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JPS6140756B2 - - Google Patents
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JPS6140756B2 - - Google Patents

Info

Publication number
JPS6140756B2
JPS6140756B2 JP6052380A JP6052380A JPS6140756B2 JP S6140756 B2 JPS6140756 B2 JP S6140756B2 JP 6052380 A JP6052380 A JP 6052380A JP 6052380 A JP6052380 A JP 6052380A JP S6140756 B2 JPS6140756 B2 JP S6140756B2
Authority
JP
Japan
Prior art keywords
structural material
thin layer
tib
temperature
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6052380A
Other languages
Japanese (ja)
Other versions
JPS56158867A (en
Inventor
Tsutae Takahashi
Hideo Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP6052380A priority Critical patent/JPS56158867A/en
Publication of JPS56158867A publication Critical patent/JPS56158867A/en
Publication of JPS6140756B2 publication Critical patent/JPS6140756B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/38Borides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

本発明は、Mo又はMo合金から成る構造材の表
面に、耐熱性及び耐摩耗性に極めて優れている
TiB2又はVB2から成る薄層を被覆した高温用構造
材に関する。 Mo又はMo合金から成る構造材は、優れた耐熱
性と耐熱衝撃性を有し、かつ、脆性が小さいため
に高温用構造材、高温用炉材として原子力利用開
発、航空機工業、宇宙開発、海洋開発等の種々の
分野において多用されている。 しかし、このようなMo又はMo合金から成る耐
熱性に極めて優れた構造材においても、600℃以
上に大気中で加熱された場合には表層から除々に
酸化して、表層はMo酸化物となり、表層から
除々に脱落して構造材がやせ細るという欠点があ
つた。 また、真空中においても高温下で表層から除々
に蒸発して構造材がやせ細るため、寿命上の問題
があつた。 本発明はかかるMo又はMo合金から成る構造材
の耐熱性をさらに向上すべくなされたもので、
Mo又はMo合金から成る構造材の表面に、TiB2
はVB2からなる薄層が被覆されて成ることを特徴
とする高温用構造材を提供しようとするものであ
る。 本発明の対象となるMo又はMo合金としては、
Mo金属粉末又はMo金属粉末と他の金属もしくは
非金属元素の粉末、例えばTi、Zr、B、V、
Re、W等との混合粉末を圧縮成形し非酸化性雰
囲気中で加熱焼結されて得られたもの、あるいは
Mo金属又はMo合金の溶解鋳造もしくは機械加工
により得られたものを使用することができる。 以下本発明の詳細を説明する。 本発明における高温用構造材は、Mo又はMo合
金から成る構造材の表面に通常5μから50μの厚
さのTiB2又はVB2から成る薄層が被覆されて構成
されている。 TiB2又はVB2から成る薄層はプラズマ溶射法、
電気めつき法、気相めつき法等の方法により構造
材上に被覆することができるが、気相めつき法に
よる場合には、他の方法による場合に比較して、
より組織の緻密な、かつ、構造材との密着性の高
い薄層を得ることができる。 なお、TiB2又はVB2はそれぞれ単独で構造材上
へ被覆してもよいが、両者を併用しても差支えな
い。 また、薄層の膜厚は5μ未満の場合には、耐熱
性の向上効果が小さく、逆に50μを越える場合に
は、薄層が構造材から剥離し易くなり、更に作業
性も低下するので、膜厚は5〜50μとするのが望
ましい。 このような高温用構造材は大気中および真空中
において約1400℃に加熱された場合でも、酸化し
たり蒸発したりすることがなく、極めて耐熱性の
高いものとなる。 更に、その外表面が耐摩耗性の高いTiB2又は
VB2から成る薄層により被覆されているため耐摩
耗性も一段と向上する。 次に実施例により本発明を詳細に説明する。 実施例 1 平均粒径2〜4μのMo金属粉末を1〜2ton/
cm2の圧力で加圧成形し、これをH2雰囲気中で
1800℃×5時間加熱焼結し、次いでこれを鍛造し
た後圧延加工して得られた巾20mm、長さ300mm、
厚さ1mmの板状Mo構造用材の表面にTiB2から成
る膜厚約10μの薄層を気相めつき法により形成し
高温用構造材を得た。 なお、気相めつき法は、例えば次式 aTiCl4+bBBr3+cH2→dTiB2+eHCl +fHBr (a、b、c、d、e、fは係数以下同じ) で表わされる熱反応を利用して、図に示すよう
に、約1000〜1400℃の高温雰囲気とされた気相め
つき炉1内にMo金属からなる構造材2を載置
し、この気相メツキ炉1内にTiCl4、BBr3、H2
から成る混合ガス3を流しながら約5〜10時間挿
通することにより行なわれた。 図において4はこのようにして形成された薄層
を示している。 こうして得られた高温用構造材を大気中1400℃
で1時間および真空(5×10-4mmHg)中1400℃
で10時間加熱した後の加熱減量はそれぞれ第1表
に示す通りであつた。 なお第1表中比較例は、TiB2を被覆しなかつ
た点を除いて実施例と同一方法で製造した同一寸
法の構造材を実施例と同一条件で加熱したときの
加熱減量であつて比較のために示したものであ
る。
The present invention provides the surface of a structural material made of Mo or Mo alloy with extremely excellent heat resistance and wear resistance.
This invention relates to high-temperature structural materials coated with a thin layer of TiB 2 or VB 2 . Structural materials made of Mo or Mo alloys have excellent heat resistance and thermal shock resistance, and are low in brittleness, so they are used as high-temperature structural materials and high-temperature reactor materials for nuclear power utilization development, aircraft industry, space development, and oceanography. It is widely used in various fields such as development. However, even in structural materials made of Mo or Mo alloys that have excellent heat resistance, when heated in the air above 600°C, the surface layer gradually oxidizes, and the surface layer becomes Mo oxide. The disadvantage was that the structural material gradually fell off from the surface layer and became thinner. Furthermore, even in a vacuum, the structural material gradually evaporates from the surface layer at high temperatures, causing thinning of the structural material, which poses a problem in terms of lifespan. The present invention was made to further improve the heat resistance of structural materials made of such Mo or Mo alloy.
The object of the present invention is to provide a high-temperature structural material, which is characterized in that the surface of the structural material made of Mo or Mo alloy is coated with a thin layer made of TiB 2 or VB 2 . Mo or Mo alloy that is the subject of the present invention includes:
Mo metal powder or powder of Mo metal powder and other metal or non-metal elements, such as Ti, Zr, B, V,
Those obtained by compression molding a mixed powder with Re, W, etc. and heating and sintering in a non-oxidizing atmosphere, or
Those obtained by melting and casting or machining Mo metal or Mo alloy can be used. The details of the present invention will be explained below. The high-temperature structural material of the present invention is constructed by coating the surface of a structural material made of Mo or Mo alloy with a thin layer of TiB 2 or VB 2 with a thickness of usually 5 μ to 50 μ. Thin layers of TiB 2 or VB 2 can be produced by plasma spraying,
It can be coated on structural materials by methods such as electroplating and vapor plating, but when using vapor plating, compared to other methods,
A thin layer with a denser structure and high adhesion to the structural material can be obtained. Incidentally, TiB 2 or VB 2 may be coated on the structural material alone, but there is no problem in using both in combination. In addition, if the thickness of the thin layer is less than 5μ, the effect of improving heat resistance will be small; if it exceeds 50μ, the thin layer will easily peel off from the structural material and workability will also decrease. The film thickness is preferably 5 to 50 μm. Such high-temperature structural materials do not oxidize or evaporate even when heated to approximately 1400°C in the air or vacuum, and have extremely high heat resistance. Furthermore, its outer surface is made of highly wear-resistant TiB 2 or
The coating is coated with a thin layer of VB 2 , which further improves wear resistance. Next, the present invention will be explained in detail with reference to Examples. Example 1 Mo metal powder with an average particle size of 2 to 4 μm at 1 to 2 tons/
Pressure molded at a pressure of cm 2 and then in an H 2 atmosphere.
The product was heated and sintered at 1800°C for 5 hours, then forged and rolled to obtain a product with a width of 20 mm and a length of 300 mm.
A thin layer of TiB 2 with a thickness of about 10μ was formed on the surface of a 1mm-thick plate-shaped Mo structural material by vapor phase plating to obtain a high-temperature structural material. The gas phase plating method utilizes a thermal reaction expressed by the following formula, for example, aTiCl 4 +bBBr 3 +cH 2 →dTiB 2 +eHCl +fHBr (a, b, c, d, e, f are the same below the coefficients). As shown in the figure, a structural material 2 made of Mo metal is placed in a vapor phase plating furnace 1 in a high temperature atmosphere of approximately 1000 to 1400°C, and TiCl 4 , BBr 3 This was carried out by inserting a mixed gas 3 consisting of , H 2 for about 5 to 10 hours. In the figure, 4 indicates the thin layer thus formed. The high-temperature structural material obtained in this way was heated to 1400℃ in the atmosphere.
for 1 hour and 1400°C in vacuum (5 x 10 -4 mmHg)
The weight loss on heating after heating for 10 hours was as shown in Table 1. In addition, the comparative examples in Table 1 are the heating loss when structural members of the same dimensions manufactured by the same method as the examples except that they were not coated with TiB 2 were heated under the same conditions as the examples. This is what was shown for.

【表】 実施例 2 実施例1と同一方法で製造した同一寸法のMo
金属から成る構造材の表面にVB2から成る膜厚約
10μの薄層を気相めつき法により形成し高温用構
造材を得た。 なお、気相めつき法は、例えば次式 aVCl4+bBBr3+cH2→dVB2+eHCl +fHBr で表わされる熱反応を利用して、図に示すよう
に、約800〜1400℃の高温雰囲気とされた気相め
つき炉1内にMo金属から成る構造材2を載置
し、この気相メツキ炉1内にVCl4、BBr3、H2
から成る混合ガス3を流しながら約5〜10時間挿
通することにより行なわれた。 図において4はこのようにして形成された薄層
を示している。 こうして得られた高温用構造材を大気中1400℃
で1時間および真空(5×10-4mmHg)中1400℃
で10時間加熱した後の加熱減量はそれぞれ第2表
の通りであつた。 なお第2表中比較例は、VB2を被覆しない点を
除いて実施例と同一方法で製造した同一寸法の構
造材を実施例と同一条件で加熱したときの加熱減
量であつて比較のために示したものである。
[Table] Example 2 Mo with the same dimensions manufactured by the same method as Example 1
A film of VB 2 on the surface of a structural material made of metal has a thickness of approx.
A high-temperature structural material was obtained by forming a 10μ thin layer by vapor phase plating. The gas phase plating method utilizes a thermal reaction expressed by the following formula, for example, aVCl 4 + bBBr 3 + cH 2 → dVB 2 + eHCl + fHBr to create a high-temperature atmosphere of about 800 to 1400°C, as shown in the figure. A structural material 2 made of Mo metal is placed in a vapor phase plating furnace 1, and heated for about 5 to 10 hours while flowing a mixed gas 3 consisting of VCl 4 , BBr 3 , and H 2 into the vapor phase plating furnace 1. This was done by inserting it. In the figure, 4 indicates the thin layer thus formed. The high-temperature structural material obtained in this way was heated to 1400℃ in the atmosphere.
for 1 hour and 1400°C in vacuum (5 x 10 -4 mmHg)
The weight loss on heating after heating for 10 hours was as shown in Table 2. Note that the comparative examples in Table 2 are the heating losses when structural members of the same dimensions manufactured by the same method as the examples except that VB 2 is not coated are heated under the same conditions as the examples. This is shown in .

【表】【table】 【図面の簡単な説明】[Brief explanation of the drawing]

図は、本発明の一実施例において用いられる気
相めつき法を説明するための概略説明図である。 1……気相めつき炉、2……構造材、3……混
合ガス。
The figure is a schematic explanatory diagram for explaining a vapor phase plating method used in an embodiment of the present invention. 1... Gas phase plating furnace, 2... Structural material, 3... Mixed gas.

Claims (1)

【特許請求の範囲】[Claims] 1 Mo又はMo合金から成る炉材の表面に気相め
つき法により形成されて成るTiB2又はVB2から成
る薄層が被覆され、この薄層の膜厚は5〜50μで
あることを特徴とする高温用炉材。
1 The surface of the furnace material made of Mo or Mo alloy is coated with a thin layer of TiB 2 or VB 2 formed by vapor phase plating, and the thickness of this thin layer is 5 to 50μ. Furnace material for high temperature.
JP6052380A 1980-05-09 1980-05-09 Structural material for use at high temperature Granted JPS56158867A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6052380A JPS56158867A (en) 1980-05-09 1980-05-09 Structural material for use at high temperature

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6052380A JPS56158867A (en) 1980-05-09 1980-05-09 Structural material for use at high temperature

Publications (2)

Publication Number Publication Date
JPS56158867A JPS56158867A (en) 1981-12-07
JPS6140756B2 true JPS6140756B2 (en) 1986-09-10

Family

ID=13144749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6052380A Granted JPS56158867A (en) 1980-05-09 1980-05-09 Structural material for use at high temperature

Country Status (1)

Country Link
JP (1) JPS56158867A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104498872B (en) * 2014-11-14 2017-06-27 中国科学院宁波材料技术与工程研究所 A kind of vanadium boride coating of high-hardness wear-resistant and preparation method thereof

Also Published As

Publication number Publication date
JPS56158867A (en) 1981-12-07

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