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JPS6212846B2 - - Google Patents
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JPS6212846B2 - - Google Patents

Info

Publication number
JPS6212846B2
JPS6212846B2 JP54045991A JP4599179A JPS6212846B2 JP S6212846 B2 JPS6212846 B2 JP S6212846B2 JP 54045991 A JP54045991 A JP 54045991A JP 4599179 A JP4599179 A JP 4599179A JP S6212846 B2 JPS6212846 B2 JP S6212846B2
Authority
JP
Japan
Prior art keywords
diffraction grating
spectral image
dispersion
positive lens
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54045991A
Other languages
Japanese (ja)
Other versions
JPS55138621A (en
Inventor
Yoshishige Nagayama
Kazuo Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP4599179A priority Critical patent/JPS55138621A/en
Publication of JPS55138621A publication Critical patent/JPS55138621A/en
Publication of JPS6212846B2 publication Critical patent/JPS6212846B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Description

【発明の詳細な説明】 本発明は、回折格子を2段用いた分光器、いわ
ゆるダブルモノクロメーターに関し、特にそのう
ちの零分散型のものに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a spectrometer using two stages of diffraction gratings, a so-called double monochromator, and particularly to a zero-dispersion type spectrometer.

ダブルモノクロメーターとしては加分散型のも
のと零分散型のものとが知られており、前者は分
散を2重に拡大させるのに対し、後者は1度分散
させた光を再び分散のない状態に戻すためのもの
で逆分散ともいわれている。従来の零分散型ダブ
ルモノクロメーターとして、凹面回折格子を用い
たものの概略構成を第1図に示す。入口スリツト
S1から入射した光は第1の凹面回折格子G1によ
り反射かつ分散され、中間スリツトS2の位置にス
ペクトル像Iを形成する。そしてこの光は第2の
凹面回折格子G2に達し、ここで反射され、逆分
散の作用を受け出口スリツトS3より射出する。こ
こで、全ての波長に対して零分散にするために
は、2つの凹面回折格子G1,G2による線分散が
等しいことが必要であり、それぞれの格子定数及
び収斂作用が等しくなければならない。また両凹
面回折格子の中間スリツトS2に関する対称性を保
ちつつ、例えば図中の矢印方向に、それぞれを同
時に回転することによつて中間スリツトS2内に形
成されるスペクトル像の波長域が変わること、さ
らに、中間スリツトの位置に種々の絞りを設ける
ことによつて、特定波長の光だけを取り出し又は
除くことができることは周知である。
Two types of double monochromators are known: additive-dispersion type and zero-dispersion type.The former doubles the dispersion, while the latter returns the once-dispersed light to a state without dispersion. It is also called inverse dispersion. FIG. 1 shows a schematic configuration of a conventional zero-dispersion double monochromator using a concave diffraction grating. entrance slit
The light incident from S 1 is reflected and dispersed by the first concave diffraction grating G 1 to form a spectral image I at the intermediate slit S 2 . This light then reaches the second concave diffraction grating G2 , is reflected there, is subjected to the effect of inverse dispersion, and exits from the exit slit S3 . Here, in order to achieve zero dispersion for all wavelengths, it is necessary that the linear dispersion by the two concave diffraction gratings G 1 and G 2 be equal, and the lattice constant and convergence effect of each must be equal. . In addition, by simultaneously rotating each of the biconcave diffraction gratings in the direction of the arrow in the figure while maintaining symmetry with respect to the intermediate slit S2 , the wavelength range of the spectral image formed within the intermediate slit S2 can be changed. Furthermore, it is well known that by providing various apertures at the intermediate slit positions, it is possible to extract or exclude only light of specific wavelengths.

ところが、中間スリツトS2の位置で光軸外にス
ペクトル像を形成する長波長光λ及び短波長光
λは回折角が異なるため、第2凹面回折格子
G2に達する時にはかなり大きな幅に広がる。こ
のため、これらの発散光を全て出口スリツトS3
集光するためには、第2凹面回折格子G2は図中
点線で示すごとく著しく大きくなくてはならな
い。さもなければ、多大のビグネツテイングが生
ずることになり、結果的には広い波長範囲にわた
つて零分散を行なうことが不可能であつた。
However, since the long wavelength light λ 1 and the short wavelength light λ 2 that form a spectral image off the optical axis at the position of the intermediate slit S 2 have different diffraction angles, the second concave diffraction grating
By the time it reaches G 2 , it has widened considerably. Therefore, in order to condense all of these diverging lights onto the exit slit S3 , the second concave diffraction grating G2 must be extremely large as shown by the dotted line in the figure. Otherwise, a large amount of vignetting would occur and, as a result, it would be impossible to achieve zero dispersion over a wide wavelength range.

しかも、出口スリツトS3では短波長光と長波長
光とが異なつた方向で射出するため、出口スリツ
トS3に続く図示なき各種測定装置でのビグネツテ
イングをも生ずることとなり、極めて不都合であ
つた。
Furthermore, since the short wavelength light and the long wavelength light are emitted from the exit slit S3 in different directions, vignetting occurs in various measuring devices (not shown) following the exit slit S3 , which is extremely inconvenient.

本発明の目的は、上述の欠点を解決すべく、広
い波長域にわたつて有効な小型でビグネツテイン
グがなく、しかも波長による指向性が無い優れた
零分散型分光器を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide an excellent zero-dispersion spectrometer which is effective over a wide wavelength range, is compact, has no vignetting, and has no wavelength-based directivity.

以下、本発明を実施例に基づいて説明する。第
2図は本発明による一実施例の概略構成図であ
り、第1図と同一の番号を付したものは同一の部
材を表わす。
Hereinafter, the present invention will be explained based on examples. FIG. 2 is a schematic diagram of an embodiment of the present invention, and the same numbers as in FIG. 1 represent the same members.

第2図に示すごとく、本実施例では互いに等し
い第1と第2の平凸正レンズL1,L2がレンズ平
面部を対向して中間スリツトS2に関して対称に配
置され、両レンズの合成系によつて2つの凹面回
折格子は互いに共役である。また、2つの正レン
ズL1,L2の合成系によるスペクトル線Iの合成
結像倍率γはγ=1である。この点第3図を用い
て詳述する。まず、第1凹面回折格子G1による
スペクトル像Iは、第1正レンズL1により光軸
方向で結像位置を変えることなくβ倍のスペクト
ル像I′となる。ここで光軸方向に結像位置を変え
ることのない条件は、第1の平凸正レンズL1
は以下のようになる。第4図に示すごとく、この
平凸レンズの焦点距離を、中心厚をd、屈折率
をn、スペクトル像iまでの距離をlとすると、
ニユートンの公式より、 (+d+l)×(−d/n−l)= 即ち、 d2+{(n+1)l−(n−1)}d+nl2=0 である。この時の倍率βは β=/+d+l である。
As shown in FIG. 2, in this embodiment, first and second plano-convex positive lenses L 1 and L 2 , which are equal to each other, are arranged symmetrically with respect to the intermediate slit S 2 with their flat surfaces facing each other, and the combination of both lenses is Depending on the system, the two concave gratings are conjugate to each other. Further, the composite imaging magnification γ of the spectral line I by the composite system of the two positive lenses L 1 and L 2 is γ=1. This point will be explained in detail using FIG. First, the spectral image I produced by the first concave diffraction grating G 1 becomes a β-times spectral image I' by the first positive lens L 1 without changing the imaging position in the optical axis direction. Here, the conditions for not changing the imaging position in the optical axis direction are as follows for the first plano-convex positive lens L1 . As shown in Fig. 4, the focal length of this plano-convex lens is: d is the center thickness, n is the refractive index, and l is the distance to the spectral image i.
From Newton's formula, (+d+l)×(-d/n-l)= 2 , that is, d2 +{(n+1)l-(n-1)}d+ nl2 =0. The magnification β at this time is β=/+d+l.

このようにして形成されるスペクトル像I′は、
さらに第2の平凸正レンズL2により光軸方向の
結像位置を変えることなく1/β倍のスペクトル
像Iとなる。従つて、両レンズL1,L2の合成系
に関してスペクトルの合成倍率γはγ=1にな
り、第1凹面回折格子G1による当初のスペクト
ル像は両レンズL1,L2の作用を受けた後のスペ
クトル像と一致する。
The spectral image I′ formed in this way is
Further, the second plano-convex positive lens L2 produces a 1/β-times spectral image I without changing the imaging position in the optical axis direction. Therefore, for the composite system of both lenses L 1 and L 2 , the spectrum composite magnification γ becomes γ = 1, and the initial spectral image by the first concave diffraction grating G 1 is affected by the effects of both lenses L 1 and L 2 . It matches the spectral image after

このような構成により、第2図のごとく2つの
凹面回折格子G1,G2、入力スリツトS1、出口ス
リツトS3、両平凸正レンズL1,L2は中間スリツ
トS2即ちスペクトル像に関して完全に対称とな
る。従つて、第1凹面回折格子G1で回折された
光束は、これと等しい大きさの第2凹面回折格子
G2に全て受け入れられ、逆分散の作用を受け、
ビグネツテイングのない完全な零分散が達成され
る。しかも上記の対称性のために、出口スリツト
S3から射出する光線は、入口スリツトS1に入射す
る光線と同様にあらゆる波長に対して等しい指向
性を有する。
With this configuration, as shown in Fig. 2, the two concave diffraction gratings G 1 and G 2 , the input slit S 1 , the exit slit S 3 , and the double plano-convex positive lenses L 1 and L 2 are connected to the intermediate slit S 2 , that is, the spectral image. It is completely symmetrical with respect to. Therefore, the light beam diffracted by the first concave diffraction grating G1 is transmitted to the second concave diffraction grating having the same size.
All are accepted by G 2 and are affected by inverse dispersion,
Completely zero dispersion without vignetting is achieved. Moreover, due to the above symmetry, the exit slit
The light beam emerging from S 3 has the same directivity for all wavelengths as the light beam entering the entrance slit S 1 .

本実施例では中間スリツトの両側には平凸正レ
ンズを配置することとしたが、正レンズでありさ
えすればこれに限られるものではなく、上記の条
件、即ち、2つの正レンズの合成系に関して2つ
の回折格子が互いに共役であること、及びスペク
トル像の合成倍率γがγ=1であることを満たす
構成とすれば十分であり、両正レンズが必ずしも
等しい必要もない。
In this embodiment, plano-convex positive lenses are arranged on both sides of the intermediate slit, but the invention is not limited to this as long as it is a positive lens. It is sufficient to have a configuration that satisfies that the two diffraction gratings are conjugate with each other and that the composite magnification γ of the spectral images is γ=1, and both positive lenses do not necessarily have to be equal.

また、上記実施例では凹面回折格子を用いた
が、古くから知られる平面回折格子と凹面鏡との
組合せからなる構成においても、本発明は同様に
有効である。この場合にも中間スリツトの両側に
2個の正レンズを配置し、スペクトル像について
は上記実施例と同様に合成系で等倍とする。そし
て、この場合には2つの平面回折格子間の光路中
に2つの凹面鏡と2つの正レンズとが介在するこ
とになるが、これら4者の合成系に関して2つの
平面回折格子が共役になるように構成すればよ
く、これによつて光学系は上記実施例と同様に中
間スリツトS2に関して対称となる。
Furthermore, although a concave diffraction grating is used in the above embodiment, the present invention is equally effective in a configuration consisting of a combination of a plane diffraction grating and a concave mirror, which have been known for a long time. In this case as well, two positive lenses are placed on both sides of the intermediate slit, and the spectral image is made equal in size by the synthesis system as in the above embodiment. In this case, two concave mirrors and two positive lenses are interposed in the optical path between the two plane diffraction gratings, but the two plane diffraction gratings are conjugated with respect to the composite system of these four. By doing so, the optical system becomes symmetrical with respect to the intermediate slit S2 , as in the above embodiment.

以上のごとく、本発明によれば、小型な構成で
ありながらビグネツテイングがなく、波長による
指向性の無い優れた零分散型分光器が達成され
た。また、この零分散型分光器は、広い波長範囲
で任意に選択のできるバンドパスフイルターとし
て用いることができ、その立上り、立下りは極め
てシヤープで、フラツトな特性を有するものであ
る。
As described above, according to the present invention, an excellent zero-dispersion spectrometer without vignetting and without wavelength-based directivity despite its compact configuration has been achieved. Furthermore, this zero-dispersion spectrometer can be used as a bandpass filter that can be arbitrarily selected over a wide wavelength range, and its rise and fall are extremely sharp and have flat characteristics.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は凹面回折格子を用いた従来の零分散型
ダブルモノクロメーターの概略構成、第2図は本
発明による実施例の概略構成、第3図は第2図の
部分拡大図、第4図は第3図の説明図である。 主要部分の符号の説明、S1……入口スリツト、
L1……第1の平凸正レンズ、S2……中間スリツ
ト、L2……第2の平凸正レンズ、S3……出口ス
リツト、G1……第1の凹面回折格子、G2……第
2の凹面回折格子。
Fig. 1 is a schematic configuration of a conventional zero-dispersion double monochromator using a concave diffraction grating, Fig. 2 is a schematic configuration of an embodiment according to the present invention, Fig. 3 is a partially enlarged view of Fig. 2, and Fig. 4 is an explanatory diagram of FIG. 3. Explanation of symbols of main parts, S 1 ... Entrance slit,
L1 ...First plano-convex positive lens, S2 ...Intermediate slit, L2 ...Second plano-convex positive lens, S3 ...Exit slit, G1 ...First concave diffraction grating, G 2 ...Second concave diffraction grating.

Claims (1)

【特許請求の範囲】 1 入射光束のスペクトル像を形成するための第
1の回折格子と、該スペクトル像の光束を逆分散
するための第2の回折格子と、前記スペクトル像
の位置に設けられた中間スリツトとを有する零分
散型分光器において、 前記中間スリツトの両側の近傍に第1正レンズ
と第2正レンズとをそれぞれ配置し、前記第1回
折格子と第2回折格子との間に介在する前記両正
レンズを含む合成系に関して前記両回折格子を共
役になすとともに、前記スペクトル像の前記両正
レンズによる合成倍率γをγ=1になし、前記第
1回折格子によるスペクトル像と前記両正レンズ
を含む合成系の作用を受けた後のスペクトル像と
を一致させる構成としたことを特徴とする零分散
型分光器。
[Claims] 1. A first diffraction grating for forming a spectral image of an incident light beam, a second diffraction grating for inversely dispersing the light beam of the spectral image, and a second diffraction grating provided at the position of the spectral image. In a zero-dispersion spectrometer having an intermediate slit, a first positive lens and a second positive lens are respectively disposed near both sides of the intermediate slit, and a first positive lens and a second positive lens are respectively arranged between the first diffraction grating and the second diffraction grating. Both the diffraction gratings are made conjugate with respect to a synthetic system including the intervening positive lenses, and the composite magnification γ of the spectral image by the positive lenses is set to γ=1, so that the spectral image by the first diffraction grating and the A zero-dispersion spectrometer characterized by having a configuration that matches a spectral image after being subjected to the action of a synthesis system including a bipositive lens.
JP4599179A 1979-04-17 1979-04-17 Zero dispersion type spectroscope Granted JPS55138621A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4599179A JPS55138621A (en) 1979-04-17 1979-04-17 Zero dispersion type spectroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4599179A JPS55138621A (en) 1979-04-17 1979-04-17 Zero dispersion type spectroscope

Publications (2)

Publication Number Publication Date
JPS55138621A JPS55138621A (en) 1980-10-29
JPS6212846B2 true JPS6212846B2 (en) 1987-03-20

Family

ID=12734594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4599179A Granted JPS55138621A (en) 1979-04-17 1979-04-17 Zero dispersion type spectroscope

Country Status (1)

Country Link
JP (1) JPS55138621A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6448656U (en) * 1987-09-18 1989-03-27

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58191936A (en) * 1982-04-30 1983-11-09 ハママツ・システムズ Monochroic picture device
JPH07107498B2 (en) * 1985-04-09 1995-11-15 株式会社日立製作所 Multi-wavelength simultaneous photometer
EP0358830A1 (en) * 1988-09-12 1990-03-21 Instruments S.A. - Division Jobin-Yvon Low noise optical system
US5835200A (en) * 1990-04-24 1998-11-10 Gersan Establishment Method and apparatus for examining an object

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039693Y1 (en) * 1970-02-25 1975-11-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6448656U (en) * 1987-09-18 1989-03-27

Also Published As

Publication number Publication date
JPS55138621A (en) 1980-10-29

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