JPS6155591B2 - - Google Patents
Info
- Publication number
- JPS6155591B2 JPS6155591B2 JP9137783A JP9137783A JPS6155591B2 JP S6155591 B2 JPS6155591 B2 JP S6155591B2 JP 9137783 A JP9137783 A JP 9137783A JP 9137783 A JP9137783 A JP 9137783A JP S6155591 B2 JPS6155591 B2 JP S6155591B2
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- base member
- hard
- coating layer
- ultra
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Description
この発明は、鋼および鋳鉄の切削、特にこれら
両被削材の高速切削や、高送り切削および深切込
み切削などの重切削に切削工具として用いた場合
に、すぐれた切削性能を発揮する表面被覆超硬質
焼結部材の製造法に関するものである。
従来、一般に、炭化タングステン基超硬合金や
炭化チタン基焼結材料などのサーメツトや、さら
に酸化アルミニウム基焼結材料などのセラミツク
スで構成された超硬質焼結部材を基体部材とし、
この基体部材の表面に、周期律表の4a,5a,およ
び6a族金属の炭化物,窒化物,および酸化物,並
びにこれらの2種以上の固溶体からなる群のうち
の1種の単層または2種以上の複層からなる被覆
層を化学蒸着法などにより形成してなる表面被覆
超硬質焼結部材が切削工具として用いられている
ことは良く知られているところである。
しかしながら、これらの従来表面被覆超硬質焼
結部材においては、あるものは鋼の切削に用いた
場合にすぐれた切削性能を示すが、鋳鉄の切削で
は所望の切削性能を示さず、比較的短時間で使用
寿命に至るものであり、また他のものは、これと
は反対に鋳鉄の切削ではすぐれた性能を示し、比
較的長期に亘る使用寿命を示すのに、鋼の切削で
は切削寿命が短かいなど、鋼および鋳鉄のいずれ
の切削においても満足する切削性能を発揮するも
のではなく、ましてや、これら両被削材の高速切
削や、高送り切削および深切込み切削などの重切
削のような苛酷な条件下での切削においては勿論
のことである。
そこで、本発明者等は、上述のような観点か
ら、鋼および鋳鉄の両方の切削に用いることがで
きることは勿論のこと、これら両被削材の高速切
削や重切削などの苛酷な条件下での切削に際して
もすぐれた切削性能を発揮する切削工具を開発す
べく研究を行なつた結果、上記の超硬質焼結部
材、あるいは表面被覆超硬質焼結部材を基体部材
とし、この基体部材を反応容器内に装入し、容量
%で、AlCl3,Al(CH3)3,およびAl2(CH3)3Cl3
のうちの1種(以下これらを総称してAl供給源
という):0.5〜5%,
CO2およびCOのうちの1種または2種:3〜
15%,あるいはCO2およびCOのうちの1種また
は2種と、炭化水素ガス:3〜15%(ただし炭化
水素ガス:0.3〜5%を含有、以下これらを総称
して炭素・酸素供給源という),
N2:10〜30%,
Ar:30〜70%,
H2:残り(ただし10%以上含有),
からなる配合組成を有する反応混合ガスを導入し
ながら、
反応容器内雰囲気:0.1〜20torrの真空,
基体部材への印加:−300〜−800Vの直流電
圧、または0.2〜10W/cm2の高周波電力、
反応容器内加熱温度:800〜1200℃,
の条件にてプラズマ化学蒸着処理を行なうと、前
記基体部材の表面には結晶形の炭窒酸化アルミニ
ウム(以下、Al CNOで示す)からなる硬質被覆
層が形成されるようになり、このAl CNOは、常
温および高温において高硬度を有すると共に、高
靭性を有し、かつ高温において化学的にきわめて
安定なものであることから、この結果のAl CNO
硬質被覆層形成の表面被覆超硬質焼結部材は、こ
れを鋼および鋳鉄の切削に切削工具として使用し
た場合にすぐれた性能を発揮し、さらにこれを前
記の両被削材の高速切削や重切削などに用いても
同様にすぐれた切削性能を発揮し、長期に亘る使
用寿命を確保することができるという知見を得た
のである。
この発明は、上記知見にもとづいてなされたも
のであつて、製造条件を上記の通りに限定した理
由を以下に説明する。
(a) 反応混合ガスの配合組成
Al供給源,炭素・酸素供給源,およびN2
これらの成分の配合量が、それぞれAl供給
源:0.5%未満,炭素・酸素供給源:3%未満,
およびN2:10%未満では、実用的反応速度で結
晶形のAl・CNO硬質被覆層を基体部材の表面に
形成することができず、一方Al供給源の配合量
が5%を越えると、グロー放電内での反応が活発
になつてAl・CNO粉末を形成するようになり、
基体部材表面に対して強固に蒸着したAl CNO硬
質被覆層を形成することが困難になり、また炭
素・酸素供給源が15%を越えたり、N2が30%を
越えたりすると、AlCNO硬質被覆層中にAl2O3や
AlNが混在するようになつて、前記被覆層の特性
が劣化するようになることから、それぞれの配合
量を、Al供給源:0.5〜5%,炭素・酸素供給
源:3〜15%,およびN2:10〜30%と定めた。
なお、炭化水素ガスはAlCNO硬質被覆層中のC
成分を相対的に高くする必要がある場合に配合さ
れるが、その配合量が0.3%未満では、その効果
が現われず、一方5%を越えて配合すると黒鉛
(炭素)が析出するようになつて、同様に前記硬
質被覆層の特性が劣化するようになることから、
炭化水素ガスの配合量を0.3〜5%と定めた。
Ar
Arガスにはグロー放電を促進する作用がある
が、その配合量が30%未満では所望のグロー放電
を確保することができず、一方70%を越えて配合
するとグロー放電が活発になりすぎ、これに伴つ
て基体部材の表面温度が1200℃を越えて高くなり
すぎ、前記硬質被覆層の結晶粒が粗大化して脆化
するようになることから、その配合量を30〜70%
と定めた。
なお、H2の配合量が10%未満では、Al供給源
の還元が十分に行なわれず、この結果AlCNO硬
質被覆層の形成に長時間を要するようになること
から、H2の配合量を10%以上と定めた。
(b) 反応容器内雰囲気の圧力
その圧力が0.1torr未満では反応速度がきわめ
て遅く、実用的でなく、一方その圧力を20torrを
越えたものにすると、雰囲気中での反応が起つ
て、非晶質のAlCNO粉末が形成されるようにな
ることから、その圧力を0.1〜20torrと定めた。
(c) 基体部材への印加
基体部材への印加が、直流電圧の場合:−
300V未満、高周波電力の場合:0.2W/cm2未満で
は、グロー放電がきわめて弱く、所望のAlCNO
被覆層を形成することができず、一方直流電圧に
あつては−800V,高周波電力にあつては10W/
cm2をそれぞれ越えると、基体部材の温度が1200℃
を越えて高くなりすぎ、脆化の原因となる結晶粒
成長が著しくなることから、基体部材への印加
を、直流電圧の場合:−300〜−800V,高周波電
力の場合:0.2〜10W/cm2と定めた。
(d) 反応容器内加熱温度
加熱温度が800℃未満ではAlCNO被覆層が非晶
質になつてしまつて、結晶形のそれを形成するこ
とができず、一方加熱温度が1200℃を越えると、
上記した通り脆化の原因となる結晶粒成長が
AlCNO被覆層に起るようになることから、その
加熱温度を800〜1200℃と定めた。
なお、この発明の方法によつて形成される
AlCNO硬質被覆層が結晶形をもつことはX線回
折測定により容易に確認できるものであり、さら
に原子比で、
Al0.55〜0.61C0.15〜0.22N0.02〜0.08O0.13〜0.20
の組成をもつものである。
さらに、この発明の方法によつてAlCNO被覆
層を形成するに際しては、その平均層厚を0.5〜
20μmとするのが望ましく、これは、その平均層
厚が0.5μm未満では所望のすぐれた切削性能を
長期に亘つて発揮することができず、一方20μm
を越えた層厚にすると、被覆処理時間が長くなる
ことに原因して、結晶が粗粒化し、靭性が低下す
るようになるばかりでなく、表面が荒れて凹凸が
激しくなるという理由によるものである。
つぎに、この発明の表面被覆超硬質焼結部材の
製造法を実施例により具体的に説明する。
実施例
基体部材として、それぞれ第1表に示される組
成並びに被覆層を有する超硬質焼結材料製切削チ
ツプおよび表面被覆超硬質焼結材料製切削チツプ
を用意し、これらの基体部材をそれぞれ通常のプ
ラズマ化学蒸着装置の反応容器内に装入し、つい
で同じく第1表に示される条件にてプラズマ化学
蒸着処理を施し、前記基体部材の表面にAlCNO
硬質被覆層を形成することによつて本発明表面被
覆切削チツプ1〜12をそれぞれ製造した。
つぎに、この結果得られた本発明表面被被覆切
削チツプ1〜12におけるAlCNO被覆層の組成,
結晶形,ビツカース硬さ,および平均層厚を測定
し、これらの測定結果も第1表に示した。
さらに、上記の本発明表面被覆切削チツプ1〜
12について、
This invention provides a surface coating that exhibits excellent cutting performance when used as a cutting tool for cutting steel and cast iron, especially for heavy cutting such as high-speed cutting, high-feed cutting, and deep-cut cutting of both of these work materials. The present invention relates to a method for manufacturing an ultra-hard sintered member. Conventionally, the base member is generally a super-hard sintered member made of a cermet such as a tungsten carbide-based cemented carbide or a titanium carbide-based sintered material, or a ceramic such as an aluminum oxide-based sintered material.
A single or double layer of one of the group consisting of carbides, nitrides, and oxides of metals from groups 4a, 5a, and 6a of the periodic table, and solid solutions of two or more of these metals is coated on the surface of this base member. It is well known that a surface-coated ultra-hard sintered member formed by forming a coating layer consisting of more than one layer by a chemical vapor deposition method or the like is used as a cutting tool. However, although some of these conventional surface-coated ultra-hard sintered members show excellent cutting performance when used for cutting steel, they do not show the desired cutting performance when cutting cast iron, and it takes a relatively short time. Others, on the contrary, show excellent performance and a relatively long service life when cutting cast iron, but have a short cutting life when cutting steel. It does not exhibit satisfactory cutting performance when cutting either steel or cast iron such as paddles, and even more so when cutting these materials at high speeds or during heavy cutting such as high-feed cutting and deep-cut cutting. Of course, this is true when cutting under such conditions. Therefore, from the above-mentioned viewpoint, the inventors of the present invention have found that it can be used not only for cutting both steel and cast iron, but also under severe conditions such as high-speed cutting and heavy cutting of both these work materials. As a result of research to develop a cutting tool that exhibits excellent cutting performance even when cutting Charged into a container, AlCl 3 , Al(CH 3 ) 3 , and Al 2 (CH 3 ) 3 Cl 3 in volume %
One of these (hereinafter collectively referred to as Al source): 0.5 to 5%, one or two of CO 2 and CO: 3 to 5%
15%, or one or two of CO 2 and CO, and hydrocarbon gas: 3 to 15% (however, hydrocarbon gas: 0.3 to 5%, hereinafter collectively referred to as carbon/oxygen supply source) ), N 2 : 10 to 30%, Ar: 30 to 70%, H 2 : remainder (but containing 10% or more), while introducing a reaction mixture gas having the following composition: Atmosphere inside the reaction vessel: 0.1 Plasma chemical vapor deposition treatment under the following conditions: vacuum of ~20 torr, application of DC voltage to the base member: -300 to -800 V, or high frequency power of 0.2 to 10 W/ cm2 , heating temperature in the reaction vessel: 800 to 1200°C. When this is carried out, a hard coating layer made of crystalline aluminum carbonitride oxide (hereinafter referred to as Al CNO) is formed on the surface of the base member, and this Al CNO has high hardness at room temperature and high temperature. The resulting Al CNO
Surface-coated ultra-hard sintered parts with a hard coating layer exhibit excellent performance when used as cutting tools for cutting steel and cast iron, and furthermore, they can be used for high-speed cutting and heavy-duty cutting of both of the work materials mentioned above. They found that even when used for cutting, it similarly exhibits excellent cutting performance and can ensure a long service life. This invention was made based on the above knowledge, and the reason why the manufacturing conditions were limited as described above will be explained below. (a) Composition of reaction mixture Al source, carbon/oxygen source, and N 2 The blending amounts of these components are respectively less than 0.5% for Al source, less than 3% for carbon/oxygen source,
and N 2 : less than 10%, it is not possible to form a crystalline Al/CNO hard coating layer on the surface of the base member at a practical reaction rate; on the other hand, if the blending amount of the Al source exceeds 5%, The reaction within the glow discharge becomes active and begins to form Al/CNO powder.
It becomes difficult to form an Al CNO hard coating layer firmly deposited on the surface of the base member, and if the carbon/oxygen supply source exceeds 15% or N2 exceeds 30%, the AlCNO hard coating layer becomes difficult to form. Al 2 O 3 and
As AlN becomes mixed, the properties of the coating layer deteriorate, so the respective blending amounts are changed to 0.5 to 5% for Al source, 3 to 15% for carbon/oxygen source, and 3 to 15% for carbon/oxygen source. N2 : was set at 10-30%.
Note that hydrocarbon gas is C in the AlCNO hard coating layer.
It is added when it is necessary to relatively increase the content of the ingredients, but if the amount added is less than 0.3%, the effect will not appear, while if it is added more than 5%, graphite (carbon) will precipitate. As a result, the properties of the hard coating layer also deteriorate.
The blending amount of hydrocarbon gas was determined to be 0.3 to 5%. Ar Ar gas has the effect of promoting glow discharge, but if the amount is less than 30%, the desired glow discharge cannot be achieved, while if it is more than 70%, the glow discharge becomes too active. As a result, the surface temperature of the base member becomes too high, exceeding 1200°C, and the crystal grains of the hard coating layer become coarse and brittle, so the amount of the hard coating layer is reduced to 30 to 70%.
It was determined that Note that if the amount of H 2 is less than 10%, the reduction of the Al supply source will not be sufficient, and as a result, it will take a long time to form the AlCNO hard coating layer. % or more. (b) Pressure of the atmosphere inside the reaction vessel If the pressure is less than 0.1 torr, the reaction rate is extremely slow and it is not practical.On the other hand, if the pressure is made to exceed 20 torr, reactions occur in the atmosphere and amorphous The pressure was determined to be 0.1 to 20 torr because quality AlCNO powder was formed. (c) Application to the base member When the application to the base member is DC voltage: -
For less than 300V and high frequency power: less than 0.2W/ cm2 , the glow discharge is extremely weak and the desired AlCNO
A coating layer cannot be formed, and on the other hand, DC voltage is -800V, and high frequency power is 10W/
cm 2 , the temperature of the base member increases to 1200℃
If the voltage becomes too high and the crystal grain growth that causes embrittlement becomes significant, the voltage applied to the base member should be changed to -300 to -800 V for DC voltage and 0.2 to 10 W/cm for high frequency power. 2 . (d) Heating temperature in the reaction vessel If the heating temperature is less than 800°C, the AlCNO coating layer becomes amorphous and cannot form a crystalline form, whereas if the heating temperature exceeds 1200°C,
As mentioned above, grain growth that causes embrittlement
Since this occurs in the AlCNO coating layer, the heating temperature was set at 800-1200°C. In addition, formed by the method of this invention
It can be easily confirmed by X-ray diffraction measurement that the AlCNO hard coating layer has a crystalline form, and furthermore, the atomic ratio is Al 0.55 ~ 0.61 C 0.15 ~ 0.22 N 0.02 ~ It has a composition of 0.08 O 0.13 to 0.20 . Furthermore, when forming the AlCNO coating layer by the method of this invention, the average layer thickness is 0.5 to
The average layer thickness is preferably 20 μm, because if the average layer thickness is less than 0.5 μm, the desired excellent cutting performance cannot be achieved over a long period of time;
This is because if the layer thickness exceeds 100%, the coating process time becomes longer, which not only causes the crystals to become coarser and reduce toughness, but also causes the surface to become rough and uneven. be. Next, the method for manufacturing the surface-coated ultra-hard sintered member of the present invention will be specifically explained with reference to Examples. Example A cutting tip made of an ultra-hard sintered material and a cutting tip made of a surface-coated ultra-hard sintered material each having the composition and coating layer shown in Table 1 were prepared as the base member, and these base members were each prepared in a normal manner. The base member is charged into a reaction vessel of a plasma chemical vapor deposition apparatus, and then subjected to plasma chemical vapor deposition treatment under the conditions shown in Table 1 to coat the surface of the base member with AlCNO.
Surface-coated cutting chips 1 to 12 of the present invention were each manufactured by forming a hard coating layer. Next, the composition of the AlCNO coating layer in the surface-coated cutting chips 1 to 12 of the present invention obtained as a result,
The crystal shape, Vickers hardness, and average layer thickness were measured and the results are also shown in Table 1. Furthermore, the above-mentioned surface-coated cutting chips 1 to 1 of the present invention
Regarding 12,
【表】【table】
【表】【table】
【表】
被削材:SNCM―8(硬さ:HB270),
切削速度:160m/min,
送り:0.34mm/rev.,
切込み:1.5mm,
切削時間:30min,
の条件での鋼の高速切削試験、並びに、
被削材:FC―25(硬さ:HB200),
切削速度:200m/min,
送り:0.25mm/rev.,
切込み:1.5mm,
切削時間:20min,
の条件での鋳鉄の高速切削試験を行ない、試験後
の切刃の逃げ面摩耗幅を測定した。これらの測定
結果を第2表に示した。また、第2表には、比較
の目的で、上記の本発明表面被覆切削チツプ1〜
12において、それぞれAlCNO被覆層を形成する
前の基体部材(以下従来切削チツプ1〜12とい
う)の同一条件での切削試験結果も示した。
第2表に示される結果から、本発明表面被覆切
削チツプ1〜12は、鋼および鋳鉄のいずれの高速
切削においても、それぞれAlCNO硬質被覆層を
形成しない以外は同一の従来切削チツプ1〜12に
比して一段とすぐれた耐摩耗性を示し、これは
AlCNO硬質被覆層の形成によつてもたらされる
ことが明らかである。
上述のように、この発明の方法によれば、常温
および高温において高硬度を有すると共に高靭性
を有し、かつ高温において化学的に安定した
AlCNO硬質被覆層を基体部材の表面に形成する
ことができ、したがつて、このAlCNO硬質被覆
層を有する表面被覆超硬質焼結部材を鋼および鋳
鉄の切削に切削工具として使用するとすぐれた性
能を発揮し、さらにより一層苛酷な条件下での切
削となる鋼および鋳鉄の高速切削や重切削などに
おいてもきわめてすぐれた切削性能を長期に亘つ
て安定的に発揮するのである。[Table] Work material: SNCM-8 (Hardness: H B 270), Cutting speed: 160 m/min, Feed: 0.34 mm/rev., Depth of cut: 1.5 mm, Cutting time: 30 min. High-speed cutting test and the following conditions: Work material: FC-25 (Hardness: HB 200), Cutting speed: 200 m/min, Feed: 0.25 mm/rev., Depth of cut: 1.5 mm, Cutting time: 20 min. A high-speed cutting test was conducted on cast iron, and the flank wear width of the cutting edge was measured after the test. The results of these measurements are shown in Table 2. Table 2 also shows, for comparison purposes, the surface-coated cutting chips 1 to 1 of the present invention.
In No. 12, the cutting test results under the same conditions of the base members (hereinafter referred to as conventional cutting chips 1 to 12) before forming the AlCNO coating layer are also shown. From the results shown in Table 2, surface-coated cutting chips 1 to 12 of the present invention are superior to conventional cutting chips 1 to 12, which are the same except that they do not form an AlCNO hard coating layer, in high-speed cutting of both steel and cast iron. It shows much better wear resistance compared to
It is clear that this is caused by the formation of the AlCNO hard coating layer. As described above, according to the method of the present invention, a material having high hardness and toughness at room temperature and high temperature, and chemically stable at high temperature.
An AlCNO hard coating layer can be formed on the surface of the base member. Therefore, when a surface-coated ultra-hard sintered member having this AlCNO hard coating layer is used as a cutting tool for cutting steel and cast iron, it has excellent performance. Furthermore, it stably exhibits extremely excellent cutting performance over a long period of time, even in high-speed cutting and heavy cutting of steel and cast iron, which require cutting under even harsher conditions.
Claims (1)
超硬質焼結部材、あるいは前記超硬質焼結部材の
表面に硬質層を形成してなる表面被覆超硬質焼結
部材を基体部材とし、この基体部材を反応容器内
に装入し、容量%で、 AlCl3,Al(CH3)3,およびAl2(CH3)3Cl3のう
ちの1種:0.5〜5%, CO2およびCOのうちの1種または2種:3〜
15%,あるいはCO2およびCOのうちの1種また
は2種と、炭化水素ガス:3〜15%(ただし炭化
水素ガス:0.3〜5%含有), N2:10〜30%, Ar:30〜70%, H2:残り(ただし10%以上含有), からなる配合組成を有する反応混合ガスを導入し
ながら、 反応容器内雰囲気:0.1〜20torrの真空, 基体部材への印加:−300〜−800Vの直流電
圧、または0.2〜10W/cm2の高周波電力、 反応容器内加熱温度:800〜1200℃、 の条件にてプラズマ化学蒸着処理を行なうことに
よつて、前記基体部材の表面に、結晶形の炭窒酸
化アルミニウムからなる硬質被覆層を形成するこ
とを特徴とする切削工具用表面被覆超硬質焼結部
材の製造法。[Scope of Claims] 1. An ultra-hard sintered member made of cermet or ceramics, or a surface-coated ultra-hard sintered member formed by forming a hard layer on the surface of the ultra-hard sintered member, as a base member; The base member is charged into a reaction vessel, and one of AlCl3 , Al( CH3 ) 3 , and Al2 ( CH3 ) 3Cl3 : 0.5 to 5%, CO2 and CO are added in volume %. One or two of the following: 3~
15%, or one or two of CO 2 and CO, hydrocarbon gas: 3 to 15% (contains hydrocarbon gas: 0.3 to 5%), N 2 : 10 to 30%, Ar: 30 While introducing a reaction mixture gas having a composition consisting of ~70%, H2 : the remainder (containing 10% or more), atmosphere inside the reaction vessel: vacuum of 0.1 to 20 torr, application to the base member: -300 to By performing plasma chemical vapor deposition treatment under the following conditions: -800V DC voltage or 0.2~10W/ cm2 high frequency power, reaction vessel heating temperature: 800~1200℃, the surface of the base member is coated with A method for producing a surface-coated ultra-hard sintered member for a cutting tool, which comprises forming a hard coating layer made of crystalline aluminum carbonitride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9137783A JPS59229479A (en) | 1983-05-24 | 1983-05-24 | Production of surface coated sintered hard member for cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9137783A JPS59229479A (en) | 1983-05-24 | 1983-05-24 | Production of surface coated sintered hard member for cutting tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59229479A JPS59229479A (en) | 1984-12-22 |
| JPS6155591B2 true JPS6155591B2 (en) | 1986-11-28 |
Family
ID=14024677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9137783A Granted JPS59229479A (en) | 1983-05-24 | 1983-05-24 | Production of surface coated sintered hard member for cutting tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59229479A (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61243180A (en) * | 1985-04-19 | 1986-10-29 | Sumitomo Electric Ind Ltd | Production of coated steel |
| JPS61253369A (en) * | 1985-05-02 | 1986-11-11 | Sumitomo Electric Ind Ltd | Surface coating method for sintered hard alloy |
| DE10322871A1 (en) * | 2003-05-21 | 2004-12-16 | Kennametal Widia Gmbh & Co.Kg | Sintered body and process for its production |
| JP4518260B2 (en) * | 2005-01-21 | 2010-08-04 | 三菱マテリアル株式会社 | Surface-coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed intermittent cutting |
| JP5935479B2 (en) * | 2012-04-20 | 2016-06-15 | 三菱マテリアル株式会社 | Surface-coated cutting tool with excellent chipping resistance with a hard coating layer in high-speed milling and high-speed intermittent cutting |
| JP5946016B2 (en) * | 2012-05-22 | 2016-07-05 | 三菱マテリアル株式会社 | A surface-coated cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting |
| JP5946017B2 (en) * | 2012-05-30 | 2016-07-05 | 三菱マテリアル株式会社 | A surface-coated cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting |
| JP5939509B2 (en) * | 2012-07-25 | 2016-06-22 | 三菱マテリアル株式会社 | A surface-coated cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting |
| JP5939508B2 (en) * | 2012-07-25 | 2016-06-22 | 三菱マテリアル株式会社 | A surface-coated cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting |
-
1983
- 1983-05-24 JP JP9137783A patent/JPS59229479A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59229479A (en) | 1984-12-22 |
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