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JPS6160611B2 - - Google Patents
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JPS6160611B2 - - Google Patents

Info

Publication number
JPS6160611B2
JPS6160611B2 JP51024828A JP2482876A JPS6160611B2 JP S6160611 B2 JPS6160611 B2 JP S6160611B2 JP 51024828 A JP51024828 A JP 51024828A JP 2482876 A JP2482876 A JP 2482876A JP S6160611 B2 JPS6160611 B2 JP S6160611B2
Authority
JP
Japan
Prior art keywords
axis
thickness
crystal resonator
shear
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51024828A
Other languages
Japanese (ja)
Other versions
JPS52108785A (en
Inventor
Hirofumi Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP2482876A priority Critical patent/JPS52108785A/en
Priority to GB3357/77A priority patent/GB1573815A/en
Priority to DE19772703335 priority patent/DE2703335A1/en
Priority to FR7702413A priority patent/FR2339991A1/en
Priority to CH113577A priority patent/CH625388GA3/en
Publication of JPS52108785A publication Critical patent/JPS52108785A/en
Priority to SG44582A priority patent/SG44582G/en
Priority to HK513/82A priority patent/HK51382A/en
Publication of JPS6160611B2 publication Critical patent/JPS6160611B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/54Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56Monolithic crystal filters
    • GPHYSICS
    • G04HOROLOGY
    • G04FTIME-INTERVAL MEASURING
    • G04F5/00Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/04Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
    • G04F5/06Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
    • G04F5/063Constructional details
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders or supports
    • H03H9/0595Holders or supports the holder support and resonator being formed in one body
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明は超小型、高性能を有する厚みすべり結
晶振動子に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultra-compact, high-performance thickness-shear crystal resonator.

従来使用されている厚みすべり結晶振動子とし
ては主に水晶を用い、第1図に示すような電極2
を有する円板タイプの振動子1が主である。また
最近円板形を改善した矩形の振動子が開発されて
いる。たとえば、第2図に示すように振動方向両
端に先細となる傾斜面を設けた矩形状の振動子1
が開発されている。前者は円形タイプのため非常
に大きいという欠点があり、また、後者の場合、
矩形により小型化がなされても、その支持が難し
いばかりか、小型化にしたため主振動以外の振動
(以下副振動と呼ぶ)が生じ、周波数−温度特性
が良くない等の欠点がある。すなわち、振動子の
小型化および細い支持線を以つてその振動子を支
持すれば、支持点でのエネルギー損失をできるだ
け小さく、かつ高性能な振動子が得られる。しか
し、細い支持線を使えば外的衝撃に対して弱く、
同時に副振動は振動子の外形寸法と密接な関係を
持つため機械的加工によつて外形寸法を決定する
場合相当の加工精度を必要とする。従つて、腕時
計の時間標準として厚みすべり振動子を使用する
場合、寸法が大きすぎ、また、小型化しようとす
ると特性の劣化、支持が難しい。副振動が発生し
やすい、外的衝撃に弱い、温度特性が悪い等の欠
点があるため、腕時計用として現状では使用でき
ない状態である。
Conventionally used thickness-shear crystal oscillators are mainly made of quartz, and electrodes 2 as shown in Figure 1 are used.
The main type of vibrator 1 is a disc type vibrator 1 having the following characteristics. Recently, a rectangular vibrator that is an improved version of the disk-shaped vibrator has been developed. For example, as shown in FIG. 2, a rectangular vibrator 1 has tapered inclined surfaces at both ends in the vibration direction.
is being developed. The former has the disadvantage of being very large because it is circular, and the latter has the disadvantage of being very large.
Even if the rectangular shape is made smaller, it is not only difficult to support it, but also vibrations other than the main vibration (hereinafter referred to as sub-vibrations) are generated due to the miniaturization, and there are drawbacks such as poor frequency-temperature characteristics. That is, by downsizing the vibrator and supporting the vibrator with a thin support wire, it is possible to minimize energy loss at the support point and obtain a high-performance vibrator. However, if a thin support wire is used, it will be weak against external shocks.
At the same time, since the secondary vibration has a close relationship with the external dimensions of the vibrator, considerable processing accuracy is required when determining the external dimensions by mechanical processing. Therefore, when using a thickness-shear oscillator as a time standard for a wristwatch, the dimensions are too large, and when attempting to downsize the oscillator, the characteristics deteriorate and support becomes difficult. Due to drawbacks such as easy generation of secondary vibrations, vulnerability to external shocks, and poor temperature characteristics, it cannot currently be used for wristwatches.

本発明は上記の欠点を除去したものであり、以
下本発明の厚みすべり結晶振動子を図により説明
する。第3図と第4図では従来の厚みすべり結晶
振動子の切り出し角とその電界方向を示したもの
であり、X軸、Y軸、Z軸を各々電気軸、機械
軸、光軸とするとき、X軸を回転軸として時計の
回転方向にθ回転(θ≒38゜)させたときY
板が作る新しい板Y′板とするときY′軸と平行に
電界(矢印)が走るようになつている。この構成
の場合、前記したような欠点が生じるわけであ
る。
The present invention eliminates the above-mentioned drawbacks, and the thickness shear crystal resonator of the present invention will be explained below with reference to the drawings. Figures 3 and 4 show the cut-out angle of a conventional thickness-shear crystal resonator and its electric field direction, and when the X-axis, Y-axis, and Z-axis are respectively the electrical axis, mechanical axis, and optical axis. , when the clock is rotated θ 1 rotation (θ 1 ≒ 38°) with the X axis as the rotation axis, Y
When the new plate created by the plate is called Y' plate, the electric field (arrow) runs parallel to the Y' axis. In the case of this configuration, the above-mentioned drawbacks occur.

本発明では、第5図に示すように、水消振動子
の結晶軸の電気軸、機械軸、光軸をそれぞれX軸
Y軸、Z軸とするとき、Z板をZ軸を回転軸とし
て時計の回転方向と逆に0゜を超えた角度から25
゜以下の範囲に回転した後のZ板の新軸X′軸、
Y′軸で、さらにX′軸を回転軸として時計の回転
方向に30゜〜45゜回転し、かつY″軸とZ′軸に垂
直な面に励振電極を配置している。そして、第6
図に示すように励振電極を上下両面の他に側面に
も設ける。ここで、電極A1,B1,C1を陽極、
A2,B2,C2を陰極とすることにより平行電界、
つまりY″軸方向に電界を加えることによつて厚
みすべり振動を起こすことができる。また、厚み
すべり振動子はY″軸方向の厚みによつて周波数
が決定されるから、前記切り出しによつてY″軸
方向の厚みを自由にとれ、周波数の選択が自由に
できる。
In the present invention, as shown in FIG. 5, when the electric, mechanical, and optical axes of the crystal axes of the water quenching oscillator are the X, Y, and Z axes, respectively, the Z plate is rotated with the Z axis as the rotation axis. 25 from an angle exceeding 0° opposite to the direction of rotation of the clock.
The new axis of the Z plate after rotating within the range below ゜
The excitation electrode is rotated by 30° to 45° on the Y′ axis and in the direction of clock rotation using the X′ axis as the rotational axis, and the excitation electrode is arranged on a plane perpendicular to the Y″ axis and the Z′ axis. 6
As shown in the figure, excitation electrodes are provided not only on the upper and lower surfaces but also on the side surfaces. Here, electrodes A 1 , B 1 , C 1 are anodes,
By using A 2 , B 2 , and C 2 as cathodes, a parallel electric field,
In other words, thickness-shear vibration can be caused by applying an electric field in the Y″-axis direction.Also, since the frequency of a thickness-shear oscillator is determined by the thickness in the Y″-axis direction, the above cut-out The thickness in the Y″ axis direction can be adjusted freely, and the frequency can be selected freely.

第7図は本発明の厚みすべり結晶振動子の一実
施例を示したものであり、第5図に示す結晶振動
子1をそのY″軸方向両端から支持部3を一体に
延長して形成した例である。尚この図で、A1
A2,B1,B2,C1,C2は電極を示す。この実施例
によれば、支持部3と励振部(結晶振動子)1を
エツチングによつて一体に形成でき、副振動等の
欠点を除去することができる。
FIG. 7 shows an embodiment of the thickness-shear crystal resonator of the present invention, which is formed by integrally extending the support portions 3 from both ends of the crystal resonator 1 in the Y'' direction of the crystal resonator 1 shown in FIG. In this figure, A 1 ,
A 2 , B 1 , B 2 , C 1 , and C 2 represent electrodes. According to this embodiment, the support section 3 and the excitation section (crystal resonator) 1 can be integrally formed by etching, and defects such as secondary vibration can be eliminated.

以上のように、本発明によれば、カツト角を選
択することによつて周波数温度特性のすぐれた振
動子が得られ、さらに電界効率を高めるため、切
断された水晶振動子の結晶軸方向を充分考慮する
ことによつて、最適な電極構造を得ることができ
る。すなわち、Z′軸に垂直な面の面積は他の面よ
り大きく、さらにこれらの面に各々一対の電極を
設け、対向する電極を同極となるように配置し、
Y″軸に垂直な面には隣接する電極と同極となる
電極を配置することによつて、Y″軸方向の電界
量を大きくし、振動子の損失抵抗を小さくするこ
とができる。さらに、振動部と支持部をエツチン
グによつて一体に成形すれば、超小型で副振動の
ない高精度な厚みすべり結晶振動子が得られ、腕
時計用として好適である。
As described above, according to the present invention, a resonator with excellent frequency-temperature characteristics can be obtained by selecting the cut angle, and in order to further increase the electric field efficiency, the direction of the crystal axis of the cut crystal resonator can be adjusted. By careful consideration, an optimal electrode structure can be obtained. In other words, the area of the plane perpendicular to the Z′ axis is larger than the other planes, and a pair of electrodes is provided on each of these planes, and the opposing electrodes are arranged so that they have the same polarity.
By arranging an electrode having the same polarity as an adjacent electrode on a plane perpendicular to the Y″ axis, the amount of electric field in the Y″ axis direction can be increased and the loss resistance of the vibrator can be reduced. Furthermore, if the vibrating part and the supporting part are integrally molded by etching, a highly accurate thickness shear crystal vibrator which is ultra-compact and free of secondary vibrations can be obtained, which is suitable for use in wristwatches.

尚、前記結晶振動子の素材としては水晶は勿論
タンタル酸リチウムやニオブ酸リチウム等があげ
られる。
The material for the crystal resonator includes quartz, lithium tantalate, lithium niobate, and the like.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の円板型厚みすべり水晶振動子の
平面図、第2図は従来の矩形厚みすべり振動子の
側面図、第3図、第4図の従来の厚みすべり結晶
振動子の切り出し角度とその電界方向を示す図。
第5図は、本発明の厚みすべり結晶振動子の切り
出し角度を示す図、第6図は本発明の厚みすべり
結晶振動子の電界方向を示す図、第7図イ、ロは
本発明の一実施例を示す厚みすべり結晶振動子の
平面図およびその側面図である。 1……結晶振動子、2……支持部。
Figure 1 is a plan view of a conventional disk-type thickness-shear crystal resonator, Figure 2 is a side view of a conventional rectangular thickness-shear crystal resonator, and Figures 3 and 4 are cut-outs of conventional thickness-shear crystal resonators. A diagram showing angles and their electric field directions.
FIG. 5 is a diagram showing the cutting angle of the thickness-shear crystal resonator of the present invention, FIG. 6 is a diagram showing the electric field direction of the thickness-shear crystal resonator of the present invention, and FIG. FIG. 1 is a plan view and a side view of a thickness-shear crystal resonator showing an example. 1...Crystal oscillator, 2...Support part.

Claims (1)

【特許請求の範囲】[Claims] 1 水晶振動子の結晶軸の電気軸、機械軸、光軸
を各X軸、Y軸、Z軸とするとき、Z板をZ軸を
回転軸として時計の回転方向と逆に0゜を超えた
角度から25゜以下の範囲に回転した後のZ板の新
軸X′軸、Y′軸で、さらにX′軸を回転軸として時
計の回転方向に30゜〜45゜回転し、かつY″軸と
Z′軸に垂直な面に励振電極を配置した厚みすべり
水晶振動子において、前記Z′軸に垂直な面の面積
は他の面より大きく、さらに、これらの面には
各々一対の電極が設けられ、対向する電極は同極
となるように配置され、Y″軸と垂直な面には隣
接する電極と同極となる電極が配置されているこ
とを特徴とする厚みすべり圧電結晶振動子。
1 When the electric, mechanical, and optical axes of the crystal resonator are the X, Y, and Z axes, the Z plate should be rotated at an angle of more than 0° in the opposite direction of the clock's rotation with the Z axis as the rotation axis. After rotating the Z plate within a range of 25 degrees or less from the original angle, the Z plate is rotated 30 to 45 degrees in the clockwise direction using the X' axis as the rotation axis, and the Y ″axis and
In a thickness-shear crystal resonator in which excitation electrodes are arranged on a plane perpendicular to the Z' axis, the area of the plane perpendicular to the Z' axis is larger than the other planes, and a pair of electrodes are provided on each of these planes. A thickness-shear piezoelectric crystal resonator characterized in that the opposing electrodes are arranged so as to have the same polarity, and an electrode that has the same polarity as the adjacent electrode is arranged on a plane perpendicular to the Y″ axis.
JP2482876A 1976-01-29 1976-03-08 Piezo crystal vibrator for perpendicular slip Granted JPS52108785A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2482876A JPS52108785A (en) 1976-03-08 1976-03-08 Piezo crystal vibrator for perpendicular slip
GB3357/77A GB1573815A (en) 1976-01-29 1977-01-27 Vibrator unit
DE19772703335 DE2703335A1 (en) 1976-01-29 1977-01-27 PIEZOELECTRIC VIBRATION WITH THICK SHEAR VIBRATION
FR7702413A FR2339991A1 (en) 1976-01-29 1977-01-28 PIEZO-ELECTRIC CRYSTAL VIBRATOR OF THICKNESS SHEAR TYPE
CH113577A CH625388GA3 (en) 1976-01-29 1977-01-31 Piezoelectric crystal vibrator operating by thickness shearing, method of manufacturing this vibrator
SG44582A SG44582G (en) 1976-01-29 1982-09-11 Vibrator unit
HK513/82A HK51382A (en) 1976-01-29 1982-11-25 Vibrator unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2482876A JPS52108785A (en) 1976-03-08 1976-03-08 Piezo crystal vibrator for perpendicular slip

Publications (2)

Publication Number Publication Date
JPS52108785A JPS52108785A (en) 1977-09-12
JPS6160611B2 true JPS6160611B2 (en) 1986-12-22

Family

ID=12149039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2482876A Granted JPS52108785A (en) 1976-01-29 1976-03-08 Piezo crystal vibrator for perpendicular slip

Country Status (1)

Country Link
JP (1) JPS52108785A (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4838992A (en) * 1971-09-21 1973-06-08
JPS4895785A (en) * 1972-03-17 1973-12-07
JPS4917763A (en) * 1972-06-07 1974-02-16
JPS50123288A (en) * 1974-03-15 1975-09-27
JPS6051282B2 (en) * 1974-05-06 1985-11-13 ドライアン−フォ−デ−ル・テクノロジ−ズ・エス・ア− Piezoelectric resonator and its manufacturing method
JPS5821444B2 (en) * 1974-05-09 1983-04-30 日本電信電話株式会社 Energy Tojikomegata Atsuden Tairohaki

Also Published As

Publication number Publication date
JPS52108785A (en) 1977-09-12

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