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JPS6150754B2 - - Google Patents
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JPS6150754B2 - - Google Patents

Info

Publication number
JPS6150754B2
JPS6150754B2 JP6364881A JP6364881A JPS6150754B2 JP S6150754 B2 JPS6150754 B2 JP S6150754B2 JP 6364881 A JP6364881 A JP 6364881A JP 6364881 A JP6364881 A JP 6364881A JP S6150754 B2 JPS6150754 B2 JP S6150754B2
Authority
JP
Japan
Prior art keywords
base metal
face
groove
grooves
cutting blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6364881A
Other languages
Japanese (ja)
Other versions
JPS57178669A (en
Inventor
Yasunori Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YAMABISHI KOGYO KK
Original Assignee
YAMABISHI KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YAMABISHI KOGYO KK filed Critical YAMABISHI KOGYO KK
Priority to JP6364881A priority Critical patent/JPS57178669A/en
Publication of JPS57178669A publication Critical patent/JPS57178669A/en
Publication of JPS6150754B2 publication Critical patent/JPS6150754B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/12Cut-off wheels
    • B24D5/123Cut-off wheels having different cutting segments

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Description

【発明の詳細な説明】 この発明は切断刃、特にシリコン、ゲルマニウ
ム等の半導体、水晶、フエライト、ガラスその他
の硬脆物質の切断に適した切断刃に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a cutting blade, and particularly to a cutting blade suitable for cutting semiconductors such as silicon and germanium, crystal, ferrite, glass, and other hard and brittle materials.

シリコンに代表される電子部品材料は、一般に
大きな素材から、切断、研削、ラツピング等の工
程を経て微小な部品へと加工される。上記切断加
工は、ブロツク状素材の外形を整えたうえで、薄
切り(スライシング)して行なわれている。
Electronic component materials, such as silicon, are generally processed from large materials into minute parts through processes such as cutting, grinding, and wrapping. The above-mentioned cutting process is performed by adjusting the outer shape of the block-shaped material and then slicing it into thin pieces.

ところで、スライシングされる電子部品材料は
一般に高品位であり、また非常に薄く切断される
ものであるから、切断刃は出来る限り薄くするほ
うが、精度上の点においても、また、切断ロス、
歩留りの点においても好ましい。この要請によく
合致した切断刃として、この発明者は、先に第4
図に示すような端面を有する切断刃を提案してい
る(以下「先行技術」と称する)。この切断刃
は、台金1の端面に少なくとも台金厚さの50%の
深さの溝2,2′を表裏にほぼ均等した数になる
よう穿ち、この溝部に砥粒3を電着ボンド等の砥
粒結合剤4によつて固着したものである。この切
断刃は、砥粒3が台金1に埋つているために、大
径の砥粒を使用しても切断刃の厚みが増えないの
で薄い切断刃の製作が容易となり、また切断ロス
が少なく、しかも切断速度が速くなる等の優れた
利点を有する。
By the way, the electronic component materials to be sliced are generally of high quality and are cut very thinly, so it is better to make the cutting blade as thin as possible in terms of accuracy and to reduce cutting loss.
It is also preferable in terms of yield. The inventor has previously developed a fourth cutting blade that meets this requirement.
A cutting blade having an end face as shown in the figure has been proposed (hereinafter referred to as "prior art"). This cutting blade is made by drilling grooves 2, 2' with a depth of at least 50% of the thickness of the base metal on the end face of the base metal 1 so that the numbers are approximately equal on both sides, and applying abrasive grains 3 to these grooves using an electrodeposition bond. It is fixed by an abrasive grain binder 4 such as. In this cutting blade, since the abrasive grains 3 are embedded in the base metal 1, the thickness of the cutting blade does not increase even if large-diameter abrasive grains are used, making it easy to manufacture thin cutting blades and reducing cutting loss. It has excellent advantages such as less cutting speed and faster cutting speed.

上記切断刃を、内周刃、往復運動式鋼帯(固定
砥粒式マルチバンドソー)、高速走行エンドレス
バンドソー等に適応する場合、被切断物を精度よ
く、且つ能率よく切断するために、この切断刃は
台金及び刃先部にテンシヨンをかけ、刃先部に充
分な剛性をもたせ、切断抵抗による切断刃の撓み
を防止して使用に供される。このテンシヨンは大
きい程良好であり、たとえば、内周刃では台金が
破断する直前までテンシヨンをかけて使用され
る。しかし、上記切断刃において、たとえば、砥
粒を固着する電着ボンドとしてニツケルを用いた
場合、テンシヨンを過大にすると、しばしば溝側
壁5,5′において、電着ニツケルボンド4と台
金1が剥離を起す問題がある。また、この場合、
溝2,2′の底部と台金端面間の残部台金厚さd
は、台金1の厚みtに比して局部的に薄くなるた
め、この部分に応力が集中して、台金の割れの起
点となり、充分なテンシヨンがかけられない問題
がある。
When the above-mentioned cutting blade is applied to internal blades, reciprocating steel strips (fixed abrasive type multi-band saws), high-speed running endless band saws, etc., in order to cut the workpiece with high precision and efficiency, it is necessary to The blade is used by applying tension to the base metal and the cutting edge to give the cutting edge sufficient rigidity to prevent the cutting blade from bending due to cutting resistance. The larger the tension, the better; for example, in the case of an inner peripheral cutter, tension is applied until just before the base metal breaks. However, in the above-mentioned cutting blade, when nickel is used as the electrodeposited bond for fixing the abrasive grains, if the tension is set too high, the electrodeposited nickel bond 4 and the base metal 1 often peel off at the groove side walls 5, 5'. There is a problem that causes Also, in this case,
Remaining base metal thickness d between the bottom of grooves 2 and 2' and the end face of the base metal
is locally thinner than the thickness t of the base metal 1, stress is concentrated in this area, which becomes the starting point for cracks in the base metal, and there is a problem that sufficient tension cannot be applied.

この発明は、上記従来の切断刃の欠点をなく
し、台金と砥粒結合剤の密着力を改善し、充分な
テンシヨンがかけられる切断刃を提供することを
目的とする。
The object of the present invention is to eliminate the drawbacks of the conventional cutting blades described above, improve the adhesion between the base metal and the abrasive binder, and provide a cutting blade that can be sufficiently tensioned.

この発明は、台金端面6から台金表面7にわた
る範囲及び台金端面6から台金裏面8にわたる範
囲に所要の深さをもち且つ台金端面6から奥行き
方向に所要の長さをもつた溝2,2′を形成し、
且つその溝2,2′を台金1の表裏両面7,8に
ほぼ均等した数になるよう適宜間隔をおいて配列
し、上記各溝2,2′に超硬度砥粒3を砥粒結合
剤4によつて固着した切断刃において、上記溝
2,2′の両側壁5,5′が台金端面6に達する部
分において台金1の表裏面と平行に引いた接線m
が溝2,2′の奥所に接近する方向に傾斜し、且
つ上記溝2,2′の両側壁5,5′の間隔を台金端
面6から奥行き方向へ次第に狭くなるように形成
したものである。
This invention has a required depth in the range extending from the base metal end surface 6 to the base metal surface 7 and from the base metal end surface 6 to the base metal back surface 8, and has a required length in the depth direction from the base metal end surface 6. forming grooves 2, 2';
In addition, the grooves 2 and 2' are arranged at appropriate intervals on both the front and back surfaces 7 and 8 of the base metal 1 so that the numbers are approximately equal, and the superhard abrasive grains 3 are bonded to each of the grooves 2 and 2'. In the cutting blade fixed by the agent 4, a tangent line m drawn parallel to the front and back surfaces of the base metal 1 at the portion where both side walls 5, 5' of the grooves 2, 2' reach the base metal end surface 6.
is inclined in the direction approaching the depths of the grooves 2, 2', and the distance between the side walls 5, 5' of the grooves 2, 2' is formed so as to gradually narrow from the base metal end face 6 in the depth direction. It is.

以下、この発明を添付図面の実施例に基づいて
説明する。
Hereinafter, the present invention will be explained based on embodiments shown in the accompanying drawings.

第1図は、台金1の溝加工例を示し、上記溝
2,2′の両側壁5,5′の間隔が台金端面6から
奥行き方向へ次第に狭くなるように、溝形状を円
弧状としたものである。この場合、溝2,2′の
両側壁5,5′が台金端面6に達する部分におい
て台金1の表裏面と平行に引いた接線mが、溝
2,2′の奥所に接近する方向に傾斜し、図示の
角度αが90度未満となるよう形成してある。角度
αはできるだけ小さいこと、即ち溝における半径
Rを大きくし、且つ溝奥行きlを小さくするほど
よい。
FIG. 1 shows an example of groove machining on the base metal 1. The groove shape is shaped into an arc so that the distance between the side walls 5, 5' of the grooves 2, 2' gradually narrows in the depth direction from the base metal end surface 6. That is. In this case, a tangent line m drawn parallel to the front and back surfaces of the base metal 1 at the portion where both side walls 5, 5' of the grooves 2, 2' reach the end surface 6 of the base metal approaches the deep part of the grooves 2, 2'. The angle α shown in the figure is less than 90 degrees. It is better that the angle α is as small as possible, that is, the radius R of the groove is larger and the groove depth l is smaller.

第2図は、台金1の他の溝加工例を示し、上記
溝2,2′の両側壁5,5′の間隔を台金端面6か
ら奥行き方向へ次第に狭くなるように、溝形状を
台形としたものである。この場合、台金端面6と
台形の斜辺がなす角度αは小さいほどよい。
FIG. 2 shows another example of groove machining on the base metal 1, in which the groove shape is changed so that the distance between the side walls 5, 5' of the grooves 2, 2' becomes gradually narrower in the depth direction from the base metal end surface 6. It is trapezoidal. In this case, the smaller the angle α between the base metal end face 6 and the oblique side of the trapezoid, the better.

第3図は、台金1の他の好ましい溝加工例を示
し、基本的には上述の第2図に示す実施例と同様
に溝形状を台形としたものであるが、この第3図
に示す実施例の場合には、さらに溝側壁5を図示
の如く階段状の複数段としている。
FIG. 3 shows another preferable example of groove machining on the base metal 1. Basically, the groove shape is trapezoidal as in the embodiment shown in FIG. 2 above. In the case of the embodiment shown, the groove side wall 5 is further formed into a plurality of stepped steps as shown in the figure.

上記の溝2,2′は、図示のように台金1の表
裏に交互に形成するほか、溝2,2′を二つおき
に台金1の表裏に形成してもよく、要は表裏に平
均して配列されればよい。この溝2,2′はフオ
トエツチング法又は放電加工法等によつて形成す
る。
The above-mentioned grooves 2, 2' may be formed alternately on the front and back sides of the base metal 1 as shown in the figure, or grooves 2, 2' may be formed every other two on the front and back sides of the base metal 1; It is sufficient if they are arranged on average. The grooves 2, 2' are formed by photoetching, electric discharge machining, or the like.

尚、第4図は溝2,2′にダイヤモンド等の超
硬度砥粒3を電着ボンド等の砥粒結合剤4によつ
て固着せしめた状態を示す台金端面6側の一部断
面図である。
FIG. 4 is a partial cross-sectional view of the base metal end face 6 side showing a state in which superhard abrasive grains 3 such as diamond are fixed to the grooves 2 and 2' with an abrasive grain binder 4 such as electrodeposited bond. It is.

この発明は以上のように構成されるので、次の
如き効果がある。この発明による切断刃は前述の
如く台金及び刃先部にテンシヨンF−F′をかけ
て使用に供されるものである。このテンシヨンF
−F′は、台金端面6とほぼ平行にかけられる
が、この発明による切断刃は、溝2,2′の両側
壁5,5′の間隔を台金端面6から奥行き方向へ
次第に狭くなるように形成されているので、台金
端面6と溝側壁5,5′とは傾斜し、そのため溝
側壁5,5′にかかるテンシヨンF−F′は分散さ
れることになる。したがつて、この発明による切
断刃は、大きなテンシヨンF−F′をかけても、
溝側壁5,5′において台金1と砥粒結合剤4の
剥離が起こりにくい。このことは、第5図イ,ロ
に示すように、例えば二つの棒状体を接着する場
合、第5図イのようにテンシヨンF−F′に垂直
な断面で接着したものより、第5図ロのようにテ
ンシヨンF−F′に対し接着面が斜めになるよう
にすれば、接着面積が大きくなつて接着面にかか
る力を分散することができ、大きなテンシヨンに
耐えるようになることを考えれば容易に理解し得
る。第1図に示す実施例において円弧状の溝2,
2′における円弧の半径Rを大きくし、且つ溝奥
行きlを小さくするほど、また、第2図に示す実
施例において台金端面6と台形の斜辺のなす角度
αが小さいほど台金端面6と溝側壁5,5′とが
傾斜することになり、溝側壁5,5′における台
金1と砥粒結合剤4の接着面積が増し接着面にか
かる力を分散させることができるので、より大き
なテンシヨンF−F′に耐える切断刃を得ること
ができる。さらに、第3図の実施例のように溝側
壁5,5′を複数段に形成した場合には、溝側壁
5,5′における台金1と砥粒結合剤の接着面積
が極めて広くなり、台金1と砥粒結合剤4の剥離
が生じない極めて良好な切断刃を得ることができ
る。
Since the present invention is configured as described above, it has the following effects. As described above, the cutting blade according to the present invention is used with tension F-F' applied to the base metal and the cutting edge. This tension F
-F' is applied almost parallel to the end face 6 of the base metal, but the cutting blade according to the present invention is designed so that the distance between the side walls 5, 5' of the grooves 2, 2' becomes gradually narrower in the depth direction from the end face 6 of the base metal. Since the base metal end face 6 and the groove side walls 5, 5' are inclined, the tension F-F' applied to the groove side walls 5, 5' is dispersed. Therefore, even if a large tension F-F' is applied to the cutting blade according to the present invention,
Peeling of the base metal 1 and the abrasive grain binder 4 at the groove side walls 5, 5' is less likely to occur. This means that, as shown in Figures 5A and 5B, for example, when two rod-like bodies are glued together, the cross section in Figure 5 Consider that if the bonding surface is made oblique to the tension F-F' as shown in (b), the bonding area will become larger and the force applied to the bonding surface will be dispersed, making it possible to withstand large tensions. can be easily understood. In the embodiment shown in FIG.
The larger the radius R of the arc at 2' and the smaller the groove depth l, and the smaller the angle α between the base metal end face 6 and the hypotenuse of the trapezoid in the embodiment shown in FIG. Since the groove side walls 5, 5' are inclined, the bonding area between the base metal 1 and the abrasive grain binder 4 on the groove side walls 5, 5' increases, and the force applied to the bonding surface can be dispersed. A cutting blade that can withstand tension F-F' can be obtained. Furthermore, when the groove side walls 5, 5' are formed in multiple stages as in the embodiment shown in FIG. An extremely good cutting blade in which the base metal 1 and the abrasive binder 4 do not separate can be obtained.

「実験例」 この発明の効果を確認するために、以下のよう
な比較実験を行なつた。
"Experimental Example" In order to confirm the effects of the present invention, the following comparative experiment was conducted.

各試料は内周刃として12インチブレード、外径
304.8φ、内径102φ、台金厚み0.1mmの
SUS304EH材で製作し、溝の形状が第6図から第
8図に示す3通りのものを製作した。これらをそ
れぞれ試料1〜3と称する。各試料の溝の寸法は
次の通りである。
Each specimen has a 12-inch blade as the inner circumferential edge, and an outer diameter
304.8φ, inner diameter 102φ, base metal thickness 0.1mm.
It was made from SUS304EH material, and three types of groove shapes were manufactured as shown in Figures 6 to 8. These are referred to as samples 1 to 3, respectively. The dimensions of the grooves of each sample are as follows.

試料1 a:5mm d:2mm b:1.5mm e:0.75R c:1mm 試料2 a:5mm d:1mm b:2mm e:1.5R c:0.5mm 試料3 a:5mm c:0.65mm b:0.95m d:1.6R なお、各試料とも溝の数は64、溝の深さは55μ
mである。
Sample 1 a: 5mm d: 2mm b: 1.5mm e: 0.75R c: 1mm Sample 2 a: 5mm d: 1mm b: 2mm e: 1.5R c: 0.5mm Sample 3 a: 5mm c: 0.65mm b: 0.95 m d: 1.6R The number of grooves in each sample is 64, and the depth of the grooves is 55μ.
It is m.

上記各試料につき、まず溝部に砥粒を固定しな
い状態で台金が破壊するまでのテンシヨン値を測
定した。テンシヨンの測定は、第9図に示す2点
P1,P2即ち内周からf(5mm)だけ離れた点を含
む円周上で、g(5mm)だけ離れた2点のうち1
点に加重をかけ、他の1点に変位計を設置して測
定し、加重に対する変位の割合によつてテンシヨ
ン値を表わす。一般には、50μmの変位に対する
加重値で表わす。
For each of the above samples, the tension value until the base metal broke was first measured without abrasive grains fixed in the groove. Tension is measured at two points shown in Figure 9.
P 1 , P 2 , that is, one of the two points separated by g (5 mm) on the circumference that includes the point f (5 mm) away from the inner circumference.
A weight is applied to one point, a displacement meter is installed at another point, and the measurement is performed, and the tension value is expressed as the ratio of the displacement to the weight. Generally, it is expressed as a weighted value for a displacement of 50 μm.

〔測定結果1〕 試料 1,2 溝の先端(台金端面)に微小クラツクが現われ
る際のテンシヨン値:250〜290g/50μm 試料 3 テンシヨン値350g/50μmまで溝部近傍には
クラツクが発生せず、それ以上のテンシヨンでは
ブレード外周部の張りあげ機構部分から大きく裂
けた。
[Measurement results 1] Samples 1 and 2 Tension value at which minute cracks appear at the tip of the groove (base metal end face): 250 to 290 g/50 μm Sample 3 No cracks appear near the groove until the tension value is 350 g/50 μm. At higher tensions, the tensioning mechanism on the outer periphery of the blade was severely torn.

次に、各試料の溝部に320/400番のダイヤモン
ド砥粒を電着法により二層に固着し、同様のテン
シヨンテストを行つた。
Next, two layers of No. 320/400 diamond abrasive grains were fixed in the grooves of each sample by electrodeposition, and the same tension test was conducted.

〔測定結果2〕 試料1 190〜230g/50μm(溝の先端に微小ク
ラツクが現われる際のテンシヨン値) 試料2 220〜290g/50μm(同上) 試料3 350g/50μm(内周部の微小クラツク
は発生せず、台金外周部において破壊す
る際のテンシヨン値) 〔実験結果の考案〕 溝形状により台金のテンシヨン値が大きく変る
こと、及び発明のもの(試料3)は他のものに比
べ大きなテンシヨン(台金の強度限界まで)をか
けることができることが判明した。
[Measurement results 2] Sample 1 190-230g/50μm (tension value when micro-cracks appear at the tip of the groove) Sample 2 220-290g/50μm (same as above) Sample 3 350g/50μm (micro-cracks at the inner periphery do not occur) (The tension value when the base metal breaks at the outer periphery of the base metal without breaking) [Description of experimental results] The tension value of the base metal changes greatly depending on the groove shape, and the one of the invention (sample 3) has a larger tension than the other ones. It was found that it was possible to apply the same strength (up to the strength limit of the base metal).

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による切断刃台金の一部を示す
平面図、第2図は台金の他の例の一部を示す平面
図、第3図は台金の好ましい例の一部を示す斜視
図、第4図は本発明による切断刃の一部断面図、
第5図イ,ロはこの発明の作用を示す説明図、第
6図から第8図は実験例における切断刃溝形状の
一部拡大平面図、第9図は実験例における測定点
を示す切断刃の平面図である。 1……台金、2,2′……溝、3……超硬度砥
粒、4……砥粒結合剤、5……溝側壁、6……台
金端面、7……台金表面、8……台金裏面。
FIG. 1 is a plan view showing a part of the cutting blade base metal according to the present invention, FIG. 2 is a plan view showing a part of another example of the base metal, and FIG. 3 is a plan view showing a part of a preferred example of the base metal. FIG. 4 is a partial sectional view of the cutting blade according to the present invention;
5A and 5B are explanatory diagrams showing the action of the present invention, FIGS. 6 to 8 are partially enlarged plan views of the cutting blade groove shape in the experimental example, and FIG. 9 is a cutting diagram showing the measurement points in the experimental example. FIG. 3 is a plan view of the blade. 1... Base metal, 2, 2'... Groove, 3... Super hard abrasive grain, 4... Abrasive grain binder, 5... Groove side wall, 6... Base metal end face, 7... Base metal surface, 8...Back side of base metal.

Claims (1)

【特許請求の範囲】[Claims] 1 台金端面から台金表面にわたる範囲及び台金
端面から台金裏面にわたる範囲に所要の深さをも
ち、且つ台金端面から奥行き方向に所要の長さを
もつた溝を形成し、且つその溝を台金の表裏両面
にほぼ均等した数になるよう適宜間隔をおいて配
列し、上記各溝に超硬度砥粒を砥粒結合剤によつ
て固着した切断刃において、上記溝の両側壁が台
金端面に達する部分において台金の表裏面と平行
に引いた接線が、溝奥所に接近する方向に傾斜
し、且つ上記両側壁の間隔が台金端面から奥行き
方向へ次第に狭くなるよう形成されていることを
特徴とする切断刃。
1 Form a groove with the required depth in the range from the base metal end face to the base metal surface and from the base metal end face to the base metal back face, and the required length in the depth direction from the base metal end face, and In a cutting blade in which grooves are arranged at appropriate intervals on both the front and back surfaces of the base metal, and superhard abrasive grains are fixed to each groove with an abrasive binder, both sides of the grooves are The tangent line drawn parallel to the front and back surfaces of the base metal at the part where it reaches the end face of the base metal is inclined in the direction approaching the deep part of the groove, and the interval between the two side walls becomes gradually narrower in the depth direction from the end face of the base metal. A cutting blade characterized in that:
JP6364881A 1981-04-23 1981-04-23 Cutting edge Granted JPS57178669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6364881A JPS57178669A (en) 1981-04-23 1981-04-23 Cutting edge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6364881A JPS57178669A (en) 1981-04-23 1981-04-23 Cutting edge

Publications (2)

Publication Number Publication Date
JPS57178669A JPS57178669A (en) 1982-11-02
JPS6150754B2 true JPS6150754B2 (en) 1986-11-05

Family

ID=13235373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6364881A Granted JPS57178669A (en) 1981-04-23 1981-04-23 Cutting edge

Country Status (1)

Country Link
JP (1) JPS57178669A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002113666A (en) * 2000-10-10 2002-04-16 Funasoo Kk Hand saw capable of cutting glass bottle and method of manufacturing the same

Also Published As

Publication number Publication date
JPS57178669A (en) 1982-11-02

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