JPS6149779B2 - - Google Patents

Description

[Detailed description of the invention]

The present invention relates to a method for manufacturing a display panel. In display panels such as gas discharge panels, EL display panels, flat display panels, flat electron beam display panels, etc., electrodes are provided on two glass substrates by vacuum deposition or sputtering so as to be perpendicular to each other. The edges of the two glass substrates are sealed with low melting point glass so that the inside thereof becomes an image display area. However, conventional display panels manufactured by such a method have the disadvantage that the electrodes chemically react with the low melting point glass at the sealing temperature during sealing, resulting in disconnection. The reason for this is that low melting point glass usually contains about lead oxide.
This is due to the large binding free energy of lead oxide. For example, when aluminum or nickel is used as the electrode metal, aluminum oxide or nickel oxide will be absorbed at a sealing temperature of approximately 400 to 500°C. It was found that this was caused by the reduction of lead oxide. The present invention has been made in view of these points, and embodiments thereof will be described below with reference to the drawings. In FIG. 1, first, an electrode 2 made of aluminum with a thickness of 0.5 μm is formed on a glass substrate 1 made of soda glass with a thickness of 400 μm by vacuum evaporation, sputtering, printing, or the like. Electrode 2
In addition to aluminum, alloys whose main component is aluminum, such as aluminum-copper alloys,
Glass substrate 1 such as nickel or iron-nickel alloy
It is easy to bond, and the glass sealing temperature is 400~500.
It is desirable to use a metal that is difficult to oxidize in the atmosphere at ℃. Alternatively, a transparent electrode such as indium oxide or tin oxide may be used. Next, a metal whose binding free energy of the metal oxide is smaller than that of lead oxide at the bonding temperature of the low-melting point glass described later, such as copper with a thickness of 0.3μ or alloy 3 mainly composed of this metal, is added in the same manner as above. The electrode 2 is coated by the method described in the following. As this metal, in addition to copper, for example, platinum or palladium is used. After that, a low-melting glass 4 (for example, trade name Iwasaki Glass #TO29) having a thickness of 10 μm and having a lead oxide as a main component is brought into contact with the metal or alloy 3, and the glass substrate 1 and the glass substrate 5 opposite thereto are made. and seal it. The coefficient of thermal expansion of this low melting point glass 4 is preferably approximately equal to the coefficient of thermal expansion of the glass substrates 1 and 5. The thus obtained display panel was in extremely good condition with no breakage or peeling of the electrodes 2 at all. In addition, when using a metal or alloy 3 that is easily oxidized at the glass sealing temperature in the atmosphere, such as copper or palladium, the second
As shown in the figure, the metal or alloy 3
On top, an oxide film, such as a silicon oxide film, a nitride film,
It is preferable to form an anti-oxidation film 6 such as a fluoride film, a metal film, for example an aluminum film. This prevents the metal or alloy 3 from oxidizing and turning dark, resulting in a clean appearance. In the above example, an example of copper (binding free energy of copper oxide at 450°C - 34 Kcal/g・atom) was explained as the metal or alloy.
In the present invention, the binding free energy of lead oxide -
Any metal having a binding energy smaller than 37 Kcal/g·atom or an alloy containing this as a main component may be used. Examples of such metal oxides are shown in Table 1.

[Table] If you do not use the method of the present invention and generally use metals with high binding free energy, such as gold, silver,
If copper or other material is formed directly on a glass substrate and used as an electrode, the adhesion between this and the glass substrate is weak, so the electrode may peel off from the glass substrate after glass sealing, resulting in gas leakage. This results in the disadvantage that the electrodes break due to the flow of the low melting point glass. As described above, the present invention can reliably prevent disconnection, peeling, etc. of the electrodes of the display panel.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of an example of a display panel made by the method of the present invention, and FIG. 2 is a sectional view of another example of the display panel. 1... Glass substrate, 2... Electrode, 3... Metal or alloy.

Claims (1)

[Claims] 1. A step of forming an electrode on at least one of the two glass substrates, and a metal or It is characterized by comprising the steps of: coating the electrode with an alloy containing this metal as a main component; and bringing the low melting point glass into contact with the metal or the alloy to seal the two glass substrates together. A method for manufacturing a display panel.