JPS6147705B2 - - Google Patents
Info
- Publication number
- JPS6147705B2 JPS6147705B2 JP20618081A JP20618081A JPS6147705B2 JP S6147705 B2 JPS6147705 B2 JP S6147705B2 JP 20618081 A JP20618081 A JP 20618081A JP 20618081 A JP20618081 A JP 20618081A JP S6147705 B2 JPS6147705 B2 JP S6147705B2
- Authority
- JP
- Japan
- Prior art keywords
- gold
- layer
- adhesion
- metal
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 64
- 239000010931 gold Substances 0.000 claims description 64
- 229910052737 gold Inorganic materials 0.000 claims description 64
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 17
- 239000002131 composite material Substances 0.000 claims description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- 229910052709 silver Inorganic materials 0.000 claims description 7
- 239000004332 silver Substances 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052790 beryllium Inorganic materials 0.000 claims description 3
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 50
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 16
- 238000000034 method Methods 0.000 description 14
- 238000005260 corrosion Methods 0.000 description 13
- 230000007797 corrosion Effects 0.000 description 13
- 238000007747 plating Methods 0.000 description 12
- 238000007740 vapor deposition Methods 0.000 description 11
- 229910052759 nickel Inorganic materials 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 239000000047 product Substances 0.000 description 4
- 239000010953 base metal Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 239000002932 luster Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000480 nickel oxide Inorganic materials 0.000 description 2
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
Description
【発明の詳細な説明】
本発明は基板上に第1層として金以上の蒸気圧
を有し、且つ密着性、耐蝕性、耐熱性に優れ、更
に金との拡散が少ない金属層を設け、第2層とし
て第1層となる金属と金との連続的な濃度勾配を
有する複合物の層を設け、第3層が金である事を
特徴とする多層金属蒸着複合体に関する。
更に詳しくは、フイルムや成型品等の基板に、
第1層として金の融点である1063℃に於いて1×
10-5Torr以上の蒸気圧を有し、密着性、耐蝕性
に優れ、融点が200℃以上であり、且つ金との拡
散が少ない、ゲルマニウム、シリコン、銀、アル
ミニウム、ベリリユウムの内の1種の金属層を設
け、第2層としては、第1層となる金属と金との
複合物層が少なくとも200Å以上であり、第3層
金属が金で構成する事を特徴とする多層金属複合
体に関するものである。
従来より装飾や耐蝕を目的として多くの分野で
金メツキが用いられている。しかしながら金メツ
キはコスト高につながるため、金層を薄くすると
か、代替品の検討が盛んであるが、問題点として
金属の中で最も密着性が乏しいといわれている金
層を薄くした場合、一層密着の不安定性や、金の
拡散等により耐蝕性膜としては使用が難しい。
又、代替品では金本来の光沢を再現性良く出し、
且つ耐蝕性に優れたものは見出せず、信頼性のた
めには高価な金を厚化する必要があつた。
金の形成法としては、湿式法や蒸着法がある
が、前者によるものが大半である。この理由とし
て蒸着法で形成した金と基板間の密着力が不足し
て、本来の耐蝕の目的には使用し得ないからであ
る。この欠点を補うために蒸着法による金メツキ
では、基板がガラスやセラミツクスの場合、周知
の如く密着力向上のため、密着性良好な下地金属
を蒸着後、その上に金蒸着する2層構造となつて
いる。しかしながら下地金属として用いられるも
のは、湿式の場合と同様、ニツケルが主流なた
め、確かに基板との密着力は金のみに比べ数段向
上する事が認められるが、逆にゲツタ作用の強い
ニツケルは、酸素が吸着して表面に保護膜である
酸化ニツケルを生成し、上層となる金との間での
均一な密着性を得る事が困難であつた。その上、
基板がプラスチツクの場合は基板との密着性にも
問題が生じていた。これは、ニツケルは金に比べ
て蒸気圧が1063℃に於いて半分以下である事か
ら、ニツケルを蒸着する際には金蒸着以上の温度
に上げる必要があり、このためルツボからの輻射
熱により基板であるプラスチツクからの放出ガス
も多く、密着力に悪影響を与えていたからであ
る、つまり基板がプラスチツクのフイルムや成型
品では、下地金属としては、出来る限り蒸着圧が
高い事が望ましく、少なくとも表面層となる金以
上の蒸着圧を有する事が密着性には必要である。
一方、従来より多く用いられている湿式による
金メツキでは、シアン浴等を用いるため、公害問
題があるばかりか、湿式メツキに於いても同様に
強固な密着性を得るためには、下地メツキとして
ニツケルを用いているが、基板並びに金に対する
均一な密着性を得る事は難かしい。又基板がプラ
スチツク等の絶縁物では、無電解メツキによる核
付け、更に密着力向上のためニツケルメツキ等を
行なつた後、金メツキを施す等の工程を経る必要
がある。更に各メツキに於ける工程管理を充分に
行なわなければ基板並びに各層との密着性や金メ
ツキの光沢等に大きな影響を及ぼすといつた問題
を抱えている。
以上に様な理由により金メツキとしては、湿式
に比べ無公害で光沢等も安定しており、工程を簡
略化出来る蒸着法が望ましいが、前述した様に充
分な密着力を有する金メツキが行なえないので現
状であつた。本発明は上記欠点を補うべく鋭意検
討を重ね、蒸着法により金の薄化に伴なう密着の
不安定性や金の拡散を防止し、低コストな金メツ
キ物を発明したものである。
以下に本発明を更に詳しく述べる。
本発明に於ける第1層金属は、基板がプラスチ
ツクであつても充分な密着力を得るために、基板
からの放出ガスを極力妨げる様な蒸気圧が出来る
だけ高く、更に金に比べ大きな密着力を有する金
属である必要がある。又表面に耐蝕性に優れた金
属が存在するからと云つて蒸着法ではミクロなピ
ンホールは避けられず、長期にわたる場合この部
分より腐食が進行する。従つて第1層金属として
は化学的に安定でなければならない。更に基板が
フイルム等の場合の様に蒸着後加熱成形を伴なう
際には、一般に成形温度は100〜200℃の範囲にな
るため、融点が200℃以下の金属では成形不可能
になる。その他低コスト化のために金の薄化が必
要となるため、第1層金属としては金との拡散が
少ない事が必要条件となる。
第2層としての役目は、第1層金属と金の密着
性を完全にするのためものである。つまり従来の
様にニツケルを下地に使用した場合には、酸化ニ
ツケルのためにニツケルと金の間で均一且つ強固
な密着力を持つ事が困難であつたが、本発明では
この欠点を完全に補つたものである。本発明によ
る第2層は、第1層金属と金の複合体であり、且
つ金の混合割合が0〜100%の連続的な濃度勾配
を有し、膜厚としては信頼性の点から連続膜の限
界である200Å以上が必要となる。ここで第2層
の形成方法としてはまずルツボ内に第1層とする
金属と金を入れ加熱する。この際まず第1段階と
して金の融点1063℃以下にして、第1層金属を蒸
着させ、所望の膜厚に達した後、第2段階として
1063℃以上の温度に上げ金の割合を除々に増加さ
せ第2層の複合体を形成させる。ここでルツボ内
の第1層金属の消減と共に第3層の金が形成され
る。この際、第1段階に於ける温度と蒸着時間並
びに第2段階での温度によつて、各層の膜厚比率
を制御出来、更にルツボに充てんする第1層金属
と金の量によつて各層の膜厚が制御出来る。但し
第1層金属が金に比べ余り蒸気圧が高過ぎると、
第1段階から第2段階へルツボ温度は瞬間的に上
昇させる事は不可能なため、連続的に蒸着出来
ず、第2層の複合体を形成する事が困難になり、
均一で強固な密着力が得られない。そこで以上の
欠点を補うため、鋭意検討を行なつた所、第1層
金属としては、金との蒸気圧差を104以内に押え
る必要があり、即ち金の融点である1063℃に於け
る蒸気圧が、1×10-1Torrから1×10-5Torrを
有する金属が望ましい。
従つて第1層金属の必要条件としては、化学的
に安定な耐蝕性、更に加熱成形に耐える200℃以
上の融点を持つ金属であり、かつ金の薄化に耐え
得る様に拡散が少なく、又金に比べ密着性が良好
である事が必要となる。そして最後に第1層と金
の完全な密着性を保持させるためには、第2層を
200Å以上形成する必要があり、この条件として
金の融点1063℃に於ける蒸気圧が1×10-1Torr
から1×10-5Torrを有する事が望ましい。
以上の条件を満す金属を鋭意検討し、本発明に
至つたものである。即ち、ゲルマニウム、シリコ
ン、銀、アルミニウム、ベリリユウムのみが上記
条件を全て満足するものであり、上述した様に各
層を連続的に形成しているために、従来から蒸着
法で行つた二層構造あるいは湿式メツキで行なう
二層構造と異なり、第1層と金の間の密着性は合
金の破断強度に等しくなつた。
以上の様に装飾、耐蝕膜として金メツキを行な
う場合、金のみでは非常に高価になり、且つ密着
性の乏しい膜になるが、本発明を用いた三層構造
の金属蒸着膜では、密着力が優れ、金の使用量を
大巾に削減出来、金本来の装飾用や耐蝕性膜とし
て使用出来るものになる。
以下実施例により本発明を更に詳細に説明す
る。
実施例
基板として25μ厚ポリエステルフイルムに第1
層金属として銀を用いるため、ルツボに銀、金を
それぞれ0.7g、0.3gづつ充填した。第1段階と
してルツボを5×10-5Torrの減圧下で1000℃に
加熱して第1層金属として銀を蒸着させ、第2段
階としてルツボ温度を1400℃に上げ、第2層の
金、銀の複合体を形成した。更に金のみの第3層
を蒸着して得られた膜の厚みは、第1層が2100
Å、第2層が2400Åであり、第3層は500Åであ
つた。この様にして得られた5000Åの膜について
密着性を調べるために粘着テープによる引きはが
しテストを行ない、又、耐蝕性を調べるために塩
水噴露テストを行なつた結果を第1表に示す。No.
1は本発明による実施例を示し、又No.2は比較例
として金のみをルツボに充填して5×10-5Torr
の減圧下で1400℃で同一の5000Åまで蒸着したも
のを示す。第1表より明らかな様に本実施例によ
る三層構造膜では密着性に優れ、化学的に安定で
あるために、塩水噴露テストに於いても金本来の
防食性を示している事が判かる。又、同一膜厚を
得るための金の使用量は約25%で済み大巾な低コ
スト化が計れた。
【表】DETAILED DESCRIPTION OF THE INVENTION The present invention provides, as a first layer, a metal layer on a substrate, which has a vapor pressure higher than that of gold, has excellent adhesion, corrosion resistance, and heat resistance, and further has low diffusion with gold. The present invention relates to a multilayer metal vapor deposited composite characterized in that a layer of a composite having a continuous concentration gradient of the first metal and gold is provided as the second layer, and the third layer is gold. More specifically, for substrates such as films and molded products,
As the first layer, 1× at 1063℃, which is the melting point of gold.
One of germanium, silicon, silver, aluminum, and beryllium, which has a vapor pressure of 10 -5 Torr or higher, excellent adhesion and corrosion resistance, a melting point of 200°C or higher, and low diffusion with gold. A multilayer metal composite, characterized in that the second layer is a composite layer of metal and gold that is the first layer and has a thickness of at least 200 Å, and the third metal layer is made of gold. It is related to. Gold plating has traditionally been used in many fields for decorative and corrosion-resistant purposes. However, gold plating leads to high costs, so there is active research into alternatives such as making the gold layer thinner, but the problem is that when making the gold layer thinner, which is said to have the poorest adhesion among metals, It is difficult to use as a corrosion-resistant film due to instability of adhesion and diffusion of gold.
In addition, the substitute products bring out the original luster of gold with good reproducibility,
Moreover, no material with excellent corrosion resistance could be found, and it was necessary to thicken expensive gold for reliability. Gold can be formed by a wet method or a vapor deposition method, but the former method is used in most cases. The reason for this is that the adhesion between the gold formed by the vapor deposition method and the substrate is insufficient, so that it cannot be used for its original purpose of corrosion resistance. To compensate for this drawback, when the substrate is glass or ceramic, gold plating using the vapor deposition method uses a two-layer structure in which a base metal with good adhesion is vapor-deposited, and then gold is vapor-deposited on top of it to improve adhesion. It's summery. However, as with the wet method, the main material used as the base metal is nickel, and although it is admitted that the adhesion to the substrate is improved by several orders of magnitude compared to gold alone, on the other hand, nickel has a strong scratching effect. In this case, oxygen adsorbed and a protective film of nickel oxide was formed on the surface, making it difficult to obtain uniform adhesion with the upper layer of gold. On top of that,
When the substrate is made of plastic, there is also a problem in adhesion to the substrate. This is because the vapor pressure of nickel is less than half that of gold at 1063°C, so when evaporating nickel it is necessary to raise the temperature to higher than that of gold. This is because there is a lot of gas released from plastic, which has a negative effect on adhesion.In other words, for films or molded products where the substrate is plastic, it is desirable to have as high a vapor deposition pressure as possible for the base metal, and at least the surface layer It is necessary for adhesion to have a vapor deposition pressure higher than that of gold. On the other hand, wet gold plating, which has been widely used in the past, uses a cyan bath, etc., which causes pollution problems. Although nickel is used, it is difficult to obtain uniform adhesion to the substrate and gold. If the substrate is made of an insulating material such as plastic, it is necessary to apply a core by electroless plating, then nickel plating to improve adhesion, and then gold plating. Furthermore, if the process of each plating process is not sufficiently controlled, there is a problem that the adhesion with the substrate and each layer, the gloss of the gold plating, etc. will be greatly affected. For the reasons mentioned above, it is desirable to use the vapor deposition method for gold plating, which is less polluting than the wet method, has stable luster, and simplifies the process, but as mentioned above, gold plating with sufficient adhesion cannot be performed. There was no such thing, so it was the current situation. The present invention has been made through intensive studies to compensate for the above drawbacks, and has invented a low-cost gold-plated product that uses a vapor deposition method to prevent instability of adhesion and diffusion of gold due to thinning of gold. The present invention will be described in more detail below. In order to obtain sufficient adhesion even when the substrate is plastic, the first layer metal in the present invention has a vapor pressure as high as possible to prevent gases released from the substrate as much as possible, and also has a greater adhesion than gold. It needs to be a strong metal. Furthermore, even if a metal with excellent corrosion resistance is present on the surface, micro pinholes are unavoidable in the vapor deposition method, and over a long period of time, corrosion progresses from these parts. Therefore, the first layer metal must be chemically stable. Furthermore, when the substrate is heat-formed after vapor deposition, such as when the substrate is a film, the molding temperature is generally in the range of 100 to 200°C, so metals with a melting point of 200°C or less cannot be molded. In addition, since it is necessary to thin gold in order to reduce costs, it is necessary for the first layer metal to have little diffusion with gold. The role of the second layer is to perfect the adhesion between the first layer metal and gold. In other words, when nickel was used as a base as in the past, it was difficult to maintain uniform and strong adhesion between the nickel and gold due to the nickel oxide, but the present invention completely eliminates this drawback. It is a supplement. The second layer according to the present invention is a composite of the first layer metal and gold, and has a continuous concentration gradient of 0 to 100% gold mixing ratio, and has a continuous film thickness from the viewpoint of reliability. A thickness of 200 Å or more is required, which is the film limit. Here, as a method for forming the second layer, first, the metal and gold to be the first layer are placed in a crucible and heated. At this time, the first step is to lower the melting point of gold to below 1063°C and deposit the first layer metal, and after reaching the desired thickness, the second step is to
The temperature is raised to 1063° C. or higher and the proportion of gold is gradually increased to form a second layer of composite. Here, as the first layer metal in the crucible is consumed, a third layer of gold is formed. At this time, the film thickness ratio of each layer can be controlled by the temperature and vapor deposition time in the first stage and the temperature in the second stage, and the thickness ratio of each layer can be controlled by the amount of the first layer metal and gold filled in the crucible. The film thickness can be controlled. However, if the vapor pressure of the first layer metal is too high compared to gold,
Since it is impossible to instantaneously increase the crucible temperature from the first stage to the second stage, continuous vapor deposition is not possible and it becomes difficult to form the second layer composite.
Uniform and strong adhesion cannot be obtained. Therefore, in order to compensate for the above drawbacks, we conducted intensive studies and found that the first layer metal must have a vapor pressure difference of less than 10 4 with gold, which means that the vapor pressure difference between gold and gold at 1063℃ A metal having a pressure of 1×10 −1 Torr to 1×10 −5 Torr is desirable. Therefore, the first layer metal must be chemically stable, corrosion resistant, have a melting point of 200°C or higher to withstand heat forming, and have low diffusion so as to withstand the thinning of gold. It also needs to have better adhesion than gold. Finally, in order to maintain complete adhesion between the first layer and the gold, the second layer must be
It is necessary to form a layer of 200 Å or more, and the condition for this is that the vapor pressure at gold's melting point of 1063°C is 1 × 10 -1 Torr.
It is desirable to have 1×10 -5 Torr. The present invention was achieved by intensively studying metals that meet the above conditions. That is, only germanium, silicon, silver, aluminum, and beryllium satisfy all of the above conditions, and because each layer is formed continuously as described above, it is difficult to form a two-layer structure or Unlike the two-layer construction performed by wet plating, the adhesion between the first layer and the gold was equal to the breaking strength of the alloy. As mentioned above, when gold plating is used as a decorative or corrosion-resistant film, gold alone is very expensive and results in a film with poor adhesion, but the three-layer metal vapor deposited film using the present invention has a high adhesion. It has excellent properties, can greatly reduce the amount of gold used, and can be used for decorative purposes and as a corrosion-resistant film. The present invention will be explained in more detail with reference to Examples below. Example: A 25μ thick polyester film was used as the substrate.
Since silver was used as the layer metal, the crucible was filled with 0.7 g and 0.3 g of silver and gold, respectively. In the first step, the crucible is heated to 1000°C under a reduced pressure of 5 × 10 -5 Torr to deposit silver as the first layer metal, and in the second step, the crucible temperature is raised to 1400°C to deposit the second layer of gold, A silver complex was formed. Furthermore, the thickness of the film obtained by vapor depositing a third layer of only gold is 2100 mm.
The thickness of the second layer was 2400 Å, and the thickness of the third layer was 500 Å. The 5000 Å film thus obtained was subjected to a peel test using adhesive tape to examine its adhesion, and to a salt water spray test to examine its corrosion resistance. The results are shown in Table 1. No.
No. 1 shows an example according to the present invention, and No. 2 shows a comparative example in which only gold was filled in the crucible and the temperature was 5×10 -5 Torr.
The same thickness of 5000 Å was deposited at 1400°C under reduced pressure. As is clear from Table 1, the three-layer structure film of this example has excellent adhesion and is chemically stable, so it shows the inherent corrosion resistance of gold even in the salt water spray test. I understand. In addition, the amount of gold used to obtain the same film thickness was reduced to about 25%, resulting in a significant cost reduction. 【table】
Claims (1)
ミニウムおよびベリリウムのうちから選ばれた1
種の金属を第1層とし、第2層は第1層となる金
属と金からなる複合物であり金の混合割合が0%
から100%の連続的な濃度勾配を有している中間
層であり、更に該金・金属紛合物よりなる第2層
上に第3層として金の層を設けてなることを特徴
とする金属蒸着複合体。 2 第2層の複合物の膜厚が200Å以上である特
許請求の範囲第1項記載の金属蒸着複合体。[Claims] 1. 1 selected from germanium, silicon, silver, aluminum and beryllium on a substrate.
The first layer is the seed metal, and the second layer is a composite consisting of the first layer metal and gold, and the mixing ratio of gold is 0%.
The intermediate layer has a continuous concentration gradient of 100% from Metal vapor deposited composite. 2. The metal vapor deposited composite according to claim 1, wherein the second layer of the composite has a thickness of 200 Å or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20618081A JPS58108131A (en) | 1981-12-22 | 1981-12-22 | Metal evaporated composite body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20618081A JPS58108131A (en) | 1981-12-22 | 1981-12-22 | Metal evaporated composite body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58108131A JPS58108131A (en) | 1983-06-28 |
| JPS6147705B2 true JPS6147705B2 (en) | 1986-10-21 |
Family
ID=16519133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20618081A Granted JPS58108131A (en) | 1981-12-22 | 1981-12-22 | Metal evaporated composite body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58108131A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6114946A (en) * | 1984-07-02 | 1986-01-23 | 株式会社 徳力本店 | Gold group laminated substrate |
| JPS6151270U (en) * | 1984-09-10 | 1986-04-07 |
-
1981
- 1981-12-22 JP JP20618081A patent/JPS58108131A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58108131A (en) | 1983-06-28 |
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