JPS6151477B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a method for producing a two-color stripe filter used in a two-tube color television camera or the like.

(Prior art) Color television cameras are of the single-tube type, which extracts luminance signals and chromaticity signals from one image pickup tube, and of the two type, which extract luminance signals and chromaticity signals (generally other than green signals) using two image pickup tubes. A two-tube type, etc., which separately extracts the other two color signals) is used, and is divided into a frequency separation method and a phase separation method, depending on how the color signals are extracted. The color distribution of the image information that is continuously focused on the face of the image pickup tube is separated in time or frequency by scanning the optical image separated by a striped color filter with an electron beam. I am getting a signal. Therefore,
The above-mentioned striped color filter is arranged on the face plate of the image pickup tube.

When creating the two-color stripe filter for the two-tube and single-tube color television cameras described above using an interference film, a reverse pattern such as a metal film that can be etched in advance is formed on the glass substrate of the face plate. After forming by photo-etching and depositing a required first color filter over the entire surface of the pattern, the metal film is peeled off by etching to remove unnecessary portions to form a first color filter pattern. Next, when creating a pattern for the second color filter, the process is similar to creating the pattern for the first color filter.

FIGS. 2a to 2j show a conventional example of a method for manufacturing the above-mentioned two-color stripe filter in the order of steps.

Hereinafter, a conventional method for producing a two-color stripe filter will be explained in accordance with the order of the steps.

In FIG. 2a, 1 is a glass substrate, and by vapor deposition or sputtering etc. on this glass substrate 1,
A Cu film (copper film) 2 is deposited, and on top of the Cu film 2 is a negative-acting resist (KPR (Kodak photo resist)) with good stability, acid resistance, and excellent resolution.
A KTFR (Kodak Thin Film Resist) film 3 is applied by a spinner method. Next, as shown in FIG. 2b, a photomask 4 having striped windows is stacked on top of the photomask 4, and a high pressure mercury lamp is used to irradiate ultraviolet rays 5 to expose a predetermined pattern.
When this exposure is completed and the resist film 3 is immersed in a special developer, the unexposed parts of the resist film 3 are dissolved and removed, leaving behind the parts that have been polymerized and hardened by the exposure.
An etching pattern as shown in FIG. 2c is formed. Further, when the Cu film 2 exposed by the above exposure is immersed in an etching solution such as FeCl ₃ or CuCl ₂ and etched, a striped pattern shown in FIG. 2d corresponding to the pattern of the photomask 4 is formed. When the exposed resistor film 3 on the surface of the Cu film 2 is removed, a striped Cu film 2 is formed by photoetching as shown in FIG. 2e. Furthermore, this striped Cu film 2
A first color filter 6 (for example, a blue-transmissive interference film) is deposited on the entire surface of the glass substrate 1, as shown in FIG. 2(f). Then, when the one shown in Fig. 2 f is immersed in an etching solution such as FeCl ₃ or CuCl ₂ , the Cu film 2 is etched, and the first color filter 6 on this Cu film 2 is removed. A striped first color filter 6 is placed on a glass substrate 1 as shown in FIG.
is formed. Note that the Cu film 2 is thicker than the first color filter 6 and has an exposed side surface to form an exposed portion, which is exposed to an etching solution and removed by etching. Next, this striped first
On the glass substrate 1 on which the color filter 6 is formed,
As shown in FIG. 2h, a Cu film 2A is first deposited by vapor deposition or the like, and then a resist film 3A is applied thereon. Then, highly accurate mask alignment is performed and photoetching is performed in the same manner as in the formation of the striped first color filter 6 described above.
By forming the pattern shown in Figure i, then depositing a second color filter 7 (a red-transparent interference film) on the entire surface, and removing the Cu film 2A by etching, a blue pattern as shown in Figure 2J is formed. Transmissive and red-transmissive two-color stripe filters are formed on the same plane on a glass substrate 1.

(Problems to be Solved by the Invention) In the above method, the first color filter 6 and the second color filter 7 formed in a stripe shape are
It is difficult to match the masks to form a mask, and it is not easy to completely overlap them with high accuracy. Therefore, due to misalignment of the masks during overlaying, the first color filter 6 and the second color filter 7 tend to partially overlap and gap, resulting in incomplete color separation. There was a problem.

The purpose of the present invention was to solve the above-mentioned problems with the conventional two-color stripe filter manufacturing method.The purpose of the present invention is to form two-color stripe-shaped color filters onto a glass substrate without overlapping or gaps by one-time photo-etching. An object of the present invention is to provide a method for creating a two-color stripe filter that can be formed on the same plane.

(Means for Solving the Problems) In order to achieve the above object, the method for producing a two-color stripe filter of the present invention includes the steps of forming a first metal film in a stripe shape on a glass substrate by photoetching; a step of vapor depositing a first color filter on the glass substrate on which the striped first metal film is formed; a step of vapor depositing a second metal film overlying the first color filter; Next, the first metal film is etched from the exposed portion formed by the step using a first etching solution that is insoluble in the second metal film and capable of etching only the first metal film. and the first color filter and the second metal film stacked thereon are removed and the first color filter and the second metal film stacked thereon are deposited directly on the glass substrate. a step of leaving the first color filter and the second metal film in a stripe shape, and a step of vapor depositing a second color filter on the glass substrate on which the first color filter and the second metal film are left in the stripe shape;
etching the second metal film from the exposed portion formed by the step using a second etching solution;
By removing this second metal film and the second color filter overlaid thereon, two-color parallel stripe filters are formed which are directly deposited on the same plane of the glass substrate.

(Function) A first metal film is formed in a stripe shape by photoetching on a glass substrate, a first color filter and a second metal film are overlaid on this, and the first metal film is etched to form a first metal film. the first color filter and the second metal film deposited directly on the glass substrate by removing the metal film, the first color filter overlaid thereon, and the second metal film and the second metal film overlaid thereon. A second color filter is placed on top of the second color filter, and the second metal film is etched to remove the second metal film and the second color filter on top of the second color filter. Since the two-color parallel stripe filter is directly deposited on a flat surface, photoetching only needs to be performed once to form the first metal film in stripes on the glass substrate; There will be no overlap or gap between the first and second color filters due to misalignment of masks during photo-etching.

(Description of Embodiments) Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1a to 1d. FIGS. 1A to 1D are diagrams showing an embodiment of the main steps of the method for producing a two-color stripe filter according to the present invention. Note that the steps shown in FIGS. 1 a to d are performed subsequent to the steps shown in FIGS. 2 a to f, and the explanation of the overlapping steps in FIGS. .

As shown in FIG. 2e, a Cu film 2, which is a first metal film, is formed in stripes on a glass substrate 1, and then a first color filter 6 is deposited as shown in FIG. 2f. As shown in FIG. 1a, a Cr film (chromium film) 8, which is a second metal film, is deposited on top of the film by vapor deposition. At this time, the thickness of the Cu film 2 is greater than the thickness of the first color filter 6 and the Cr film 8 stacked together, and a part of the side surface of the Cu film 2 is exposed due to the step, forming an exposed part. be. Next, the Cr film 8 is immersed in a first etching solution such as FeCl ₃ or CuCl ₂ that is insoluble and only the Cu film 2 can be etched, and the Cu film 2 is etched from the side of the exposed part, as shown in Figure 1b. This Cu film 2, the first color filter 6 and Cr film 8 overlaid thereon are removed, and the first color filter 6 deposited directly on the glass substrate 1 and the Cr film overlaid thereon are removed. Leave 8 in a stripe pattern. Furthermore, the first color filter 6 and
On the Cr film 8 left in stripes on the glass substrate 1, a second color filter 7 is deposited by vapor deposition, as shown in FIG. 1c. The thickness of the second color filter 7 is equal to that of the first color filter 6, and the side surface of the Cr film 8 is exposed due to the difference in level to form an exposed portion. This is further immersed in a second etching solution consisting of potassium permanganate and caustic soda that can etch the Cr film 8, and the Cr film 8 is etched from the side of the exposed part, and the Cr film 8 and the Cr film 8 are superimposed on it. The second color filter 7 is removed. As a result, as shown in FIG. 1d, the glass substrate 1
Two-color parallel stripe filters, one blue-transmissive and one red-transmissive, are created by directly depositing them on the same plane.

Note that the present invention includes not only the above-mentioned embodiment, but also
It can be implemented with various modifications without changing the other gist.

(Effects of the Invention) As explained above, according to the method for producing a two-color stripe filter of the present invention, the photoetching step is only required once when forming the first metal film in a stripe shape on the glass substrate. Therefore, there is no need for highly accurate mask alignment required when performing multiple photoetchings, and manufacturing is easy.
Moreover, there is no problem caused by misalignment of masks as in the conventional method, and the first and second color filters are directly deposited on the same plane of the glass substrate without overlapping or gaps, creating a two-color parallel stripe filter. Can be formed. Therefore, it is possible to form a two-color stripe filter with more complete color separation, which is an excellent effect.

[Brief explanation of the drawing]

1A to 1D are diagrams showing an example of the main steps of the method for manufacturing a two-color stripe filter of the present invention, and FIGS. 2A to 2J are diagrams showing the method for manufacturing a two-color stripe filter in the order of steps. This is a conventional example. 1... Glass substrate, 2... Cu film, 3... Resist film, 4... Photomask, 5... Ultraviolet rays, 6...
...first color filter, 7...second color filter,
8...Cr film.

Claims (1)

[Claims] 1. A step of forming a first metal film in a stripe shape by photoetching on a glass substrate, a step of vapor depositing a first color filter on the glass substrate on which the stripe-shaped first metal film is formed, and a step of depositing a second metal film overlying the first color filter, and then etching the first metal film using a first etching solution that is insoluble in the second metal film and capable of etching only the first metal film; etching the metal film from the exposed portion formed by the step, removing the first metal film, the first color filter overlaid thereon, and the second metal film, and depositing directly on the glass substrate. a step of leaving the first color filter and a second metal film superimposed thereon in a stripe pattern; a step of vapor depositing a second color filter on the second metal film, and etching the second metal film from the exposed portion formed by the step using a second etching solution, thereby forming a layer overlapping the second metal film and the second metal film. A method for producing a two-color stripe filter, comprising: removing a second color filter to form two-color parallel stripe filters deposited directly on the same plane of the glass substrate.