Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JPS6155035B2 - - Google Patents
[go: Go Back, main page]

JPS6155035B2 - - Google Patents

Info

Publication number
JPS6155035B2
JPS6155035B2 JP55150660A JP15066080A JPS6155035B2 JP S6155035 B2 JPS6155035 B2 JP S6155035B2 JP 55150660 A JP55150660 A JP 55150660A JP 15066080 A JP15066080 A JP 15066080A JP S6155035 B2 JPS6155035 B2 JP S6155035B2
Authority
JP
Japan
Prior art keywords
column
oxygen
air
argon
amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55150660A
Other languages
Japanese (ja)
Other versions
JPS5774574A (en
Inventor
Michimasa Okabe
Yasuo Tasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15066080A priority Critical patent/JPS5774574A/en
Publication of JPS5774574A publication Critical patent/JPS5774574A/en
Publication of JPS6155035B2 publication Critical patent/JPS6155035B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation By Low-Temperature Treatments (AREA)

Description

【発明の詳細な説明】 本発明は、空気の液化深冷分離により酸素、窒
素と同時にアルゴンを採取する空気分離装置にお
ける製品酸素量の自動制御方法に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for automatically controlling the amount of oxygen product in an air separation device that extracts argon as well as oxygen and nitrogen through liquefaction and cryogenic separation of air.

従来、アルゴンを採取する空気分離装置の運転
は、一般のアルゴンを採取しない酸素、窒素採取
の空気分離装置に比べて運転操作がむずかしく、
長年の運転経験を有する専門の運転者を必要とし
た。しかしながら、近年これら専門の運転者の人
手不足と、空気分離装置の運転の省力化の要求か
ら、空気分離装置の製品発生量の自動化の要望が
各方面から強くでてきている。
Conventionally, the operation of air separation equipment that collects argon is more difficult than that of general air separation equipment that collects oxygen and nitrogen, which does not collect argon.
It required a professional driver with many years of driving experience. However, in recent years, due to the shortage of these specialized operators and the demand for labor-saving operation of air separation equipment, there has been a strong demand from various quarters for automation of the product output of air separation equipment.

アルゴンを採取しない一般の酸素、窒素採取の
空気分離装置での製品酸素発生量の自動化は、こ
れまでも精溜塔上塔の温度差を一定にする制御方
法、酸素純度を規定値にするように発生量を追従
させる計算機を導入したコンピユーターコントロ
ール等、いくつかの考案がなされ、その一部は実
用化されている。しかしながら、酸素、窒素と同
時にアルゴンを採取する空気分離装置では運転が
むずかしく、製品酸素発生量の最適制御方法がこ
れまでに実用化されていなかつた。
Automation of the amount of product oxygen generated in general oxygen and nitrogen extraction air separation equipment that does not collect argon has been done until now by using a control method that keeps the temperature difference between the upper columns of the rectification column constant and a method that maintains the oxygen purity at a specified value. Several ideas have been devised, including a computer control system that uses a computer to track the amount generated, and some of them have been put into practical use. However, air separation equipment that extracts argon at the same time as oxygen and nitrogen is difficult to operate, and an optimal control method for the amount of product oxygen generated has not been put into practical use.

アルゴンを採取する空気分離装置の運転上の問
題点は、粗アルゴン塔の運転を正常に行うことで
ある。粗アルゴン塔の運転は、主精溜塔との運転
と密接な関連があり、粗アルゴン塔の差圧、主精
溜塔の下塔から上塔へ吹込まれる液体空気の酸素
濃度、製品酸素等により大きく変化する。
A problem in the operation of air separation equipment for extracting argon is the normal operation of the crude argon column. The operation of the crude argon column is closely related to the operation with the main rectification column, including the differential pressure of the crude argon column, the oxygen concentration of the liquid air blown from the lower column to the upper column of the main rectification column, and the product oxygen. It varies greatly depending on etc.

更に、空気分離装置では空気中のアセチレンお
よび炭化水素の液体酸素中での濃縮防止のため
に、液体空気ラインにゲルを充填した吸着器が設
置されているが、この吸着器は一定周期毎に切替
えて使用され、この切替時の変動によつても粗ア
ルゴン塔の運転は大きく変動する。
Furthermore, in air separation equipment, an absorber filled with gel is installed in the liquid air line to prevent the concentration of acetylene and hydrocarbons in the air in liquid oxygen. The operation of the crude argon column fluctuates greatly due to changes in switching.

このように、アルゴンを採取する空気分離装置
には、粗アルゴン塔を安定させるためのいくつか
の変動要素があり、これらの要因を的確に、しか
も簡単に把握することが困難なため、これまでア
ルゴンを採取する空気分離装置での製品酸素発生
量の最適自動制御がなされていない。
In this way, air separation equipment that collects argon has several variable factors to stabilize the crude argon column, and it is difficult to accurately and easily understand these factors, so until now Optimal automatic control of the amount of product oxygen generated in the air separation equipment that collects argon is not performed.

本発明の目的は、これまで自動制御が困難とさ
れていたアルゴン採取空気分離装置での製品酸素
量の最適な計算機による自動制御を行うことにあ
る。
An object of the present invention is to perform automatic control using an optimal computer of the amount of product oxygen in an argon sampling air separation device, which has been difficult to control automatically until now.

本発明の要点は、粗アルゴン塔の運転を安定さ
せるために、主精溜塔上塔の液体空気吹込段と、
粗アルゴン塔へのフイード段との間に温度計をも
うけ、この段の飽和温度と、主凝縮器の液体酸素
溜めの酸素の飽和温度との温度差に、粗アルゴン
塔の安定運転のための限界値をもうけて、この限
界値の範囲内で酸素純度に応じた製品酸素または
原料空気量の計算制御を行うものである。
The main point of the present invention is that, in order to stabilize the operation of the crude argon column, a liquid air blowing stage of the upper column of the main rectification column;
A thermometer is installed between the feed stage to the crude argon column, and the temperature difference between the saturation temperature of this stage and the oxygen saturation temperature of the liquid oxygen reservoir of the main condenser is used to determine the temperature for stable operation of the crude argon column. A limit value is established, and the amount of product oxygen or raw material air is calculated and controlled according to the oxygen purity within the range of this limit value.

以下、本発明の実施例を図によつて詳細に説明
する。図において、原料空気は除塵後導管1、容
量調節弁2を通つて原料空気圧縮機3で約5Kg/
cm2Gに昇圧される。圧縮された空気は、導管4よ
り吸着装置5で空気中の水分および炭酸ガスを除
去された後、導管6より主熱交換器7に導かれ
る。主熱交換器7で戻りガスと熱交換して飽和温
度まで冷却された空気の大部分は、導管8より主
精溜塔9の下塔10に吹込まれ、下塔10で精溜
されて窒素と純度約40%O2の液体空気に分離さ
れる。主熱交換器7で冷却された空気の残りの一
部は、主熱交換器7の中間から引き抜かれ、導管
11より膨脹機12に導かれ、膨脹機12で圧力
約0.3Kg/cm2Gまで断熱膨脹することによつて外部
仕事をし、自身はほぼ飽和温度近くまで温度を下
げ、装置の全寒冷損失を補つている。膨脹機12
を出た空気は、導管13より主精溜塔9の上塔1
4中部に吹込まれて精溜分離される。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the figure, after dust removal, the raw material air passes through the conduit 1 and the capacity control valve 2, and is transferred to the raw material air compressor 3 at approximately 5 kg/kg.
The pressure is increased to cm 2 G. The compressed air is led from conduit 4 to main heat exchanger 7 through conduit 6 after moisture and carbon dioxide are removed from the air by adsorption device 5 . Most of the air, which has been cooled to the saturation temperature by exchanging heat with the return gas in the main heat exchanger 7, is blown into the lower column 10 of the main rectification column 9 through the conduit 8, where it is rectified into nitrogen. and is separated into liquid air with a purity of approximately 40% O2 . The remaining part of the air cooled by the main heat exchanger 7 is extracted from the middle of the main heat exchanger 7 and guided to the expander 12 through the conduit 11, where the pressure is about 0.3 Kg/cm 2 G. It performs external work by adiabatically expanding to a maximum temperature, lowering its temperature to almost the saturation temperature and compensating for the total cooling loss of the device. Expansion machine 12
The air leaving the main rectification column 9 is transferred to the upper column 1 from the conduit 13.
4 It is blown into the middle part and subjected to rectification and separation.

一方、下塔10で精溜分離された窒素は、下塔
10の上部から液体となつて導管15、膨脹弁1
6、導管17を通つて、圧力約0.2Kg/cm2Gまで減
圧されて主精溜塔9の上塔14の上部に還流液と
して供給される。残りの下塔10の下部に溜めら
れた純度約40%O2の液体空気は、導管18より
過冷却器19を通つて上塔14上部からの窒素ガ
スによつて過冷却され、導管20より2方向に分
岐される。その一つは導管21より膨脹弁22、
導管23を通つて上塔14の中部に還流液として
供給され、他の一つは、導管24より膨脹弁25
で圧力約0.3Kg/cm2Gまで減圧されて飽和温度まで
温度低下し、粗アルゴン塔27のコンデンサーに
導かれる。ここで液体空気は、粗アルゴン塔27
で精溜分離された純度約95%の粗アルゴンガスと
熱交換し、粗アルゴンを液化させて還流液を作る
一方、自身はガス状となり導管28より上塔14
の中部に吹込まれて精溜分離される。
On the other hand, the nitrogen that has been rectified and separated in the lower column 10 becomes a liquid from the upper part of the lower column 10 and passes through the conduit 15 and the expansion valve 1.
6. Through the conduit 17, the pressure is reduced to about 0.2 Kg/cm 2 G, and the resultant is supplied to the upper part of the upper column 14 of the main rectification column 9 as a reflux liquid. The remaining liquid air with a purity of about 40% O 2 stored in the lower part of the lower column 10 is supercooled by nitrogen gas from the upper part of the upper column 14 through a conduit 18 and a supercooler 19, and is then passed through a conduit 20 through a supercooler 19. Branched in two directions. One of them is an expansion valve 22 from a conduit 21,
The reflux liquid is supplied to the middle part of the upper column 14 through the conduit 23, and the other liquid is supplied from the conduit 24 to the expansion valve 25.
The pressure is reduced to approximately 0.3 Kg/cm 2 G, the temperature is lowered to the saturation temperature, and the crude argon is introduced into the condenser of the crude argon column 27. Here, the liquid air is in the crude argon column 27
It exchanges heat with the crude argon gas with a purity of about 95% that has been rectified and separated in
It is blown into the middle part of the tank and subjected to rectification and separation.

主精溜塔9の上塔14に吹込まれた空気、液体
窒素、液体空気等は、精溜塔分離によつて上塔1
4の上部に窒素、下部に酸素が分離される。
Air, liquid nitrogen, liquid air, etc. blown into the upper column 14 of the main rectification column 9 are separated into the upper column 14 of the main rectification column 9.
Nitrogen is separated in the upper part of 4, and oxygen is separated in the lower part.

窒素は、上塔14の上部から直接ガス状とし
て、導管29より過冷却器19を通つて導管30
より主熱交換器7に導かれ、空気と熱交換するこ
とによつてほぼ常温まで温度回復して装置外へ取
出される。
Nitrogen is directly supplied from the upper part of the upper column 14 in a gaseous state through a conduit 29 through a subcooler 19 to a conduit 30.
It is guided to the main heat exchanger 7, and by exchanging heat with air, the temperature is recovered to approximately room temperature, and then taken out of the apparatus.

上塔14で精溜分離された酸素は、下部の主凝
縮器32に液状として溜められ、下塔10の窒素
ガスで再蒸発されたガス状酸素の一部を、導管3
3より抜出して主熱交換器7に導き、空気と熱交
換することによつて常温まで温度回復させて、導
管34から流量調節弁35を通り、導管36より
使用端に供給される。
The oxygen that has been rectified and separated in the upper column 14 is stored as a liquid in the lower main condenser 32, and a part of the gaseous oxygen that has been reevaporated with nitrogen gas in the lower column 10 is transferred to the conduit 3.
3 and guided to the main heat exchanger 7, where the temperature is recovered to normal temperature by exchanging heat with air, and then passed through a flow control valve 35 from a conduit 34 and supplied to the end of use from a conduit 36.

アルゴンは、主精溜塔9の上塔14下部のアル
ゴンリツチなフイードガス抜口(以下フイード段
と呼ぶ)から導管37よりガス状で粗アルゴン塔
27の下部に導かれ、粗アルゴン塔27で純度約
95%の粗アルゴンに精溜分離し、上部よりガス状
または液状として導管38より取出される。
Argon is led in gaseous form to the lower part of the crude argon column 27 through a conduit 37 from an argon-rich feed gas outlet (hereinafter referred to as feed stage) at the bottom of the upper column 14 of the main rectification column 9, and is purified in the crude argon column 27. about
It is rectified and separated into 95% crude argon, and taken out from the upper part as a gas or liquid through a conduit 38.

一般に、アルゴンを採取しない空気分離装置で
は、主凝縮器32より取出される製品酸素出口導
管33に取付けた酸素純度計39より酸素純度を
電子計算機40にインプツトし、純度が規定値に
なるように製品酸素量の流量調節計41により調
節弁35を介し制御する方法、または、空気の流
量調節計42により容量調節弁2を介し制御する
方法などが実用化されつつあるが、アルゴンを採
取する空気分離装置では、粗アルゴン塔27の運
転状態によつては酸素純度の制御だけではうまく
行かず、粗アルゴン塔27の運転を安定させるこ
とが絶対条件となる。
Generally, in an air separation device that does not collect argon, the oxygen purity is input into the computer 40 from the oxygen purity meter 39 attached to the product oxygen outlet conduit 33 taken out from the main condenser 32, and the purity is adjusted to the specified value. Methods such as controlling the amount of product oxygen using the flow rate controller 41 via the regulating valve 35, or controlling the amount of product oxygen via the volume regulating valve 2 using the air flow regulator 42 are being put into practical use. In the separation device, depending on the operating state of the crude argon column 27, controlling the oxygen purity alone may not be successful, and stabilizing the operation of the crude argon column 27 is an absolute requirement.

粗アルゴン塔27を安定させるためには、主精
溜塔9の上塔14の粗アルゴン塔27へのフイー
ド段における窒素ガスを規定値以上の濃度にしな
いことが必要である。
In order to stabilize the crude argon column 27, it is necessary to prevent the concentration of nitrogen gas in the feed stage of the upper column 14 of the main rectification column 9 to the crude argon column 27 from exceeding a specified value.

この解決策として、本発明では上塔14の液体
空気吹込段とフイード段の間に温度検出端43
と、主凝縮器32の酸素の飽和温度を測定する温
度検出端44を設け、更に温度検出端43および
44の温度差を測定する温度差計45を設置し、
温度差がある限界値を越えると粗アルゴン塔27
へのフイードガス中に窒素が多量に入り、粗アル
ゴン塔27の運転が不安定になるため、定められ
た温度差の限界値内で、酸素純度計39の濃度に
応じて製品酸素量、または原料空気量を調節する
ようにしたもので、運転操作過程において、酸素
純度が規定値よりはるかに良く、酸素純度計39
の指示が酸素量の増量ができると出ていても、も
し温度差計45の値が限界値を越えているような
場合は、温度差の制御を優先させて空気量の増量
または製品酸素量の減量を行い、粗アルゴン塔2
7の運転を安定させるようにしたものである。
As a solution to this problem, the present invention provides a temperature sensing end 43 between the liquid air blowing stage and the feed stage of the upper column 14.
A temperature detection end 44 is installed to measure the saturation temperature of oxygen in the main condenser 32, and a temperature difference meter 45 is installed to measure the temperature difference between the temperature detection ends 43 and 44.
When the temperature difference exceeds a certain limit value, the crude argon column 27
Since a large amount of nitrogen enters the feed gas to the feed gas, making the operation of the crude argon column 27 unstable, the amount of oxygen in the product or the raw material will be reduced depending on the concentration of the oxygen purity meter 39 within the specified temperature difference limit. It is designed to adjust the amount of air, and during the operation process, the oxygen purity is much better than the specified value, and the oxygen purity meter 39
Even if the instruction indicates that the amount of oxygen can be increased, if the value of the temperature difference meter 45 exceeds the limit value, priority is given to controlling the temperature difference and the amount of air or product oxygen is increased. The crude argon column 2
This is to stabilize the operation of the 7.

温度差計45のみで製品酸素量を制御すること
も従来行なわれており、アルゴンを採取しない空
気分離装置で実用化されているが、これらは製品
酸素の純度を一定にするための方策であり、粗ア
ルゴン塔27の安定運転およびアルゴン採取時の
最適酸素純度制御には適していない。
Controlling the amount of product oxygen using only the temperature difference meter 45 has been conventionally done, and has been put into practical use in air separation equipment that does not collect argon, but these are measures to keep the purity of product oxygen constant. , is not suitable for stable operation of the crude argon column 27 and optimum oxygen purity control during argon extraction.

アルゴン採取運転では、粗アルゴン塔27の負
荷の状態、吸着器切流時の還流液量の一時的変動
等によつて、酸素の純度が規定値を上回つている
場合でも、粗アルゴン塔27へのフイード段が窒
素リツチになることがあり、逆にフイード段に窒
素がない場合でも、酸素純度が規定値を下回ると
いうことがあり得る。このような時、本発明方法
では、粗アルゴン塔27へのフイード段に窒素を
入れないように温度差計45で限界値をもうけて
いるので、粗アルゴン塔27の運転を失敗するこ
とがなく、製品酸素量の最適制御が可能である。
In the argon sampling operation, even if the purity of oxygen exceeds the specified value due to the load condition of the crude argon column 27, temporary fluctuations in the amount of reflux liquid when the adsorber is cut off, etc., the crude argon column 27 The feed stage to the reactor may become rich in nitrogen, and conversely, even if the feed stage is devoid of nitrogen, the oxygen purity may fall below the specified value. In such a case, in the method of the present invention, a limit value is set with the temperature difference gauge 45 to prevent nitrogen from entering the feed stage to the crude argon column 27, so that the operation of the crude argon column 27 will not fail. , it is possible to optimally control the amount of oxygen in the product.

本発明は以上述べたようにしたものであるから
従来、運転操作がむずかしく、長年の経験を必要
としたアルゴンを採取する空気分離装置における
製品酸素発生量の最適自動制御が可能となり、省
力化、経験者の人手不足が解消され、運転ミスに
よる損失も解消することができる。
Since the present invention is as described above, it is possible to optimally automatically control the amount of product oxygen generated in an air separation device for extracting argon, which has conventionally been difficult to operate and required many years of experience, resulting in labor savings and This eliminates the shortage of experienced personnel and eliminates losses caused by driving errors.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明によるアルゴンを採取する空気分
離装置の自動制御方法の一例を示す系統図であ
る。 2……容量調節弁、3……空気圧縮機、5……
吸着装置、7……主熱交換器、9……主精溜塔、
10……下塔、12……膨脹機、14……上塔、
16,22,25……膨脹弁、19……過冷却
器、27……粗アルゴン塔、32……主凝縮器、
35……流量調節弁、39……酸素純度計、40
……電子計算機、41,42……流量調節計、4
3,44……温度検出端、45……温度差計。
The drawing is a system diagram showing an example of an automatic control method for an air separation device for collecting argon according to the present invention. 2... Capacity control valve, 3... Air compressor, 5...
Adsorption device, 7... Main heat exchanger, 9... Main rectification column,
10...lower tower, 12...expansion machine, 14...upper tower,
16, 22, 25... Expansion valve, 19... Supercooler, 27... Crude argon column, 32... Main condenser,
35...Flow control valve, 39...Oxygen purity meter, 40
...Electronic computer, 41, 42...Flow rate controller, 4
3, 44... Temperature detection end, 45... Temperature difference meter.

Claims (1)

【特許請求の範囲】[Claims] 1 アルゴンを採取する空気分離装置において、
主精溜塔上塔の液体空気吹込段と粗アルゴン塔へ
のフイード段の間の飽和温度と、主精溜塔主凝縮
器の酸素の飽和温度との温度差を検出し、この温
度差に粗アルゴン塔を安定運転させるための限界
値を設定し、製品酸素量または原料空気量を調節
して前記温度差を常時限界値内に制御すると共
に、前記温度差の限界値内で酸素純度計の酸素濃
度に応じて製品酸素量または原料空気量を制御す
ることを特徴とするアルゴンを採取する空気分離
装置の制御方法。
1 In an air separation device that collects argon,
The temperature difference between the saturation temperature between the liquid air blowing stage of the upper column of the main rectification column and the feed stage to the crude argon column and the saturation temperature of oxygen in the main condenser of the main rectification column is detected. A limit value for stable operation of the crude argon column is set, and the amount of product oxygen or feed air is adjusted to constantly control the temperature difference within the limit value, and the oxygen purity meter is controlled within the limit value of the temperature difference. 1. A method for controlling an air separation device for collecting argon, the method comprising controlling the amount of product oxygen or the amount of raw material air according to the oxygen concentration of the argon.
JP15066080A 1980-10-29 1980-10-29 Control of air separator for extracting argon Granted JPS5774574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15066080A JPS5774574A (en) 1980-10-29 1980-10-29 Control of air separator for extracting argon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15066080A JPS5774574A (en) 1980-10-29 1980-10-29 Control of air separator for extracting argon

Publications (2)

Publication Number Publication Date
JPS5774574A JPS5774574A (en) 1982-05-10
JPS6155035B2 true JPS6155035B2 (en) 1986-11-26

Family

ID=15501695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15066080A Granted JPS5774574A (en) 1980-10-29 1980-10-29 Control of air separator for extracting argon

Country Status (1)

Country Link
JP (1) JPS5774574A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61256174A (en) * 1985-05-07 1986-11-13 株式会社日立製作所 Control method for air separation equipment that collects argon

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413469A (en) * 1977-07-01 1979-01-31 Hitachi Ltd Controlling method for air separation plant

Also Published As

Publication number Publication date
JPS5774574A (en) 1982-05-10

Similar Documents

Publication Publication Date Title
CA2015458C (en) Low temperature air fractionation accommodating variable oxygen demand
US3056268A (en) Method for stabilizing the operation of a plant for the low temperature rectification of gaseous mixtures
CN100397012C (en) Methods and systems for optimizing argon recovery in an air separation unit
US4734114A (en) Controlling method of air separator
JPS6155035B2 (en)
US4507134A (en) Air fractionation method
JPH029278B2 (en)
JP2018096645A (en) Air liquefaction separation method and air liquefaction separation device
JP3065968B2 (en) Air liquefaction separation device and air liquefaction separation method
JPH0412391B2 (en)
KR100226933B1 (en) Oxygen purity control system of air separating apparatus
JPH029279B2 (en)
JPS62142986A (en) Method of controlling air separator
JP3217320B2 (en) Nitrogen generator and operating method thereof
JPH0526114B2 (en)
JPH0413629B2 (en)
JP3213848B2 (en) Nitrogen production apparatus and control method thereof
JPH04295586A (en) Air separation method and device
JP2917163B2 (en) Operating method of nitrogen generator
JPH11270965A (en) Air liquefaction separation device and operation method thereof
JPS5944569A (en) Method of operating nitrogen manufacturing device
JPH051882A (en) Ultra high purity nitrogen production equipment
JPH0615947B2 (en) Air liquefaction separation method and device
JPH07103645A (en) Argon production method
JPS6128911B2 (en)