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JPS6216377B2 - - Google Patents
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JPS6216377B2 - - Google Patents

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Publication number
JPS6216377B2
JPS6216377B2 JP3250680A JP3250680A JPS6216377B2 JP S6216377 B2 JPS6216377 B2 JP S6216377B2 JP 3250680 A JP3250680 A JP 3250680A JP 3250680 A JP3250680 A JP 3250680A JP S6216377 B2 JPS6216377 B2 JP S6216377B2
Authority
JP
Japan
Prior art keywords
sample gas
adsorbent
electrode
water
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3250680A
Other languages
Japanese (ja)
Other versions
JPS56128451A (en
Inventor
Toshuki Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyoto Electronics Manufacturing Co Ltd
Original Assignee
Kyoto Electronics Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyoto Electronics Manufacturing Co Ltd filed Critical Kyoto Electronics Manufacturing Co Ltd
Priority to JP3250680A priority Critical patent/JPS56128451A/en
Publication of JPS56128451A publication Critical patent/JPS56128451A/en
Publication of JPS6216377B2 publication Critical patent/JPS6216377B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Description

【発明の詳細な説明】 この発明は試料ガス中の水分濃度の測定法に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for measuring moisture concentration in a sample gas.

従来、排ガス等、試料ガス中の水分濃度測定用
の計器には、自動化されたものがなく、手間と労
力を要していた。また、連続測定も不可能なため
実用的ではなかつた。
Conventionally, there were no automated instruments for measuring the moisture concentration in sample gases such as exhaust gas, which required time and effort. Furthermore, continuous measurement is not possible, so it is not practical.

そこで、この発明は、上記欠点に鑑み、これを
改良して、連続的に自動測定ができる測定装置を
提供するものである。
Therefore, in view of the above-mentioned drawbacks, the present invention aims to improve this and provide a measuring device capable of continuous automatic measurement.

この発明は水分の持つ大きな誘電率に着目し、
平行電極間に試料ガスを通し、この電極間の電気
容量を測定して水分含有率の測定を行なうもので
ある。ところで、液体状の水分の誘電率は80程度
と大きな値を持つているが、気体状の時は非常に
小さな値となる。従つて、コンデンサーを形成す
る極板間に試料を満たし、そのキヤパシタンスか
ら水分量を測る方法では充分な感度が得られな
い。そこで、コンデンサーを形成する極板間に水
分吸着能の大きな吸着材を充填し、これに試料ガ
スを通す。このようにすると水分濃度に応じた吸
着平衡に達する。この時、水分は濃縮された形で
吸着材に保持され、気体試料でも水分濃度に応じ
たキヤパシタンス変化が得られ、予じめ水分濃度
とキヤパシタンスとの対応を求めておけば、試料
ガス中の水分濃度の連続測定ができる。ところ
で、この吸着材を挾んで対向する電極の形状であ
るが、感度を良くするため、吸着材を薄くして電
極板の対向間隔を小さくすることが好ましい。し
かし、吸着材の間隔を狭くすると、試料ガスが流
しにくくなつて応答速度が低下する。そこで、こ
の発明は、第1図に示すように、多孔質の導電板
1,1を、薄い吸着材2を間在させて対向させ
て、一対の測定電極aとした。この多孔質の電極
板1,1を介して吸着材2に試料ガス3を通すの
である。多孔質の導電板1,1は耐腐食性に秀れ
た材質が好ましく、例えば、ステンレスを多孔質
にしたものを用いる。また吸着材2は、水分吸着
能良好な材質、例えば活性アルミナが適してい
る。この吸着材2の厚さは、例えば0.5mm程度に
すればよい。このように、吸着材の厚さが薄く電
極間隔が狭く、電極自体に直接に試料ガスを供給
できるので、測定の応答は速くなる。以下この測
定電極aの具体的構成例について説明する。
This invention focuses on the large dielectric constant of water,
The water content is measured by passing a sample gas between parallel electrodes and measuring the capacitance between the electrodes. By the way, the dielectric constant of liquid water has a large value of about 80, but when it is in gaseous form it has a very small value. Therefore, sufficient sensitivity cannot be obtained by filling a sample between the electrode plates forming a capacitor and measuring the water content from the capacitance of the sample. Therefore, an adsorbent with high moisture adsorption capacity is filled between the electrode plates that form the condenser, and the sample gas is passed through this. In this way, adsorption equilibrium is reached depending on the water concentration. At this time, water is retained in the adsorbent in a concentrated form, and the capacitance of the gas sample changes according to the water concentration. Continuous measurement of moisture concentration is possible. By the way, regarding the shape of the electrodes that face each other with this adsorbent sandwiched between them, in order to improve sensitivity, it is preferable to make the adsorbent thinner and to reduce the spacing between the opposing electrode plates. However, if the spacing between the adsorbents is narrowed, it becomes difficult for the sample gas to flow and the response speed decreases. Therefore, in the present invention, as shown in FIG. 1, porous conductive plates 1, 1 are made to face each other with a thin adsorbent 2 interposed therebetween to form a pair of measurement electrodes a. The sample gas 3 is passed through the adsorbent 2 through the porous electrode plates 1, 1. The porous conductive plates 1, 1 are preferably made of a material with excellent corrosion resistance; for example, porous stainless steel is used. Further, the adsorbent 2 is suitably made of a material with good moisture adsorption ability, such as activated alumina. The thickness of this adsorbent 2 may be, for example, about 0.5 mm. In this way, the thickness of the adsorbent is thin and the spacing between the electrodes is narrow, and the sample gas can be supplied directly to the electrodes themselves, resulting in faster measurement response. A specific example of the configuration of the measurement electrode a will be described below.

上記測定電極aは、耐腐食性を考慮して第2図
に示すようなチタン製の電極ケースb内に組込ま
れる。同図において、4はチタン製の電極ケース
本体であつて、試料ガスの吸気孔5及び排気孔6
と、排気側空気室7が穿設され、吸気孔5と同軸
に円筒部材8が溶接され、反対側に植込みボルト
9が溶接固定されている。また、10はチタン製
の電極支持体であつて、吸気用の蜂の巣状の孔1
1と吸気側空気室12を持ち、後述する電極押え
枠を螺合させるネジ孔13、前記円筒部材8が挿
嵌される貫通孔14と植込みボルト9が挿通され
る貫通孔15が穿設されている。また、16はチ
タン製の電極ケース蓋体であつて、吸気された試
料ガスの案内孔16′と、前記植込みボルト9を
挿嵌させる貫通孔17が穿設されている。上記電
極ケース本体4と電極支持体10と電極ケース蓋
体16とは、円筒部材8及び植込みボルト9で位
置決めして、ナツト9aで締付け固定される。ま
た19はチタン製の電極押え枠であつて、吸気側
の第1の押え枠19、排気側の第2の押え枠2
0、絶縁スリーブ21、締付けボルト22とから
構成されている。測定電極aは、テフロンのシー
ル部材23と共に、第1及び第2の押え枠19,
20間に嵌め込まれ、締付ボルト22で固定され
る。また24は、電極ケース本体4に嵌め込まれ
る電極取出し体であつて、テフロン製の電極取出
し部25、電極取出し部の中央の孔26にネジ止
めされた接点体ホルダー27、接点体ホルダー2
7内に保持されスプリング28により多孔質の導
電板1への押圧力を与えられた接点体29、電極
取出し部25を電極ケース本体4に固定するボル
ト30、接点体ホルダー27を外部と電気的に接
続するボルト31、ボルト30,31に引出され
た電極を外部線と接続するための外部端子32,
33とから構成されている。
The measurement electrode a is incorporated into a titanium electrode case b as shown in FIG. 2 in consideration of corrosion resistance. In the figure, reference numeral 4 denotes an electrode case body made of titanium, which includes an intake hole 5 and an exhaust hole 6 for the sample gas.
Then, an exhaust side air chamber 7 is bored, a cylindrical member 8 is welded coaxially with the intake hole 5, and a stud 9 is welded and fixed to the opposite side. Reference numeral 10 denotes an electrode support made of titanium, which has honeycomb-shaped holes 1 for air intake.
1 and an intake side air chamber 12, a screw hole 13 into which an electrode holding frame (described later) is screwed, a through hole 14 into which the cylindrical member 8 is inserted, and a through hole 15 through which the stud 9 is inserted are bored. ing. Reference numeral 16 denotes an electrode case lid made of titanium, which has a guide hole 16' for the sample gas taken in and a through hole 17 into which the stud 9 is inserted. The electrode case body 4, electrode support 10, and electrode case lid 16 are positioned using the cylindrical member 8 and the stud bolt 9, and are tightened and fixed with a nut 9a. Reference numeral 19 denotes electrode holding frames made of titanium, including a first holding frame 19 on the intake side and a second holding frame 2 on the exhaust side.
0, an insulating sleeve 21, and a tightening bolt 22. The measurement electrode a is attached to the first and second holding frames 19, together with the Teflon sealing member 23.
20 and fixed with tightening bolts 22. Reference numeral 24 denotes an electrode extraction body fitted into the electrode case body 4, which includes an electrode extraction part 25 made of Teflon, a contact body holder 27 screwed into a hole 26 in the center of the electrode extraction part, and a contact body holder 2.
The contact body 29 is held in the housing 7 and is pressed against the porous conductive plate 1 by the spring 28, the bolt 30 fixes the electrode extraction part 25 to the electrode case body 4, and the contact body holder 27 is electrically connected to the outside. an external terminal 32 for connecting the electrodes drawn out to the bolts 30 and 31 to an external line;
It is composed of 33.

この構成において、吸気孔5から吸気された試
料ガスは、円筒部材8、案内孔16′、蜂の巣状
の孔11を経て、吸気側空気室12に入る。そし
て、多孔質の導電板1から吸着材2を通つて排気
側空気室7に抜け排気孔6から排出されて行く。
この結果、吸着材2は試料ガス中の水分濃度に対
応した含水率を持つ。
In this configuration, the sample gas taken in through the suction hole 5 passes through the cylindrical member 8, the guide hole 16', and the honeycomb-shaped hole 11, and enters the suction side air chamber 12. Then, the air passes from the porous conductive plate 1 through the adsorbent 2 to the exhaust side air chamber 7 and is discharged from the exhaust hole 6.
As a result, the adsorbent 2 has a moisture content corresponding to the moisture concentration in the sample gas.

また、吸着材2を挾んだ一対の導電板1,1は
夫々、外部端子32,33に導出されている。す
なわち、一方の導電板1は接点体29、接点体ホ
ルダー27、ボルト31を介して、外部端子32
に接続され、また、他方は第1の押え枠19、電
極支持体10、植込みボルト9、電極ケース本体
4、ボルト30、外部端子33の順に接続されて
いる。なお、これら電極導出用の導電路は、相互
にテフロン製の絶縁スリーブ21、テフロン製の
シール部材23、テフロン製の電極取出し部25
によつて絶縁が保たれている。
Further, the pair of conductive plates 1, 1 sandwiching the adsorbent 2 are led out to external terminals 32, 33, respectively. That is, one conductive plate 1 is connected to an external terminal 32 via a contact body 29, a contact body holder 27, and a bolt 31.
The other end is connected to the first holding frame 19, the electrode support 10, the stud 9, the electrode case body 4, the bolt 30, and the external terminal 33 in this order. Note that these conductive paths for leading out the electrodes are connected to an insulating sleeve 21 made of Teflon, a sealing member 23 made of Teflon, and an electrode extraction part 25 made of Teflon.
Insulation is maintained by

このように構成された電極bは、第3図に示す
測定装置c内に組込まれる。同図において、34
は煙道、35は煙道34から試料ガスを吸引する
プローブである。プローブ35内には、ヒーター
36及びサーモスタツト37が組込まれている。
The electrode b configured in this way is incorporated into the measuring device c shown in FIG. In the same figure, 34
35 is a probe that sucks the sample gas from the flue 34. A heater 36 and a thermostat 37 are incorporated within the probe 35.

プローブ35先端の吸入孔39で吸引された試
料ガスは加熱導管40を介して、測定装置C内に
引込まれる。なお、吸入孔39は挿入部ヒーター
41によつて、また加熱導管40は加熱導管温調
器42によつて、結露しないように保温されてお
り、試料ガスは成分比を変えないで測定装置Cの
恒温槽43内に引き込まれる。恒温槽43内に
は、測定用バルブ44、熱交換器45、前記測定
電極aを組込んだ電極ケースb、較正用の蒸発器
46、蒸発器46内のサーモスタツト47及びヒ
ータ48、恒温器温調器49及びそのヒーター5
0が配設されている。なお、前記蒸発器46は校
正用の標準ガス発生機構dを構成するもので、純
水タンク51から自動水分定量注入器52を介し
て、水分が任意量供給可能にされまた脱水用シリ
カゲル筒53とダストフイルタ54を介して外気
が供給可能にされている。この蒸発器の動作は蒸
発器バルブ55の開閉により制御される。次に、
恒温槽の排気側において、56はドレイントラツ
プ、57はドレインタンク、58は電子除湿器、
59は二次フイルタ、60は試料ポンプ、61は
バツフアタンク、62は流量調整バルブ、63は
流量計、64は試料ガス出口である。
The sample gas sucked through the suction hole 39 at the tip of the probe 35 is drawn into the measuring device C via the heating conduit 40. The suction hole 39 is kept warm by an insertion part heater 41 and the heating conduit 40 is kept warm by a heating conduit temperature controller 42 to prevent condensation, and the sample gas is heated to the measuring device C without changing the component ratio. is drawn into the constant temperature bath 43. Inside the constant temperature bath 43, there are a measurement valve 44, a heat exchanger 45, an electrode case b incorporating the measurement electrode a, an evaporator 46 for calibration, a thermostat 47 and a heater 48 in the evaporator 46, and a constant temperature chamber. Temperature controller 49 and its heater 5
0 is placed. The evaporator 46 constitutes a standard gas generation mechanism d for calibration, and can be supplied with an arbitrary amount of water from a pure water tank 51 via an automatic water metering injector 52, and a silica gel cylinder 53 for dehydration. Outside air can be supplied through a dust filter 54. The operation of this evaporator is controlled by opening and closing an evaporator valve 55. next,
On the exhaust side of the thermostatic chamber, 56 is a drain trap, 57 is a drain tank, 58 is an electronic dehumidifier,
59 is a secondary filter, 60 is a sample pump, 61 is a buffer tank, 62 is a flow rate adjustment valve, 63 is a flow meter, and 64 is a sample gas outlet.

この機構は測定の終つた試料ガスを脱水して、
試料ポンプ60で排出するもので、この排出流量
は、流量計63で測定される。流量は流量調整バ
ルブ62にて設定することができ、この設定量は
乾燥ガス基準になる。この結果、プローブ34で
吸引された試料ガスは乾燥ガス基準で計量され、
大気汚染防止法の規制単位に適合するので測定が
便利である。
This mechanism dehydrates the sample gas after measurement.
The sample pump 60 discharges the sample, and the discharge flow rate is measured by a flow meter 63. The flow rate can be set using the flow rate adjustment valve 62, and this set amount is based on the dry gas. As a result, the sample gas aspirated by the probe 34 is measured on a dry gas basis,
It is convenient to measure because it conforms to the regulatory unit of the Air Pollution Control Act.

また、この測定装置は前記標準ガス発生機構d
を備えているので、測定用バルブ44を閉じ、蒸
発器バルブ55を開いた状態で運転することによ
り、感度の校正が手動又は自動により容易に行な
える。
In addition, this measuring device also uses the standard gas generation mechanism d.
By operating with the measurement valve 44 closed and the evaporator valve 55 open, the sensitivity can be easily calibrated manually or automatically.

以上説明したように、この発明は水の吸着材を
間在させた対向する二枚の導電板間の電気容量を
測定して、試料ガス中の水分濃度に対応して吸着
材中に吸着された水分量を測定する試料ガス中の
水分濃度測定法において、対向する二枚の多孔質
の導電板で薄膜状とした水の吸着材の両側膜面を
挾持させ、かつ、試料ガスを吸着材に対して一方
の導電板の方から他方の導電板の方へ膜面に直交
させて通すように試料ガス通路を上記導電板で仕
切つたから、試料ガスを導電板を透過させて吸着
材の膜面に直交させて流通させることができ、し
かも吸着材の膜面を両側から導電板で挾持補強さ
せ得るため、吸着材を薄くすることが可能とな
り、試料ガス中の水分濃度に対する吸着材の水分
吸着平衡状態への所要時間が短縮でき、感度及び
応答速度を向上させることができる。また、この
発明方法は、物理測定のため、特に試薬を必要と
せず、流量変動があつても指示値に影響を与えな
い。
As explained above, this invention measures the capacitance between two opposing conductive plates with a water adsorbent interposed between them, and determines whether water is adsorbed into the adsorbent in accordance with the water concentration in the sample gas. In the water concentration measurement method in a sample gas, which measures the amount of moisture in a sample gas, two opposing porous conductive plates sandwich the film surfaces of a water adsorbent in the form of a thin film, and the sample gas is transferred to the adsorbent. The sample gas passage was partitioned by the conductive plates so that it passed perpendicularly to the membrane surface from one conductive plate to the other. The adsorbent can be passed perpendicularly to the membrane surface, and the membrane surface of the adsorbent can be sandwiched and reinforced with conductive plates from both sides, making it possible to make the adsorbent thinner, making it possible to reduce the adsorption material's influence on the water concentration in the sample gas. The time required to reach a moisture adsorption equilibrium state can be shortened, and sensitivity and response speed can be improved. Further, since the method of the present invention is a physical measurement, no reagent is particularly required, and even if the flow rate fluctuates, the indicated value is not affected.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の測定方法の原理を説明する
測定電極の側断面図、第2図は測定電極を組込ん
だ電極ケースの側断面図、第3図は測定装置全体
のブロツク図である。 1……多孔質の導電板、2……吸着材、3……
試料ガス、4……電極ケース本体、5……吸気
孔、6……排気孔、10……電極支持体、16…
…電極ケース蓋体、18……電極押え枠、24…
…電極取出し部、33,34……外部端子、34
……煙道、35……プローブ、43……恒温槽、
58……電子除温器、60……試料ポンプ、62
……流量調整バルブ、63……流量計、a……測
定電極、b……電極ケース、C……測定装置、d
……標準ガス発生機構。
Fig. 1 is a side sectional view of a measuring electrode to explain the principle of the measuring method of the present invention, Fig. 2 is a side sectional view of an electrode case incorporating the measuring electrode, and Fig. 3 is a block diagram of the entire measuring device. . 1...Porous conductive plate, 2...Adsorbent, 3...
Sample gas, 4... Electrode case body, 5... Intake hole, 6... Exhaust hole, 10... Electrode support, 16...
...Electrode case lid, 18... Electrode holding frame, 24...
... Electrode extraction part, 33, 34 ... External terminal, 34
... Flue, 35 ... Probe, 43 ... Constant temperature chamber,
58...electronic dehumidifier, 60...sample pump, 62
...Flow rate adjustment valve, 63...Flowmeter, a...Measuring electrode, b...Electrode case, C...Measuring device, d
...Standard gas generation mechanism.

Claims (1)

【特許請求の範囲】[Claims] 1 水の吸着材を間在させた対向する二枚の導電
板間の電気容量を測定して、試料ガス中の水分濃
度に対応して吸着材中に吸着された水分量を測定
する試料ガス中の水分濃度測定法において、対向
する二枚の多孔質の導電板で薄膜状とした水の吸
着材の両側膜面を挾持させ、かつ、試料ガスを吸
着材に対して一方の導電板の方から他方の導電板
の方へ膜面に直交させて通すように試料ガス通路
を上記導電板で仕切つたことを特徴とする試料ガ
ス中の水分濃度測定法。
1. A sample gas in which the capacitance between two opposing conductive plates with a water adsorbent interposed therebetween is measured to determine the amount of water adsorbed in the adsorbent according to the water concentration in the sample gas. In the method for measuring the water concentration in water, two facing porous conductive plates sandwich the membrane surfaces of a thin film of water adsorbent, and the sample gas is applied to the adsorbent on one of the conductive plates. A method for measuring moisture concentration in a sample gas, characterized in that a sample gas passage is partitioned by the conductive plate so as to pass perpendicularly to the membrane surface from one conductive plate to the other conductive plate.
JP3250680A 1980-03-13 1980-03-13 Measuring method for concentration of water in sample gas Granted JPS56128451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3250680A JPS56128451A (en) 1980-03-13 1980-03-13 Measuring method for concentration of water in sample gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3250680A JPS56128451A (en) 1980-03-13 1980-03-13 Measuring method for concentration of water in sample gas

Publications (2)

Publication Number Publication Date
JPS56128451A JPS56128451A (en) 1981-10-07
JPS6216377B2 true JPS6216377B2 (en) 1987-04-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP3250680A Granted JPS56128451A (en) 1980-03-13 1980-03-13 Measuring method for concentration of water in sample gas

Country Status (1)

Country Link
JP (1) JPS56128451A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453035U (en) * 1987-09-25 1989-03-31

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163419A (en) * 1982-03-16 1983-09-28 ポ−ル・コ−ポレ−シヨン Adsorption fractional distillation method and device automatically controlling cycle

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453035U (en) * 1987-09-25 1989-03-31

Also Published As

Publication number Publication date
JPS56128451A (en) 1981-10-07

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