | 1982-03-02 | Humidity sensing resistance element and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58148948A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114280108A (en) * | 2021-12-03 | 2022-04-05 | 电子科技大学长三角研究院(湖州) | Aluminum-based porous alumina film humidity-sensitive sensor and preparation method thereof |
-
1982
- 1982-03-02 JP JP57033461A patent/JPS58148948A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58148948A (en) | 1983-09-05 |
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