JPS6139616B2 - - Google Patents
Info
- Publication number
- JPS6139616B2 JPS6139616B2 JP1180281A JP1180281A JPS6139616B2 JP S6139616 B2 JPS6139616 B2 JP S6139616B2 JP 1180281 A JP1180281 A JP 1180281A JP 1180281 A JP1180281 A JP 1180281A JP S6139616 B2 JPS6139616 B2 JP S6139616B2
- Authority
- JP
- Japan
- Prior art keywords
- hole
- holes
- plate
- substrate
- sensor block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 19
- 238000005259 measurement Methods 0.000 claims description 17
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
【発明の詳細な説明】
本発明は、被測定ガスが有する熱伝導度を利用
して、ガス分析を行う装置の検出器に関し、さら
に詳しくは、高速ガスクロマトグラフの検出器と
して最適な拡散形の熱伝導度形検出器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a detector for a device that performs gas analysis by utilizing the thermal conductivity of a gas to be measured, and more specifically, to a detector of a diffusion type that is optimal as a detector for a high-speed gas chromatograph. Regarding thermal conductivity type detectors.
第１図は、従来のガスクロマトグラフの拡散形
の熱伝導度形検出器の構成説明図である。検出器
は、金属ブロツク２２に形成して成る測定室（測
定ガスを満たした室）２３及び２４内に設置する
フイルラメント２５及び２６と、これと同一構成
の基準室（キヤリヤガスを満たした室）内に設置
するフイルラメント（図示せず）とでホイートス
トンブリツジを構成するようになつている。 FIG. 1 is an explanatory diagram of the configuration of a conventional diffusion type thermal conductivity type detector for a gas chromatograph. The detector consists of fillaments 25 and 26 installed in measurement chambers 23 and 24 (chambers filled with measurement gas) formed in a metal block 22, and a reference chamber (chamber filled with carrier gas) having the same structure. A Wheatstone bridge is constructed with a fillament (not shown) installed inside.
ところで、このような検出器は、できるだけ小
形、即ち、測定室２３及び２４の内容積が小さい
方が、応答性を高めることができるので望まし
い。しかしながら、フイルラメント２５及び２６
に所定の抵抗値をもたせようとすると、その形状
が大きくなり、どうしても測定室の内容積が大き
くならざるを得ないのが実状である。また、フイ
ルラメント２５及び２６を金属ブロツク２２で形
成する測定室２３及び２４に設置しているので、
断線時の交換作業が難しく、時には、検出器全体
を交換することになり、保守コストを高める点に
難点があつた。 By the way, it is desirable for such a detector to be as small as possible, that is, the internal volume of the measurement chambers 23 and 24 is as small as possible, since responsiveness can be improved. However, filaments 25 and 26
In reality, if an attempt is made to have a predetermined resistance value, the shape becomes large, and the internal volume of the measurement chamber inevitably becomes large. In addition, since the filaments 25 and 26 are installed in the measurement chambers 23 and 24 formed by the metal blocks 22,
The problem was that it was difficult to replace the wire when it broke, and sometimes the entire detector had to be replaced, increasing maintenance costs.
本発明は、かかる点に鑑みてなされたものであ
り、本発明は、測定室の内容積を小さく、かつ、
フイルラメントの交換を容易にするために、板面
に貫通穴を形成し、その貫通穴に橋絡状に設置し
て成る抵抗体を有する基板を用いて検出器を構成
するようになつている。 The present invention has been made in view of these points, and the present invention reduces the internal volume of the measurement chamber, and
In order to facilitate the replacement of the filament, a through hole is formed in the plate surface, and the detector is constructed using a substrate having a resistor formed by forming a bridge in the through hole. .
以下、図面を参照し本発明について詳しく説明
する。 Hereinafter, the present invention will be explained in detail with reference to the drawings.
第２図〜第４図は、本発明の一実施例によるガ
スクロマトグラフの検出器の構成説明図であり、
第２図は、基板１の斜視図、第３図は、第２図の
Ａ−Ａ断面図、第４図は、検出器の縦断面図であ
る。第２図及び第３図において、基板１は、その
板面に形成して成る貫通穴２，３及び４と、貫通
穴２及び４夫々に橋絡状に設置して成る櫛の歯状
の抵抗体５及び６とを有する。そして、抵抗体５
及び６の各端部７及び８並びに９及び１０は、基
板１の端部にて、他の抵抗体が回路に接続し得る
ようになつている。 2 to 4 are explanatory diagrams of the configuration of a gas chromatograph detector according to an embodiment of the present invention,
FIG. 2 is a perspective view of the substrate 1, FIG. 3 is a sectional view taken along the line AA in FIG. 2, and FIG. 4 is a longitudinal sectional view of the detector. In FIGS. 2 and 3, a substrate 1 has through holes 2, 3, and 4 formed on its plate surface, and comb-teeth-shaped through holes 2, 3, and 4 formed in a bridging manner in the through holes 2 and 4, respectively. It has resistors 5 and 6. And resistor 5
The ends 7 and 8 and 9 and 10 of and 6 are such that other resistors can be connected to the circuit at the ends of the substrate 1.
次に、上記基板１を用いて構成した検出器につ
いて、第４図を参照して説明する。 Next, a detector constructed using the above substrate 1 will be explained with reference to FIG. 4.
検出器は、２個の基板１及び基板１に略合同な
形状、即ち、板面に貫通穴１２，１３、及び１４
を形成して成るスペーサ１１（抵抗体を有せず）
を有し、貫通穴２と１２、３と１３、４と１４、
とを夫々一致させて一体化すると共に、抵抗体５
と６とでホイートストンブリツジを構成して成る
センサブロツクと、板面に、貫通穴３及び４夫々
に対する位置に貫通穴１６及び１７を形成して成
る側板１５と、板面に、貫通穴４に対応する位置
及び基板１のいずれの貫通穴にも対応しない位置
夫々に貫通穴２１及び１９を形成すると共に、セ
ンサブロツクに接合する面に、貫通穴２，３及び
１９夫々に連通する流路２０を形成して成る側板
１８と、ホイートストンブリツジに電力を供給す
る電源（図示せず）とで構成されている。 The detector has two substrates 1 and a shape substantially congruent with the substrate 1, that is, through holes 12, 13, and 14 on the plate surface.
A spacer 11 (without a resistor) formed of
through holes 2 and 12, 3 and 13, 4 and 14,
are matched and integrated, and the resistor 5
and 6 constitute a Wheatstone bridge; a side plate 15 having through holes 16 and 17 formed on the plate surface at positions relative to the through holes 3 and 4, respectively; and a side plate 15 having through holes 4 on the plate surface. Through-holes 21 and 19 are formed at positions corresponding to the through-holes of the substrate 1 and at positions that do not correspond to any of the through-holes of the substrate 1, and channels communicating with the through-holes 2, 3, and 19 are formed on the surface to be joined to the sensor block. 20, and a power source (not shown) for supplying power to the Wheatstone bridge.
なお、センサブロツクと側板との一体化は、公
知の手段、例えば、接着剤、ボルト・ナツト（こ
の場合、ボルト貫通用の穴を板面に設ける必要が
ある）等を用いてなされている。また、この一体
化によつて、側板１５の板面で、センサブロツク
の一方の面にて貫通穴２を閉塞するようになつて
いる。 Incidentally, the sensor block and the side plate are integrated using known means such as adhesives, bolts and nuts (in this case, it is necessary to provide holes in the plate surface for the bolts to pass through). Further, due to this integration, the plate surface of the side plate 15 closes the through hole 2 on one surface of the sensor block.
上記の検出部は、貫通穴１６→貫通穴３→貫通
穴１３→貫通穴３→流路２０→貫通穴１９で形成
する流路に被測定ガスFmを流しながら、貫通穴
２及び１２で形成する測定室に被測定ガスを満た
すと共に、貫通穴４，１４，１７及び２１で形成
する基準室にキヤリヤガスFrを流して、ガスク
ロマトグラフの検出器として機能する。 The above detection section is formed by through holes 2 and 12 while flowing the gas to be measured Fm through the flow path formed by through hole 16 → through hole 3 → through hole 13 → through hole 3 → flow path 20 → through hole 19. The measurement chamber is filled with the gas to be measured, and the reference chamber formed by the through holes 4, 14, 17, and 21 is filled with a carrier gas Fr, thereby functioning as a detector for the gas chromatograph.
このように、検出器のセンサブロツクの測定室
は、基板１及びスペーサ１２の板面に形成した貫
通穴２及び１２で構成しているので、測定室の内
容積を小さくすることができる。また、ボルト・
ナツトを用いて一体化した検出器は、その解体が
容易なので、抵抗体や基板の交換が簡単で、保守
性に優れている。 In this way, since the measurement chamber of the sensor block of the detector is constituted by the through holes 2 and 12 formed in the plate surfaces of the substrate 1 and the spacer 12, the internal volume of the measurement chamber can be reduced. Also, bolt
A detector integrated using a nut can be easily disassembled, making it easy to replace the resistor and board, and is excellent in maintainability.
なお、上記実施例は、ガスクロマトグラフの検
出器について説明したが、本発明はこれに限定す
るものではなく、他の分析計、例えば、H2計、
O2計、CO2計等の検出器であつてもよい。 Although the above embodiment describes a gas chromatograph detector, the present invention is not limited to this, and may be applied to other analyzers such as an H 2 meter,
It may be a detector such as an O 2 meter or a CO 2 meter.
また、上記実施例は、スペーサを介在して２個
の基板を一体化しているが、本発明はスペーサを
必ずしも必要としない。抵抗体が設置されていな
い板面同士を合せて、２個の基板を一体化し、測
定室及び基準室を形成してもよい。 Further, in the above embodiment, two substrates are integrated with a spacer interposed therebetween, but the present invention does not necessarily require a spacer. The two substrates may be integrated by aligning the plate surfaces on which the resistors are not installed to form a measurement chamber and a reference chamber.
さらに、側板１５及び１８は上記実施例に限定
するものではない。要は、側板１５はセンサブロ
ツクの一方の面にて、貫通穴２を閉塞する機能を
持つていればよい、また、側板１８はセンサブロ
ツクの他方の面にて、貫通穴２及び３に連通し、
外部の流路に連絡する開口部を持つていればよ
い。 Furthermore, the side plates 15 and 18 are not limited to the above embodiments. In short, it is sufficient that the side plate 15 has the function of closing the through hole 2 on one side of the sensor block, and the side plate 18 has the function of closing the through hole 2 and 3 on the other side of the sensor block. death,
It is sufficient if it has an opening that communicates with an external flow path.
さらに、上記実施例は、櫛の歯状の抵抗体を用
いているが、本発明はこれに限定するものではな
く、渦巻状の抵抗体であつてもよい。 Further, although the above embodiment uses a comb-like resistor, the present invention is not limited to this, and a spiral resistor may be used.
以上、詳しく説明したように、本発明の熱伝導
度形検出器によれば、板面に貫通穴を形成し、そ
の貫通穴に橋絡状に設置する抵抗体を有する基板
で測定室を構成するようになつているので、測定
室の内容積を小さくすることができ、また、抵抗
体を簡単に交換することができる。 As explained in detail above, according to the thermal conductivity type detector of the present invention, the measurement chamber is configured with a substrate having a through hole formed in the plate surface and a resistor installed in the through hole in a bridging manner. Therefore, the internal volume of the measurement chamber can be reduced, and the resistor can be easily replaced.
第１図は、従来の拡散形の熱伝導度形検出器の
構成説明図、第２図は、本発明の一実施例による
熱伝導度形検出器を構成するエレメント（基板）
の構成説明図、第３図は、第２図のＡ−Ａ断面
図、第４図は、本発明の一実施例による熱伝導度
形検出器の構成説明図である。
１……基板、２，３及び４……貫通穴、５及び
６……抵抗体、１１……スペーサ、１５及び１８
……側板、１６，１７，１９及び２１……貫通
穴、２０……流路。
FIG. 1 is an explanatory diagram of the configuration of a conventional diffusion type thermal conductivity detector, and FIG. 2 is an element (substrate) constituting a thermal conductivity detector according to an embodiment of the present invention.
FIG. 3 is a sectional view taken along the line A-A in FIG. 2, and FIG. 4 is an explanatory diagram of the configuration of a thermal conductivity type detector according to an embodiment of the present invention. 1... Board, 2, 3 and 4... Through hole, 5 and 6... Resistor, 11... Spacer, 15 and 18
... Side plate, 16, 17, 19 and 21 ... Through hole, 20 ... Channel.
Claims (1)
し、該第１及び第３の貫通穴夫々に橋絡状に設置
して成る抵抗体を有する第１及び第２の基板から
成り、該第１及び第２の基板の同一番号の貫通穴
同士を合せて一体化すると共に、前記各抵抗体で
ホイートストンブリツジを構成して成るセンサブ
ロツクと、該センサブロツクの一方の面にて、前
記第１の貫通穴を閉塞する盲板と、前記センサブ
ロツクの他方の面にて、前記第１の貫通穴と第２
の貫通穴とを連通し、かつ、外部流路に接続する
開口部を有する手段と、前記ホイートストンブリ
ツジに印加する電源とを具備し、前記第２の貫通
穴及び開口部を流入口及び流出口として測定ガス
を流すと共に、前記第３の貫通穴に基準ガスを流
すか、封じ込んで、前記ホイートストンブリツジ
の出力を測定信号とすることを特徴とする熱伝導
度形検出器。 ２ 前記盲板は、前記センサブロツクの一方の面
に接合して固着する板であつた、前記基板の第２
及び第３の貫通穴夫々に対応する位置を貫通して
成る測定ガス流入口及び基準ガス流入口を有する
ことを特徴とする特許請求の範囲第１項の熱伝導
度検出器。 ３ 前記手段は、前記センサブロツクの他方の面
に接合して固着する板であつて、前記基板の第３
の貫通穴に対応する位置及び該基板のいずれの貫
通穴にも対応しない位置夫々を貫通して成る基準
ガス流出口及び測定ガス流出口と、前記センサブ
ロツクに接合する面に、前記基板の第１及び第２
の貫通穴並びに前記測定ガス流出口に連通する流
路を有することを特徴とする特許請求の範囲第１
項の熱伝導度形検出器。[Scope of Claims] 1. A first device having a resistor formed by forming first, second, and third through holes in a plate surface, and installing a resistor in a bridging manner in each of the first and third through holes. and a second substrate, through-holes having the same number in the first and second substrates are aligned and integrated, and each of the resistors constitutes a Wheatstone bridge; A blind plate that closes the first through hole is provided on one surface of the block, and a blind plate that closes the first through hole and the second through hole is provided on the other surface of the sensor block.
means having an opening that communicates with the second through hole and connects it to an external flow path; and a power supply that applies power to the Wheatstone bridge, connecting the second through hole and the opening to the inlet and the flow path. A thermal conductivity type detector, characterized in that a measurement gas is allowed to flow as an outlet, and a reference gas is allowed to flow or is sealed in the third through hole, and the output of the Wheatstone bridge is used as a measurement signal. 2. The blind plate is a second plate of the substrate that is bonded and fixed to one surface of the sensor block.
2. The thermal conductivity detector according to claim 1, further comprising a measurement gas inlet and a reference gas inlet that penetrate through positions corresponding to the and third through holes. 3. The means is a plate that is bonded and fixed to the other surface of the sensor block, and the means is a plate that is bonded and fixed to the other surface of the sensor block, and
A reference gas outlet and a measuring gas outlet are formed by penetrating through positions corresponding to the through holes of the substrate and positions not corresponding to any of the through holes of the substrate, and a reference gas outlet and a measurement gas outlet are formed on the surface to be joined to the sensor block. 1st and 2nd
Claim 1, characterized in that it has a through hole and a flow path communicating with the measurement gas outlet.
Thermal conductivity type detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1180281A JPS57125838A (en) | 1981-01-29 | 1981-01-29 | Heat conductivity type detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1180281A JPS57125838A (en) | 1981-01-29 | 1981-01-29 | Heat conductivity type detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57125838A JPS57125838A (en) | 1982-08-05 |
| JPS6139616B2 true JPS6139616B2 (en) | 1986-09-04 |
Family
ID=11787983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1180281A Granted JPS57125838A (en) | 1981-01-29 | 1981-01-29 | Heat conductivity type detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57125838A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2797373B2 (en) * | 1989-02-14 | 1998-09-17 | 株式会社島津製作所 | Thermal conductivity detector |
| JPH04136367U (en) * | 1991-06-12 | 1992-12-18 | 内山工業株式会社 | Seal fitting structure |
-
1981
- 1981-01-29 JP JP1180281A patent/JPS57125838A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57125838A (en) | 1982-08-05 |
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