JPS6140150B2 - - Google Patents
Info
- Publication number
- JPS6140150B2 JPS6140150B2 JP54045293A JP4529379A JPS6140150B2 JP S6140150 B2 JPS6140150 B2 JP S6140150B2 JP 54045293 A JP54045293 A JP 54045293A JP 4529379 A JP4529379 A JP 4529379A JP S6140150 B2 JPS6140150 B2 JP S6140150B2
- Authority
- JP
- Japan
- Prior art keywords
- polyacetylene
- compounds
- solar cell
- thin film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 74
- 229920001197 polyacetylene Polymers 0.000 claims description 62
- 150000001875 compounds Chemical class 0.000 claims description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 29
- 229910052710 silicon Inorganic materials 0.000 claims description 29
- 239000010703 silicon Substances 0.000 claims description 29
- 239000010408 film Substances 0.000 claims description 27
- 239000010409 thin film Substances 0.000 claims description 24
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 16
- -1 oleum Chemical compound 0.000 claims description 15
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 14
- AKEJUJNQAAGONA-UHFFFAOYSA-N sulfur trioxide Chemical compound O=S(=O)=O AKEJUJNQAAGONA-UHFFFAOYSA-N 0.000 claims description 14
- 229910017604 nitric acid Inorganic materials 0.000 claims description 9
- 239000002253 acid Substances 0.000 claims description 8
- 150000002148 esters Chemical class 0.000 claims description 7
- 150000007513 acids Chemical class 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 description 26
- 239000003054 catalyst Substances 0.000 description 25
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 18
- 150000002902 organometallic compounds Chemical class 0.000 description 15
- 125000004432 carbon atom Chemical group C* 0.000 description 12
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 238000006116 polymerization reaction Methods 0.000 description 12
- 125000000217 alkyl group Chemical group 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 150000003623 transition metal compounds Chemical class 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 125000005843 halogen group Chemical group 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- CUJRVFIICFDLGR-UHFFFAOYSA-N acetylacetonate Chemical compound CC(=O)[CH-]C(C)=O CUJRVFIICFDLGR-UHFFFAOYSA-N 0.000 description 3
- 125000003545 alkoxy group Chemical group 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- YBGKQGSCGDNZIB-UHFFFAOYSA-N arsenic pentafluoride Chemical compound F[As](F)(F)(F)F YBGKQGSCGDNZIB-UHFFFAOYSA-N 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052723 transition metal Inorganic materials 0.000 description 3
- 150000003624 transition metals Chemical class 0.000 description 3
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 238000001291 vacuum drying Methods 0.000 description 3
- 229910021630 Antimony pentafluoride Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 150000004703 alkoxides Chemical group 0.000 description 2
- VBVBHWZYQGJZLR-UHFFFAOYSA-I antimony pentafluoride Chemical compound F[Sb](F)(F)(F)F VBVBHWZYQGJZLR-UHFFFAOYSA-I 0.000 description 2
- 125000003710 aryl alkyl group Chemical group 0.000 description 2
- CTNFGBKAHAEKFE-UHFFFAOYSA-N bis(2-methylpropyl)alumanyloxy-bis(2-methylpropyl)alumane Chemical compound CC(C)C[Al](CC(C)C)O[Al](CC(C)C)CC(C)C CTNFGBKAHAEKFE-UHFFFAOYSA-N 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 150000001735 carboxylic acids Chemical group 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 2
- HQWPLXHWEZZGKY-UHFFFAOYSA-N diethylzinc Chemical compound CC[Zn]CC HQWPLXHWEZZGKY-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- ZRZKFGDGIPLXIB-UHFFFAOYSA-N fluoroform;sulfuric acid Chemical compound FC(F)F.OS(O)(=O)=O ZRZKFGDGIPLXIB-UHFFFAOYSA-N 0.000 description 2
- UQSQSQZYBQSBJZ-UHFFFAOYSA-N fluorosulfonic acid Chemical compound OS(F)(=O)=O UQSQSQZYBQSBJZ-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 125000000962 organic group Chemical group 0.000 description 2
- 125000004437 phosphorous atom Chemical group 0.000 description 2
- OBCUTHMOOONNBS-UHFFFAOYSA-N phosphorus pentafluoride Chemical compound FP(F)(F)(F)F OBCUTHMOOONNBS-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- XTHPWXDJESJLNJ-UHFFFAOYSA-N sulfurochloridic acid Chemical compound OS(Cl)(=O)=O XTHPWXDJESJLNJ-UHFFFAOYSA-N 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- AQRLNPVMDITEJU-UHFFFAOYSA-N triethylsilane Chemical compound CC[SiH](CC)CC AQRLNPVMDITEJU-UHFFFAOYSA-N 0.000 description 2
- PPPHYGCRGMTZNA-UHFFFAOYSA-M trifluoromethyl sulfate Chemical compound [O-]S(=O)(=O)OC(F)(F)F PPPHYGCRGMTZNA-UHFFFAOYSA-M 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- CMAOLVNGLTWICC-UHFFFAOYSA-N 2-fluoro-5-methylbenzonitrile Chemical compound CC1=CC=C(F)C(C#N)=C1 CMAOLVNGLTWICC-UHFFFAOYSA-N 0.000 description 1
- QYKABQMBXCBINA-UHFFFAOYSA-N 4-(oxan-2-yloxy)benzaldehyde Chemical compound C1=CC(C=O)=CC=C1OC1OCCCC1 QYKABQMBXCBINA-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- MXRNYNIJHVXZAN-UHFFFAOYSA-N CCO[Mg]CC Chemical compound CCO[Mg]CC MXRNYNIJHVXZAN-UHFFFAOYSA-N 0.000 description 1
- UIIPTSKEQHTPOK-UHFFFAOYSA-N CC[AlH]O[Al](CC)CC.Cl Chemical compound CC[AlH]O[Al](CC)CC.Cl UIIPTSKEQHTPOK-UHFFFAOYSA-N 0.000 description 1
- JQVAWAQPCKCFQX-UHFFFAOYSA-N CC[Zn](CC)(CC)CC Chemical compound CC[Zn](CC)(CC)CC JQVAWAQPCKCFQX-UHFFFAOYSA-N 0.000 description 1
- RNEVEVNPPDRJTB-UHFFFAOYSA-N C[AlH]O[Al](C)C.Cl Chemical compound C[AlH]O[Al](C)C.Cl RNEVEVNPPDRJTB-UHFFFAOYSA-N 0.000 description 1
- FKGWBSVLMDRGNG-UHFFFAOYSA-N C[Al](O[Al](CC(C)C)CC(C)C)C Chemical compound C[Al](O[Al](CC(C)C)CC(C)C)C FKGWBSVLMDRGNG-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 229910005540 GaP Inorganic materials 0.000 description 1
- 239000002841 Lewis acid Substances 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical group OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910018287 SbF 5 Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 125000005595 acetylacetonate group Chemical group 0.000 description 1
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical group CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- NXCNZUPSLFNAKV-UHFFFAOYSA-N alumanyloxy(tetradecyl)alumane Chemical compound CCCCCCCCCCCCCC[AlH]O[AlH2] NXCNZUPSLFNAKV-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- FOGKOKCRHYFGPM-UHFFFAOYSA-N bis(2-methylpropyl)alumanylium;dibutylazanide Chemical compound CCCC[N-]CCCC.CC(C)C[Al+]CC(C)C FOGKOKCRHYFGPM-UHFFFAOYSA-N 0.000 description 1
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 description 1
- YLYNVLJAZMTTIQ-UHFFFAOYSA-N butoxy(diethyl)alumane Chemical compound CCCC[O-].CC[Al+]CC YLYNVLJAZMTTIQ-UHFFFAOYSA-N 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- KWTSZCJMWHGPOS-UHFFFAOYSA-M chloro(trimethyl)stannane Chemical compound C[Sn](C)(C)Cl KWTSZCJMWHGPOS-UHFFFAOYSA-M 0.000 description 1
- KNVLCWQKYHCADB-UHFFFAOYSA-N chlorosulfonyloxymethane Chemical compound COS(Cl)(=O)=O KNVLCWQKYHCADB-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- INVPQTFQRFNBFL-UHFFFAOYSA-N dibutyl(chloro)borane Chemical compound CCCCB(Cl)CCCC INVPQTFQRFNBFL-UHFFFAOYSA-N 0.000 description 1
- VJRUISVXILMZSL-UHFFFAOYSA-M dibutylalumanylium;chloride Chemical compound CCCC[Al](Cl)CCCC VJRUISVXILMZSL-UHFFFAOYSA-M 0.000 description 1
- JKDSABTVILQKQF-UHFFFAOYSA-N dibutylazanide;diethylalumanylium Chemical compound CC[Al+]CC.CCCC[N-]CCCC JKDSABTVILQKQF-UHFFFAOYSA-N 0.000 description 1
- PKKGKUDPKRTKLJ-UHFFFAOYSA-L dichloro(dimethyl)stannane Chemical compound C[Sn](C)(Cl)Cl PKKGKUDPKRTKLJ-UHFFFAOYSA-L 0.000 description 1
- RQJBGPOCHBZFCO-UHFFFAOYSA-L dichloroalumanylium;dimethylazanide Chemical compound [Cl-].[Cl-].CN(C)[Al+2] RQJBGPOCHBZFCO-UHFFFAOYSA-L 0.000 description 1
- GTLMIIKASNFJDX-UHFFFAOYSA-N diethylalumanylium;dimethylazanide Chemical compound C[N-]C.CC[Al+]CC GTLMIIKASNFJDX-UHFFFAOYSA-N 0.000 description 1
- LWBWGOJHWAARSS-UHFFFAOYSA-N diethylalumanyloxy(diethyl)alumane Chemical compound CC[Al](CC)O[Al](CC)CC LWBWGOJHWAARSS-UHFFFAOYSA-N 0.000 description 1
- YNLAOSYQHBDIKW-UHFFFAOYSA-M diethylaluminium chloride Chemical compound CC[Al](Cl)CC YNLAOSYQHBDIKW-UHFFFAOYSA-M 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- OENQCSSEPLJXEC-UHFFFAOYSA-N dihexylaluminum Chemical compound CCCCCC[Al]CCCCCC OENQCSSEPLJXEC-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- UQOCPIAAOSVOFK-UHFFFAOYSA-N dimethylalumanylium;dioctylazanide Chemical compound C[Al+]C.CCCCCCCC[N-]CCCCCCCC UQOCPIAAOSVOFK-UHFFFAOYSA-N 0.000 description 1
- GMNSEICSYCVTHZ-UHFFFAOYSA-N dimethylalumanyloxy(dimethyl)alumane Chemical compound C[Al](C)O[Al](C)C GMNSEICSYCVTHZ-UHFFFAOYSA-N 0.000 description 1
- AXAZMDOAUQTMOW-UHFFFAOYSA-N dimethylzinc Chemical compound C[Zn]C AXAZMDOAUQTMOW-UHFFFAOYSA-N 0.000 description 1
- LAWOZCWGWDVVSG-UHFFFAOYSA-N dioctylamine Chemical compound CCCCCCCCNCCCCCCCC LAWOZCWGWDVVSG-UHFFFAOYSA-N 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- UVECLJDRPFNRRQ-UHFFFAOYSA-N ethyl trifluoromethanesulfonate Chemical compound CCOS(=O)(=O)C(F)(F)F UVECLJDRPFNRRQ-UHFFFAOYSA-N 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- UQSQSQZYBQSBJZ-UHFFFAOYSA-M fluorosulfonate Chemical compound [O-]S(F)(=O)=O UQSQSQZYBQSBJZ-UHFFFAOYSA-M 0.000 description 1
- KRRYGFCJUCTWMH-UHFFFAOYSA-N fluorosulfonyloxyethane Chemical compound CCOS(F)(=O)=O KRRYGFCJUCTWMH-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- 229960002050 hydrofluoric acid Drugs 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- 150000007517 lewis acids Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- CQRPUKWAZPZXTO-UHFFFAOYSA-M magnesium;2-methylpropane;chloride Chemical compound [Mg+2].[Cl-].C[C-](C)C CQRPUKWAZPZXTO-UHFFFAOYSA-M 0.000 description 1
- WRYKIHMRDIOPSI-UHFFFAOYSA-N magnesium;benzene Chemical compound [Mg+2].C1=CC=[C-]C=C1.C1=CC=[C-]C=C1 WRYKIHMRDIOPSI-UHFFFAOYSA-N 0.000 description 1
- VXWPONVCMVLXBW-UHFFFAOYSA-M magnesium;carbanide;iodide Chemical compound [CH3-].[Mg+2].[I-] VXWPONVCMVLXBW-UHFFFAOYSA-M 0.000 description 1
- DLPASUVGCQPFFO-UHFFFAOYSA-N magnesium;ethane Chemical compound [Mg+2].[CH2-]C.[CH2-]C DLPASUVGCQPFFO-UHFFFAOYSA-N 0.000 description 1
- FRIJBUGBVQZNTB-UHFFFAOYSA-M magnesium;ethane;bromide Chemical compound [Mg+2].[Br-].[CH2-]C FRIJBUGBVQZNTB-UHFFFAOYSA-M 0.000 description 1
- YCCXQARVHOPWFJ-UHFFFAOYSA-M magnesium;ethane;chloride Chemical compound [Mg+2].[Cl-].[CH2-]C YCCXQARVHOPWFJ-UHFFFAOYSA-M 0.000 description 1
- CYSFUFRXDOAOMP-UHFFFAOYSA-M magnesium;prop-1-ene;chloride Chemical compound [Mg+2].[Cl-].[CH2-]C=C CYSFUFRXDOAOMP-UHFFFAOYSA-M 0.000 description 1
- RYEXTBOQKFUPOE-UHFFFAOYSA-M magnesium;propane;chloride Chemical compound [Mg+2].[Cl-].CC[CH2-] RYEXTBOQKFUPOE-UHFFFAOYSA-M 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- MBXNQZHITVCSLJ-UHFFFAOYSA-N methyl fluorosulfonate Chemical compound COS(F)(=O)=O MBXNQZHITVCSLJ-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- OIRDBPQYVWXNSJ-UHFFFAOYSA-N methyl trifluoromethansulfonate Chemical compound COS(=O)(=O)C(F)(F)F OIRDBPQYVWXNSJ-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- SSAWPNVUGVLDQP-UHFFFAOYSA-N n-diethylalumanyl-n-ethylethanamine Chemical compound CC[N-]CC.CC[Al+]CC SSAWPNVUGVLDQP-UHFFFAOYSA-N 0.000 description 1
- GUHSGHQVNSDCNV-UHFFFAOYSA-N n-dimethylalumanyl-n-methylmethanamine Chemical compound CN(C)[Al](C)C GUHSGHQVNSDCNV-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 125000002370 organoaluminium group Chemical group 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- ANRQGKOBLBYXFM-UHFFFAOYSA-M phenylmagnesium bromide Chemical compound Br[Mg]C1=CC=CC=C1 ANRQGKOBLBYXFM-UHFFFAOYSA-M 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002685 polymerization catalyst Substances 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- HIFJUMGIHIZEPX-UHFFFAOYSA-N sulfuric acid;sulfur trioxide Chemical compound O=S(=O)=O.OS(O)(=O)=O HIFJUMGIHIZEPX-UHFFFAOYSA-N 0.000 description 1
- RWWNQEOPUOCKGR-UHFFFAOYSA-N tetraethyltin Chemical compound CC[Sn](CC)(CC)CC RWWNQEOPUOCKGR-UHFFFAOYSA-N 0.000 description 1
- VXKWYPOMXBVZSJ-UHFFFAOYSA-N tetramethyltin Chemical compound C[Sn](C)(C)C VXKWYPOMXBVZSJ-UHFFFAOYSA-N 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- ORYGRKHDLWYTKX-UHFFFAOYSA-N trihexylalumane Chemical compound CCCCCC[Al](CCCCCC)CCCCCC ORYGRKHDLWYTKX-UHFFFAOYSA-N 0.000 description 1
- MCULRUJILOGHCJ-UHFFFAOYSA-N triisobutylaluminium Chemical compound CC(C)C[Al](CC(C)C)CC(C)C MCULRUJILOGHCJ-UHFFFAOYSA-N 0.000 description 1
- WXRGABKACDFXMG-UHFFFAOYSA-N trimethylborane Chemical compound CB(C)C WXRGABKACDFXMG-UHFFFAOYSA-N 0.000 description 1
- UKHQRARQNZOXRL-UHFFFAOYSA-N trimethyltin Chemical compound C[SnH](C)C UKHQRARQNZOXRL-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- WXKZSTUKHWTJCF-UHFFFAOYSA-N zinc;ethanolate Chemical compound [Zn+2].CC[O-].CC[O-] WXKZSTUKHWTJCF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/10—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/50—Photovoltaic [PV] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/30—Doping active layers, e.g. electron transporting layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/141—Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE
- H10K85/143—Polyacetylene; Derivatives thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
Description
本発明は、光起電力効果によつて、太陽エネル
ギーを受けて電気エネルギーに変換するのに適し
たp−nヘテロ接合形太陽電池に関するものであ
る。
従来から、例えばn型シリコンの薄板の表面
に、p形層を拡散により形成したものが、太陽電
池の構造としてよく知られている。また、シリコ
ン以外の半導体でもp−n接合によるもの、例え
ばInP、GaP、Ga、As、CdSなど種々のものが適
用できることも知られている。しかしながら、こ
れら各種n形またはp形半導体の基板の表面に、
p−n接合になる薄膜層を形成することは極めて
困難であり、また従来から用いられている。例え
ばCVD法、真空蒸着法あるいはスパツタリング
法などでは、このような半導体薄膜を形成するこ
とは困難であり、また、特殊な装置を用いること
が必要であつた。すなわち、従来の方法では太陽
電池に適した安定した品質で効率のよいp−n接
合になる薄膜層を得ることは極めて困難であり、
このため生産性・経済性なども乏しく、極めて高
価になるという問題点があつた。
本発明は上述のような問題点を解決した、高品
質で生産性の良いp−nヘテロ接合形太陽電池を
提供せんとするものである。
即ち、本発明は、n型シリコンの表面でアセチ
レンの重合を行なつて、共役二重結合連鎖を有す
る膜厚が10μm以下の鎖状ポリアセチレン薄膜を
n形シリコン表面に形成し、続いて三酸化硫黄、
発塩硫酸、硫酸、硝酸、発煙硝酸、超強酸及びそ
のエステルから選ばれた少くとも一種の化合物で
ポリアセチレン薄膜を処理して得られるp−nヘ
テロ接合形太陽電池である。
本発明者らの一部は既に固体表面にポリアセチ
レン薄膜を形成する方法を見い出し提案した(特
公昭48−32581号)。
上記方法に準じてn型シリコン表面にポリアセ
チレン、薄膜を形成し触媒を洗滌して、乾燥後、
前記の化合物で処理することによつて比較的高抵
抗のp形ポリアセチレン薄膜を電導度が1Ω-1cm
-1以上のp型導電性ポリアセチレン薄膜にするこ
とによつて高品質で生産性の良いp−nヘテロ接
合形太陽電池を製造することができる。
以下、本発明について図面を用いて詳細に説明
する。
第1図は、本発明のp−nヘテロ接合形太陽電
池の実施例の一つである。即ち、片面にオーミツ
ク電極4を有するn型シリコン(3リン原子をド
ープしたもの)にp型導電性ポリアセチレン薄膜
(2、ポリアセチレンン薄膜を三酸化イオウで処
理したもので膜厚は0.8μm)を形成してp−n
接合を作り、さらに、p型導電性ポリアセチレン
薄膜の上に透明電極(1、金を化学蒸着法によつ
て被覆させたもので膜厚は0.50μm)を形成させ
たものである。
本発明の特徴はn−型シリコン表面で、既に当
該業者には公知である重合方法で膜厚が10μm以
下のポリアセチレン薄膜を形成し、さらに形成さ
れたポリアセチレン薄膜を三酸化イオウ、発煙硫
酸、硫酸、硝酸、発煙硝酸、超強酸及びそのエス
テルから選ばれた少くとも1種の化合物で処理す
ることにある。ポリアセチレンのバンド・ギヤツ
プ・エネルギーは約1.6eVであり、太陽光のエネ
ルギーの大半を吸収して光伝導体になることよ
り、本発明で得られたp−nヘテロ接合素子は、
その光起電力効果によつて、太陽エネルギーを受
けて電気エネルギーに変換する、効率の良いp−
nヘテロ接合形太陽電池となる。
本発明によれば、p型導電性ポリアセチレン薄
膜の膜厚はアセチレンの重合条件、例えば触媒調
製条件、触媒濃度、触媒量、アセチレン圧力、重
合温度および重合時間等によつて容易に制御する
ことができるから、ポリアセチレン膜の膜厚の制
御が重要な要素となる太陽電池として好適であ
る。
以下本発明について具体的に説明する。
本発明において用いられるn型シリコンとして
は通常用いられているリンやアンチモンの如き最
高原子価が5価の金属をドープしたシリコン単結
晶でも、また最近検討が進んでいるn形アモルフ
アスシリコンのいずれでも可能であるが、高い太
陽エネルギー変換効率を得る為にはn形シリコン
単結晶を用いる方が好ましい。
用いるn形シリコンの片面には図面で示した様
にオーミツクな電極を付けることが好ましいが、
オーミツク電極を付けずに直接シリコン面にリー
ド線を付けても構わない。オーミツク電極は当該
業者の間で通常行なわれているCVD法、真空蒸
着法あるいはスパツタリング法等で作ることがで
きる。
n形シリコンのポリアセチレン膜と接触する面
は通常のエツチング操作により酸化物被膜を除去
してフレツシユなシリコン表面としておく方が望
ましいが、エツチング操作をせずに酸化物被膜の
上にポリアセチレン薄膜を形成しても太陽電池と
して有効である。
エツチング操作は当該業者の間で広く行われて
いる湿式法又は乾式法のいずれを用いることが出
来る。
n形シリコン表面上にポリアセチレン膜を製造
する方法についてはすでに本発明者等の一部が提
案した方法(特公昭48−32581号)に準じて行う
ことができるが、その方法について詳細に説明す
る。
生成するポリアセチレンが二重結合連鎖を有す
る鎖状ポリアセチレンであれば、アセチレンの重
合触媒には制限はないが、通常は遷移金属化合物
と有機金属化合物を組合せた触媒系が用いられ
る。触媒系は均一系又は不均一系のいずれでも構
わないが、触媒除去の容易なことより通常は均一
系が用いられる。
本発明において用いられる触媒系を得るために
使われる遷移金属化合物〔触媒成分(A)〕としては
チタン、バナジン、クロム、鉄、コバルト、タン
グステン及びモリブテンの金属とハロゲン原子あ
るいは炭素数が多くとも20個のアルキル基、アル
ケニル基、アリル(aryl)基、アラルキル基、ア
ルコキサイド基、フエノキシド基、カルボン酸残
基、シクロペンタジエニル基、アセチルアセトン
残基、一酸化炭素(カルボニル基)を有する化合
物ならびに該化合物とピリジン、トリフエニルフ
オスフインおよびジピリジル等の電子供与性化合
物との錯体である。
遷移金属化合物のうちでもチタン、バナジン、
鉄、コバルトおよびクロムの化合物が好ましく、
特にチタンの化合物が好ましい。
好ましい遷移金属化合物の代表例として一般式
が(1)〜(3)式で示される遷移金属化合物を挙げるこ
とができる。
Ti(OR4) (1)
(Rは炭素数が多くとも20個以下のアルキル基)
M(acac)3 (2)
MO(acac)2 (3)
〔(acac)はアセチルアセトナート基、Mはチタ
ン、バナジン、鉄、コバルトおよびクロムから選
ばれる遷移金属である〕
本発明において用いられる有機金属化合物〔触
媒成分(B)〕は周期律表のA、B、Bおよび
B族の金属のうち少なくとも一種の金属を有す
る有機金属化合物であり、そのうちの一部の一般
式は下式で示されるものである。
MRn
〔ただし、Mは周期律表のA、B、Bまた
はB族の金属であり、Rは炭素数が多くとも20
個のアルキル基、アルケニル基、アリル(aryl)
基、アラルキル基、アルコキサイド基、フエノキ
シ基およびシクロペンタジエニル基からなる群か
らえらばれた有機基または水素原子もしくはハロ
ゲン原子であり、それらは同一でも異種でもよい
が、それらのうち少なくとも一つは水素原子また
は該有機基であり、nは該金属の最高原子価数ま
たはそれ以下の正の整数である〕
他の有機金属化合物としては、上記の有機金属
化合物と当モルのピリジン、トリフエニルホスフ
インまたはジエチルエーテルとの錯体および該有
機金属化合物1モルと多くとも2.0モルの水との
反応物ならびに二種の前記有機金属化合物の複塩
があげられる。
本発明において使用される有機金属化合物のう
ち、代表的なものとしては、マグネシウム、カル
シウム、亜鉛、ほう素、アルミニウム、カリウ
ム、けい素およびすずを有する有機金属化合物で
あり、特に、マグネシウム、亜鉛、アルミニウム
およびすずの有機金属化合物が好ましく、とりわ
け、有機アルミニウム系化合物が好適である。該
有機アルミニウム系化合物の代表例としては、ト
リエチルアルミニウム、トリイソブチルアルミニ
ウム、トリヘキシルアルミニウム、ジエチルアル
ミニウムクロライド、ジ−n−ブチルアルミニウ
ムクロライド、エチルアルミニウムセスキクロラ
イド、ジエチルアルミニウムブトキシドおよびト
リエチルアルミニウムと水との反応生成物〔反応
割合1;0.5(モル比)〕があげられる。それ以外
の有機アルミニウム系化合物としては、アルミニ
ウム・シロキサレン系(siloxalene)化合物、ア
ルミニウム・アマイド系化合物およびジアルモキ
サレン系化合物ならびに前記の有機アルミニウム
化合物を含む複塩があげられる。
本発明において有機金属化合物として使用され
るアルミニウム・シロキサレン系化合物の一般式
は下式で示されるものである。
〔ただし、R1、R2およびR3は同一でも異種でもよ
く、ハロゲン原子または炭素数が多くとも10個の
アルキル基もしくはアルコキシ基であり、R4は
炭素数が多くとも10個のアルキル基であり、R5
はハロゲン原子または炭素数が多くとも10個のア
ルキル基もしくはアルコキシ基あるいは一般式が
The present invention relates to a pn heterojunction solar cell suitable for receiving solar energy and converting it into electrical energy by the photovoltaic effect. Conventionally, a structure in which a p-type layer is formed by diffusion on the surface of a thin plate of n-type silicon, for example, has been well known as a solar cell structure. It is also known that various semiconductors other than silicon, such as those based on p-n junctions, such as InP, GaP, Ga, As, and CdS, can be applied. However, on the surface of the substrate of these various n-type or p-type semiconductors,
It is extremely difficult to form a thin film layer that forms a p-n junction, and this has been conventionally used. For example, it is difficult to form such a semiconductor thin film using a CVD method, a vacuum evaporation method, or a sputtering method, and it is necessary to use special equipment. In other words, with conventional methods, it is extremely difficult to obtain a thin film layer that forms an efficient p-n junction with stable quality suitable for solar cells.
For this reason, there were problems in that productivity and economy were poor, and it was extremely expensive. The present invention aims to solve the above-mentioned problems and provide a pn heterojunction solar cell with high quality and good productivity. That is, in the present invention, acetylene is polymerized on the surface of n-type silicon to form a chain polyacetylene thin film having a conjugated double bond chain and a thickness of 10 μm or less on the surface of n-type silicon, and then trioxide is formed on the surface of n-type silicon. sulfur,
This is a p-n heterojunction solar cell obtained by treating a polyacetylene thin film with at least one compound selected from hydrochloric sulfuric acid, sulfuric acid, nitric acid, fuming nitric acid, super strong acids, and esters thereof. Some of the present inventors have already discovered and proposed a method for forming a polyacetylene thin film on a solid surface (Japanese Patent Publication No. 32581/1983). Following the above method, a thin film of polyacetylene is formed on the n-type silicon surface, the catalyst is washed away, and after drying,
By treating with the above-mentioned compound, a relatively high resistance p-type polyacetylene thin film can be made to have an electrical conductivity of 1Ω -1 cm.
By forming a p-type conductive polyacetylene thin film with a p-type conductivity of -1 or more, a pn heterojunction solar cell with high quality and good productivity can be manufactured. Hereinafter, the present invention will be explained in detail using the drawings. FIG. 1 shows one embodiment of the pn heterojunction solar cell of the present invention. That is, a p-type conductive polyacetylene thin film (2, polyacetylene thin film treated with sulfur trioxide, film thickness 0.8 μm) was applied to n-type silicon (doped with 3 phosphorus atoms) having an ohmic electrode 4 on one side. form p-n
A junction was made, and then a transparent electrode (1, coated with gold by chemical vapor deposition, film thickness: 0.50 μm) was formed on the p-type conductive polyacetylene thin film. The feature of the present invention is that a polyacetylene thin film having a thickness of 10 μm or less is formed on the n-type silicon surface by a polymerization method already known to those skilled in the art, and the formed polyacetylene thin film is then coated with sulfur trioxide, oleum, and sulfuric acid. , nitric acid, fuming nitric acid, super strong acids, and esters thereof. The band gap energy of polyacetylene is about 1.6 eV, and since it absorbs most of the energy of sunlight and becomes a photoconductor, the p-n heterojunction device obtained by the present invention
Its photovoltaic effect allows it to receive solar energy and convert it into electrical energy, making it an efficient p-
This becomes an n-heterojunction solar cell. According to the present invention, the thickness of the p-type conductive polyacetylene thin film can be easily controlled by the acetylene polymerization conditions, such as catalyst preparation conditions, catalyst concentration, catalyst amount, acetylene pressure, polymerization temperature, and polymerization time. Therefore, it is suitable for solar cells where control of the thickness of the polyacetylene film is an important factor. The present invention will be specifically explained below. The n-type silicon used in the present invention may be either single crystal silicon doped with a metal with the highest valence of 5, such as phosphorus or antimony, which is commonly used, or n-type amorphous silicon, which has been studied recently. However, in order to obtain high solar energy conversion efficiency, it is preferable to use n-type silicon single crystal. It is preferable to attach an ohmic electrode to one side of the n-type silicon used as shown in the drawing.
It is also possible to attach a lead wire directly to the silicon surface without attaching an ohmic electrode. The ohmic electrode can be manufactured by a CVD method, a vacuum evaporation method, a sputtering method, etc. which are commonly used in the industry. It is preferable to remove the oxide film on the surface of n-type silicon that contacts the polyacetylene film using a normal etching operation to leave a flexible silicon surface, but it is also possible to form a thin polyacetylene film on the oxide film without performing an etching operation. However, it is effective as a solar cell. For the etching operation, either a wet method or a dry method, which is widely practiced among those skilled in the art, can be used. The method for producing a polyacetylene film on the surface of n-type silicon can be carried out in accordance with the method already proposed by some of the present inventors (Japanese Patent Publication No. 32581/1983), but this method will be explained in detail. . As long as the polyacetylene to be produced is a linear polyacetylene having a double bond chain, there are no restrictions on the acetylene polymerization catalyst, but a catalyst system comprising a combination of a transition metal compound and an organometallic compound is usually used. The catalyst system may be either a homogeneous system or a heterogeneous system, but a homogeneous system is usually used because the catalyst can be easily removed. The transition metal compounds [catalyst component (A)] used to obtain the catalyst system used in the present invention include metals such as titanium, vanadine, chromium, iron, cobalt, tungsten, and molybdenum, and halogen atoms or at most 20 carbon atoms. Compounds containing alkyl groups, alkenyl groups, aryl groups, aralkyl groups, alkoxide groups, phenoxide groups, carboxylic acid residues, cyclopentadienyl groups, acetylacetone residues, carbon monoxide (carbonyl groups), and It is a complex between a compound and an electron-donating compound such as pyridine, triphenylphosphine, and dipyridyl. Among transition metal compounds, titanium, vanadine,
Compounds of iron, cobalt and chromium are preferred;
Particularly preferred are titanium compounds. Representative examples of preferred transition metal compounds include transition metal compounds whose general formulas are represented by formulas (1) to (3). Ti(OR 4 ) (1) (R is an alkyl group having at most 20 carbon atoms) M(acac) 3 (2) MO(acac) 2 (3) [(acac) is an acetylacetonato group, M is a transition metal selected from titanium, vanadine, iron, cobalt, and chromium.] The organometallic compound [catalyst component (B)] used in the present invention is a transition metal selected from titanium, vanadine, iron, cobalt, and chromium. It is an organometallic compound containing at least one kind of metal, and the general formula of some of them is shown by the following formula. MRn [However, M is A, B, B, or a metal from Group B of the periodic table, and R has at most 20 carbon atoms.
alkyl, alkenyl, aryl
an organic group selected from the group consisting of aralkyl group, alkoxide group, phenoxy group, and cyclopentadienyl group, or a hydrogen atom or a halogen atom, which may be the same or different, but at least one of them is is a hydrogen atom or the organic group, and n is the highest valence number of the metal or a positive integer less than that.] Other organometallic compounds include pyridine, triphenylphosphine, Mention may be made of complexes with yne or diethyl ether and the reaction products of 1 mol of said organometallic compound with at most 2.0 mol of water, as well as double salts of two of said organometallic compounds. Among the organometallic compounds used in the present invention, typical ones include those containing magnesium, calcium, zinc, boron, aluminum, potassium, silicon, and tin. Organometallic compounds of aluminum and tin are preferred, and organoaluminium-based compounds are particularly preferred. Typical examples of the organoaluminum compounds include triethylaluminum, triisobutylaluminum, trihexylaluminum, diethylaluminum chloride, di-n-butylaluminum chloride, ethylaluminum sesquichloride, diethylaluminium butoxide, and the reaction of triethylaluminum with water. The product [reaction ratio 1; 0.5 (molar ratio)] is mentioned. Other organoaluminum compounds include aluminum siloxalene compounds, aluminum amide compounds, dialmoxalene compounds, and double salts containing the above organoaluminum compounds. The general formula of the aluminum-siloxalene compound used as the organometallic compound in the present invention is shown by the following formula. [However, R 1 , R 2 and R 3 may be the same or different and are a halogen atom or an alkyl group or alkoxy group having at most 10 carbon atoms, and R 4 is an alkyl group having at most 10 carbon atoms. and R 5
is a halogen atom, an alkyl group or alkoxy group having at most 10 carbon atoms, or a general formula of
【式】 または【formula】 or
【式】
(ただし、R6、R7、およびR8は同一でも異種でも
よく、前記のR1、R2およびR3と同一であり、n
は10以下の正の整数)で表わされる置換基であ
る〕
本発明において用いられるアルミニウム・シロ
キサレン系化合物のうち、代表的なものとして
は、トリメチルジメチル−シロキサレン、トリメ
チルジエニル−シロキサレン、トリメチルジ−n
−プロピル−シロキサレン、トリメチル−ジイソ
ブチル−シロキサレン、トリメチルジオクチル−
シロキサレン、トリクロロジメチル−シロキサレ
ン、ジメチルエチルジエニル−シロキサレン、ト
リメトキシジメチル−シロキサレン、トリエチル
ジメチル−シロキサレン、トリメチルジメトキシ
−シロキサレン、トリメチルジメトキシ−シロキ
サレンおよびトリメトキシジクロロ−シロキサレ
ンがあげられる。
また、本発明において有機金属化合物として使
われるアルミニウム・アマイド系化合物の一般式
は下式で示されるものである。
(ただし、R1、R2およびR3は同一でも異種でもよ
く、水素原子または炭素数が多くとも10個のアル
キル基であり、R4はハロゲン原子または炭素数
が多くとも10個のアルキル基である)。
本発明において使用されるアルミニウム・アマ
イド系化合物のうち、代表的なものとしては、ジ
エチルアルミニウムジメチルアミド、ジエチルア
ルミニウムジエチルアミド、ジメチルアルミニウ
ムジメチルアミド、ジメチルアルミニウムジ−n
−ブチルアミド、ジエチルアルミニウムジ−n−
ブチルアミド、ジクロロアルミニウムジメチルア
ミド、ジメチルアルミニウムジオクチルアミド、
ジイソブチルアルミニウムジ−n−ブチルアミド
およびジヘキシルアルミニウムジオクチルアミド
があげられる。
本発明において有機金属化合物として用いられ
ジアルモキサン系化合物の一般式は下式で示され
るものである。
(ただし、R1、R2およびR3は同一でも異種でもよ
く、ハロゲン原子または炭素数が多くとも10個の
アルキル基もしくはアルコキシ基であり、R4は
炭素数が多くとも10個のアルキル基である)
本発明において使用されるジアルモキサン系化
合物のうち、代表的なものとしては、テトラメチ
ルジアルモキサン、テトラエチルジアルモキサ
ン、テトライソブチルジアルモキサン、1・1−
ジメチル−3・3−ジエチルジアルモキサン、テ
トライソブチルジアルモキサン、1・1−ジメチ
ル−3・3−ジイソブチルジアルモキサン、テト
ラデシルジアルモキサン、塩化トリメチルジアル
モキサンおよび塩化トリエチルジアルモキサンが
あげられる。
本発明において使用される有機金属化合物のう
ち有機アルミニウム化合物以外の有機金属化合物
の代表例としては、ジエチルマグネシウム、塩化
エチルマグネシウム、ヨウ化メチルマグネシウ
ム、塩化アリル(allyl)マグネシウム;塩化ノル
マルプロピルマグネシウム、第三級−ブチルマグ
ネシウムクロライド、臭化フエニルマグネシウ
ム、ジフエニルマグネシウム、エチル・エトキシ
マグネシウム、ジメチル亜鉛、ジエチル亜鉛、ジ
エトキシ亜鉛、塩化ジブチルホウ素、ジボレイ
ン、トリメチルホウ素、トリエチルシラン、四水
素化ケイ素、トリエチルシリコーンハイドライ
ド、テトラメチルスズ、テトラエチルスズ、塩化
トリメチルスズ、二塩化ジメチルスズ、水素化ト
リメチルスズ、臭化エチルマグネシウムとエチル
エーテルとの鎖体およびジエチル亜鉛と水との反
応生成物〔H2C/Zn(C2H5)2<2.0モル比)〕など
があげられる。
さらに、本発明において使用される有機化合物
としては、二種の上記有機化合物の複塩(たとえ
ば、リチウムアルミニウムテトラハイドライド、
カルシウムテトラエチル亜鉛)があげられる。
本発明も実施するにあたり、これらの有機金属
化合物は一種のみを使用してもよく、二種以上を
併用してもよい。
本発明に使用される触媒成分(A)の遷移金属に対
する有機金属化合物(B)の割合はモル比で1〜100
の間で自由に選択できるが、特にこれに限定する
わけではない。
これら触媒成分(A)、(B)に以下に示す第3成分を
組み合せて重合体収率、重合速度等を制御するこ
とも可能であるが、これらは用いても用いなくて
もよい。第3成分としては含酸素化合物、例えば
アルコール、エーテル、過酸化物、カルボン酸、
酸無水物、酸クロライド、エステル、ケトン等が
代表的であるが、その他含窒素化合物、含硫黄化
合物、含ハロゲン化合物、あるいは分子状沃素そ
の他のルイス酸等を用いることができる。
これらの添加順序は特に制限はない。
触媒は希釈しないでそのまま用いても良いが、
通常は芳香族系又は樹脂族系の不活性有機触媒で
希釈して用いることが好ましいが、希釈する際に
遷移金属化合物の濃度は0.001モル/以上であ
ることが必要であり、遷移金属化合物の濃度が
0.001モル/以下であつては、良好なポリアセ
チレン薄膜を得ることが困難である。
これ等の触媒は空気中の酸素又は水分と反応と
して分解したり変質したりするので、取扱いは実
質的に酸素及び水分の存在しない状態、例えば窒
素又はアルゴンガス等の不活性気体中や真空中で
取り扱わなければならない。
上記触媒溶液を、よく乾燥して実質的に水の付
いていない状態にしたn型シリコン表面に塗布し
アセチレンガスと接触させてポリアセチレン薄を
作る。
重合時の温度によつてポリアセチレンの立体構
造を制御することが出来、10℃以下の温度ではシ
ス型の多いポリアセチレンが10℃以上の温度では
トランス型の多いポリアセチレンを作ることがで
きる。
重合温度は300℃以下が好ましく、300℃以上で
はポリアセチレンの分解が起り好ましくない。
アセチレンの重合は、触媒にアセチレンガスを
接触することによつて起る。アセチレン圧力は特
に制限はないが、実用的な観点から、10気圧以下
で行うことが望ましい。
生成する高分子量のポリアセチレンは有機溶媒
に溶解しないので、重合開始と共に析出する。
所定の膜厚のポリアセチレン膜が得られたら、
存アセチレンガスを除去し、続いて酸素及び水を
除去した触媒が溶解する有機溶媒で数回洗滌し
て、残存触媒を除去する。
続いて残存有機溶媒を乾燥除去してp型ポリア
セチレン膜とn型シリコンのp−nヘテロ接合子
を得る。
ポリアセチレン膜の膜厚は太陽光線を出来るだ
け多く透過させる為に10μm以下が好ましく、特
に2μm以下が特に好ましい。10μm以上の膜厚
では太陽エネルギーの変換効率が極端に低下す
る。
ポリアセチレン膜の膜厚は触媒の調製条件、ア
セチレン圧力、重合時間及び重合温度等によつて
容易に制御することが可能できる。生成するポリ
アセチレンの膜厚は薄い方が太陽エネルギーの変
換効率が大きく望ましいが、0.05μm以下の膜厚
のポリアセチレン薄膜を作成することは困難であ
る。
この様にして得られるp−nヘテロ接合形素子
のポリアセチレンの電気伝導度は10-8〜10-5Ω
-1・cm-1と低いが、このままでも、光起電力効果
により太陽電池となり得るが、より大きい変換効
率を得るには、ポリアセチレン膜を三酸化イオ
ウ、発煙硫酸、硫酸、硝酸、発煙硝酸、超強酸及
びそのエステルから選ばれた少くとも一種の化合
物で処理してポリアセチレン膜の電導度を1Ω-1
cm-1以上に上げることによつて大きい変換効率を
有する太陽電池を製造することが可能となつた。
ポリアセチレンの電気伝導度を1Ω-1・cm- 1以
上の高いレベルに上げることの出来る電子受容性
化合物として、すでに(1)ヨウ素(2)、臭素
(Br2)およびヨウ化臭素(IBr)等のハロゲン(ii)五
フツ化ヒ素(ASF5)、五フツ化アンチモン
(SbF5)、四フツ化ケイ素(SiF4)、五塩化リン
(PCl5)および五フツ化リン(PF5)等の金属ハロ
ゲン化物(iii)ジフルオロスルホニルパーオキシド
(F2S2O4)が知られている。本発明者は前記以外
の化合物でポリアセチレンの電気伝導度を1Ω
-1・cm-1以上にすることができ、かつp型ポリア
セチレン膜を与える処理剤について種々検討した
結果、三酸化イオウ、発煙硫酸、硫酸、硝酸、発
煙硝酸、超強酸及びそのエステルから選ばれた少
くとも一種の化合物でポリアセチレン膜を処理す
ることによつて、ポリアセテレンの電気伝導度を
1Ω-1・cm-1以上にすることができることを見い
出し本発明に到達した。
本発明で用いることのできる処理剤は、従来の
高い電気伝導度を与える電子受容性化合物である
五フツ化ヒ素やヨウ素に比較して毒性が低くかつ
安価であるので工業的に極めて有用である。
本発明でいう超強酸とは、一般式が(1)式で示さ
れる化合物である。
R1−SO3H (1)
(R1はCl、Fまたはハロゲンで置換された炭素数
5個以下の炭化水素残基)
代表的な具体例としては、フロロ硫酸、クロロ
硫酸、トリフルオロメタン硫酸等をあげることが
できる。
これら(1)式で示される化合物は、(1)式で示され
る化合物1モルに対して0.5モル以下の三酸化イ
オウ、五フツ化ヒ素、五フツ化タリウムおよび五
フツ化アンチモンから選ばれる少なくとも1種の
化合物と混合して使用してもよい。
また、本発明でいう超強酸のエステルとは、一
般式が(2)式で示される化合物である。
R1−SO3−R2 (2)
(R1は(1)式に同じ、R2は炭素数が5個以下のアル
キル基)
代表的な具体例としては、フロロ硫酸メチル、
フロロ硫酸エチル、クロロ硫酸メチル、トリフロ
ロメタンスルホン酸メチル、トリフロロメタンス
ルホン酸エチル等をあげることができる。これら
の化合物で前記のp−nヘテロ接合形素子のポリ
アセチレン薄膜を処理することによつて大きい変
換効率の太陽電池を得ることができる。
これらの化合物でポリアセチレン膜を処理する
方法としては(i)これ等の化合物の蒸気を直接ポリ
アセチレン膜に接触させる方法(ii)ポリアセチレン
膜を不活性有機溶媒又は水に浸漬してそこにこれ
等の化合物を導入する方法(iii)これらの化合物中に
ポリアセチレン膜を直接浸漬する方法等が考えら
れるが、いずれの方法を用いても良い。
p−nヘテロ接合型素子を前記の化合物で処理
した後、ポリアセチレンと未反応の過剰の化合物
は不活性有機溶媒洗滌又は真空乾燥等の通常の方
法で除去しておくことが望ましい。
この様にして得られたp−型導電性ポリアセチ
レン薄膜−n型シリコンのp−n型ヘテロ接合素
子のp−型導電性ポリアセチレン薄膜に直接リー
ド線を付けて太陽電池としても良いが、ポリアセ
チレン薄膜にオーミツクな透明電極を付けてリー
ド線を付ける方が変換効率を上げることができる
から好ましい。
オーミツクな透明電極は当該業者の間で通常行
なわれているCVD法、真空蒸着法あるいはスパ
ツタリング法等で作ることができる。
以上の方法によつて製造されるp−n接合型太
陽電池は酸素によつて比較的酸化劣化を受け易い
ので、真空又は不活性ガス雰囲気下で使用するこ
とが好ましい。この為の包装材料として太陽電池
に通常用いられているガラスやポリカーボネー
ト、ポリメタクリレートおよびポリエステル等の
プラスチツクが好適である。
実施例 1
窒素ガスで完全に装置した200mlの反応器に常
法に従つて製精したトルエンを40ml、テトラブト
キシチタニウムを10ミリモル及びトリエチルアル
ミニウムを40ミリモルを室温でこの順序に仕込ん
で触媒溶液を調製した。
片面に金を蒸着してオーミツクな電極を付けた
n−型シリコンウエーハー(リン原子をドープし
たもので、比抵抗5〜15Ω・cm)の非電極面を濃
硝酸:フツ酸=5:1(重量比)のエツチング液
で1分間エツチング処理した後、多量の蒸留水で
洗滌した後、室温で真空乾燥した。
窒素ガス雰囲気下で、上記の乾燥したn型シリ
コンウエーハーのエツチング面に上記の触媒溶液
約0.2mlを適下して、触媒溶液をシリコン表面に
均一に塗布した。次いで系を真空にして窒素ガス
を追い出した後、−78℃に冷却して4cmHgの圧力
の精製アセチレンガスを導入して30秒間重合を行
なつた。重量終了後直ちに未反応アセチレンガス
を追い出して窒素ガスで置換した。−78℃に冷却
しながら窒素ガス雰囲気下、多量の精製トルエン
で触媒を洗滌して完全に除去し、室温で真空乾燥
して残存トルエンを除去した。膜厚0.5μmの透
明なポリアセチレン膜がシリコン表面を均一に覆
つていた。生成したポリアセチレン膜はシス体が
95%で、電気伝導度は8×10-8Ω-1・cm-1のp型
半導体であつた。
得られたポリアセチレン/n型シリコンウエー
ハー積層板のポリアセチレン面及びシリコンの電
極面に白金のリード線を導電性接着剤(商品名
“Electro dag502”)で付けて30分間真空乾燥して
接着剤中の有機溶媒を除去した。
この様にして得られたp−nヘテロ接合素子を
反応容器に入れ、真空ポンプで系中の空気を排気
した後、三酸化トオウ(市販品を蒸留したもの)
を−78℃に冷却し、その温度の蒸気圧の蒸気を反
応器に入れて40分間処理を行なつた。続いて、未
反応の三酸化イオウを排気してp−nヘテロ接合
形太陽電池を得た。このポリアセチレン膜の電気
伝導度は480Ω-1・cm-1であつた。
得られた太陽電池のポリアセチレン膜の膜厚は
0.5μm、面積は0.2cm2であつた。上記の太陽電池
に太陽光(57.3MW/cm3)を照射して光起電力を
測定したところ、開放端電圧が0.41V、短絡電流
が4.45mA/cm2、フイル・フアクターが0.26で、変
換効率は0.83%であつた。
実施例 2
実施例1で得られたポリアセチレン/n型シリ
コンウエーハー積層板にリード線を付ける前のポ
リアセチレン膜の表面に透明な金薄膜の電極を真
空蒸着法によつて付け、そこに白金のリード線を
付けた以外は実施例1と全く同じ方法でp−nヘ
テロ接合型太陽電池を作つた。
実施例1と全く同じ方法で光起電力を測定した
ところ、その変換効率は1.59%であつた。
比較例 1
実施例1で行つた三酸化イオウの処理を行なわ
なかつた以外は実施例1と全く同様な方法でp−
nヘテロ接合型太陽電池を作つた。
実施例1と全く同じ方法で光起電力を測定した
ところ、その変換効率は0.12%であつた。
この比較例より、ポリアセチレン膜の電気伝導
度を高くしておくことが、太陽電池の変換効率を
上げる点から好ましいことが判る。
実施例 3
実施例1で得られた未処理ポリアセチレン−n
型シリコンのp−ヘテロ接合形素子と50mlのトル
エンをガラス製反応器に入れ、反応容器を液体窒
素で冷却して系中の空気を真空ポンプで排気した
後、反応容器を−78℃に冷却した。この系に約5
mlのトリフルオロメタン硫酸を導入して、−78℃
で2時間反応させた後、室温に戻して24時間処理
した。
処理後、窒素雰囲気下、トルエン50mlでこのp
−nヘテロ接合素子を3回洗滌し、次に真空乾燥
して残存トルエンとトリフルオロメタン硫酸を除
去した。
この様にして得られたp−nヘテロ接合形太陽
電池の変換効率を実施例1と全く同じ方法で測定
したところ、その変換効率は0.80%であつた。
実施例 4〜8
実施例2で用いたトリフルオロメタン硫酸の替
りに第1表で示した化合物を用いた以外は実施例
3と全く同様に処理を行つてp−nヘテロ接合形
太陽電池を作製して、実施例1と同様にその変換
効率を測定した。結果は第1表に示した。[Formula] (However, R 6 , R 7 and R 8 may be the same or different, and are the same as the above R 1 , R 2 and R 3 , and n
is a positive integer of 10 or less)] Representative examples of the aluminum-siloxalene compounds used in the present invention include trimethyldimethyl-siloxalene, trimethyldienyl-siloxalene, and trimethyldi-siloxalene. n
-Propyl-siloxsalene, trimethyl-diisobutyl-siloxsalene, trimethyldioctyl-
Mention may be made of siloxsalene, trichlorodimethyl-siloxsalene, dimethylethyldienyl-siloxsalene, trimethoxydimethyl-siloxsalene, triethyldimethyl-siloxsalene, trimethyldimethoxy-siloxsalene, trimethyldimethoxy-siloxsalene and trimethoxydichloro-siloxsalene. Further, the general formula of the aluminum amide compound used as the organometallic compound in the present invention is shown by the following formula. (However, R 1 , R 2 and R 3 may be the same or different and are a hydrogen atom or an alkyl group having at most 10 carbon atoms, and R 4 is a halogen atom or an alkyl group having at most 10 carbon atoms. ). Among the aluminum amide compounds used in the present invention, typical examples include diethylaluminum dimethylamide, diethylaluminum diethylamide, dimethylaluminum dimethylamide, dimethylaluminum di-n
-butyramide, diethylaluminium di-n-
butylamide, dichloroaluminum dimethylamide, dimethylaluminum dioctylamide,
Mention may be made of diisobutylaluminum di-n-butylamide and dihexylaluminum dioctylamide. The general formula of the dialmoxane compound used as the organometallic compound in the present invention is shown by the following formula. (However, R 1 , R 2 and R 3 may be the same or different and are a halogen atom or an alkyl group or alkoxy group having at most 10 carbon atoms, and R 4 is an alkyl group having at most 10 carbon atoms. Among the dialmoxane compounds used in the present invention, representative ones include tetramethyldialumoxane, tetraethyldialumoxane, tetraisobutyldialumoxane, and 1.1-
Dimethyl-3,3-diethyldialumoxane, tetraisobutyldialumoxane, 1,1-dimethyl-3,3-diisobutyldialumoxane, tetradecyldialumoxane, trimethyldialumoxane chloride and triethyldialumoxane chloride can give. Among the organometallic compounds used in the present invention, typical examples of organometallic compounds other than organoaluminum compounds include diethylmagnesium, ethylmagnesium chloride, methylmagnesium iodide, allylmagnesium chloride; normal propylmagnesium chloride, Tertiary-butylmagnesium chloride, phenylmagnesium bromide, diphenylmagnesium, ethyl ethoxymagnesium, dimethylzinc, diethylzinc, diethoxyzinc, dibutylboron chloride, diborein, trimethylboron, triethylsilane, silicon tetrahydride, triethylsilicone Hydride, tetramethyltin, tetraethyltin, trimethyltin chloride, dimethyltin dichloride, trimethyltin hydride, chains of ethylmagnesium bromide and ethyl ether, and reaction products of diethylzinc and water [H 2 C/Zn ( C 2 H 5 ) 2 <2.0 molar ratio)]. Further, as the organic compound used in the present invention, double salts of two types of the above-mentioned organic compounds (for example, lithium aluminum tetrahydride,
calcium (tetraethylzinc). In carrying out the present invention, only one kind of these organometallic compounds may be used, or two or more kinds may be used in combination. The molar ratio of the organometallic compound (B) to the transition metal of the catalyst component (A) used in the present invention is 1 to 100.
You can freely choose between, but it is not particularly limited to this. It is also possible to control the polymer yield, polymerization rate, etc. by combining these catalyst components (A) and (B) with a third component shown below, but these may or may not be used. The third component includes oxygen-containing compounds such as alcohols, ethers, peroxides, carboxylic acids,
Typical examples include acid anhydrides, acid chlorides, esters, ketones, etc., but nitrogen-containing compounds, sulfur-containing compounds, halogen-containing compounds, molecular iodine, and other Lewis acids can also be used. There is no particular restriction on the order of addition of these. The catalyst may be used as is without dilution, but
Usually, it is preferable to dilute with an aromatic or resinous inert organic catalyst, but when diluting, the concentration of the transition metal compound must be 0.001 mol/or more, and the transition metal compound must be diluted with an inert organic catalyst. The concentration is
If the amount is less than 0.001 mol/mol, it is difficult to obtain a good polyacetylene thin film. Since these catalysts decompose or change in quality as they react with oxygen or moisture in the air, they should be handled in a state substantially free of oxygen and moisture, such as in an inert gas such as nitrogen or argon gas, or in a vacuum. must be handled with. The above catalyst solution is applied to a well-dried n-type silicon surface that is substantially free of water and brought into contact with acetylene gas to form a polyacetylene thin film. The steric structure of polyacetylene can be controlled by changing the temperature during polymerization; at temperatures below 10°C, polyacetylene with many cis forms can be produced, while at temperatures above 10°C, polyacetylene with many trans forms can be produced. The polymerization temperature is preferably 300°C or lower; if it is higher than 300°C, decomposition of the polyacetylene occurs, which is undesirable. Polymerization of acetylene occurs by contacting acetylene gas with a catalyst. The acetylene pressure is not particularly limited, but from a practical standpoint, it is desirable to conduct the reaction at 10 atmospheres or less. Since the high molecular weight polyacetylene produced is not soluble in organic solvents, it precipitates out upon initiation of polymerization. Once a polyacetylene film of a predetermined thickness is obtained,
The remaining acetylene gas is removed, followed by washing several times with an organic solvent in which the oxygen- and water-free catalyst is dissolved to remove the remaining catalyst. Subsequently, the remaining organic solvent is removed by drying to obtain a p-n heterozygote of a p-type polyacetylene film and n-type silicon. The thickness of the polyacetylene film is preferably 10 μm or less, particularly preferably 2 μm or less, in order to transmit as much sunlight as possible. If the film thickness is 10 μm or more, the solar energy conversion efficiency will be extremely reduced. The thickness of the polyacetylene film can be easily controlled by adjusting catalyst preparation conditions, acetylene pressure, polymerization time, polymerization temperature, etc. The thinner the produced polyacetylene film, the greater the solar energy conversion efficiency, and is therefore desirable, but it is difficult to create a polyacetylene thin film with a thickness of 0.05 μm or less. The electrical conductivity of the polyacetylene of the p-n heterojunction type device obtained in this way is 10 -8 to 10 -5 Ω.
Although it is low at -1 cm -1 , it can still be used as a solar cell due to the photovoltaic effect, but in order to obtain a higher conversion efficiency, the polyacetylene film must be mixed with sulfur trioxide, oleum, sulfuric acid, nitric acid, fuming nitric acid, etc. The conductivity of the polyacetylene film is increased to 1Ω -1 by treating it with at least one compound selected from super strong acids and their esters.
By increasing the conversion efficiency to cm -1 or higher, it has become possible to manufacture solar cells with high conversion efficiency. As electron-accepting compounds that can increase the electrical conductivity of polyacetylene to a high level of 1 Ω -1 cm - 1 or higher, (1) iodine ( 2 ), bromine (Br 2 ), and iodized bromine (IBr) have already been used. Halogens (ii) such as arsenic pentafluoride (ASF 5 ), antimony pentafluoride (SbF 5 ), silicon tetrafluoride (SiF 4 ), phosphorus pentafluoride (PCl 5 ) and phosphorus pentafluoride (PF 5 ), etc. Metal halide (iii) difluorosulfonyl peroxide (F 2 S 2 O 4 ) is known. The inventor of the present invention has determined that the electrical conductivity of polyacetylene can be increased to 1Ω using compounds other than those mentioned above.
-1・cm -1 or higher and provide a p-type polyacetylene film. As a result of various studies, we found that the following treatment agents were selected from sulfur trioxide, oleum, sulfuric acid, nitric acid, fuming nitric acid, super strong acids, and their esters. The inventors have discovered that the electrical conductivity of polyacetylene can be increased to 1 Ω -1 ·cm -1 or more by treating the polyacetylene film with at least one type of compound, and have thus arrived at the present invention. The processing agent that can be used in the present invention is industrially extremely useful because it is less toxic and cheaper than arsenic pentafluoride and iodine, which are conventional electron-accepting compounds that give high electrical conductivity. . The super strong acid referred to in the present invention is a compound whose general formula is represented by formula (1). R 1 −SO 3 H (1) (R 1 is a hydrocarbon residue with 5 or less carbon atoms substituted with Cl, F, or halogen) Typical examples include fluorosulfuric acid, chlorosulfuric acid, trifluoromethanesulfuric acid etc. can be given. These compounds represented by formula (1) contain at least 0.5 mole or less of sulfur trioxide, arsenic pentafluoride, thallium pentafluoride, and antimony pentafluoride per mole of the compound represented by formula (1). It may be used in combination with one type of compound. Furthermore, the ester of a super strong acid as used in the present invention is a compound whose general formula is represented by formula (2). R 1 −SO 3 −R 2 (2) (R 1 is the same as formula (1), R 2 is an alkyl group having 5 or less carbon atoms) Typical specific examples include methyl fluorosulfate,
Examples include ethyl fluorosulfate, methyl chlorosulfate, methyl trifluoromethanesulfonate, and ethyl trifluoromethanesulfonate. By treating the polyacetylene thin film of the pn heterojunction type device with these compounds, a solar cell with high conversion efficiency can be obtained. Methods for treating polyacetylene membranes with these compounds include (i) bringing the vapor of these compounds into direct contact with the polyacetylene membrane; and (ii) immersing the polyacetylene membrane in an inert organic solvent or water and then treating the polyacetylene membrane with these compounds. Method of introducing the compound (iii) A method of directly immersing the polyacetylene membrane in these compounds can be considered, but any method may be used. After treating the pn heterojunction type device with the above-mentioned compound, it is desirable to remove the excess compound unreacted with the polyacetylene by a conventional method such as washing with an inert organic solvent or vacuum drying. The p-type conductive polyacetylene thin film of the thus obtained p-type conductive polyacetylene thin film-n-type silicon p-n type heterojunction element may be attached directly to the p-type conductive polyacetylene thin film to form a solar cell. It is preferable to attach an ohmic transparent electrode and a lead wire to the converter because the conversion efficiency can be increased. The ohmic transparent electrode can be manufactured by the CVD method, vacuum evaporation method, sputtering method, etc. that are commonly used in the industry. Since the p-n junction solar cell manufactured by the above method is relatively susceptible to oxidative deterioration due to oxygen, it is preferable to use it in a vacuum or an inert gas atmosphere. Suitable packaging materials for this purpose include glass and plastics such as polycarbonate, polymethacrylate, and polyester, which are commonly used for solar cells. Example 1 Into a 200 ml reactor completely equipped with nitrogen gas, 40 ml of toluene purified according to a conventional method, 10 mmol of tetrabutoxytitanium, and 40 mmol of triethylaluminum were charged in this order at room temperature to prepare a catalyst solution. Prepared. The non-electrode side of an n-type silicon wafer (doped with phosphorus atoms, resistivity 5 to 15 Ωcm) with an ohmic electrode attached by vapor-depositing gold on one side was heated with concentrated nitric acid:fluoric acid = 5:1. After etching for 1 minute with an etching solution of (weight ratio), washing with a large amount of distilled water, and vacuum drying at room temperature. Approximately 0.2 ml of the above catalyst solution was dropped onto the etched surface of the above dried n-type silicon wafer under a nitrogen gas atmosphere to uniformly apply the catalyst solution to the silicon surface. The system was then evacuated to expel nitrogen gas, cooled to -78°C, purified acetylene gas at a pressure of 4 cmHg was introduced, and polymerization was carried out for 30 seconds. Immediately after the weight was finished, unreacted acetylene gas was expelled and replaced with nitrogen gas. The catalyst was completely removed by washing with a large amount of purified toluene under a nitrogen gas atmosphere while cooling to −78° C., and the remaining toluene was removed by vacuum drying at room temperature. A transparent polyacetylene film with a thickness of 0.5 μm uniformly covered the silicon surface. The polyacetylene film produced has a cis form.
It was a p-type semiconductor with an electrical conductivity of 95% and an electrical conductivity of 8×10 −8 Ω −1 ·cm −1 . Platinum lead wires were attached to the polyacetylene surface and the silicon electrode surface of the obtained polyacetylene/n-type silicon wafer laminate using a conductive adhesive (trade name "Electro dag502"), and vacuum dried for 30 minutes to remove the adhesive. of the organic solvent was removed. The p-n heterojunction device obtained in this way was placed in a reaction container, and after exhausting the air in the system with a vacuum pump, the p-n heterojunction device was added to
was cooled to -78°C, and steam at that temperature and vapor pressure was introduced into the reactor and treated for 40 minutes. Subsequently, unreacted sulfur trioxide was evacuated to obtain a pn heterojunction solar cell. The electrical conductivity of this polyacetylene film was 480Ω -1 ·cm -1 . The thickness of the polyacetylene film of the solar cell obtained is
The diameter was 0.5 μm and the area was 0.2 cm 2 . When the above solar cell was irradiated with sunlight (57.3 MW/cm 3 ) and the photovoltaic force was measured, the open circuit voltage was 0.41 V, the short circuit current was 4.45 mA/cm 2 , and the film factor was 0.26. The efficiency was 0.83%. Example 2 Before attaching lead wires to the polyacetylene/n-type silicon wafer laminate obtained in Example 1, a transparent gold film electrode was attached to the surface of the polyacetylene film by vacuum evaporation, and platinum was applied thereto. A pn heterojunction solar cell was produced in exactly the same manner as in Example 1 except that lead wires were attached. When the photovoltaic force was measured in exactly the same manner as in Example 1, the conversion efficiency was 1.59%. Comparative Example 1 P-
We created an n-heterojunction solar cell. When the photovoltaic force was measured in exactly the same manner as in Example 1, the conversion efficiency was 0.12%. This comparative example shows that it is preferable to increase the electrical conductivity of the polyacetylene film from the viewpoint of increasing the conversion efficiency of the solar cell. Example 3 Untreated polyacetylene-n obtained in Example 1
Put the silicon p-heterojunction element and 50 ml of toluene into a glass reactor, cool the reaction container with liquid nitrogen, exhaust the air in the system with a vacuum pump, and then cool the reaction container to -78℃. did. Approximately 5
ml of trifluoromethane sulfate and cooled to −78°C.
After reacting for 2 hours, the mixture was returned to room temperature and treated for 24 hours. After treatment, remove this p with 50 ml of toluene under nitrogen atmosphere.
The -n heterojunction device was washed three times and then vacuum dried to remove residual toluene and trifluoromethane sulfate. When the conversion efficiency of the pn heterojunction solar cell thus obtained was measured in exactly the same manner as in Example 1, the conversion efficiency was 0.80%. Examples 4 to 8 A p-n heterojunction solar cell was prepared in the same manner as in Example 3, except that the compounds shown in Table 1 were used instead of the trifluoromethane sulfuric acid used in Example 2. The conversion efficiency was measured in the same manner as in Example 1. The results are shown in Table 1.
【表】
(Ω−1・cm−1)
実施例 4 フロロ硫酸 89 0.61
トリフロロメ
〃 5 タン硫酸メチ 156 0.70
ル
[Table] (Ω −1・cm −1 )
Example 4 Fluorosulfuric acid 89 0.61
Trifluorome 〃 5 Methyl tansulfate 156 0.70
le
【表】
フロロ硫酸メ
〃 8 79 0.59
チル
実施例 9
実施例1で得られた未処理p−nヘテロ接合形
素子を硝酸(HNO3含量61%の試薬特級)に5秒
間浸漬し、直ちに引き上げて実施例1と同様の方
法で太陽電池としての変換効率を測定した。変換
効率は0.62%であつた。
実施例 10
実施例9で用いた硝酸の替りに硫酸(H2SO4含
量97%、精密分析用、和光純薬工業KK製)を用
いた以外は実施例と全く同様にして変換効率0.58
%のp−nヘテロ接合形太陽電池を得た。
実施例 11
ガラス製反応器に発煙硝酸(比重1.52、試薬特
級、関東化学(株)社製)を入れ、真空ポンプで系中
の空気を除去した後、実施例1で得られた未処理
p−nヘテロ接合素子を容器の気相部分に吊し
て、発煙硝酸の蒸気による処理を室温で2分間行
なつて実施例1と同様の方法で太陽電池としての
変換効率を測定した。変換効率は0.51%であつ
た。
実施例 12
実施例11で用いた発煙硝酸の替りに発煙硫酸10
%(関東化学(株)社製、試薬一級)を用いた以外は
実施例11と同様の方法で変換効率0.66%のp−n
ヘテロ接合形太陽電池を得た。[Table] Fluorosulfate 〃 8 79 0.59
Chill Example 9 The untreated p-n heterojunction device obtained in Example 1 was immersed in nitric acid (special grade reagent with HNO 3 content of 61%) for 5 seconds, immediately pulled out, and exposed to sunlight in the same manner as in Example 1. The conversion efficiency as a battery was measured. Conversion efficiency was 0.62%. Example 10 The conversion efficiency was 0.58 in exactly the same manner as in Example except that sulfuric acid (H 2 SO 4 content 97%, for precision analysis, manufactured by Wako Pure Chemical Industries KK) was used instead of nitric acid used in Example 9.
% p-n heterojunction solar cell was obtained. Example 11 After putting fuming nitric acid (specific gravity 1.52, special reagent grade, manufactured by Kanto Kagaku Co., Ltd.) into a glass reactor and removing the air in the system with a vacuum pump, the untreated P obtained in Example 1 was The conversion efficiency as a solar cell was measured in the same manner as in Example 1 by suspending the -n heterojunction element in the gas phase portion of the container and treating it with fuming nitric acid vapor at room temperature for 2 minutes. Conversion efficiency was 0.51%. Example 12 Fuming sulfuric acid 10 was used instead of oleum nitric acid used in Example 11.
% (manufactured by Kanto Kagaku Co., Ltd., reagent grade 1) was used in the same manner as in Example 11, with a conversion efficiency of 0.66%.
A heterojunction solar cell was obtained.
図面は本発明のp−nヘテロ接合形太陽電池の
概念図であり、1は透明オーミツク電極、2はp
形導電性ポリアセチレン薄膜、3はn型シリコン
の単結晶薄板(ウエーハー)4はオーミツク電極
を、それぞれ表わす。
The drawing is a conceptual diagram of a p-n heterojunction solar cell of the present invention, where 1 is a transparent ohmic electrode, 2 is a p-n heterojunction solar cell, and 2 is a p-n heterojunction solar cell.
3 represents a conductive polyacetylene thin film, 3 represents an n-type silicon single crystal thin plate (wafer), and 4 represents an ohmic electrode.
Claims (1)
る鎖状ポリアセチレン薄膜をn型シリコン表面に
形成し、続いて三酸化イオウ、発煙硫酸、硫酸、
硝酸、発煙硝酸、超強酸及びそのエステルから選
ばれた少くとも一種の化合物でポリアセチレン薄
膜を処理してなるp−nヘテロ接合形太陽電池。1 A chain polyacetylene thin film having a conjugated double bond chain with a film thickness of 10 μm or less is formed on the n-type silicon surface, and then sulfur trioxide, oleum, sulfuric acid,
A p-n heterojunction solar cell obtained by treating a polyacetylene thin film with at least one compound selected from nitric acid, fuming nitric acid, superstrong acids, and esters thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4529379A JPS55138879A (en) | 1979-04-16 | 1979-04-16 | P-n hetero junction type solar battery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4529379A JPS55138879A (en) | 1979-04-16 | 1979-04-16 | P-n hetero junction type solar battery |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55138879A JPS55138879A (en) | 1980-10-30 |
| JPS6140150B2 true JPS6140150B2 (en) | 1986-09-08 |
Family
ID=12715259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4529379A Granted JPS55138879A (en) | 1979-04-16 | 1979-04-16 | P-n hetero junction type solar battery |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55138879A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011046565A (en) * | 2009-08-27 | 2011-03-10 | Sharp Corp | Single crystal silicon ingot, single crystal silicon wafer, single crystal silicon solar cell, and method for manufacturing single crystal silicon ingot |
-
1979
- 1979-04-16 JP JP4529379A patent/JPS55138879A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55138879A (en) | 1980-10-30 |
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