JPS6160331B2 - - Google Patents
Info
- Publication number
- JPS6160331B2 JPS6160331B2 JP51093961A JP9396176A JPS6160331B2 JP S6160331 B2 JPS6160331 B2 JP S6160331B2 JP 51093961 A JP51093961 A JP 51093961A JP 9396176 A JP9396176 A JP 9396176A JP S6160331 B2 JPS6160331 B2 JP S6160331B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean room
- air chamber
- temperature
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Central Air Conditioning (AREA)
- Ventilation (AREA)
Description
【発明の詳細な説明】
未発明は超恒温（±0.1℃）で最高のクリーン
度（クラス100）を維持し且つ温度を屋外環境以
下としたクリーン・ルームをプリハブ化して得ら
れ、その環境条件の維持管理を簡便適確とし、既
存の室内に簡単に設置できるようにしたクリー
ン・ルームに関する。[Detailed description of the invention] The invention is obtained by prefabricating a clean room that maintains the highest degree of cleanliness (class 100) at an ultra-constant temperature (±0.1°C) and has a temperature below the outdoor environment, and its environmental conditions This invention relates to a clean room that can be easily and accurately maintained and installed in an existing room.
従来、見られるクリーン・ルーム施設は、第２
図で示すように、送風機Ｆによつてクリーン・ル
ームａとエヤーチヤンバーｂ間を循還させる空気
は、その戻り空気の全量を常に冷却コイルＣ，Ｃ
又は再熱コイルＨ・Ｃによつて冷却或いは加熱調
和してエヤーチヤンバーｂ内に送込み炉過壁を経
てクリーン・ルームａ内に吹出すようにし、或い
は第３図で示すように冷却時のみは戻り空気を分
流させて冷却コイルＣ，Ｃで処理してエヤーチヤ
ンバーｂ内に送込んでいるが、加熱処理は戻り空
気の全風量を再熱コイルＨ，Ｃにより行なうもの
で、上記従来例ではいづれの場合にも加熱処理に
際しては戻り空気の全風量を処理していた。従つ
てこれらのものは機構的には単純化されてプリハ
ブには好適であるが、加熱する空気は戻り空気の
全風量を対象とするため再熱コイルＨ，Ｃの制御
に無理を生じ戻り空気の全風量即ちクリーン・ル
ームａへの吹出空気の全量を±0.1℃程度に調温
することは極めて困難であり、例えば電気ヒータ
ーの立上り性能に支配されたオーバーシユートを
必然的に発生するの欠陥がある。本発明はこのよ
うな欠陥を排除して空気温度を超恒温（±0.1
℃）に維持させるようにしたもので、一側を炉過
壁でエヤーチヤンバーと区劃したクリーン・ルー
ムの他側を空気循還用送風機を介してエヤーチヤ
ンバーに連通させ、該エヤーチヤンバー内に冷却
コイルと再熱コイルと小型送風機から成るエヤー
チヤンバー内の空気調和装置を設けて、空気循還
用送風機によりクリーン・ルーム内に循還する空
気の一部をエヤーチヤンバー内で調温することを
特徴とする。 Traditionally, clean room facilities are
As shown in the figure, the air that is circulated between the clean room a and the air chamber b by the blower F is constantly routed to the cooling coils C and C.
Alternatively, the air may be cooled or heated by reheating coils H and C and blown into the clean room a through the air chamber b through the furnace wall, or only during cooling as shown in Figure 3. The return air is divided into streams, processed by the cooling coils C and C, and sent into the air chamber b, but the heating treatment is carried out by the reheating coils H and C. In this case, the entire amount of return air was processed during the heat treatment. Therefore, these devices are mechanically simple and suitable for prefabrication, but since the air to be heated targets the entire volume of return air, it becomes difficult to control the reheating coils H and C, and the return air It is extremely difficult to control the temperature of the total air volume, that is, the total amount of air blown into clean room A, to about ±0.1°C, and for example, overshoot, which is dominated by the start-up performance of the electric heater, will inevitably occur. There is a flaw. The present invention eliminates such defects and maintains the air temperature at a super constant temperature (±0.1
℃), one side of the clean room is separated from the air chamber by a furnace wall, the other side is connected to the air chamber via an air circulation blower, and a cooling coil is installed inside the air chamber. The air conditioner is equipped with an air conditioner in the air chamber consisting of a reheating coil and a small blower, and the temperature of a portion of the air that is circulated into the clean room is controlled within the air chamber by the air circulation blower.
本発明の実施態様を図面によつて説明する。 Embodiments of the present invention will be described with reference to the drawings.
１はクリーン・ルームでその一側は２個連設し
たフイルター層２ａ，２ｂから成る炉過壁２を介
してエヤーチヤンバー３と隣接するよう区劃し、
クリーン・ルーム１の他側４は天井裏５を経て空
気循還用送風機６を介してエヤーチヤンバーｂに
連通させ、かくて空気は送風機６によりクリー
ン・ルーム１とエヤーチヤンバーｂとを循還す
る。 1 is a clean room, one side of which is adjacent to an air chamber 3 through a furnace wall 2 consisting of two filter layers 2a and 2b,
The other side 4 of the clean room 1 is communicated with the air chamber b via the attic 5 and an air circulation fan 6, so that the air is circulated between the clean room 1 and the air chamber b by the fan 6.
エヤーチヤンバー３内に冷却コイル７と再熱コ
イル８並に小型送風機９から成る空気調和機１０
を設けて、空気循還用送風機６からチヤンバー３
内に送込まれる空気の一部を調和させるように
し、この調和された空気を混入した空気を炉過壁
２を経てクリーン・ルーム１内に送出すようにし
た。 An air conditioner 10 consisting of a cooling coil 7, a reheating coil 8, and a small blower 9 inside the air chamber 3
from the air circulation blower 6 to the chamber 3.
A part of the air sent into the clean room 1 is conditioned, and the air mixed with this conditioned air is sent through the furnace wall 2 into the clean room 1.
尚、図示例においてクリーン・ルーム１内に水
平方向の空気層流を得るようにルーム１の両側に
多孔壁１１，１２を設けた。 In the illustrated example, porous walls 11 and 12 are provided on both sides of the clean room 1 so as to obtain a horizontal laminar air flow within the clean room 1.
図中１３は照明灯、１４は出入口部、１５は補
助空気取入口を示し、以上の設備を有するクリー
ン・ルーム１は外壁１６内にプリハブ化して構成
し、これを既存の室内に設置し得る。 In the figure, 13 indicates a lighting lamp, 14 indicates an entrance/exit, and 15 indicates an auxiliary air intake.The clean room 1 having the above equipment can be constructed by prefabricating it inside the outer wall 16, and can be installed in an existing room. .
以上のように構成されるクリーン・ルーム１で
は循還用送風機６でエヤーチヤンバー３とクリー
ン・ルーム１内を循還させる空気は外壁１６で限
られた空間内を循還するため大きな温度条件の変
化はなく、従つて温度調整は僅かの補償で済む
が、従来既存のクリーン・ルームではその循還風
量の多少に拘らずその全風量を再熱コイルで加熱
する手段を採用しているため超恒温（±0.1℃）
状態を維持するため微温調整の制御が困難である
が、本発明によるときはエヤーチヤンバー３内に
おける循還空気の主流中に空気調和装置１０を設
けて該循還空気流の一部を調温し、これを循還主
流の中に混入して調和空気を得るため再熱コイル
によるオーバーシユートの影響が、緩和されその
微量制御を容易とする。 In the clean room 1 configured as described above, the air that is circulated between the air chamber 3 and the clean room 1 by the circulation blower 6 is circulated within a space limited by the outer wall 16, which causes large changes in temperature conditions. Therefore, temperature adjustment requires only a small amount of compensation; however, in existing clean rooms, regardless of the amount of circulating air, the entire air volume is heated by a reheating coil, so the temperature is super constant. (±0.1℃)
However, according to the present invention, an air conditioner 10 is provided in the main flow of the circulating air in the air chamber 3 to control the temperature of a part of the circulating air. Since this is mixed into the circulating main stream to obtain conditioned air, the influence of overshoot caused by the reheating coil is alleviated, making it easy to control the amount of overshoot.
このように本発明によるとき循還用送風機によ
る循還空気の主流中に空気調和装置を設けて循還
用空気の一部のみを調和するため微量な温度制御
を可能にしクリーン・ルームの超恒温状態を常に
維持し且つその制御を容易にした効果を有する。 In this way, according to the present invention, an air conditioner is provided in the main flow of the recirculated air by the recirculating blower, and only a part of the recirculated air is conditioned, making it possible to control the temperature in a very small amount, thereby achieving an ultra-constant temperature in the clean room. This has the effect of constantly maintaining the state and making it easy to control.
第１図は本発明のクリーン・ルームを示す截断
側面図、第２図および第３図は従来例の截断側面
図である。
１……クリーン・ルーム、２……炉過壁、３…
…エヤーチヤンバー、６……循還用送風機、７…
…冷却コイル、８……再熱コイル、９……小型送
風機、１０……空気調和装置。
FIG. 1 is a cutaway side view showing a clean room according to the present invention, and FIGS. 2 and 3 are cutaway side views of a conventional example. 1...Clean room, 2...Furnace wall, 3...
...Air chamber, 6...Circulation blower, 7...
...Cooling coil, 8...Reheating coil, 9...Small blower, 10...Air conditioner.
Claims (1)
クリーン・ルームの他側を空気循還用送風機を介
しエヤーチヤンバーに連通させ、該エヤーチヤン
バー内に冷却コイルと再熱コイルと小型送風機か
ら成るエヤーチヤンバー内の空気調和装置を設け
て、空気循還用送風機によりクリーンルーム内に
循還する空気の一部をエヤーチヤンバー内で調温
することを特徴とするクリーン・ルームにおける
空気調和装置。1 One side of the clean room is separated from the air chamber by a furnace wall, and the other side of the clean room is connected to the air chamber through an air circulation blower. An air conditioner for a clean room, which is equipped with an air conditioner and controls the temperature of a portion of the air that is circulated in the clean room using an air circulation blower in an air chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9396176A JPS5319661A (en) | 1976-08-09 | 1976-08-09 | Air conditioner in clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9396176A JPS5319661A (en) | 1976-08-09 | 1976-08-09 | Air conditioner in clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5319661A JPS5319661A (en) | 1978-02-23 |
| JPS6160331B2 true JPS6160331B2 (en) | 1986-12-20 |
Family
ID=14096994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9396176A Granted JPS5319661A (en) | 1976-08-09 | 1976-08-09 | Air conditioner in clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5319661A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230014569A (en) * | 2021-07-21 | 2023-01-30 | 한국전력공사 | Fin tube inspection device of heat recovery steam generator |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5795536A (en) * | 1980-12-05 | 1982-06-14 | Takasago Thermal Eng Co Lts | Apparatus for preparing work environment for manufacturing integrated circuits or the like |
| KR960007979B1 (en) * | 1991-04-17 | 1996-06-17 | 마쯔시다덴기산교 가부시기가이샤 | Clinic Space System |
| FR2878315B1 (en) * | 2004-11-19 | 2007-06-01 | Matal Sa | INSTALLATION FOR HOUSEHOLD WORKING AREA UNDER CONTROLLED ATMOSPHERE IN A LOCAL |
-
1976
- 1976-08-09 JP JP9396176A patent/JPS5319661A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230014569A (en) * | 2021-07-21 | 2023-01-30 | 한국전력공사 | Fin tube inspection device of heat recovery steam generator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5319661A (en) | 1978-02-23 |
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