JPS6152722B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a cleaning agent for vapor phase drying that contains a cleaning agent in the previous process that is produced when vapor phase drying glass substrates used in lenses and liquid crystal display devices. The present invention relates to a method for washing and separating .

As a method for cleaning lenses, glass substrates of liquid crystal display devices, etc., a method is generally adopted in which the lenses are washed with a detergent, then washed with water, then washed with alcohol, and finally dried in a vapor phase. In this vapor phase drying process, an alcoholic cleaning agent (chlorodifluoromethane (manufactured by DuPont, U.S.A.: Freon
22), dichlorodifluoromethane (same product: Freon 12), 1,1,2-trichloro-1,2,2-
It can be dissolved in a vapor-phase drying detergent such as trifluoroethane (Freon 113) or trichlene, and then dried by vaporizing it.
When the vapor phase drying cleaning agent vaporized in the vapor phase drying device adheres to the object to be cleaned, it condenses and liquefies on it, and there the alcohol cleaning agent from the previous process is washed away.
Can be dried at the same time. Apparatuses using this vapor phase drying method are available, for example, in Utility Model Publication No. 42-6781,
It is described in Publication No. 45-6113, etc.

Vapor-phase drying detergents such as chlorodifluoromethane used in the above-mentioned vapor-phase drying equipment dissolve alcohol, but are not miscible with water, so when alcohol is included and water comes into contact with it, chlorodifluoromethane is produced. Alcohol is extracted from the liquid, and since it has a high specific gravity, it is separated into an aqueous phase containing alcohol and a chlorofluoromethane phase.

Therefore, the detergent for vapor phase drying containing the alcohol detergent in the previous process is usually separated from the detergent for vapor phase drying by a water washing separation device, and then sent to the vapor phase drying device again to be reused. ing.

However, such conventional water washing separation methods require a considerable amount of washing water, and even though a large amount of washing water is used, the extraction of the cleaning agent for vapor phase drying is insufficient. It has the disadvantage of overflow.

In addition, in this conventional method, water from washing is mixed into the cleaning agent for vapor phase drying that has been washed and separated, resulting in an increase in the boiling point and a decrease in the thermal efficiency of vapor phase drying. It also has the disadvantage that the phase drying cleaning agent vaporizes first and a moisture film is formed on the object to be cleaned.

An object of the present invention is to provide a water washing separation method that can eliminate the above-mentioned drawbacks.

In the present invention, when washing and separating the cleaning agent for vapor phase drying containing the cleaning agent from the previous step, which is generated by vapor phase drying the object to be cleaned to which the cleaning agent from the previous step has adhered, the cleaning agent from the previous step is applied. This method is characterized by contacting a cleaning agent for vapor phase drying containing a cleaning agent with washing water having a water temperature of 0°C to 15°C, preferably 5°C to 10°C.

Furthermore, in a preferred embodiment of the present invention, the cleaning agent for vapor phase drying, including the cleaning agent in the previous step, is added at a water temperature of 0°C to 15°C.
℃, preferably 5℃ to 10℃ of washing water and the step of contacting the water-washed and separated cleaning agent phase for vapor phase drying to 0℃
It includes a step of cooling to ~15°C, preferably 5°C to 10°C.

The present invention will be explained below with reference to the drawings.

FIG. 1 shows a cross-sectional view of a typical water washing separation device of the present invention.

In FIG. 1, an object to be cleaned (for example,
For vapor phase drying of chlorodifluoromethane, dichlorodifluoromethane, 1,1,2-trichloro-1,2,2-trifluoroethane, trichlene, etc., which have been vaporized from glass substrates used in lenses and liquid crystal display devices (as mentioned above). The object to be cleaned is cleaned by placing it in an atmosphere of a cleaning agent. At this time, the vaporized cleaning agent for vapor phase drying aggregates on the object to be cleaned, dissolves the alcohol cleaning agent in the previous step, and is then vaporized.

The vapor phase drying detergent containing the vaporized alcohol detergent in the previous step is condensed by a cooler (not shown) disposed within the vapor phase drying device 10,
This condensate is sent through a conduit 13 to tank A of the water washing and separation device 1.

Tank A and tank B of the water washing separation device 1 are separated by a partition plate 15, tank A is for washing the condensate sent from the conduit 13, and tank B is for washing and separating the condensate. This is for extracting moisture from the cleaning agent 6 for vapor phase drying.

Tank A has a cooling pipe 2 connected to a refrigerator (not shown) and a rinsing Shiary pipe 3 provided with a through hole 4 through which rinsing water can be spouted. The Shiary pipe 3 for flushing has through holes 4 arranged so that the flushing water is ejected toward the cooling pipe 2 and its vicinity, and the cooled flushing water is connected to the condensate sent from the conduit 13. For example, 0.5mm~ to increase the contact interface.
It is effective to provide a large number of through holes 4 having a diameter of 2.0 mm, preferably 0.7 mm to 1.0 mm. Through hole 4
The rinsing water spouted from the cooling pipe 2 and the cooling atmosphere in its vicinity reaches a temperature of 0°C to 15°C, preferably 5°C to
Cooled down to 10℃. If the condensate sent from the conduit 13 comes into contact with washing water at a temperature of 17°C to 20°C or above, alcohol cannot be completely extracted from the condensate, and the cleaning agent for vapor phase drying will be mixed with the washing water containing alcohol. It will overflow.

The amount of condensed liquid sent from the conduit 13 is generally 5 to 10 per minute, and the amount of washing water spouted from the Shiry pipe 2 at this time is suitably 1 to 5 per minute. The condensate sent from the conduit 13 comes into contact with the washing water cooled by the cooling pipe 2 and the cooling atmosphere in its vicinity, and forms an aqueous phase 5 containing an alcohol detergent and a detergent phase 6 for vapor phase drying. Since the separated cleaning agent for vapor phase drying has a higher specific gravity than water, it can accumulate in the lower part of tank A.

The bottom plate 16 of the water washing separation device 1 is preferably provided with a taper so that the washing and separation cleaning agent phase 6 for vapor phase drying moves quickly to the B tank. At this time, it is preferable that the partition plate 6 is arranged with a gap between it and the bottom plate 16, or that an appropriate through hole is provided. Aqueous phase 5 containing alcohol detergent
can be discharged from the overflow port 17 to keep the water level in the tank constant.

In tank B, a cooling pipe 7 connected to a refrigerator (not shown) is disposed in the cleaning phase 9 for vapor phase drying that flows down through the gap between the partition plate 15 and the bottom plate 16 and accumulates. It's starting to look like that. The cooling pipe 7 cools the cleaning agent phase 9 for vapor phase drying to 0°C to 15°, preferably 5°C.
Can be cooled to ~10°C. The remaining wash water is extracted from the cooled vapor drying cleaning agent phase 9 to form an aqueous phase 8.

The cleaning agent for vapor phase drying from which the washing water and the alcoholic cleaning agent have been removed is sent through the conduit 14 to the vapor phase drying device 10, where it is used again for vapor phase drying.
It is more effective to provide the conduit 14 with a valve 11 and a filter 12.

In addition to partitioning the A tank and the B tank, the partition plate 15 can prevent the influence of the turbulent flow generated by the flushing water ejected from the flushing shear pipe 3 disposed in the A tank from affecting the B tank. .

According to the present invention, firstly, the amount of washing water can be reduced, and secondly, the amount of vapor phase drying detergent that flows out during washing can be minimized. Thirdly, it is possible to effectively prevent an increase in the boiling point of the vapor phase drying detergent caused by mixing of washing water.

Hereinafter, the present invention will be explained according to examples.

Example 1 A cleaning agent for vapor phase drying was used in circulation using the water washing and separation apparatus shown in FIG. At this time, Freon 22 (manufactured by DuPont, USA) was used as a cleaning agent for vapor phase drying.

The object to be cleaned was a lens that had been cleaned with alcohol in the previous step, and was subjected to vapor phase drying using the Freon 22 mentioned above.The washing separation device pumped washing water at a temperature of about 20°C at a rate of 2 minutes per minute to a Shiry pipe for washing. A refrigerator is connected to each of the cooling pipes 2 and 7, and the cooling pipes 2 and 7 are connected so that the washing water cooled to a water temperature of 5° to 10° C. comes into contact with the condensate sent from the conduit 13. The cooling pipe 7 was set so that the temperature of the cleaning agent phase 9 for vapor phase drying was 5°C to 10°C.

In this way, the cleaning agent for vapor phase drying was used repeatedly, and vapor phase drying was repeatedly carried out. At this time, when the content of Freon 22 in the washing water overflowing from the washing separation device 1 was measured, the presence of Freon 22 was not confirmed at all.

Therefore, no replenishment of Freon 22 was required in this example. Furthermore, it has been found that even if the Freon 22 regenerated by the water washing separation device 1 is repeatedly applied to vapor phase drying, no problem occurs in vapor phase drying.

Example 2 The water washing separation device used in Example 1 was used. However, the cooling pipe 7 placed in tank B was not connected to the refrigerator. Vapor phase drying and water washing separation were carried out in the same manner as in Example 1 using this water washing separation apparatus.

As a result, the presence of Freon 22 was not confirmed at all in the overflow washing water. In addition, although the boiling point of the regenerated Freon 22 had increased, Example 1 except that the temperature of the Freon 22 vaporization device in the vapor phase drying device was slightly increased.
It was possible to do the same thing.

Comparative Example 1 The water washing separation device used in Example 1 was used. However, each cooling pipe 2 placed in tank A and tank B
and 7 were not connected to a refrigerator. Vapor phase drying and water washing separation were carried out in the same manner as in Example 1 using this water washing separation apparatus.

As a result, the overflow flush water has 15
The presence of % Freon 22 by weight was confirmed. Therefore, in this comparative example, it was necessary to successively replenish the decreased amount of Freon 22 during repeated use. Further, in the vapor phase drying apparatus, a moisture film was formed on the object to be cleaned after the Freon 22 was vaporized, which was not preferable.

Example 3 Vapor phase drying and water washing separation were repeated in the same manner as in Example 1, except that Freon 12 (manufactured by DuPont, USA) was used in place of Freon 22 used in Example 1, but the results were completely different from those in Example 1. Similar results were obtained.

As is clear from Examples 1 to 3, by using the method of the present invention, there is no need to replenish the cleaning agent for vapor phase drying, and preferably, a decrease in thermal efficiency in vapor phase drying is effectively prevented. can do.

The present invention has the features described in the claims, and its embodiments are as follows.

(1) The cleaning agent for vapor phase drying is chlorodifluoromethane, dichlorodifluoromethane, 1,1,2-
The water washing separation method according to claim 1 or 2, wherein at least one compound is selected from the group of compounds consisting of trichloro-1,2,2-trifluoroethane and trichrene.

(2) The water washing separation method according to claim 1 or 2, wherein the cleaning agent in the previous step is alcohol.

(3) The water washing and separation method according to claim 1 or 2, wherein the object to be cleaned is a lens or a glass substrate of a liquid crystal display device.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of the water washing separation device of the present invention. DESCRIPTION OF SYMBOLS 1...Water washing separation device, 2...Cooling pipe, 3...Shary pipe for water washing, 4...Through hole, 5, 8...Water phase, 6,9...Cleaning agent phase for vapor phase drying, 7...Cooling pipe, 10...Air phase dryer, 11... valve, 12... filter, 13...
Conduit, 14... Conduit, 15... Partition plate, 16... Bottom plate,
17...Overflow port.

Claims (1)

[Scope of Claims] 1. A cleaning agent for vapor phase drying containing the cleaning agent from the previous step, which is produced by vapor phase drying an object to be cleaned to which the cleaning agent from the previous step has adhered, is heated to a water temperature of 0°C to 15°C. A washing separation method characterized in that the water washing separation method is characterized in that the cleaning agent phase for vapor phase drying and the aqueous phase containing the cleaning agent from the previous step are separated by contacting the washing water. 2. Bringing washing water at a water temperature of 0°C to 15°C into contact with the cleaning agent for vapor phase drying containing the cleaning agent from the previous step, which is produced by vapor phase drying the object to be cleaned to which the cleaning agent from the previous step has adhered. It is characterized by separating into a cleaning agent phase for vapor phase drying and an aqueous phase containing the cleaning agent from the previous step, and then controlling the liquid temperature of the cleaning agent phase for vapor phase drying to 0°C to 15°C. Water washing separation method.