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JPS6219367B2 - - Google Patents
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JPS6219367B2 - - Google Patents

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Publication number
JPS6219367B2
JPS6219367B2 JP57181242A JP18124282A JPS6219367B2 JP S6219367 B2 JPS6219367 B2 JP S6219367B2 JP 57181242 A JP57181242 A JP 57181242A JP 18124282 A JP18124282 A JP 18124282A JP S6219367 B2 JPS6219367 B2 JP S6219367B2
Authority
JP
Japan
Prior art keywords
furnace
base material
gas
transparent vitrification
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57181242A
Other languages
Japanese (ja)
Other versions
JPS5973443A (en
Inventor
Tsuneo Nakahara
Tsunehisa Kyodo
Nobuo Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Electric Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP18124282A priority Critical patent/JPS5973443A/en
Publication of JPS5973443A publication Critical patent/JPS5973443A/en
Publication of JPS6219367B2 publication Critical patent/JPS6219367B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146Furnaces therefor, e.g. muffle tubes, furnace linings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/30Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

【発明の詳細な説明】 本発明は光通信用フアイバの母材の製造法に関
し、特に母材中の残留水分量を極力少なくしなが
ら、かつ最適な屈折率分布に制御しつつ、連続的
に母材を製造する方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a base material for fibers for optical communications, and in particular, to a method for manufacturing a base material for fibers for optical communications, and in particular, to continuously manufacture a base material while minimizing the amount of residual moisture in the base material and controlling the refractive index distribution to an optimum. The present invention relates to a method of manufacturing a base material.

光伝送用ガラス母材を造る方法の一つに特公昭
49−145338号公報等に開示されている気相軸付け
法(VAD法)がある。ここで従来、実施されて
いるVAD法の概略を説明すると、第1図aに示
すように、容器1の下部に設けたバーナ2にガラ
ス微粒子の原料ガスや燃料用ガスおよびドーパン
トガスを供給し、バーナから出発物質3に向けて
火炎を吹き付け、ガラス微粒子のススをこの出発
物質3の下面に付着、堆積させ、出発物質3を回
転して引き上げながらこのガラス微粒子スス体を
成長させ、集合体4を造り、母材とするものであ
る。
Tokkosho is one of the methods of making glass base material for optical transmission.
There is a vapor phase axial attachment method (VAD method) disclosed in Publication No. 49-145338 and the like. To give an overview of the conventional VAD method, as shown in Fig. 1a, raw material gas for glass particles, fuel gas, and dopant gas are supplied to a burner 2 installed at the bottom of a container 1. , a flame is blown from the burner toward the starting material 3, so that the soot of glass fine particles is attached and deposited on the lower surface of the starting material 3, and while the starting material 3 is rotated and pulled up, this glass fine particle soot body is grown to form an aggregate. 4 is made and used as the base material.

このVAD法では低損失で半径方向に任意の屈
折率分布を有し、円周および長手方向に均一な組
成を有し安価な光伝送用フアイバーを得ることが
できると共に、この方法は原料収率が良く高純度
製品が得られ、最大の不純物である水分の除去も
VAD多孔質母材が均一微粒子集合体であるがゆ
えに焼結時、脱水が容易であることや、工程数が
少ないことなどの特徴があり、実用上大きな利点
を有する。
With this VAD method, it is possible to obtain an inexpensive optical transmission fiber with low loss, arbitrary refractive index distribution in the radial direction, and uniform composition in the circumferential and longitudinal directions. A high-purity product can be obtained, and the biggest impurity, water, can be removed.
Because the VAD porous base material is a uniform collection of fine particles, it has features such as easy dehydration during sintering and a small number of steps, which has great practical advantages.

その際、GeO2などのドーパントは中央部に多
く堆積し周辺部へ向うにしたがつて少なく堆積さ
せ、これによりドーパント濃度を所望の分布に形
成させ、第1図bに示すような屈折率分布のガラ
ス母材が得られる。図中、n0は石英ガラスの屈折
率レベル、△nはGeO2により増大した屈折率レ
ベルであり、αは△n=n〔1−(r/r)〓〕で示
さ れる屈折率分布曲線の指数である。このαは光フ
アイバにとつて重要な帯域特性に大きな影響を与
える要素であり、α=2.0前後が最適とされてお
り、使用波長域で、その値は微妙に変化する。例
えば0.85μmではα=2.0、1.30μmではα=1.80
とされている。更に近年、広帯域特性を有した低
損失の光フアイバの需要が20Km以上の無中継伝送
方式を軸に急増している。特に1.30μm帯で
0.8dB/Km以下でかつ帯域特性が800MHzKm以上
の特性を有するフアイバが望ましいとされてい
る。このような特性、低損失を確保するために
は、フアイバ中の残留水分量を0.1ppm以下、ま
た帯域特性を確保するためにはαをα±0.05以
内に制御する必要がある。
At this time, a large amount of dopant such as GeO 2 is deposited in the center and less toward the periphery, thereby forming the dopant concentration into a desired distribution, resulting in a refractive index distribution as shown in Figure 1b. of glass base material is obtained. In the figure, n 0 is the refractive index level of silica glass, △n is the refractive index level increased by GeO 2 , and α is the refractive index distribution expressed as △n=n[1-(r/r 0 )〓] is the index of the curve. This α is a factor that greatly affects the important band characteristics of optical fibers, and α = around 2.0 is considered optimal, and its value changes slightly depending on the wavelength range used. For example, at 0.85μm α=2.0, at 1.30μm α=1.80
It is said that Furthermore, in recent years, the demand for low-loss optical fibers with broadband characteristics has increased rapidly, mainly for non-repeater transmission systems over 20 km. Especially in the 1.30μm band
It is said that a fiber having a band characteristic of 0.8 dB/Km or less and a band characteristic of 800 MHzKm or more is desirable. In order to ensure such characteristics and low loss, it is necessary to control the amount of residual water in the fiber to 0.1 ppm or less, and to ensure band characteristics, it is necessary to control α within α 0 ±0.05.

しかしながら従来の公知方法では屈折率分布の
係数αを変化させる場合、原料ガス、ドーパント
ガス、燃焼用ガスの量比を微妙に変える必要があ
り、例えば1.30μm帯用のα値1.80±0.05より
0.85μm帯用のα値2.00±0.05に変更することは
非常に困難である。
However, in the conventional known method, when changing the coefficient α of the refractive index distribution, it is necessary to slightly change the ratio of the raw material gas, dopant gas, and combustion gas.
It is very difficult to change the α value to 2.00±0.05 for the 0.85 μm band.

本発明者等は先に、最適な屈折率分布を任意に
得られる光伝送用ガラス母材の製法として、ガラ
ス微粒子集合体を焼結して透明ガラス体とするに
際し、第2図に示すようにCl2/Heの雰囲気の1
つの炉21を用い、そこで焼結と同時に脱水なら
びにプロフアイル制御を行なう方法を提案した
(特願昭57−4901号)。図中、21が焼結炉、22
ガスバーナー、23出発物質、24集合体、25
排気口、26ヒーター、27Cl2/He供給口であ
る。
The present inventors previously developed a method for producing a glass base material for optical transmission that can arbitrarily obtain an optimal refractive index distribution, as shown in FIG. in an atmosphere of Cl 2 /He
proposed a method in which dehydration and profile control were performed simultaneously with sintering using two furnaces 21 (Japanese Patent Application No. 57-4901). In the figure, 21 is a sintering furnace, 22
gas burner, 23 starting materials, 24 aggregates, 25
They are an exhaust port, 26 heaters, and 27 Cl 2 /He supply ports.

このたび、本発明者等は脱水反応と揮散反応の
活性な領域を鋭意、研究の結果、次のようなこと
を見出した。スス体のカサ密度が0.15〜0.40g/
cm3の範囲のものでは、脱水反応は1000〜1500℃で
活性であり、この下限は脱水反応の活性化に由来
し、上限はスス体の収縮速度が脱水反応より上回
ることに由来する。一方、揮散反応は1200〜1400
℃で活性であり、下限は、 GeO2+2Cl2→GeCl4+O2 の反応の活性化に由来し、上限はスス体の収縮速
度が非常に速くGeO2の揮散反応を阻害するため
である。以上の理由から、脱水反応とGeO2の揮
散反応が共に活性な温度領域は1200〜1400℃であ
ることが判る。脱水反応に比べ上限温度が100℃
低くなるのは、スス体内でのGeCl4ガス拡散が脱
水反応で生ずるHClガスに比べ遅いためである。
The present inventors have made the following findings as a result of intensive research into the active regions of dehydration reactions and volatilization reactions. Bulk density of soot body is 0.15~0.40g/
In the cm 3 range, the dehydration reaction is active at 1000-1500°C, the lower limit of which comes from the activation of the dehydration reaction, and the upper limit from the fact that the shrinkage rate of the soot body exceeds the dehydration reaction. On the other hand, the volatilization reaction is 1200-1400
It is active at ℃, and the lower limit is due to the activation of the GeO 2 +2Cl 2 →GeCl 4 +O 2 reaction, and the upper limit is because the soot shrinkage rate is very fast and inhibits the GeO 2 volatilization reaction. From the above reasons, it can be seen that the temperature range in which both the dehydration reaction and the GeO 2 volatilization reaction are active is 1200 to 1400°C. Upper temperature limit is 100℃ compared to dehydration reaction
The reason for this decrease is that GeCl 4 gas diffusion within the soot body is slower than that of HCl gas generated in the dehydration reaction.

一方、透明ガラス化するには1500℃以上の温度
が必要である。このため先に挙げた先願発明のよ
うに単一の炉を使用し、脱水と同時に揮散反応を
利用しプロフアイル制御を行ないながら透明ガラ
ス化することは非常に困難であり、特にプロフア
イル制御の自由度が著しく阻害される。
On the other hand, a temperature of 1500°C or higher is required to create transparent vitrification. For this reason, it is extremely difficult to produce transparent vitrification using a single furnace and simultaneously performing dehydration and profile control using a volatilization reaction, as in the prior invention mentioned above. degree of freedom is significantly hindered.

本発明は上記先願方法における、プロフアイル
の制御を更に容易にすると共に、ガラス母材の
Cl2による泡の発生を抑えることを目的として開
発されたもので、2つの炉を用いて、まず脱水と
プロフアイル制御を行ない、次の炉で付加的な脱
水と焼結を行なうことを特徴とするものである。
The present invention makes it easier to control the profile in the above-mentioned method of the prior application, and also makes it easier to control the profile of the glass base material.
It was developed with the aim of suppressing the generation of bubbles due to Cl 2 , and is characterized by using two furnaces, first performing dehydration and profile control, and then performing additional dehydration and sintering in the second furnace. That is.

すなわち、本発明は光フアイバ用多孔質母材を
軸方向へ成長させながら、これを同軸上に置かれ
た透明ガラス化炉を用いて連続的に透明ガラス化
する方法において、多孔質母材の成長点と透明ガ
ラス化炉の間に、多孔質母材を完全に収縮させな
い1200〜1300℃の温度範囲に調整した予備加熱炉
を設け、この炉内で不活性ガス(He等)とドー
パントを還元揮散させる作用を有する脱水剤とし
てCl2ガスとを含み、該Cl2ガス濃度が0.5〜5容
量%である雰囲気下、上記母材の脱水を行ないな
がら、ドーパントの揮散による屈折率分布の制御
を行ない、更に透明ガラス化炉で不活性ガスと脱
水剤を含む雰囲気下、母材の透明ガラス化を行な
うことを特徴とする方法、に関するものである。
That is, the present invention provides a method for growing a porous preform for optical fiber in the axial direction and continuously converting it into transparent vitrification using a coaxially placed transparent vitrification furnace. A preheating furnace adjusted to a temperature range of 1200 to 1300℃ that does not completely shrink the porous base material is installed between the growth point and the transparent vitrification furnace, and an inert gas (such as He) and dopant are heated in this furnace. Controlling the refractive index distribution by volatilizing the dopant while dehydrating the base material in an atmosphere containing Cl 2 gas as a dehydrating agent having the effect of reducing and volatilizing the Cl 2 gas at a concentration of 0.5 to 5% by volume. The present invention relates to a method characterized in that the base material is transparently vitrified in an atmosphere containing an inert gas and a dehydrating agent in a transparent vitrification furnace.

本発明で用いられる脱水剤としてはCl2ガスが
挙げられる。不活性ガスとしてはHe、Ar、N2
が用いられる。
The dehydrating agent used in the present invention includes Cl 2 gas. He, Ar, N2 , etc. are used as the inert gas.

本発明では、脱水剤としてCl2ガスを使用し、
予備加熱炉の炉温は1200〜1300℃で、Cl2ガス濃
度が0.5〜5容量%である不活性ガス(He等)雰
囲気であり、透明ガラス化炉の炉温は1500〜1700
℃で、Cl2ガス濃度が0.1〜0.2容量%であるHeガ
ス雰囲気で、光フアイバ母材をVAD法で製造す
ることによつて、特性のよいものを効率よく製造
するとことができる。
In the present invention, Cl2 gas is used as a dehydrating agent,
The furnace temperature of the preheating furnace is 1200~1300℃, and the atmosphere is an inert gas (such as He) with a Cl2 gas concentration of 0.5~5% by volume, and the furnace temperature of the transparent vitrification furnace is 1500~1700℃.
By manufacturing an optical fiber base material by the VAD method in a He gas atmosphere with a Cl 2 gas concentration of 0.1 to 0.2% by volume at 100° C., fibers with good properties can be efficiently manufactured.

他方、光フアイバ母材の製造に当り2つの加熱
部あるいは炉を用い第1の加熱部で脱水、第2の
加熱部で透明化を行う方法も特開昭54−134722
号、同54−134128号、同54−94050号、同55−
10412号公報に記載されているが、第1の加熱部
でプロフアイル制御が行なわれていない点、第2
の加熱部に脱水剤が存在せずに単に焼結のみが行
なわれている点で本発明と異なり、本発明ではこ
の相違する構成によつて、光フアイバ中の残留水
分を取り除き、更に帯域特性にとり重要なα値を
連続的に変化させ、しかもその制御範囲をα±
0.05以内にすることを可能にし、これにより任意
の屈折率分布を有する光フアイバが連続的に製造
でき、光フアイバを安価に提供することを可能な
らしめたものである。
On the other hand, there is also a method in which two heating sections or furnaces are used in the production of optical fiber base material, and dehydration is carried out in the first heating section and transparency is carried out in the second heating section, as disclosed in Japanese Patent Application Laid-Open No. 54-134722.
No. 54-134128, No. 54-94050, No. 55-
Although it is described in Publication No. 10412, the first heating section does not perform profile control, and the second
This invention differs from the present invention in that only sintering is performed without a dehydrating agent in the heating section of the optical fiber.In the present invention, this different configuration removes residual moisture in the optical fiber and further improves the band characteristics. The α value, which is important for
0.05 or less, thereby making it possible to continuously manufacture optical fibers having arbitrary refractive index distributions and to provide optical fibers at low cost.

1つの炉を用いて脱水を焼結を行なう先願方法
(特願昭57−4901号)と本願発明の差を図を用い
て説明する。
The difference between the method of the prior application (Japanese Patent Application No. 57-4901), which performs dehydration and sintering using one furnace, and the present invention will be explained using figures.

1500℃とした場合(先願方法)のヒータの炉温
分布とスス体の収縮は第3図a、1100〜1300℃と
した場合(本発明方法)のヒータの炉温分布とス
ス体の収縮は第3図bに示される通りである。図
中、斜線部lで示されるのが反応領域で、ここで
ドーパント揮散、続いて脱水が行なわれるが、こ
の領域はl1(先願)≪l2(本発明)で、本発明の
ものが非常に長いことが判る。
Figure 3a shows the furnace temperature distribution of the heater and the shrinkage of the soot body when the temperature is set at 1500℃ (the method of the prior application), and the distribution of the furnace temperature of the heater and the contraction of the soot body when the temperature is set at 1100 to 1300℃ (the method of the present invention). is as shown in FIG. 3b. In the figure, the hatched area l is the reaction region, where dopant volatilization and subsequent dehydration take place. It turns out that it is very long.

一方、プロフアイル制御(ドーパント揮散)の
パラメータは温度T、反応時間t、塩素濃度Cの
3つで、これによりプロフアイルfが決定され
る。
On the other hand, there are three parameters for profile control (dopant volatilization): temperature T, reaction time t, and chlorine concentration C, which determine profile f.

fi(T.t.C)→f1が大きいほどドーパントが揮散 (1) ゾーン焼結の場合、tは反応領域lを下降rate
Rで割つた値 t=l/R (2) で表示され、(2)より(1)は fi(T.l/R、C)となる。 (3) またTは反応の活性度を示し、 で表示される。
fi (TtC) → f The larger the 1, the more the dopant volatilizes (1) In the case of zone sintering, t is the rate at which the reaction region l descends.
The value divided by R is expressed as t=l/R (2), and from (2), (1) becomes fi(Tl/R, C). (3) Also, T indicates the activity of the reaction, is displayed.

先願の場合(第3図a)lが小さく、fiを大
きくするためはRを小さくするかCを大きくす
る必要がある。
In the case of the prior application (Fig. 3a), l is small, and in order to increase fi, it is necessary to decrease R or increase C.

一方、Tは透明ガラス化するためには1500℃
以上である必要がある。このような温度領域で
は気泡が発生し易く、C(Cl2濃度)を小さく
抑える必要があり、事実0.6〜1mol%が限界
(スス体により差あり)で、それ以下に抑えね
ばならず、このためCの量を変化させてfiの制
御をはかることは困難である。
On the other hand, T is 1500℃ to make it transparent vitrified.
It needs to be more than that. In such a temperature range, bubbles are likely to occur, and it is necessary to keep C (Cl 2 concentration) low.In fact, the limit is 0.6 to 1 mol% (varies depending on the soot material), and it must be kept below this level. Therefore, it is difficult to control fi by changing the amount of C.

またRについても透明ガラス化に要する加熱
時間より4mm/分以下が必要であり、これが上
限となる。下降は効率の問題より1mm/分が限
度(360のススで6時間要する)である。
Also, R needs to be 4 mm/min or less than the heating time required for transparent vitrification, and this is the upper limit. Due to efficiency issues, the rate of descent is limited to 1 mm/min (360 soot takes 6 hours).

以上より先願の単一炉を用いる方法ではプロ
フアイル制御の自由度は非常に狭く、プロフア
イル制御は困難である。
As mentioned above, the degree of freedom in profile control is very narrow in the method of the prior application using a single furnace, and profile control is difficult.

一方、本発明の方式(第3図b)では、反応
領域lが長くまたCも5モル%としても気泡の
発生もなく、Tも透明ガラス化する必要がない
ため可変領域が大きい。
On the other hand, in the method of the present invention (FIG. 3b), the reaction region l is long, no bubbles are generated even if C is 5 mol %, and T does not need to be made into transparent glass, so the variable region is large.

fiが効率的な領域は 1000<T<(1300℃)○* 0.5<C<5モル% R<10 ○*は他の要因で決まる。 The area where fi is efficient is 1000<T<(1300℃)○* 0.5<C<5 mol% R<10 ○* is determined by other factors.

T<1300℃は130℃以上だとスス体が収縮
し、スス体のわずかの変化(P量など)で収縮
速度が変化し、fiが同一条件でもリン量(例え
ばPOCl3ガスの形で導入する)により変動す
る。
When T<1300℃ is 130℃ or higher, the soot body contracts, and the contraction speed changes with a slight change in the soot body (P amount, etc.), and even if fi is the same, the phosphorus amount (for example, introduced in the form of POCl 3 gas) ).

以上の点からT.C.Rのいずれか1つを固定して
もfiを一定の値にできる(T・Cの選択領域が広
い)という広い自由度をもつた方式である。
From the above points, it is a method with a wide degree of freedom in that even if any one of the TCRs is fixed, fi can be kept at a constant value (the selection range of T and C is wide).

本発明ではRを選択してもfiはT・Cで調整で
き、スス付けタンデムにとり非常に有利である。
この方法で大方の水分の除去も可能であり、また
脱水の不足分は更に上記の透明化炉で若干のCl2
を添加することにより補うことである。
In the present invention, even if R is selected, fi can be adjusted by T and C, which is very advantageous for soot tandems.
It is possible to remove most of the moisture with this method, and the lack of dehydration can be made up by adding some Cl 2 in the above-mentioned clarifying furnace.
It is supplemented by adding .

以上述べたように、引上げスピード(下降に対
応)がスス付けrateで決まることから、第3図a
の先願の方式では高速化した場合限度があるが、
第3図bの本発明方式では高速化の場合にも対応
でき、非常に有利な方法といえる。
As mentioned above, since the pulling speed (corresponding to descending) is determined by the sooting rate, Figure 3a
The method of the earlier application has a limit when speeding up, but
The method of the present invention shown in FIG. 3b can be applied to cases of high speed, and can be said to be a very advantageous method.

以下に本発明をVAD法を例にとつた第4図を
用いて詳細に説明する。第4図は本発明を実施す
る装置構成の一例である。ここでは、反応容器3
1の下部にバーナ32が設けられており、バーナ
32に対向して出発物質33が容器内部に回転自
在に吊下され、更に容器31の内周にヒータ3
6,38が設けられている。また容器31上部や
側面に容器内に所定のガスを送り込むガス供給口
37,39が設けられていると共に、反応容器3
1の下部には容器内のガスを排出する排気口35
が設けられている。
The present invention will be explained in detail below using FIG. 4 using the VAD method as an example. FIG. 4 shows an example of an apparatus configuration for implementing the present invention. Here, reaction vessel 3
A burner 32 is provided at the bottom of the container 31, and a starting material 33 is rotatably suspended inside the container facing the burner 32.
6, 38 are provided. Further, gas supply ports 37 and 39 are provided at the top and side of the container 31 to feed a predetermined gas into the container.
At the bottom of 1, there is an exhaust port 35 for discharging the gas inside the container.
is provided.

上記装置を用いてバーナ32から原料ガスを燃
焼させて生じたガラス微粒子のススを出発物質3
3の下面に堆積させ、ガラス微粒子集合体34を
形成する。この場合ガス供給口37を通して不活
性ガスで希釈された脱水剤を供給し、またガス供
給口39を通して、不活性ガスで希釈された、脱
水作用と共にドーパント揮散作用を有するCl2
スを供給して、炉36内を脱水剤を含む不活性ガ
ス雰囲気、炉38内を脱水作用やドーパント揮散
可能な雰囲気とし、これらの雰囲気で上記ガラス
微粒子集合体34を形成すると共に、該ガラス微
粒子体40を上方へ引上げ、ヒータ38で脱水を
行ないつつプロフアイル制御(ドーパントを揮
散)させながら、ヒータ36で脱水と透明ガラス
化を行なう。ヒータ38は当該母材の脱水とプロ
フアイル制御を行なう目的で設置されており、こ
の場合、ヒータは1台となつているが2台であつ
ても差し支えない。またヒータ36は微粒子体3
4を透明ガラス化に使用する目的で設置されてい
る。ヒータ36,38の加熱温度や雰囲気ガスを
変化させることにより、帯域特性にとつて重要な
係数αを容易に変化させることが可能である。
The soot of glass particles generated by burning the raw material gas from the burner 32 using the above device is used as the starting material 3.
3 to form a glass fine particle aggregate 34. In this case, a dehydrating agent diluted with an inert gas is supplied through the gas supply port 37, and a Cl 2 gas diluted with an inert gas, which has a dehydrating action and a dopant volatilization action, is supplied through the gas supply port 39. The inside of the furnace 36 is set to an inert gas atmosphere containing a dehydrating agent, and the inside of the furnace 38 is set to an atmosphere capable of dehydration and dopant volatilization, and the above-mentioned glass fine particle aggregate 34 is formed in these atmospheres, and the glass fine particle body 40 is heated upward. While dehydrating with the heater 38 and controlling the profile (vaporizing the dopant), the heater 36 performs dehydration and transparent vitrification. The heater 38 is installed for the purpose of dehydrating the base material and controlling the profile. In this case, there is one heater, but two heaters may be used. Further, the heater 36 is connected to the particulate matter 3.
4 was installed for the purpose of making transparent vitrification. By changing the heating temperature of the heaters 36 and 38 and the atmospheric gas, it is possible to easily change the coefficient α, which is important for the band characteristics.

なお、37より脱水剤例えばCl2ガスを添加す
るのは、上記外部の浸入水分を塩酸にするもので
積極的に母材を脱水するものではない。Cl20.1容
量%で充分で、0.2容量%以上とした場合、透明
化母材に泡の発生が見られることがあつた。また
Cl20.2容量%以下の場合プロフアイルが段状とな
つてしまうし、5容量%以上の場合、周辺部がす
そ引きを起こし、共に帯域特性に悪影響を及ぼ
す。
Note that the addition of a dehydrating agent such as Cl 2 gas from No. 37 is to convert the moisture that has entered the outside into hydrochloric acid, and is not to actively dehydrate the base material. 0.1% by volume of Cl 2 was sufficient, and when it was 0.2% by volume or more, bubbles were sometimes observed in the transparent base material. Also
If Cl 2 is less than 0.2% by volume, the profile becomes step-like, and if it is more than 5% by volume, the peripheral part will be sloping, both of which will have an adverse effect on the band characteristics.

第4図の装置を用いてフアイバ母材を製造した
例を次に示す。
An example of manufacturing a fiber base material using the apparatus shown in FIG. 4 is shown below.

実施例 1 多孔質母材の生成条件を一定とし炉38での加
熱温度を1200℃とし、ガス供給口39よりCl22容
量%を含むHeガス5/分を流し、炉36での
加熱温度1600℃とし、ガス供給口37よりCl20.1
容量%を含む5/分のHeガスを流したとこ
ろ、残留水分量0.01ppm、屈折率分布α=1.95の
フアイバーが得られた。
Example 1 The porous base material generation conditions were kept constant, the heating temperature in the furnace 38 was 1200°C, He gas containing 2% by volume of Cl 2 was flowed through the gas supply port 39 at 5/min, and the heating temperature in the furnace 36 was 1600℃, Cl 2 0.1 from gas supply port 37
When He gas containing % by volume was flowed at a rate of 5/min, a fiber with a residual moisture content of 0.01 ppm and a refractive index distribution α=1.95 was obtained.

実施例 2 ガス供給口39よりCl21容量%を含むHeガス
5を流し、他は実施例1と同様にした場合、残
留水分0.05ppm、α=2.00のフアイバが得られ
た。
Example 2 When He gas 5 containing 1% by volume of Cl 2 was flowed from the gas supply port 39 and the other conditions were the same as in Example 1, a fiber with residual moisture of 0.05 ppm and α=2.00 was obtained.

実施例 3 炉38を1100℃とし他は実施例1と同様とした
場合、残留水分0.03ppm、α=1.85のフアイバが
得られた。
Example 3 When the furnace 38 was set at 1100° C. and the other conditions were the same as in Example 1, a fiber with residual moisture of 0.03 ppm and α=1.85 was obtained.

実施例 4 炉38を1100℃としガス供給口39よりCl2
量%を含むHeガス5/分を流し、他は実施例
1と同様とした場合、残留水分は0.04ppm、α=
1.80のフアイバが得られた。
Example 4 When the temperature of the furnace 38 is set to 1100°C, He gas containing Cl 2 volume % is flowed 5/min from the gas supply port 39, and the other conditions are the same as in Example 1, the residual moisture is 0.04 ppm, α=
A fiber of 1.80 was obtained.

実施例 5 実施例1においてガス供給口37よりのCl2
加を止めた場合、残留水分量は0.03ppmとなり屈
折率分布はα=1.95となつた。
Example 5 In Example 1, when the addition of Cl 2 through the gas supply port 37 was stopped, the residual moisture content was 0.03 ppm and the refractive index distribution was α=1.95.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図aはVAD法の概略を示す図であり、第
1図bはVAD法における屈折率分布を示す図で
あり、第2図はVAD法において1つの炉を用い
る先行発明の方法を示す図であり、第3図aは第
2図の先行発明の法におけるヒータの炉温分布と
スス体の収縮を示す図であり、第3図bは本発明
方法におけるヒータの炉温分布とスス体の収縮を
示す図であり、第4図は本発明方法の概略を示す
図である。
Figure 1a is a diagram showing the outline of the VAD method, Figure 1b is a diagram showing the refractive index distribution in the VAD method, and Figure 2 is a diagram showing the method of the prior invention using one furnace in the VAD method. FIG. 3a is a diagram showing the heater furnace temperature distribution and soot body contraction in the method of the prior invention shown in FIG. 2, and FIG. 3b is a diagram showing the heater furnace temperature distribution and soot body contraction in the method of the present invention. FIG. 4 is a diagram showing the contraction of the body, and FIG. 4 is a diagram schematically showing the method of the present invention.

Claims (1)

【特許請求の範囲】 1 光フアイバ用多孔質母材を軸方向へ成長させ
ながら、これを同軸上に置かれた透明ガラス化炉
を用いて連続的に透明ガラス化する方法におい
て、多孔質母材の成長点と透明ガラス化炉の間
に、多孔質母材を完全に収縮させない1200〜1300
℃の温度範囲に調整した予備加熱炉を設け、この
炉内で不活性ガス(He等)とドーパントを還元
揮散させる作用を有する脱水剤としてのCl2ガス
とを含み、該Cl2ガス濃度が0.5〜5容量%である
雰囲気下、上記母材の脱水を行ないながら、ドー
パントの揮散による屈折率分布の制御を行ない、
更に透明ガラス化炉で不活性ガスと脱水剤を含む
雰囲気下、母材の透明ガラス化を行なうことを特
徴とする光フアイバ用ガラス母材の製造方法。 2 透明ガラス化炉の炉温は1500〜1700℃で、
Cl2ガス濃度が0.1〜0.2容量%であるHeガス雰囲
気である、特許請求の範囲第1項記載の光フアイ
バ用ガラス母材の製造方法。
[Claims] 1. In a method of growing a porous preform for optical fiber in the axial direction and continuously converting it into transparent vitrification using a transparent vitrification furnace placed on the same axis, 1200~1300 between the growth point of the material and the transparent vitrification furnace without completely shrinking the porous base material.
A preheating furnace adjusted to a temperature range of Controlling the refractive index distribution by volatilizing the dopant while dehydrating the base material in an atmosphere of 0.5 to 5% by volume,
A method for producing a glass base material for optical fibers, which further comprises vitrifying the base material transparently in an atmosphere containing an inert gas and a dehydrating agent in a transparent vitrification furnace. 2 The furnace temperature of the transparent vitrification furnace is 1500 to 1700℃,
The method for producing a glass base material for optical fiber according to claim 1, wherein the atmosphere is a He gas atmosphere having a Cl 2 gas concentration of 0.1 to 0.2% by volume.
JP18124282A 1982-10-18 1982-10-18 Manufacture of glass proform for optical fiber Granted JPS5973443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18124282A JPS5973443A (en) 1982-10-18 1982-10-18 Manufacture of glass proform for optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18124282A JPS5973443A (en) 1982-10-18 1982-10-18 Manufacture of glass proform for optical fiber

Publications (2)

Publication Number Publication Date
JPS5973443A JPS5973443A (en) 1984-04-25
JPS6219367B2 true JPS6219367B2 (en) 1987-04-28

Family

ID=16097274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18124282A Granted JPS5973443A (en) 1982-10-18 1982-10-18 Manufacture of glass proform for optical fiber

Country Status (1)

Country Link
JP (1) JPS5973443A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0699163B2 (en) * 1985-07-30 1994-12-07 古河電気工業株式会社 Vitrification method of optical fiber base material
AU657845B2 (en) * 1992-03-17 1995-03-23 Sumitomo Electric Industries, Ltd. Method and apparatus for producing glass thin film

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54134128A (en) * 1978-04-04 1979-10-18 Nippon Telegr & Teleph Corp <Ntt> Manufacture of basic material for light transmitting fiber
JPS5915093B2 (en) * 1979-10-17 1984-04-07 日本電信電話株式会社 Manufacturing equipment for anhydrous silica optical fiber base material

Also Published As

Publication number Publication date
JPS5973443A (en) 1984-04-25

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