JPS6153815B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for depositing a heat-absorbing material film on a color cathode-ray tube, and more particularly to an apparatus for forming a heat-absorbing material film on a light-reflecting metal film of a color cathode-ray tube.

FIG. 1 is a sectional view of essential parts showing an example of a face plate of a color cathode ray tube. In the figure, a color cathode ray tube includes a phosphor film 2 for projecting an image on a face plate 1, a film layer 3 for smoothing the surface of the phosphor film 2, and a film layer 3 for smoothing the surface of the phosphor film 2.
The temperature of the shadow mask increases due to the light-reflecting metal film 4 deposited thereon and the electron beam impinging on the light-reflecting metal film 4. In other words, misland ink is caused by thermal expansion and deformation of the shadow mask due to this temperature rise. A heat-absorbing material film 5 is formed to reduce the heat absorption, and a baking treatment is performed to remove the binder of the fluorescent film 2 and the film layer 3 by ashing.

Conventionally, the vapor deposition of the light-reflective metal film 4 is carried out by attaching the face plate 1 on which the fluorescent film 2 and film layer 3 are formed in a vacuum chamber 6 in an airtight manner, as shown in the cross-sectional view of FIG. After reaching a predetermined degree of vacuum using an evacuation device such as a vacuum pump, the temperature of the evaporation source 7 equipped with the evaporation material is increased to melt and evaporate the evaporation material. Further, the heat absorbing material film 5 was also formed in the same manner.

However, in the vapor deposition apparatus having the above configuration, since the face plate 1 forms a part of the vapor deposition apparatus, each surface of the inside of the apparatus is exposed to the atmosphere and adsorbs a large amount of air, thereby achieving the desired degree of vacuum. It required a long period of evacuation to reach this point. For this reason, in order to process a large amount of face plates 1, it was necessary to prepare a large number of similar devices. In this case, differences in characteristics will inevitably appear between each device, resulting in large variations in the thickness and distribution of the deposited film, light reflection efficiency, heat absorption efficiency, etc., and a large number of attached devices. This has the disadvantage that the number of malfunctions and repairs increases due to the installation of the same equipment, and that maintenance requires a lot of time.

In an attempt to improve this drawback, the light-reflecting metal film 4 and the heat-absorbing material film 5 are continuously deposited by arranging functionally divided vacuum chambers in series. A device that does this has been devised and put into practical use.

FIG. 3 is a block diagram showing an example of a currently proposed vapor deposition apparatus, and since the same symbols as those in FIG. 2 represent the same elements, a description thereof will be omitted. In the same figure, vacuum chambers including an entrance chamber 6a, a light-reflective metal film deposition chamber 6b, a heat-absorbing material film deposition chamber 6c, and an exit chamber 6d are arranged in series, and a vacuum is applied to the entrance and exit of each chamber. With valves 8a to 8b interposed, each chamber 6a
to 6d are connected to exhaust equipment (not shown) depending on the desired degree of vacuum. The two vapor deposition chambers 6b and 6c also include an evaporation source 7, a vapor deposition substance 9 such as aluminum, and an automatic vapor deposition substance inserter 1.
0 are provided at predetermined positions, and furthermore, a shielding plate 11 is provided above the vapor deposition plate 11 to prevent vapor deposition in unnecessary locations. Here, the evaporation source 7
By using a board-shaped resistance heating body containing boron nitride as a main component and also equipped with an automatic evaporation material inserter 10, the tungsten wire coil used as an evaporation source has a short lifespan and a one-time evaporation. This eliminates the disadvantage of replenishing the deposition material, and allows continuous deposition over a long period of time.

In the vapor deposition apparatus configured as described above, first, the face plate 1 on which the fluorescent film 2 and the film layer 3 have been formed is carried into the entrance chamber 6a, and at the same time, the treated face plate 1 is carried out from the outlet chamber 6d, and then The chamber 6a and the outlet chamber 6d are brought to a vacuum level of 10 ^-1 to ^{10 -2} Torr. In this case, the vacuum valve 8a at the inlet/outlet section is closed. Next, open the vacuum valve 8b of each chamber,
The face plate 1 in the entrance chamber 6a is always transferred to the vapor deposition chamber 6b in a vacuum state, and the face plate 1 on which the aluminum film, which is the light-reflecting metal film 4, is vapor-deposited is transferred from the vapor deposition chamber 6b, which is always in a vacuum state, to the vapor deposition chamber 6c. The face plate 1 on which the blackened aluminum film, which is the heat-absorbing material film 5, is vapor-deposited is sequentially conveyed from the vapor deposition chamber 6c to the outlet chamber 6d, respectively, to the next vacuum chamber. After the transfer is completed, the vacuum valve 8b is closed, the deposition chamber 6b is set at 10 ^-4 Torr, and the deposition chamber 6c is set at 10 ^-1 Torr.
After creating a vacuum of 10 ^-2 Torr, each deposition chamber 6
In b and 6c, an aluminum wire evaporation material 9 is inserted from the evaporation material automatic inserter 10 into the evaporation source 7 heated by passing an electric current, and a light reflective metal film 4 of aluminum is evaporated in the evaporation chamber 6b. Vapor deposition chamber 6
In c, a heat-absorbing substance film 5 of blackened aluminum is deposited on the surface of the light-reflective metal film 4. Also,
During this vapor deposition, the inlet chamber 6a and the outlet chamber 6
d to atmospheric pressure, open the vacuum valve 8a,
The face plate 1 is carried in and carried out, the vacuum valve 8a is closed, and the inlet chamber 6a and outlet chamber 6d are evacuated. By repeating the above steps, one face plate 1 is carried into the entrance chamber 6a and held in a temporarily evacuated state, and a light reflective metal film 4 is deposited in the next deposition chamber 6b. The heat-absorbing material film 5 is formed by vapor deposition in the next vapor deposition chamber 6c, and is further taken out to the outside through the exit chamber 6d. This operation is repeated one after another, and ends up being performed continuously. Therefore, in such a continuous vapor deposition film production apparatus, the face plate 1 is not used as a part of the vacuum container as shown in FIG. It is fixed at a fixed position in the vapor deposition chambers 6b and 6c, and aluminum is vapor-deposited at a predetermined degree of vacuum while the shielding plate 11 prevents vapor deposition in unnecessary places. When the light-reflecting metal film 4 was formed by vapor-depositing aluminum, the shielding plate 11 had a sufficient effect because the aluminum evaporated at a vacuum level of 10 ^-4 Torr had good straightness.

However, in the continuous vapor deposition film production apparatus having the above configuration, when forming the heat absorbing material film 5 by vapor depositing blackened aluminum, the degree of vacuum is
In the range of 10 ^-1 to 10 ^-2 Torr, the straightness of the evaporated aluminum deteriorates, and the aluminum becomes like dust and floats in the deposition chamber 6c, eventually covering the entire inner wall of the deposition chamber 6c, the conveying device, and the face. It also ends up adhering to the outer peripheral surface of the plate 1.
For this reason, after the face plate 1 was vapor-deposited, the blackened aluminum adhering to the outer circumferential surface of the face plate 1 was wiped off one by one for all the processed plates. In addition, the blackened aluminum layer adhering to the inner wall of the vapor deposition chamber 6c and the transport device adsorbs a large amount of air when the pressure inside the vapor deposition chamber 6c is set to atmospheric pressure, such as when replacing the aluminum vapor deposition material 9 or the evaporation source 7. It turns out.
As a result, by repeating the vapor deposition of the face plate 1, the gas adsorption property increases further, and the next time when the vacuum is evacuated to a predetermined degree, the evacuation speed decreases rapidly, so that the black deposited at that point It was necessary to remove the aluminum layer. For this reason, an extremely large amount of time was spent cleaning it. Therefore, such a device has the disadvantage that the productivity of the face plate assembly is significantly reduced.

Therefore, an object of the present invention was to solve the above-mentioned drawbacks, and to provide a heat-absorbing material film for a color cathode ray tube in which the heat-absorbing material film is not deposited or attached to any place other than where necessary. The purpose of the present invention is to provide a vapor deposition apparatus.

In order to achieve this purpose, the heat absorbing material film deposition apparatus for color cathode ray tubes according to the present invention has the following features:
The interior of the deposition chamber is divided into a space in which a heat absorbing material film is deposited on the inner surface of the face plate and a space in which the heat absorbing material film is not deposited or attached. The apparatus for depositing a heat absorbing material film for a color cathode ray tube according to the present invention will be described in detail below with reference to the drawings.

FIG. 4 is a block diagram showing the main parts of an embodiment of the heat-absorbing material film deposition apparatus for a color cathode ray tube according to the present invention. The same symbols as in FIGS. 2 and 3 are the same elements, so the explanation thereof will be Omitted. Further, the vapor deposition chamber 6c and its vacuum valve 8b are not shown. In the same figure,
The face plate 1 is fixed at a predetermined position on a conveyance table 13 by a holding table 12 that is in close contact with the sealing surface. Then, the conveyor table 13 is conveyed to a fixed position in the vapor deposition chambers 6b, 6c (not shown) by a moving mechanism that does not interfere with the opening/closing functions of the vacuum valves 8a, 8b (not shown), and the face plate 1
are fixed at predetermined positions within the vapor deposition chambers 6b and 6c. Further, a box-shaped evaporation box 14 with a shielding plate 14a integrally provided opposite thereto is disposed on the lower side of the conveyance table 13, and the evaporation source 7 and the evaporation material are placed inside the evaporation box 14. An automatic vapor deposition substance inserter 10 for supplying vapor deposition material 9 is housed therein, and this vapor deposition box 14 is housed in the lower side of the vapor deposition chamber 6c (not shown). In addition, in the gap between the shielding plate 14a and the conveyance table 13, in order to reduce the molecular flow conductance in this gap, in other words, to prevent air circulation, there is a groove extending in the vapor deposition direction on the upper surface of the shielding plate 14a. Three sets of partitions 15 are provided, and the distance between the lower surface of the conveyance table 13 and the tip of the partitions 15 is set to about 10 mm.
In addition, in this case, this shielding plate 14a, the partition part 15
is configured so as not to hinder the movement of the conveyance table 13.

According to the vapor deposition apparatus configured in this way, the face plate 1 has partitions 1 on its inner and outer sides.
5, the blackened aluminum to be evaporated is not attached to the outer surface of the face plate 1, the inner wall of the vapor deposition chamber 6c on the outer surface side (not shown), and the vacuum valve 8b, but is instead attached to the inner surface of the face plate 1, that is, the light-reflective metal. It will be deposited only on the entire surface of the membrane 4.

FIG. 5 is a block diagram showing a main part of another embodiment of the heat-absorbing material film deposition apparatus for a color cathode ray tube according to the present invention, and the same symbols as those in FIG. 4 are the same elements, so a description thereof will be omitted. This figure differs from FIG. 4 in that a partition 15a is provided circumscribing the vapor deposition window of the shielding plate 14a, and a cylindrical concentrator 16 is provided passing through the partition 15a. In this case, the concentrator 16 is configured to be freely movable in the vertical direction, and is provided with a mechanism that lowers to the lower part of the vapor deposition chamber except during vapor deposition so as not to interfere with the movement of the conveyor table 13.

According to the vapor deposition apparatus configured in this way, the partitions 15 and 15a prevent the blackened aluminum from going around toward the outer surface of the face plate 1, and the cylindrical concentrator 16 prevents the vapor deposition of the blackened aluminum. The deposition can be carried out mainly on the central part of the face plate 1, and the peripheral part and the skirt part of the face plate 1 are hardly deposited.

FIG. 6 is a block diagram showing still another embodiment of the heat-absorbing material film deposition apparatus for a color cathode ray tube according to the present invention, and the same symbols as those in the previous figure represent the same elements, so a description thereof will be omitted. In the same figure, Fig. 4,
The difference from FIG. 5 is that the entire shielding plate 14a is placed close to the conveyance table 13 within a range that does not hinder the movement of the conveyance table 13.

According to the vapor deposition apparatus configured in this way, if the gap between the lower surface of the conveyance table 13 and the shielding plate 14a is narrowed, and the distance between the inner surface and the outer surface of the face plate 1 is long, evaporation, diffusion, and floating will occur. The amount of blackened aluminum that passes through the gap and reaches the outer surface of the face plate 1 is so small as to pose no problem, and the same effect as described above can be obtained.

FIG. 7 is a block diagram showing still another embodiment of the heat-absorbing material film deposition apparatus for a color cathode ray tube according to the present invention, and since the same symbols as those in the previous figure represent the same elements, a description thereof will be omitted. In this figure, the difference from FIG. 6 is that the carrier 13 is in contact with or faces with a slight gap from the inner wall of the vapor deposition chamber 6c or the carrier moving mechanism 17, such as a rail or guide rail, provided on the inner wall of the vapor deposition chamber 6c. It is composed of

According to the vapor deposition apparatus configured in this way, the vapor deposition chamber 6c is separated by the conveyor table 13 into a space including the evaporation source 7 and the inner surface of the face plate 1, and a space on the outer surface side of the face plate. And blackened aluminum no longer adheres to the upper inner wall of the vapor deposition chamber 6c. however,
In the above-mentioned apparatus, the conveyance table 13 has a disadvantage in that blackened aluminum adheres to this part because a part of the conveyance table 13 is exposed in the vapor deposition atmosphere. Since it is configured to be carried out of the vapor deposition apparatus, cleaning can be easily performed. Further, by preparing a large number of conveyance tables 13 and replacing dirty conveyance tables 13 one by one, the process will not be interrupted. Further, in order to prevent blackened aluminum from adhering to the inner wall of the lower part of the vapor deposition chamber 6c, the shield plate 14a is an extended box, and forms a vapor deposition box 14 that surrounds the evaporation source 7 and the automatic vapor deposition substance inserter 10. However, the shielding plate 14a, which has been soiled after repeated evaporation, is exposed to the evaporation substance 9 and the evaporation source 7.
When the vapor deposition chamber 6c is brought to atmospheric pressure, replace it with a cleaned one. This replacement prevents deterioration of the degree of vacuum due to adsorption of a large amount of blackened aluminum deposited in layers to the atmosphere, and also saves the effort of cleaning the inner wall of the vapor deposition chamber 6c.

As described above, in each of the above embodiments, the shape of the shielding plate 14a or the transfer table 13 is changed in order to separate the space between the outer surface side and the inner surface side of the face plate 1, and the shape of the transfer table 13 and the shielding plate 14a or the vapor deposition chamber
c The gap is narrowed in order to eliminate the gap with the inner wall or to prevent the passage of blackened aluminum.The narrower the gap is, the better for the shielding function. It is desirable for the equipment to have a wide range of dimensional errors and installation errors. Therefore, in order to obtain an appropriate gap, we repeated the experiment many times, and as a result, as shown in Fig. 4,
In the example shown in FIG. 5, when blackened aluminum is vapor-deposited at a vacuum level of 10 ^-3 Torr, the effect starts to appear when the distance is 50 mm, and when the distance is 20 mm, there is almost no adhesion to the outer surface of the face plate 1. ,moreover
At 10mm, the deposition chamber 6 remains even after several hundred depositions.
c The inner wall was slightly stained. Also, the 6th
In the embodiment shown in FIGS. 7 and 7, this interval is 30 mm, so that there is almost no adhesion to the outer surface of the face plate 1.
At 20mm, the walls of the deposition chamber, which had become slightly dirty after hundreds of depositions, were no longer dirty by making the film even narrower to 10mm.

As explained above, according to the heat-absorbing material film deposition apparatus for color cathode ray tubes according to the present invention, it is possible to prevent blackened aluminum from being deposited in areas other than the required locations, and to prevent blackened aluminum from being deposited on the outer surface of the face plate and the inner wall of the deposition chamber. The effort required to remove excess blackened aluminum caused by adhesion and the reduction in the degree of vacuum in the vapor deposition chamber are eliminated, resulting in an extremely excellent effect that can greatly improve the productivity of face plates.

[Brief explanation of the drawing]

Fig. 1 is a cross-sectional view of a main part showing an example of a face plate of a color cathode ray tube, and Fig. 2 is a cross-sectional view of a main part showing an example of a vapor deposition apparatus for a light-reflecting metal film and a heat-absorbing material film of a conventional color cathode-ray tube. Fig. 3 is a block diagram of main parts showing an example of a currently proposed vapor deposition apparatus, and Fig. 4 is a block diagram of main parts showing an example of a heat absorbing material film vapor deposition apparatus for a color cathode ray tube according to the present invention. , FIG. 5 is a main part configuration diagram showing another embodiment of the heat-absorbing material film deposition apparatus for a color cathode-ray tube according to the present invention, and FIG. FIG. 7 is a diagram illustrating a main part of another embodiment of the apparatus for depositing a heat absorbing material film for a color cathode ray tube according to the present invention; FIG. DESCRIPTION OF SYMBOLS 1... Face plate, 2... Fluorescent film, 3... Film layer, 4... Light reflective metal film, 5... Heat absorbing material film, 6... Vacuum chamber, 6a... Entrance chamber, 6b... Light reflective metal film deposition Chamber, 6c... Heat-absorbing substance film deposition chamber, 6
d...Exit chamber, 7...Evaporation source, 8a, 8b...Vacuum valve,
9... Vapor deposition substance, 10... Vapor deposition substance automatic inserter, 11
...shielding plate, 12... holding table, 13... transport table, 14...
Vapor deposition box, 14a...shielding plate, 15, 15a...partition section, 16...concentrator, 17...transfer table moving mechanism.

Claims (1)

[Claims] 1 In a heat-absorbing material film deposition apparatus for a color cathode ray tube in which a phosphor layer, a film layer, and a light-reflecting metal film are formed on the inner surface of a face plate and then a heat-absorbing material film is formed on the surface thereof, a vacuum evaporation chamber is used. and disposing the face plate in the vapor deposition chamber and transporting it to a predetermined position in the vapor deposition chamber;
A heat-absorbing material film deposition chamber is provided, which includes a transfer table to be fixed, and a vapor deposition box disposed in the vapor deposition chamber and containing a vapor deposition material and a vapor deposition source. A collar characterized in that the transfer table, the wall of the vapor deposition chamber, and the vapor deposition box are mutually arranged so as to be separated into a space in which a film is deposited and a space in which the heat-absorbing material film is deposited and reduced in adhesion. Heat-absorbing material film deposition equipment for cathode ray tubes.