JPS6210384B2 - - Google Patents
Info
- Publication number
- JPS6210384B2 JPS6210384B2 JP12653280A JP12653280A JPS6210384B2 JP S6210384 B2 JPS6210384 B2 JP S6210384B2 JP 12653280 A JP12653280 A JP 12653280A JP 12653280 A JP12653280 A JP 12653280A JP S6210384 B2 JPS6210384 B2 JP S6210384B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- vibrator
- electrode
- value
- shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 13
- 238000012360 testing method Methods 0.000 claims description 8
- 230000007547 defect Effects 0.000 description 17
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 241000226585 Antennaria plantaginifolia Species 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000002592 echocardiography Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 本発明は超音波探傷における探触子に関する。[Detailed description of the invention] The present invention relates to a probe for ultrasonic flaw detection.
鋼材等の内部欠陥を非破壊で探傷する方法とし
て超音波を利用した超音波探傷試験法がある。こ
れは、一対の電極間に水晶等の誘電体を挟み、該
電極にパルス電圧を印加することにより誘電体に
固有の振動を発生させ、この振動を被検材に伝搬
せしめ、その欠陥からの反射波を検出することに
より探傷するものである。上記垂直探傷用の探触
子の電極は一般に振動子の円形平面の全面に銀を
蒸着して形成されている。そして、上記通常の垂
直探触子を使用して近距離音場限界距離内の欠陥
を探傷する場合には、単一の実欠陥を複数の欠陥
が存在するかの如くに検出する場合が多く、超音
波探傷法の信頼性を低下させる原因となつてい
る。これは、近距離音場限界距離内において、超
音波の音場が従来の探触子による場合に干渉効果
により複雑な音場分布を形成し、その結果正しい
欠陥検出信号の外に１またはそれ以上の側波信号
を与えることに起因するものと考えられている。
かかる現象は測定技術上錯誤を起す原因となる。
そのため干渉縞を消失させ、音場を単純化する試
みが従来より行なわれて来た。本発明はその一方
法として、振触子における電極形状に工夫を行な
い、振動子に対しガウス分布の振動を行なわせる
ことにより副極を消失させるものである。すなわ
ち、本発明における探触子はそれを構成する電極
の形状を、円形接物面（被検体に接する面）につ
いてそれを４等分するＸ−Ｙ直交座標軸の各象限
毎にガウス分布曲線で囲まれた面で表わされるも
のとなしたものである。本発明のごとく、電極形
状を変形したものの例として、第１図に示す如く
８枚の花弁状に形成したいわゆる菊型電極による
振動子が提案されたが、このものは試作段階にお
いて優秀な性能を有するものと発表されたが、形
状が複雑なために製作技術上の再現性に問題があ
り、実用化に至らなかつた。このため、現状では
円形平面電極の探触子が実用機として用いられて
いるに過ぎない。 There is an ultrasonic testing method that uses ultrasonic waves as a non-destructive method for detecting internal defects in steel materials. In this method, a dielectric material such as crystal is sandwiched between a pair of electrodes, and a pulse voltage is applied to the electrodes to generate vibrations specific to the dielectric material, and this vibration is propagated to the material to be inspected, thereby removing defects from the material. Flaws are detected by detecting reflected waves. The electrodes of the probe for vertical flaw detection are generally formed by depositing silver on the entire circular plane of the vibrator. When detecting defects within the near field limit distance using the above-mentioned normal vertical probe, a single actual defect is often detected as if multiple defects exist. , which causes a decrease in the reliability of ultrasonic flaw detection. This is because within the near field limit distance, when the ultrasonic sound field is generated by a conventional probe, a complex sound field distribution is formed due to the interference effect, and as a result, one or more than one defect detection signal is detected outside the correct defect detection signal. This is thought to be due to the application of the above side wave signals.
Such a phenomenon causes errors in measurement technology.
Therefore, attempts have been made to eliminate interference fringes and simplify the sound field. One method of the present invention is to eliminate the sub-poles by devising the shape of the electrodes in the vibrator and causing the vibrator to vibrate in a Gaussian distribution. In other words, the shape of the electrode in the probe according to the present invention is determined by a Gaussian distribution curve for each quadrant of the X-Y orthogonal coordinate axes that divide the circular contact surface (the surface in contact with the object) into four equal parts. What is represented by the enclosed surface and what is done. As an example of a device with a modified electrode shape as in the present invention, a vibrator with so-called chrysanthemum-shaped electrodes formed in the shape of eight petals as shown in Fig. 1 was proposed, but this device showed excellent performance at the prototype stage. However, due to the complicated shape, there were problems with the reproducibility of manufacturing technology, and it was not put into practical use. For this reason, at present, only probes with circular planar electrodes are used as practical devices.
本発明は上述の点に鑑みてなされたもので、探
触子の接物面、すなわち、被検材に接する振動子
の面の電極形状を直交座標のＸ、Ｙ軸について対
称なガウス曲線によつて囲まれた面に形成し、超
音波の相互干渉を防止し、且つ超音波振動方向の
軸上音圧を最大ならしめてピーク信号を得るよう
にした超音波探触子を提供するものである。 The present invention has been made in view of the above-mentioned points, and the electrode shape of the contact surface of the probe, that is, the surface of the vibrator that contacts the test material, is shaped into a Gaussian curve that is symmetrical about the X and Y axes of the orthogonal coordinates. The present invention provides an ultrasonic probe that is formed on a surface surrounded by the ultrasonic waves, prevents mutual interference of ultrasonic waves, and maximizes the on-axis sound pressure in the ultrasonic vibration direction to obtain a peak signal. be.
以下、本発明に係る超音波探触子を添付図面に
示す一実施例に基づいて説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS An ultrasonic probe according to the present invention will be described below based on an embodiment shown in the accompanying drawings.
第２図は本発明に従つて作製された探触子の接
物面における電極形状を示すもので、断面が半径
Ｒpの円形をなす振動子（たとえば水晶からな
る）の接物面に金属銀を蒸着して得たものであ
る。そして、その形状は、振動子の各部の音圧が
ガウス分布となるようにするために、接物面をＸ
−Ｙの直交座標軸で４等分して形成される４つの
象限毎に次式で表わされる曲線（〜）で囲ま
れたものである。 FIG. 2 shows the shape of the electrodes on the contact surface of a probe manufactured according to the present invention . It is obtained by vapor depositing silver. The shape is such that the contact surface is
Each of the four quadrants formed by dividing it into four equal parts by the orthogonal coordinate axis of -Y is surrounded by a curve (~) expressed by the following equation.
Ｙ＝Ｒpｅ〓〓 ……(1)
Ｘ＝Ｒpｅ〓〓 ……(2)
ここに、Ｒpは振動子１の有効半径であり、ｒp
は、ｒp≦Ｒpで且つ、ｒp≦√（Ａは２
〜３の数値）を満足する定数である。さらにｌは
被検材の肉厚（mm）であり、また、λは被検材中
の音波長（mm）である。 Y=R p e〓〓〓 ……(1) X=R p e〓〓〓 ……(2) Here, R p is the effective radius of the vibrator 1, and r p
is r p ≦R p and r p ≦√(A is 2
~3). Further, l is the wall thickness (mm) of the material to be tested, and λ is the sound wavelength (mm) in the material to be tested.
そして、これらの各曲線〜により囲まれた
略々糸巻き状の平面を電極部２としてガウス振動
子を形成する。振動子１の半径Ｒpはその大きさ
に理論的制限はないが、これを大きくすると探傷
操作上不便であり、また、余り小さくすると発信
出力が小さくなり探傷能力に制限が加えられる。
このため、実用上は５〜15mm程度が好ましい。こ
のＲpの値は超音波の波長λとも関係があり、被
検材の材質、大きさ及び肉厚等をも考慮して適宜
の値に選定する。また、ｒpは本発明における電
極２の幾何学的形状を決定する因子であり、被検
材の肉厚ｌ及び使用波長λにより決定されるが実
用上は３〜10の値から選ばれる。更に、使用波長
λは被検材の材質例えば炭素鋼、或いはオーステ
ナイト鋼等の材質並びに肉厚、必要探傷深度等に
よつて適宜選択される。 Then, a Gaussian oscillator is formed by using a substantially pincushion-shaped plane surrounded by these curves as the electrode section 2. Although there is no theoretical limit to the radius R p of the vibrator 1, if it is made too large, it will be inconvenient for flaw detection operations, and if it is made too small, the transmitted output will become small and the flaw detection capability will be limited.
For this reason, in practice, it is preferably about 5 to 15 mm. The value of R p is related to the wavelength λ of the ultrasonic wave, and is selected to be an appropriate value in consideration of the material, size, thickness, etc. of the material to be inspected. Further, r p is a factor that determines the geometrical shape of the electrode 2 in the present invention, and is determined by the wall thickness l of the material to be examined and the wavelength used, λ, and is practically selected from a value of 3 to 10. Further, the wavelength λ to be used is appropriately selected depending on the material of the material to be inspected, such as carbon steel or austenitic steel, wall thickness, required flaw detection depth, etc.
そこで、一例として上記各値を以下のように設
定した場合の電極の形状を求めてみる。 Therefore, as an example, the shape of the electrode will be determined when each of the above values is set as follows.
(1) 振動子の大きさすなわち、有効半径Ｒpは感
度及び使用性等を考慮してＲp＝14（mm）とす
る。(1) The size of the vibrator, that is, the effective radius R p is set to R p =14 (mm) in consideration of sensitivity, usability, etc.
(2) 振動子の周波数を５（ＭHz）とする。(2) The frequency of the vibrator is 5 (MHz).
(3) 最大探傷距離を100（mm）とする。(3) The maximum flaw detection distance is 100 (mm).
(4) 定数Ａを2.2とする。(4) Let constant A be 2.2.
以上によりr0＝６（mm）となるので、これを前
記(1)および(2)に代入すると、
Ｙ＝14e〓〓
Ｘ＝14e〓〓
となり、これを座標に描くと電極の形状は第２図
に示すような略々糸巻き状となる。この振動子を
有する探触子をSM42の試験鋼材について近距離
音場内の欠陥検出に適用した場合を第３図に示
す。この欠陥検出に使用した走査図形用試験片５
は第３図に示すように材質SM42、大きさ100×
100×30（mm）に図のように上面５ａから深さ25
（mm）となるように底面５ｂより４（φ）の平底
ドリル穴５Ｃを明けてこれを模疑欠陥としたもの
である。そして、欠陥直上の位置０点を零とし、
感度を変えることなく左右（矢印Ａ、A′方向）
に探触子１を走査した場合、夫々の距離に対する
エコー高さは第４図に示すようなグラフで表わさ
れる。但し、測定感度は最大エコーが80％となる
ように設定してある。これに対し、従来の円形平
面からなる電極を有する探触子により試験片５を
前述と全く同様に走査した場合の試験結果を第５
図に示す。これらのグラフから明らかなように、
本発明に係る探触子によればピークエコーは只１
つのみであり、しかもその位置は探触子の真下に
ある。これに対して従来の探触子の場合は、明ら
かにピークエコーが複数（２つ）存在しており、
あたかも２つの欠陥が並んで存在しているかの如
くに識別される。しかも、それらの位置は実際の
欠陥の位置から数ミリも離れた位置に見掛上存在
している。 From the above, r 0 = 6 (mm), so by substituting this into (1) and (2) above, we get Y = 14e〓〓 It has an approximately pincushion shape as shown in Figure 2. Figure 3 shows a case in which a probe with this vibrator is applied to detect defects in the near-field sound field of SM42 test steel. Scanning pattern test piece 5 used for this defect detection
As shown in Figure 3, the material is SM42 and the size is 100×
100 x 30 (mm) with a depth of 25 from the top surface 5a as shown in the figure.
(mm), a flat bottom drill hole 5C of 4 (φ) was drilled from the bottom surface 5b and this was used as a suspected defect. Then, the position 0 point directly above the defect is set as zero,
Left and right without changing sensitivity (arrow A, A' direction)
When the probe 1 is scanned, the echo height with respect to each distance is represented by a graph as shown in FIG. However, the measurement sensitivity is set so that the maximum echo is 80%. In contrast, the test results obtained when the test piece 5 was scanned in exactly the same manner as described above using a probe having a conventional circular plane electrode were shown in the fifth column.
As shown in the figure. As is clear from these graphs,
According to the probe according to the present invention, the peak echo is only 1
There is only one probe, and its position is directly below the probe. In contrast, with conventional probes, there are clearly multiple (two) peak echoes.
They are identified as if two defects were present side by side. Moreover, these positions are apparently located several millimeters away from the actual position of the defect.
以上説明したように本発明によれば、走査図形
にピークがただ１つのみ現われ、しかもその位置
が探触子の真下にあり、近距離音場内の欠陥を極
めて高精度に検出することができ、また、エコー
高さの距離依存性が単調であり欠陥寸法評価の解
析が容易である。更に、電極の形状が比較的簡単
であるために探触子の製作が容易である等の優れ
た効果がある。 As explained above, according to the present invention, only one peak appears in the scanning pattern, and the peak is located directly below the probe, making it possible to detect defects in the near-field sound field with extremely high accuracy. Furthermore, the distance dependence of the echo height is monotonous, making it easy to analyze the defect size evaluation. Furthermore, since the shape of the electrode is relatively simple, there are other excellent effects such as ease of manufacturing the probe.
第１図は従来の超音波探触子の菊型電極の形状
を示す図、第２図は本発明に係る超音波探触子の
電極の形状の一実施例を示す図、第３図は近距離
音場内の欠陥検出の一実施例を示す図、第４図は
本発明に係る超音波探触子による近距離音場内の
欠陥検出信号の一例を示すグラフ、第５図は従来
の超音波探触子による近距離音場内の欠陥検出信
号の一例を示すグラフである。
１…振動子、２…電極、５…試験片。
FIG. 1 is a diagram showing the shape of a chrysanthemum-shaped electrode of a conventional ultrasound probe, FIG. 2 is a diagram showing an example of the shape of an electrode of an ultrasound probe according to the present invention, and FIG. FIG. 4 is a graph showing an example of a defect detection signal in the near field by the ultrasonic probe according to the present invention, and FIG. It is a graph which shows an example of the defect detection signal in a short-distance sound field by a sonic probe. 1... Vibrator, 2... Electrode, 5... Test piece.
Claims (1)
座標軸の各象限毎にＹ＝Ｒpｅ〓〓及びＸ＝Ｒpｅ
〓〓なる曲線を描き、これらの各曲線により包囲
された略々糸巻形の面積を電極としたことを特徴
とする超音波探触子。 但し、前記値Ｒpは振動子の半径であり、値ｒp
は最大探傷距離ｌ及び被検材における超音波の波
長λにより決定され、ｒp＞Ｒp且つｒp≦√
λ／Ａ（Ａは２〜３の数値）を満足する値。[Claims] 1. For each quadrant of the X-Y orthogonal coordinate axis that divides the circular contact surface of the probe into four equal parts, Y=R p e〓〓 and X=R p e
An ultrasonic probe characterized by drawing curves such as 〓〓 and using a substantially pincushion-shaped area surrounded by each of these curves as an electrode. However, the value R p is the radius of the vibrator, and the value r p
is determined by the maximum flaw detection distance l and the wavelength λ of the ultrasonic wave in the test material, r p > R p and r p ≦√
A value that satisfies λ/A (A is a numerical value of 2 to 3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12653280A JPS5752299A (en) | 1980-09-11 | 1980-09-11 | Ultrasonic probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12653280A JPS5752299A (en) | 1980-09-11 | 1980-09-11 | Ultrasonic probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5752299A JPS5752299A (en) | 1982-03-27 |
| JPS6210384B2 true JPS6210384B2 (en) | 1987-03-05 |
Family
ID=14937527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12653280A Granted JPS5752299A (en) | 1980-09-11 | 1980-09-11 | Ultrasonic probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5752299A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3008860U (en) * | 1994-06-14 | 1995-03-20 | 杉山金属株式会社 | Electric heating board |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2758930B2 (en) * | 1989-06-27 | 1998-05-28 | 株式会社トキメック | Ultrasonic probe |
| JP7627110B2 (en) * | 2020-12-01 | 2025-02-05 | Tdk株式会社 | Piezoelectric transducers and ultrasonic transducers |
-
1980
- 1980-09-11 JP JP12653280A patent/JPS5752299A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3008860U (en) * | 1994-06-14 | 1995-03-20 | 杉山金属株式会社 | Electric heating board |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5752299A (en) | 1982-03-27 |
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