Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JPS6219684B2 - - Google Patents
[go: Go Back, main page]

JPS6219684B2 - - Google Patents

Info

Publication number
JPS6219684B2
JPS6219684B2 JP1350881A JP1350881A JPS6219684B2 JP S6219684 B2 JPS6219684 B2 JP S6219684B2 JP 1350881 A JP1350881 A JP 1350881A JP 1350881 A JP1350881 A JP 1350881A JP S6219684 B2 JPS6219684 B2 JP S6219684B2
Authority
JP
Japan
Prior art keywords
image sensor
light source
outer diameter
light
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1350881A
Other languages
Japanese (ja)
Other versions
JPS57127803A (en
Inventor
Motoi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KIIENSU KK
Original Assignee
KIIENSU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KIIENSU KK filed Critical KIIENSU KK
Priority to JP1350881A priority Critical patent/JPS57127803A/en
Publication of JPS57127803A publication Critical patent/JPS57127803A/en
Publication of JPS6219684B2 publication Critical patent/JPS6219684B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/08Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/10Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving
    • G01B11/105Measuring arrangements characterised by the use of optical techniques for measuring diameters of objects while moving using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

【発明の詳細な説明】 この発明は物体の外径を測定する外径測定機に
関し、特には、発光源と受光手段を用い被測定物
体の外径を非接触の状態で知り得る様にした光学
式外径測定機に関するものである。
[Detailed Description of the Invention] This invention relates to an outer diameter measuring device for measuring the outer diameter of an object, and in particular, it uses a light emitting source and a light receiving means to determine the outer diameter of the object to be measured without contact. This invention relates to an optical outer diameter measuring machine.

光学式外径測定機は基本的に受光手段における
光学像の変化を測定するものであるため、光学系
を含む直接的測定部は被測定物体に全く接触しな
いという利点がある。そのため、シート状物体の
穴検出や管状物体の外径検出等その他多くの各種
物体の連続的測定を、効率的に且つ高速に行うこ
とが出来、近時の外径測定に非常に多く適用され
る様になつている。
Since the optical outer diameter measuring machine basically measures changes in the optical image in the light receiving means, it has the advantage that the direct measuring section including the optical system does not come into contact with the object to be measured at all. Therefore, it is possible to perform continuous measurements of many types of objects efficiently and quickly, such as detecting holes in sheet-like objects and detecting the outer diameter of tubular objects. It's starting to look like this.

この種の光学式外径測定機を非常に大まかに分
類すれば、光源側を走査する光源側走査方式を採
用したものと、受光側を走査する受光側走査方式
を採用したものとに分けることが出来る。前者の
測定機としてはレーザ装置を用いたレーザ外径測
定機が中心的であり、また後者の測定機としては
イメージセンサを用いた外径測定機が主なもので
ある。
This type of optical outer diameter measuring machine can be classified very roughly into those that use a light source side scanning method that scans the light source side, and those that use a light receiving side scan method that scans the light receiving side. I can do it. The main measuring device for the former is a laser outer diameter measuring device using a laser device, and the main measuring device for the latter is an outer diameter measuring device using an image sensor.

ところがレーザ外径測定機は、レーザ光によつ
て測定面を走査しなければならないため走査機構
が機械的で且つ複雑化し、大型化、高価格化、更
には故障率が大きいという本質的な欠点を有して
いる。これに対し、イメージセンサを用いる外径
測定機は、走査の実行が電気的に行われるため小
型化とともに低価格化および故障率の低減を図る
ことが出来る。そこで、このイメージセンサを用
いた外径測定機も多く実用に供されているが、従
来の測定機の多くは拡散光によつて被測定物を照
明し撮像レンズを介してイメージセンサ上に被測
定物体の像を結び、その像の暗部を測定すること
で同物体の外径を知得乃至識別する様にしてい
た。明白であるが、その様な測定機ではイメージ
センサ上に被測定物体を結像しなければならない
ため被測定物体が常に撮像レンズの焦点深度内へ
入る様に配慮する必要があり、また被測定物体の
ピント位置によつて撮像倍率が変動するという欠
点を有していた。
However, since the laser outer diameter measuring machine must scan the measurement surface with a laser beam, the scanning mechanism is mechanical and complex, resulting in larger size, higher price, and a higher failure rate, which are the essential drawbacks. have. On the other hand, an outer diameter measuring device using an image sensor performs scanning electrically, so it is possible to reduce the size, cost, and failure rate of the device. Therefore, many outer diameter measuring machines using this image sensor are in practical use, but most of the conventional measuring machines illuminate the object to be measured with diffused light and illuminate the object on the image sensor through an imaging lens. By forming an image of the object to be measured and measuring the dark part of the image, the outer diameter of the object was known or identified. Obviously, in such a measuring device, the object to be measured must be imaged on the image sensor, so care must be taken to ensure that the object to be measured always falls within the depth of focus of the imaging lens, and This has the disadvantage that the imaging magnification varies depending on the focus position of the object.

即ち、従来のイメージセンサを用いた外径測定
機は、被測定物体の空間的測定位置の制約と、撮
像倍率の変動に起因するイメージセンサ上の光学
像の変動性、つまり外径の定量測定の困難性とい
う欠点を有していた。
In other words, conventional outer diameter measuring machines using image sensors are limited by constraints on the spatial measurement position of the object to be measured and the variability of the optical image on the image sensor due to variations in imaging magnification, in other words, quantitative measurement of the outer diameter. It had the disadvantage of being difficult.

それ故にこの発明の主な目的は、イメージセン
サを用いた外径測定機の利点を保有しつつ、被測
定物体の位置に無関係にその外径を定量的に測定
し得る様にした、光学的外径測定機を提供するこ
とにある。
Therefore, the main purpose of the present invention is to provide an optical measuring device that retains the advantages of an external diameter measuring device using an image sensor, while also being able to quantitatively measure the external diameter of an object regardless of its position. The purpose of the present invention is to provide an outer diameter measuring machine.

この発明を要約すれば、受光手段としてイメー
ジセンサを用いる一方、線光源とコリメータレン
ズを用いることにより光学的ムラの無い平行光束
を極めて簡単に形成し、この平行光束内に被測定
物体を置いた時にイメージセンサ上に生ずる光学
像を測定する様にしたものである。
To summarize this invention, while an image sensor is used as a light receiving means, a line light source and a collimator lens are used to extremely easily form a parallel light beam with no optical unevenness, and the object to be measured is placed within this parallel light beam. It is designed to measure an optical image that sometimes appears on an image sensor.

第1図はこの発明の前提となる外径測定機の光
学系部分の概略図を示す。また、第2図は同測定
機のイメージセンサ上における光強度分布図を示
している。
FIG. 1 shows a schematic diagram of the optical system portion of an outer diameter measuring machine, which is the premise of this invention. Moreover, FIG. 2 shows a light intensity distribution diagram on the image sensor of the same measuring device.

第1図において1は無限小の点光源、2はコリ
メータレンズ、3は開口絞り、4はスクリーン6
上のイメージセンサ、5は被測定物である棒材を
それぞれ示す。なお、点光源1はコリメータレン
ズ2の焦点位置に配置されている。
In Figure 1, 1 is an infinitesimal point light source, 2 is a collimator lens, 3 is an aperture stop, and 4 is a screen 6.
The upper image sensor 5 indicates a bar material which is the object to be measured. Note that the point light source 1 is placed at the focal point of the collimator lens 2.

第2図に示す様に以上の構成よりイメージセン
サ4上に形成される光学像は、棒材5によつてし
や光された部分が暗部となつて表われる。従つて
この暗部の長さを計測すれば棒材5の直径φdを
知ることが出来る。
As shown in FIG. 2, in the optical image formed on the image sensor 4 with the above configuration, the portion illuminated by the rod 5 appears as a dark portion. Therefore, by measuring the length of this dark part, the diameter φd of the bar 5 can be determined.

この様に、平行光束内に配置された被測定物体
の外径は、イメージセンサ上に投影される影の部
分(暗部)の長さを測定することで容易に知るこ
とが出来るため、構成が非常に簡易となり、また
測定結果が被測定物体の位置に無関係に常に正確
なものとなる。
In this way, the outer diameter of the object to be measured placed within the parallel light beam can be easily determined by measuring the length of the shadow part (dark part) projected on the image sensor. It is very simple and the measurement results are always accurate regardless of the position of the object to be measured.

但し、発光源として無限小の点光源を用いるこ
の装置は、点光源故その光量不足によつて実質的
にコントラストの充分な光学像を得ることが困難
である。
However, in this device, which uses an infinitesimal point light source as a light emitting source, it is difficult to obtain an optical image with sufficient contrast due to the insufficient amount of light because the point light source is a point light source.

第3図はこの発明に係る外径測定機の光学系部
分の概略図を示す。また、第4図は同測定機のイ
メージセンサ上における光強度分布図を示してい
る。
FIG. 3 shows a schematic diagram of the optical system portion of the outer diameter measuring machine according to the present invention. Moreover, FIG. 4 shows a light intensity distribution diagram on the image sensor of the same measuring device.

構成において第1図と異なるのは、光源を点光
源1の有限列集合体、即ち線光源1′にしたこと
である。
The difference in configuration from FIG. 1 is that the light source is a finite array of point light sources 1, that is, a line light source 1'.

この様にすることによつて、イメージセンサ4
上に形成される光学像は、線光源1′を構成する
各点光源による光学像のy′方向への重ね合わせで
表わされることになり、棒材(被測定物体)5の
暗部と明部のコントラストは充分に向上されるこ
ととなる。第5図A,Bは第3図に示す構成にお
いて、イメージセンサ4に入光する光源の範囲を
示している。同図Aはイメージセンサ4がレンズ
2の焦点位置にある場合を示し、同図Bはイメー
ジセンサ4が焦点よりも外側に位置する場合を示
す。同図Aにおいては、図示するように、開口絞
り3がない場合にはAの位置の点光源までがイメ
ージセンサ4に入光し、開口絞り3がある場合に
はA′の位置の点光源までがイメージセンサ4に
入光する。また同図Bにおいては、開口絞り3が
ない場合にはBの位置の点光源までがイメージセ
ンサ4に入光し、開口絞り3がある場合にはB′の
位置の点光源までがイメージセンサ4に入光す
る。この図から、イメージセンサ4が遠くに位置
する程、また開口絞りのない場合よりもある場合
の方が、イメージセンサ4に到達する光源の範囲
が小さくなる。しかしながら、光源の範囲が小さ
くなつても、イメージセンサ4に到達する光量は
光源が点光源である場合に比べてかなり大きい。
すなわち、イメージセンサ4上では各点光源の光
が重畳されることとなり、これによつてコントラ
ストの大きな被測定物像が形成される。
By doing this, the image sensor 4
The optical image formed above is represented by the superposition of the optical images in the y' direction from each point light source constituting the linear light source 1', and the dark and bright parts of the bar (object to be measured) 5. The contrast will be sufficiently improved. 5A and 5B show the range of the light source that enters the image sensor 4 in the configuration shown in FIG. 3. Figure A shows the case where the image sensor 4 is located at the focal point of the lens 2, and Figure B shows the case where the image sensor 4 is located outside the focal point. In the same figure A, as shown in the figure, if there is no aperture diaphragm 3, light up to the point light source at position A enters the image sensor 4, and if there is an aperture diaphragm 3, the point light source at position A' The light reaches the image sensor 4. In addition, in Figure B, if there is no aperture stop 3, light up to the point light source at position B enters the image sensor 4, and if there is an aperture stop 3, light up to the point light source at position B' enters the image sensor 4. The light enters at 4. From this figure, the farther the image sensor 4 is located, and the smaller the range of the light source that reaches the image sensor 4 is with an aperture stop than without it. However, even if the range of the light source is reduced, the amount of light reaching the image sensor 4 is considerably larger than when the light source is a point light source.
That is, the light from each point light source is superimposed on the image sensor 4, thereby forming an image of the object to be measured with high contrast.

ところで、以上に示した線光源を形成する装置
として、光源を点光源の集合体にし(通常の一定
の面積を有する光源)、この光源とコリメータレ
ンズとの間にy軸に平行なスリツトを介在させる
ものが考えられる。しかし、この様にして等価的
な線光源を形成する様にしたものは、スリツトに
光ムラが生じたり、イメージセンサ上に光源の実
像が形成されたりして、分解能の低下を招き好ま
しい結果を生じさせない。また、これを解決する
ために収差補正用のコンデンサレンズをコリメー
タレンズとスリツトの間に配置する装置も考えら
れるが、大型化する上に高価格となり、更に光源
の利用効率を大きく低下させる不都合がある。
By the way, as a device for forming the line light source shown above, the light source is made into a collection of point light sources (a normal light source having a constant area), and a slit parallel to the y-axis is interposed between the light source and the collimator lens. I can think of things that would cause it. However, when an equivalent linear light source is formed in this way, light unevenness occurs in the slit and a real image of the light source is formed on the image sensor, resulting in a decrease in resolution and resulting in undesirable results. Don't let it happen. In order to solve this problem, a device in which a condenser lens for aberration correction is placed between the collimator lens and the slit may be considered, but this would be large and expensive, and it would also have the disadvantage of greatly reducing the efficiency of light source use. be.

即ち、線光源を形成させるためにはスリツトを
用いることなく実際上の線光源体を使用する必要
がある。
That is, in order to form a line light source, it is necessary to use an actual line light source body without using a slit.

第6図はこの発明に係る外径測定機の最も望ま
しい実施例概略図を示すもので、線光源体とし
て、ライン状フイラメント管10を用いたものを
示している。
FIG. 6 shows a schematic diagram of the most preferred embodiment of the outer diameter measuring device according to the present invention, and shows one using a linear filament tube 10 as the linear light source.

同図から明らかな様に、光学系としてはコリメ
ータレンズ2とライン状フイラメント管10だけ
であり、その構成は非常に簡単である。更にスリ
ツトを用いないので光ムラが生じず、コンデンサ
レンズ等の中間光学系を用いて収差補正を施す必
要が全くない。
As is clear from the figure, the optical system consists of only the collimator lens 2 and the linear filament tube 10, and its configuration is very simple. Furthermore, since no slit is used, no light unevenness occurs, and there is no need to correct aberrations using an intermediate optical system such as a condenser lens.

従つて小型で、且つ低価格にして光の利用効率
の大きな外径測定機とすることが出来る。
Therefore, it is possible to obtain an outer diameter measuring device that is small and inexpensive and has high light utilization efficiency.

なお、イメージセンサ4は、フオトダイオード
アレイで構成されるのが一般的であり、光学像の
暗部の長さの測定は、フオトダイオードアレイを
走査して、当該暗部に対応するフオトダイオード
を識別した後、そのダイオード数にアレイピツチ
を乗ずることによつて行う。
The image sensor 4 is generally composed of a photodiode array, and the length of the dark part of the optical image is measured by scanning the photodiode array and identifying the photodiode corresponding to the dark part. Then, multiply the number of diodes by the array pitch.

以上詳述した様に、この発明によれば、光学系
を非常に小型化出来、また、レーザ外径測定機の
様に機械的要素を必要としないので信頼性の高い
且つ低価格な外径測定機とすることが出来る。更
に、被測定物体への照射光として平行光束を用い
る様にしたので、同物体の位置に制約を受けるこ
となく、常に正確に外径を測定することが出来
る。さらに光源として線光源を用いるために、照
度の高い測定環境であつてもコントラストの高い
正確な測定が可能となる。
As described in detail above, according to the present invention, the optical system can be made extremely compact, and mechanical elements unlike laser outside diameter measuring machines are not required, resulting in highly reliable and low cost outside diameter measurement. It can be used as a measuring device. Furthermore, since a parallel beam of light is used as the light to irradiate the object to be measured, the outer diameter can always be accurately measured without being restricted by the position of the object. Furthermore, since a line light source is used as the light source, accurate measurement with high contrast is possible even in a measurement environment with high illuminance.

よつて、この発明に係る光学式外径測定機は定
性測定分野はもちろん、定量測定分野にも充分に
適用し得るものである。
Therefore, the optical outer diameter measuring device according to the present invention can be fully applied not only to the field of qualitative measurement but also to the field of quantitative measurement.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の前提となる外径測定機の要
部概略図、第2図は同測定機のイメージセンサ上
における光強度分布図、第3図はこの発明に係る
外径測定機の要部概略図、第4図は同測定機のイ
メージセンサ上における光強度分布図、第5図
A,Bはイメージセンサに入光する光源の範囲を
説明する図、第6図はこの発明に係る外径測定機
の最も望ましい実施例概略図をそれぞれ示してい
る。 1……点光源、1′……線光源、2……コリメ
ータレンズ、3……開口絞り、4……イメージセ
ンサ、5……棒材、10……ライン状フイラメン
ト管。
Fig. 1 is a schematic diagram of the main parts of the outer diameter measuring machine which is the premise of this invention, Fig. 2 is a light intensity distribution diagram on the image sensor of the measuring machine, and Fig. 3 is a diagram of the outer diameter measuring machine according to the present invention. A schematic diagram of the main parts, Fig. 4 is a light intensity distribution diagram on the image sensor of the same measuring device, Figs. The most desirable embodiment schematic diagram of such an outer diameter measuring machine is shown, respectively. DESCRIPTION OF SYMBOLS 1... Point light source, 1'... Line light source, 2... Collimator lens, 3... Aperture stop, 4... Image sensor, 5... Bar material, 10... Line-shaped filament tube.

Claims (1)

【特許請求の範囲】[Claims] 1 線光源をコリメータレンズの焦点位置に配置
して平行光束を形成するとともに、この平行光束
の照射部にイメージセンサを配置し、前記コリメ
ータレンズと前記イメージセンサとの間に物体を
置いた時に形成されるイメージセンサ上の暗部の
長さを測定することにより物体の外径を測定する
様にした、光学式外径測定機。
1 A linear light source is placed at the focal point of a collimator lens to form a parallel light beam, an image sensor is placed at the irradiation part of this parallel light beam, and an object is placed between the collimator lens and the image sensor. An optical outer diameter measuring machine that measures the outer diameter of an object by measuring the length of the dark area on the image sensor.
JP1350881A 1981-01-30 1981-01-30 Optical gauge for measuring outer diameter Granted JPS57127803A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1350881A JPS57127803A (en) 1981-01-30 1981-01-30 Optical gauge for measuring outer diameter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1350881A JPS57127803A (en) 1981-01-30 1981-01-30 Optical gauge for measuring outer diameter

Publications (2)

Publication Number Publication Date
JPS57127803A JPS57127803A (en) 1982-08-09
JPS6219684B2 true JPS6219684B2 (en) 1987-04-30

Family

ID=11835075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1350881A Granted JPS57127803A (en) 1981-01-30 1981-01-30 Optical gauge for measuring outer diameter

Country Status (1)

Country Link
JP (1) JPS57127803A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0312106U (en) * 1989-06-21 1991-02-07
JPH0528483Y2 (en) * 1990-03-23 1993-07-22

Also Published As

Publication number Publication date
JPS57127803A (en) 1982-08-09

Similar Documents

Publication Publication Date Title
US3922093A (en) Device for measuring the roughness of a surface
EP0698776B1 (en) Optical inspection of container finish dimensional parameters
US4660946A (en) Cornea shape measuring method and apparatus
US4534645A (en) Automatic lens meter
US5764367A (en) Method and apparatus for measuring a position of a web or sheet
US5724150A (en) Method and apparatus for measuring a position of webs or sheets
JP2009109315A (en) Optical measuring device and scanning optical system
JPS6219684B2 (en)
JPH0364816B2 (en)
JP2001166202A (en) Focus detection method and focus detector
JP2870908B2 (en) Method and apparatus for measuring perspective distortion
JP5012071B2 (en) Slit scanning confocal microscope
JPH034858B2 (en)
JPS63138204A (en) Shape measuring method
JPH0643893B2 (en) Distance measuring device
JPS6034699B2 (en) hardness tester
RU2055311C1 (en) Method and device for measurement of torsion angle of distant object
JPH02176408A (en) Body-shape measuring apparatus
JPH01304339A (en) Refraction angle measuring device
JPH11183151A (en) Transparent sheet inspection equipment
JP3684246B2 (en) Stamp reader
JPH0789058B2 (en) Distance measuring device
JP2675051B2 (en) Optical non-contact position measuring device
JPH03142302A (en) Optical width measuring instrument
US3475614A (en) Film image compression and reader