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JPS6210046B2 - - Google Patents
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JPS6210046B2 - - Google Patents

Info

Publication number
JPS6210046B2
JPS6210046B2 JP54131558A JP13155879A JPS6210046B2 JP S6210046 B2 JPS6210046 B2 JP S6210046B2 JP 54131558 A JP54131558 A JP 54131558A JP 13155879 A JP13155879 A JP 13155879A JP S6210046 B2 JPS6210046 B2 JP S6210046B2
Authority
JP
Japan
Prior art keywords
response
zero
electrode fingers
electrode
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54131558A
Other languages
Japanese (ja)
Other versions
JPS5656029A (en
Inventor
Michio Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP13155879A priority Critical patent/JPS5656029A/en
Publication of JPS5656029A publication Critical patent/JPS5656029A/en
Publication of JPS6210046B2 publication Critical patent/JPS6210046B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • H03H9/02881Means for compensation or elimination of undesirable effects of diffraction of wave beam
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517Means for weighting
    • H03H9/1452Means for weighting by finger overlap length, apodisation

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Description

【発明の詳細な説明】 本発明はインターデイジタル電極を用いた弾性
表面波フイルタに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface acoustic wave filter using interdigital electrodes.

一般に、アポダイズドされたインターデイジタ
ル電極は、所望周波数特性をフーリエ逆変換して
インパルス応答を求め、このインパルス応答の時
間に対応させて電極ピツチを規定し、応答の大き
さに対応させて隣接する異電位の電極指間の交さ
幅を規定して構成されており、これを交さ幅重み
付けという。実際のインパルス応答では各応答を
結ぶ一組の包絡線が交る場合が多々あり、この場
合にはその交点付近において応答の大きさが非常
に小さくなり、対応する電極指間の交さ幅も非常
に小さくなる。このような交さ幅の小さい対の電
極指は、その指間で励振される表面波が拡散し易
く、したがつて回折損が大きくなり、また電極指
をフオトエツチング処理などで製造する際、その
製造上の寸法バラツキにより大きな影響を受け、
得られる周波数特性が所望周波数特性から大きく
ずれる。
Generally, for an apodized interdigital electrode, an impulse response is determined by inverse Fourier transform of the desired frequency characteristic, the electrode pitch is defined in correspondence with the time of this impulse response, and the adjacent difference is determined in correspondence with the magnitude of the response. It is configured by specifying the crossing width between potential electrode fingers, and this is called crossing width weighting. In an actual impulse response, a set of envelopes connecting each response often intersects, and in this case, the magnitude of the response becomes very small near the intersection, and the width of the intersection between the corresponding electrode fingers also decreases. becomes very small. In such a pair of electrode fingers with a small intersecting width, the surface waves excited between the fingers are likely to diffuse, resulting in large diffraction loss. Largely affected by dimensional variations during manufacturing,
The resulting frequency characteristics deviate significantly from the desired frequency characteristics.

また、リフレクシヨン法などにより電極パター
ンを設計した場合には、一組の包絡線が交わる付
近だけでなく、それ以外の領域においても応答の
小さいものが生じ、この場合にも上述と同様の問
題が起こる。
In addition, when an electrode pattern is designed using a reflection method, small responses occur not only in the area where a set of envelopes intersect, but also in other areas, and in this case, the same problem as described above occurs. happens.

そこで本発明は、上述した従来の欠点をことご
とく除去したもので、零交さ幅領域を形成するこ
とにより、回折損を小さく、かつ製造バラツキの
影響を極力押さえて、得られる周波数特性と所望
周波数特性の誤差を小さくするとともに、零交さ
幅領域の形成により表面波音速に差が生ずるのを
極力小さくして、周波数特性の誤差を一層小さく
した弾性表面波フイルタを提供することを目的と
する。
Therefore, the present invention eliminates all of the above-mentioned conventional drawbacks, and by forming a zero-crossing width region, the diffraction loss is minimized and the influence of manufacturing variations is suppressed as much as possible, and the frequency characteristics obtained and the desired frequency are It is an object of the present invention to provide a surface acoustic wave filter that further reduces errors in frequency characteristics by reducing errors in characteristics and minimizing differences in surface wave sound speed due to the formation of zero crossing width regions. .

すなわち本発明は、インパルス応答における最
大応答に比して6%以下の大きさを有する応答に
対応する、複数の隣接する異電位の電極指間の交
さ幅を零とし、その複数の零交さ幅の位置を電極
指の長さ方向に順次ずらせたインターデイジタル
電極を備えるものである。
That is, in the present invention, the crossing width between a plurality of adjacent electrode fingers of different potentials corresponding to a response having a magnitude of 6% or less compared to the maximum response in an impulse response is set to zero, and the crossing width of the plurality of zero crossings is set to zero. This device includes interdigital electrodes whose widths are sequentially shifted in the length direction of the electrode fingers.

以下、本発明の実施例を図面を参照しつつ詳述
する。
Embodiments of the present invention will be described in detail below with reference to the drawings.

既に知られているように、帯域通過フイルタの
インパルス応答は、所望周波数特性をフーリエ逆
変換して得られるもので、例えば第1図に示すよ
うになる。このインパルス応答は、複数箇所で応
答が極小値を示して、一組の包絡線1,2が3,
4,5,6,7,8で交さする。例えば、フーリ
エ逆変換された重み付け関数がsin x/xで、帯域
幅 Wのフイルタでは、インパルス応答の時間軸上で
1/W、2/W、3/W、………………の位置に応答の
極小値すなわち交さ点をもつ。このようなインパ
ルス応答に対応させてインターデイジタル電極が
構成される。インターデイジタル電極は、一対の
くし歯電極が相互に差し込まれて構成されたもの
で、そのくし歯電極は多数の電極指を有してい
る。各電極指は電極ピツチ(異電位の隣接する電
極指の中心間距離)をインパルス応答の時間間隔
に比例的に対応させて配列されている。そして、
異電位の隣接する電極指間の交さ幅は、インパル
ス応答の最大応答(第1図では記号9で示す応
答)の6%以下の大きさを有する微小応答を除い
て、各応答の大きさに比例的に対応させて設定さ
れている。包絡線1,2の交さ点3,4,5,
6,7,8付近に存在する6%以下の大きさを有
する複数の微小応答に対応する電極指間は、交さ
しないように電極指が設けられている。一例を第
2図に示す。同図は第1図のインパルス応答の交
さ点3付近を示したものである。同図において、
破線で囲まれた部分は最大応答に比し6%を越え
る大きさの応答に対応させて各電極指が形成され
ている。そして、電極指10と11、電極指11
と12、電極指12と13、電極指13と14、
電極指14と15、電極指15と16間は6%以
下の大きさの応答に対応するもので、それぞれ交
さしないように対向する電極指が離間して設けら
れている。しかも各隣接する電極指10と11、
12と13、………………間の零交さ幅の部分
は、電極指の長さ方向に順次位置をずらせ、例え
ば伝播方向に対し或る角度で傾斜する線に沿つて
分散させられている。他の零交さ幅の領域4〜8
も、第3図に示すように、各領域内において上記
と同様に或る傾斜線(上記線とは異なる線であつ
てもよい)に沿つて零交さ幅の部分が順次ずらさ
れている。各領域3〜8も可能な限り互いにずら
せるようにすればよい。また。零交さ幅以外の部
分も伝播方向に対し傾斜する線に沿つてずらせる
ようにしてもよい。なお、上記例では、各領域の
零交さ幅部分を同一方向にずらせているが、6%
を越える交さ幅部分の電極形状によつては一部を
反対に傾斜する線に沿つてずらせてもよく、要は
零交さ幅部分が伝播方向においてできる限り重な
らないようにずらせればよい。ただ、電極形状に
よつては零交さ幅領域の一部が伝播方向で重な
り、部分的に零交さ幅部分が伝播方向で重なるこ
ともあるが、全体としては音速差の影響を十分小
さくすることができる。第3図は第1図のイパル
ス応答に対応させたインターデイジタル電極の指
先端を結ぶ包絡線を示し、零交さ幅の領域3,
4,5,6,7,8は複数の縦線で示している。
As is already known, the impulse response of a bandpass filter is obtained by inverse Fourier transform of a desired frequency characteristic, as shown in FIG. 1, for example. In this impulse response, the response shows minimum values at multiple locations, and a set of envelopes 1 and 2 is 3,
Intersect at 4, 5, 6, 7, 8. For example, for a filter whose weighting function obtained by inverse Fourier transform is sin x/x and whose bandwidth is W, the time axis of the impulse response is
The minimum value of the response, or the intersection point, is at the positions of 1/W, 2/W, 3/W, ………………. Interdigital electrodes are configured to correspond to such impulse responses. The interdigital electrode is constructed by inserting a pair of comb-shaped electrodes into each other, and the comb-shaped electrode has a large number of electrode fingers. Each electrode finger is arranged such that the electrode pitch (the distance between the centers of adjacent electrode fingers having different potentials) corresponds proportionally to the time interval of the impulse response. and,
The width of intersection between adjacent electrode fingers of different potentials is determined by the magnitude of each response, except for minute responses that have a magnitude of 6% or less of the maximum impulse response (response indicated by symbol 9 in Figure 1). It is set in proportion to the Intersection points 3, 4, 5 of envelopes 1 and 2,
The electrode fingers corresponding to a plurality of minute responses having a magnitude of 6% or less existing around 6, 7, and 8 are provided so as not to intersect. An example is shown in FIG. This figure shows the vicinity of the intersection point 3 of the impulse responses in FIG. In the same figure,
In the area surrounded by the broken line, each electrode finger is formed to correspond to a response greater than 6% of the maximum response. Then, electrode fingers 10 and 11, electrode finger 11
and 12, electrode fingers 12 and 13, electrode fingers 13 and 14,
The electrode fingers 14 and 15 and the electrode fingers 15 and 16 correspond to a response with a magnitude of 6% or less, and opposing electrode fingers are spaced apart so that they do not intersect. Moreover, each adjacent electrode finger 10 and 11,
The zero-crossing width portions between 12 and 13, . ing. Other zero crossing width areas 4 to 8
Also, as shown in Fig. 3, within each region, the zero crossing width portions are sequentially shifted along a certain slope line (the line may be different from the above line) in the same way as above. . The regions 3 to 8 may also be shifted from each other as much as possible. Also. The portion other than the zero crossing width may also be shifted along a line inclined to the propagation direction. Note that in the above example, the zero intersection width portions of each area are shifted in the same direction, but by 6%.
Depending on the shape of the electrodes, a portion of the zero-crossing width portion may be shifted along a line that slopes in the opposite direction.In short, it is sufficient to shift the zero-crossing width portion so that they do not overlap as much as possible in the propagation direction. . However, depending on the electrode shape, some of the zero-crossing width regions may overlap in the propagation direction, and the zero-crossing width regions may partially overlap in the propagation direction, but as a whole, the effect of the sound speed difference is sufficiently minimized. can do. FIG. 3 shows an envelope connecting the finger tips of the interdigital electrodes corresponding to the impulse response in FIG.
4, 5, 6, 7, and 8 are indicated by a plurality of vertical lines.

本実施例で、最大応答の6%以下の応答に対応
する交さ幅のみ零としているのは、6%以下のも
のでは表面波回折が大きく、かつ寸法誤差の影響
を大きく受け易く、また6%を越えたものを零に
すると周波数特性を大きく狂わす恐れがあるから
である。
In this example, only the intersection width corresponding to a response of 6% or less of the maximum response is set to zero because if the response is 6% or less, the surface wave diffraction is large and is easily influenced by dimensional errors. This is because if a value exceeding % is set to zero, the frequency characteristics may be greatly disturbed.

本実施例によれば、交さ幅の小さい励振源がな
くなるので、これによつて生ずる大きな回折損が
発生しなくなる。また、フオトエツチングなどで
電極指を形成する際、指寸法にバラツキが生じ易
く、特に従来では交さ幅の小さいものに相対的に
大きな影響を与えていたが、本実施例によればそ
のような影響はない。したがつて、回折損、製造
バラツキの影響を極力押さえることができ、設計
時の所望周波数特性と得られる実際の周波数特性
を近付けることができる。
According to this embodiment, since there is no excitation source with a small intersecting width, the large diffraction loss caused by this is no longer generated. Furthermore, when forming electrode fingers by photo etching, etc., variations in finger dimensions tend to occur, and in the past, this had a relatively large effect especially on those with a small intersecting width. There is no impact. Therefore, the effects of diffraction loss and manufacturing variations can be suppressed as much as possible, and the desired frequency characteristics at the time of design can be brought close to the actual frequency characteristics obtained.

一般に、表面波は伝播基板上に電極があるとそ
こでの音速が相対的に早くなり、逆に無電極部で
の音速は相対的に遅くなるとい現象がある。
In general, when a surface wave has an electrode on a propagation substrate, the speed of sound there becomes relatively high, and conversely, the speed of sound in an electrode-free area becomes relatively slow.

一方、零交さ幅部分を形成するとそれによつて
無電極部が生じ、しかもその無電極部は電極指方
向の中央に集中しやすく、この結果音速に差が生
じ、波面に歪が生ずる。ところが、本実施例では
零交さ幅部分を電極指方向にずらせているので、
音速変化の影響を小さくすることができ、所望特
性と実際の特性をより確実に近付けることができ
る。
On the other hand, when a zero crossing width portion is formed, an electrodeless portion is created, and the electrodeless portion tends to be concentrated at the center in the direction of the electrode fingers, resulting in a difference in sound speed and distortion in the wavefront. However, in this example, the zero crossing width portion is shifted in the direction of the electrode finger, so
The influence of changes in sound speed can be reduced, and desired characteristics and actual characteristics can be brought closer to each other more reliably.

上記実施例はシングル型電極指のものを示して
いるが、本発明によればスプリツト型電極指につ
いても同様に適用できるものである。また、リフ
レクシヨン手法などによりインターデイジタル電
極を形成する場合には、インパルス応答の包絡線
が交さする部分以外にも、最大応答に比し6%以
下の大きさをもつ応答が生ずることがあるが、こ
れらの応答についても上記と同様に交さ幅を零に
構成するようにするとよい。さらに、上記実施例
では6%以下の大きさの応答に対応するものはす
べて交さ幅を零としているが、場合によつては部
分的に零にするだけでもよい。
Although the above-mentioned embodiment shows a single-type electrode finger, the present invention can be similarly applied to a split-type electrode finger. Additionally, when forming interdigital electrodes using a reflection method, a response with a magnitude of 6% or less compared to the maximum response may occur in areas other than the intersection of the impulse response envelopes. However, it is preferable to configure the intersection width to be zero for these responses as well, as described above. Further, in the above embodiment, the intersection width is set to zero in all cases corresponding to a response with a magnitude of 6% or less, but depending on the case, it may be possible to set it to zero only partially.

さらにまた、音速の均一化を図るため、上記実
施例においてダミー電極を追加してもよいことは
もちろんである。ダミー電極を設ける場合には、
第4図に示すように、ダミー電極18,20,2
2と各々に対向する電極指17,19,21との
間隔をGとし、零交さ幅部分を分散させるため電
極指およびダミー電極を順次ずらせていく距離を
αとすると、G>αの関係を保つ必要がある。
Furthermore, in order to equalize the speed of sound, it goes without saying that a dummy electrode may be added to the above embodiment. When installing dummy electrodes,
As shown in FIG. 4, dummy electrodes 18, 20, 2
2 and the electrode fingers 17, 19, 21 facing each other is G, and α is the distance by which the electrode fingers and dummy electrodes are sequentially shifted in order to disperse the zero crossing width portion, then the relationship G>α is established. need to be maintained.

本発明は、以上説明したような構成からなるの
で、回折損が小さくなり、製造バラツキによる影
響が大幅に小さくなつて、所望周波数特性に非常
に近い特性が確実に得られるという、実用上大き
な効果を有する。
Since the present invention has the configuration described above, diffraction loss is reduced, the influence of manufacturing variations is greatly reduced, and characteristics very close to desired frequency characteristics can be reliably obtained, which is a great practical effect. has.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明による弾性表面波フイルタを説明す
るためのもので、第1図はインパルス応答図、第
2図はインターデイジタル電極の要部パターンを
示す図、第3図はインターデイジタル電極の包絡
線を示す図、第4図は他の実施例によるインター
デイジタル電極の要部パターンを示す図である。
The figures are for explaining the surface acoustic wave filter according to the present invention. Figure 1 is an impulse response diagram, Figure 2 is a diagram showing the main part pattern of the interdigital electrode, and Figure 3 is the envelope of the interdigital electrode. FIG. 4 is a diagram showing a main part pattern of an interdigital electrode according to another embodiment.

Claims (1)

【特許請求の範囲】[Claims] 1 所望周波数特性に基づくインパルス応答に対
応させて、隣接する異電位の電極指の交さ幅を選
定するようにした交さ幅重み付けインターデイジ
タル電極を備える弾性表面波フイルタにおいて、
前記インパルス応答における最大応答に比して、
6%以下の大きさを有する応答に対応する、複数
の電極指の交さ幅を零とし、その複数の零交さ幅
の位置を電極指の長さ方向に順次ずらせたことを
特徴とする弾性表面波フイルタ。
1. In a surface acoustic wave filter equipped with interdigital electrodes with weighted crossing widths, the crossing width of adjacent electrode fingers of different potentials is selected in accordance with an impulse response based on desired frequency characteristics.
Compared to the maximum response in the impulse response,
The cross width of a plurality of electrode fingers corresponding to a response having a magnitude of 6% or less is set to zero, and the positions of the plurality of zero cross widths are sequentially shifted in the length direction of the electrode fingers. Surface acoustic wave filter.
JP13155879A 1979-10-11 1979-10-11 Elastic surface wave filter Granted JPS5656029A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13155879A JPS5656029A (en) 1979-10-11 1979-10-11 Elastic surface wave filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13155879A JPS5656029A (en) 1979-10-11 1979-10-11 Elastic surface wave filter

Publications (2)

Publication Number Publication Date
JPS5656029A JPS5656029A (en) 1981-05-16
JPS6210046B2 true JPS6210046B2 (en) 1987-03-04

Family

ID=15060867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13155879A Granted JPS5656029A (en) 1979-10-11 1979-10-11 Elastic surface wave filter

Country Status (1)

Country Link
JP (1) JPS5656029A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05269402A (en) * 1992-03-25 1993-10-19 Taiyo Yuden Co Ltd Apparatus for fractionating magnetic component

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5528678A (en) * 1978-08-22 1980-02-29 Nec Corp Reed screen shape electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05269402A (en) * 1992-03-25 1993-10-19 Taiyo Yuden Co Ltd Apparatus for fractionating magnetic component

Also Published As

Publication number Publication date
JPS5656029A (en) 1981-05-16

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