JPS6149814B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the manufacture of semiconductor devices and surface wave devices, for example, and to an improvement in an apparatus for bonding a pellet as an upper member to a stem as a lower member.

Conventionally, there have been various pellet bonding methods used in the manufacture of semiconductor devices and surface wave devices, for example.

For example, a pellet made of a circular tube with a tapered inner peripheral surface at the tip is used to adsorb and hold a pellet as an upper member and convey it to the position of a stem as a lower member, and the pellet and stem are connected through a metal foil. The Au-Si eutectic method connects the above pellets with the stem, the solder mount method uses solder as an adhesive between the above pellets and the stem, and the adhesive is discharged onto the top of the stem using a dispenser, and then the pellets are placed on top of the solder. There have been methods for fixing the image, but these conventional methods have the following problems.

That is, in the Au--Si eutectic method and the solder mounting method, high heat is used to fix the pellets, so these methods cannot be used for bonding of pellets that cannot be subjected to high heat due to their characteristics. In addition, there is a limit to the size of pellets when conveying them using the above-mentioned collet, and the size of the pellets is usually 1.2 to 1.5 mm.
The maximum size is mm square, and it was impossible to convey pellets larger than this. In addition, in this collet mounting method, the pellet is positioned by the taper inside the collet, so the Au-Si
Au in the eutectic method, solder in the solder mount method, and adhesive in the dispenser method adhere to the tip of the collect, and when this collect transports the next pellet, the above Au, etc. adhere to the next pellet, causing defective bonding. I was getting used to it.
Further, in positioning pellets using this collect, it is possible to position pellets with simple shapes such as squares and rectangles, but it is not possible to position pellets with other shapes such as parallelograms. In addition, with the adhesive dispensing method using the dispenser described above, the adhesive does not apply uniformly to the stem, resulting in a so-called "drop" shape, so even if the pellet is bonded on top of it, it is tilted, and the bottom surface of the stem and the top surface of the pellet cannot be parallel. . In addition, with this method of discharging adhesive using a dispenser, there is a limit to the amount of adhesive that can be discharged, and for relatively large pellets, the adhesive is discharged multiple times to compensate for the area. Air holes were created between the two, reducing the adhesive strength and causing pellet cracks.

The present invention aims to improve these points and provides a bonding device that can bond upper members of various shapes and sizes to lower members with high precision and high strength.

An embodiment of the present invention will be described based on the drawings.

A transport device 4 is provided between a plurality of loading magazines 2 provided on one side of the table 1 and a plurality of unloading magazines 3 provided on the other side of the table 1. Positioning devices 5 _a and 5 _b are provided at each location, and an adhesive applicator 6 is provided at the first location of the conveying device 4.
An adhesive thickness constant device 7 is provided at the tip of this device 6.
A mounting device 8 is provided at a second location of the transport device 4, and an X-Y direction moving device 9 is provided at the tip of this device 8.

The loading magazine 2 and the unloading magazine 3 have a carrier tape 1 in which a plurality of stems A as lower members are provided at regular intervals.
1 is stored in multiple stages, and this magazine 2, 3
Long grooves into which both sides of the carrier tape 11 are inserted are provided in multiple stages on both inner wall surfaces of the carrier tape 11.
Also, multiple loading magazines 2 on one side
Alternatively, the plurality of unloading magazines 3 on the other side are supported by moving tables 12 and 13.
The carrier tapes are integrally moved intermittently in the Y direction and Z direction by Each empty section of the magazine 3 is successively and intermittently positioned opposite to the take-out end of the conveying device 4.

Further, in the conveying device 4, a feed pin supported by a feed rod is repeatedly moved forward, downward, backward, and upward by a cam mechanism, and the carrier tape 11 is latched to the feed pin. from the supply end to the first location;
from the location to the second location, and from this second location to the take-out end.

Further, the positioning device 5 will be explained based on FIGS. 2 to 4.

A base 16 is fixed to the table 1, two parallel outer tubes 18 are fitted into the upper end base 17 of the base 16 so that they can move forward and backward, and an inner rod 19 is fitted into the inside of each outer tube 18 so that it can move forward and backward. Plate-shaped holding portions 20 for holding the stem A are provided at the distal end portions 18 _a of each outer tube 18 and the distal end portions 19 _a of each inner rod 19 so as to face each other in the axial direction. This holding part 20 has a large plate 20 _a for positioning the entire stem A in the outer tube 18 and inner rod 19 on one side.
The outer tube 18 and inner rod 19 on the other side are formed by a small plate _20b for positioning the protrusion a of the stem A.

Also, the rear end portion 18 _b of each outer tube 18 and each inner rod 1
A cam follower 23 is rotatably attached to the rear end 19 _b of the cam follower 9 , and a string cam 24 is interposed between the cam followers 23 on both sides. The arrow cams 24 on both sides are guided by vertical guides 25 provided on both sides of the base 16 to advance and retreat in a direction perpendicular to the axes of the outer tube 18 and the inner rod 19. The inclination angles θ of the opposing inclined portions 24 _a on both sides facing the cam follower 23 of 24 are formed to be equal, and by vertical movement of the cam 24, the outer tube 18 and the inner rod 19 are moved the same distance in opposite directions. The holding parts 20 on both sides facing each other can both move toward the ideal center O. Note that the rear end portion 18 _b of the outer tube 18 and the rear end portion 19 _b of the inner rod 19 on both sides are biased toward each other by a spring (not shown). Further, in the figure, 26 is a nut for adjusting the fixing position of the plate-shaped holding portion 20.

Further, a drive motor 29 is fixed to the table 1 via a mounting part 28, and a large number of disc cams 31, 32, 33, 34, 35, 36 are attached to a shaft 30 of this motor 29.
Connect the shaft of The disc cam 31 positions the shaft 30 at an accurate angle when the shaft 30 rotates for one cycle and stops.
The roller 38 at the intermediate portion of the rotary lever 37 is fitted into the notch recess 31 _a to determine its position. Note that 39 urges the lever 37 downward to move the roller 38 to the disc cam 31.
It is a spring that presses against the circumferential surface of the Also, the disc cam 32
is for vertically moving the arrow string cam 24, one end of which is in contact with a roller 42 at the intermediate portion of a lever 41 rotatably attached to the base 16 with a shaft 40, and the other end of the lever 41 is connected. It is connected to the lower part of the arrow string cam 24 via a rod 43. In addition, in the figure, the disk cam 32 related to the arrow string cam 24 on one side
Although only shown, a disc cam for the arrow string cam 24 on the other side is similarly provided on the opposite side of the base 16. Further, the lever 41 is urged upward by a spring (not shown), and its roller 42
is always pressed against the circumferential surface of the disc cam 32. Further, the disc cam 33 has an intermediate portion attached to the base 1.
6, which is rotatably supported by a shaft 46, contacts a roller 48 at one end of a lever 47, and moves up and down a push-up cylinder 50 as a push-up part connected to a roller 49 at the other end of the lever 47. The lever 47 is biased clockwise by a spring (not shown), and its roller 48 is pressed against the circumferential surface of the cam 33. The roller 49 at the other end of the lever 47 is slidably fitted into the U-shaped portion 51 at the lower end of the push-up tube 50, and the push-up tube 50 is guided by a guide (not shown) to move up and down. The inside of the stem A is connected to a vacuum pressure source and the upper end opening is connected to the stem A.
It is designed to be able to absorb and hold. Further, from the upper end base 17 of the base 16, the outer tubes 18 on both sides
An upper surface positioning arm 52 as a locking portion is provided protrudingly between the distal end portions 18a of the stem _A , and this arm 52 locks the upper surface of the stem A to position the upper surface. Further, the disc cam 34 is a 1/2 cycle timing cam, the disc cam 35 is a 1 cycle timing cam, and the disc cam 36 is a vacuum on-off signal timing cam related to supplying and discharging the internal air of the thrust cylinder 50. be.

Then, the stem A, which is conveyed to this positioning device by a conveyor (not shown), is transferred to the push-up cylinder 5.
0 between the upper holding parts 20, a part of the upper surface of the stem A is locked by the upper surface positioning arm 52 to position the upper surface of the stem A, and then the upper surface of the stem A is positioned by the arrows on both sides. P of string cam 24
Due to the movement in the direction, the outer tube 18 and inner rod 19 on both sides move Q.
The plate-shaped holding parts 20 located on both sides of the stem A at their tips move the same distance toward the ideal center O, and the stem A is held in the horizontal direction by the holding parts 20. Positioning is done. At this time, variations in the outer diameter of the stem A are absorbed by changing the stopping position of the arrow cam 24 in the P direction. Next, after applying adhesive and pellet mounting, which will be described later, to the stem A which has been positioned in the upper surface and horizontal direction in this way, the holding part 20 is opened,
The push-up cylinder 50 is lowered to return the stem A to its initial state, and then transported by the transport device 4. In addition, all such drives are performed by the motor 29, the disc cam 32,
33, etc., and repeating operations from the initial state to positioning and after positioning to the initial state are performed by driving and stopping the motor 29.

Also, the adhesive applicator 6 at the first location
A rod 57 is provided on the upper part of a T-shaped board 55 which is movable up and down, via a support roller 56, so that it can move forward and backward, and a cam (not shown) is used to move the rod 57
7 is moved back and forth, and the substrate 55 is also moved up and down, and the head 58 provided at the tip of the rod 57 is moved back and forth between the positioning device _5a at the first location and the adhesive thickness constant device 7. At the same time, each of the devices _5a and 7 is configured to move up and down, and a stamp tool 59 is provided at the bottom of the head 58.
Then, the adhesive in the thickness constant device 7 is peeled off and applied to the upper surface of the stem A positioned and fixed at the first location.

Further, as shown in FIG. 5, the adhesive thickness constant device 7 has a motor bracket 61 attached to the table 1, a drive motor 62 attached below the motor bracket 61, and a three-axis adjustment table 63 and three A drive shaft 66 is inserted into the center shaft of the main body 65, and the lower end of the shaft 66 is connected to the motor 62, and the upper end is connected to the main body 6.
An adhesive storage table 67 rotatably fitted to the upper part of the main body 65 is connected, and a cover plate 68 is fitted to the upper end of the main body 65, and this plate 68 is attached to the mounting parts 69 on both sides of the upper part of the main body 65. It is fixed to the main body 65 with a provided cover clamp 70. The three-axis adjustment table 63 finely adjusts the inclination of the main body 65 by adjusting a plurality of bolts 71 screwed thereon, and adjusts the inclination of the adhesive storage table 67 supported by the upper bottom surface 65 _a of the main body 65. fine-tune,
The bottom surface of this table 67 and the stem A positioned at the first location are adjusted to be parallel to each other. Further, the cover clamp 70 is configured so that by raising and lowering a lever 75 that is pivotally supported by the clamp body 74, a fixed claw 77 at the upper end of a shaft 76, which is engaged with the lever 75 with a cam, for example, is moved up and down. This is what I did. In addition, the cover plate 6
A pair of weirs 78 are installed inside the weir 7.
8, the adhesive on both sides of the adhesive storage table 67 is collected in the center, so that the adhesive can be used efficiently. In addition, the adhesive storage table 6
A wiper 81 that is moved up and down by a micrometer 80 for adjusting the adhesive thickness is inserted into the inside of the wiper 81, and this wiper 81 makes the surface of the adhesive uniform on the adhesive storage table 67 which is in a rotationally driven state. Smooth the adhesive so that it has a constant thickness. Note that the thickness is adjusted using the micrometer 80 mentioned above.

Next, referring to FIG. 9, the adhesive coating device 6
The operation will be explained in relation to the adhesive thickness constant device 7.

First, as the adhesive storage table 67 is rotated by the drive motor 62, the adhesive 82 in the storage table 67 is formed into a constant film thickness set by the micrometer 80 through contact with the wiper 81. . Once the constant thickness film is formed, the rotation of the table 67 is stopped and the wiper 81 is removed from the elongated hole 79 of the cover plate 68.

Then, in order to transfer the adhesive onto the stem A, first, the stamp tool 59, which is waiting directly above the stem A, is directed directly above the adhesive storage table 67 as indicated by arrow a using a cam mechanism (not shown). to move horizontally.

When the stamp tool 59 reaches the end of this horizontal movement, the operation of the cam mechanism is switched by a timing switch or the like that detects this, the stamp tool 58 descends as shown by arrow b, and the wiper 81 The stamp tool 59 enters the adhesive storage table 87 through the elongated hole 79, and a part of the adhesive 82 having a uniform thickness is adhered to the tip of the stamp tool 59 by surface tension phenomenon.

After a certain period of time (instantaneous), this stamp tool 59 rises as shown by arrow c. When the end of this upward movement is reached, the operation of the cam mechanism is switched by a timing switch or the like that detects this, and the tool 59 with the adhesive 82a attached is horizontally moved directly above the stem A as shown by the arrow d. After moving, it descends as shown by arrow e and transfers the adhesive 82a to the transfer position of stem A. After this transfer is completed, it rises to the standby position as shown by arrow f, and one cycle of operation is completed.

Also, the mounting device 8 at the second location
will be explained based on FIGS. 6 to 8.

A mounting head 85 is attached to the tip of a rod 84 that is linearly advanced and retracted and horizontally moved up and down by a cam mechanism (not shown).

This mounting head 85 has a cylindrical pick-up tool 87 fitted into the center of the base 86 so as to be vertically movable, and a gauging arm which is freely rotatable with a support shaft 88 in the middle on each of the four sides of the base 86. 89 is fitted. Further, the pick-up tool 87 is provided below the roller 91 of the mounting plate 90 at the upper end, and is advanced and retracted through the operating section 92 by a cam mechanism (not shown) or the like, and is attached to a support shaft 93.
The mounting plate 90 may be driven upward by a lever 94 which is rotated vertically around the mounting plate 90.
Compression coil spring (not shown) in contact with the top surface of
The upper end of the pick-up tool 87 is connected to a vacuum hose 95 of a vacuum pressure source, and the lower end is formed flat. Furthermore, the gauging arms 89 at the four locations move the rollers 96 at each upper end to the base 86.
A compression coil spring 97 provided inside the base section 86 biases the inner circumferential cam surface of a ring-shaped positioning cam 99 rotatably held by rollers 98 at four corners of the upper surface of the base section 86, and this positioning cam 99 Operation unit 10 of
By moving the positioning cam 99 forward and backward using a cam mechanism (not shown) or the like, the positioning cam 99 is rotated to open and close the lower end portion _89a of each gauging arm 89.

Then, the pellet B serving as the upper member is transported to the pick-up position M by moving the pellet tray 111 on the table 110 of the X-Y direction moving device 9, as will be described later. Here, the pick-up tool 87 is lowered, and the pellet B is adsorbed to the lower end of the pick-up tool 87 by the vacuum force of a vacuum pressure source (not shown). Next, with the pellet B adsorbed, the pick up tool 87 is raised, and the positioning cam 99 is rotated to position the pellet B so as to be enclosed in the gauging box ₁₀₁ by the lower end 89a of the gauging arm 89. do. The external dimensions of the gauging box 101 at this time are almost the same as the external dimensions of the pellet B, and when the gauging arm 89 is closed, its tip _89a hits the side surface of the gauging box 101, so that no excessive force is applied to the pellet B. It doesn't cost anything. Next, the rod 84 is moved to transport the pellet B in its position to the mounting position N, and after opening the gauging arm 89, the pick up tool 87 is lowered and the stem fixed by the positioning device _5b is placed at the position N. The pellet B is pressed onto the adhesive-coated surface of A to complete the mounting. In addition, FIG. 7 is a diagram showing the above-mentioned operation, and in this FIG. 7, one cycle from pick-up to mounting is completed in the sequence a→b→c→b→a.

Furthermore, by arbitrarily changing the shape of the inner circumferential cam surface of the ring-shaped positioning _cam 99, for example, as shown in FIG. The four gauging arms 89 are driven in an order, such as by delaying the operation of the gauging arm _89b . By providing the driving order in this way, even when positioning the pellet _B1 shaped like a parallelogram in the figure, the contact between the pellet _B1 and the gauging arms _89a and _89b becomes smooth,
Pellet B ₁ can be accurately positioned without applying excessive force.

Further, the X-Y direction moving device 9 rotates an X-axis feed screw 104 by an X-axis pulse motor 103, and an X-axis table 10 screwed onto this screw 104.
5, and the Y-axis feed screw 107 is rotated by the Y-axis pulse motor 106.
7 moves the Y-axis table 108 forward and backward, and the pellet tray fixing table 110 on the support 109 erected on this Y-axis table 108 and the pellet tray 111 fixed thereto are intermittently moved in the X-Y direction. Among the large number of pellets B arranged in the X-Y direction above, the one to be picked up is positioned at the pick-up position M.

Next, the overall effect will be explained.

The carrier tape 11 in the loading magazine 2 is intermittently sent to a first location and a second location by the transport device 4, and is kept constant at the first location by the adhesive thickness constant device 7. The thickened adhesive is peeled off by the adhesive applicator 6 and applied to the upper surface of the stem A of the carrier tape 11, and at the second location, the adhesive is applied to the adhesive-applied surface of the stem A by the mounting device 8. Mount pellet B and complete pellet bonding.
Note that the stem A is fixed at an accurate position at the first and second locations by positioning devices 5 _a and 5 _b . Carrier tape 11 accommodates stem A with pellet B bonded in this way.
is transported to the unloading magazine 3 by the transport device 4 and stored therein.

The present invention can be used not only in the production of semiconductor devices and surface wave devices, such as the bonding of pellets to the stem, but also in a wide range of applications, such as when bonding devices to liquid crystals and printed circuit boards.

As described above, according to the present invention, the adhesive is formed to a constant thickness by an adhesive thickness regulating device comprising an adhesive storage table that is driven to rotate and a wiper that smooths the surface of the adhesive into a uniform surface. The stamp tool of the adhesive application device peels off the adhesive, the adhesive is applied to the lower member fixed in position by the positioning device, and the adhesive is applied to the adhesive-coated surface of the lower member by the mounting device. Mounting the upper member solves the drawback of high heat in the conventional Au-Si eutectic method and solder mounting method, and also solves the problems caused by uneven adhesive discharge and multiple discharges in the conventional adhesive dispensing method using a dispenser. The upper member can be adhered to the lower member with high precision and high strength while preventing a decrease in adhesive strength. In addition, since the upper member is held and positioned by a plurality of gauging arms provided on the outer periphery of the pick-up tool of the mounting device, the drawbacks of the conventional mounting method using a collet are overcome, and various shapes and sizes can be obtained. The positioning of the upper member due to its size can be performed at the same time during transfer, and the upper member can be bonded with high precision quickly.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a perspective view of the positioning device, FIG. 3 is a plan view thereof, FIG. 4 is a sectional view of FIG. 3, FIG. 5 is an exploded perspective view of the adhesive thickness constant device, and FIG. 6 is the mounting device. 7a, b, and c are cross-sectional views showing its operation, FIG. 8 is a bottom view thereof, and FIG. 9 explains the operation of the adhesive applicator in relation to the adhesive thickness constant device. FIG. 5... Positioning device, 6... Adhesive application device,
7... Adhesive thickness constant device, 8... Mounting device, 59... Stamp tool, 67... Adhesive storage table, 81... Wiper, 87... Pick up tool, 89... Gauging arm, A...
Stem as the lower member, B... pellet as the upper member.

Claims (1)

[Claims] 1. An adhesive thickness constant device consisting of a rotationally driven adhesive storage table and a wiper that smooths the surface of the adhesive into a uniform surface, a stamp tool that strips off this adhesive, and a mechanism that moves the stamp tool up and down to advance and retreat. an adhesive applicator, a positioning device that fixes in position a lower member to which adhesive is applied by the adhesive applicator, a pick-up tool that suction-holds the upper member, and an outer peripheral portion of the pick-up tool. and a mounting device comprising a plurality of gauging arms provided on the upper member for sandwiching and positioning the upper member, and a mechanism for transferring the pick-up tool and the gauging arms onto the adhesive-applied surface of the lower member. Characteristic bonding equipment.