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JPS6220139B2 - - Google Patents
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JPS6220139B2 - - Google Patents

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Publication number
JPS6220139B2
JPS6220139B2 JP58227043A JP22704383A JPS6220139B2 JP S6220139 B2 JPS6220139 B2 JP S6220139B2 JP 58227043 A JP58227043 A JP 58227043A JP 22704383 A JP22704383 A JP 22704383A JP S6220139 B2 JPS6220139 B2 JP S6220139B2
Authority
JP
Japan
Prior art keywords
base material
porous base
pulling speed
burner
constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58227043A
Other languages
Japanese (ja)
Other versions
JPS60122736A (en
Inventor
Naoki Yoshioka
Hiroo Kanamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP22704383A priority Critical patent/JPS60122736A/en
Publication of JPS60122736A publication Critical patent/JPS60122736A/en
Publication of JPS6220139B2 publication Critical patent/JPS6220139B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/0142Reactant deposition burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/36Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/50Multiple burner arrangements
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/60Relationship between burner and deposit, e.g. position
    • C03B2207/62Distance
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/70Control measures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

【発明の詳細な説明】 (技術分野) 本発明は光フアイバ母材の製造方法に関し、特
に気相軸付け法(VAD法)に於いて、多孔質母
材を作製する時に、長手方向の均一性を向上させ
る光フアイバ母材の製法を提案するものである。
Detailed Description of the Invention (Technical Field) The present invention relates to a method for manufacturing an optical fiber base material, and in particular, in the vapor phase axial deposition method (VAD method), when producing a porous base material, uniformity in the longitudinal direction is obtained. This paper proposes a manufacturing method for optical fiber base material that improves properties.

(背景技術) VAD法により多孔質母材を作成する一つの方
法として複数のバーナーを用いて半径方向に組成
の異なる原料を流し多孔質母材を合成する方法が
知られていて、具体例としては単一モードフアイ
バ用母材の製造法として、更には、多モードフア
イバにおいてもコア部とジヤケツト部を同時に合
成する製造法などとして用いられている。
(Background technology) As one method of creating a porous base material using the VAD method, a method is known in which the porous base material is synthesized by flowing raw materials with different compositions in the radial direction using multiple burners. This method is used as a method for manufacturing a base material for a single mode fiber, and also as a method for simultaneously synthesizing a core portion and a jacket portion for a multimode fiber.

以下図面に従つて説明する。 This will be explained below with reference to the drawings.

第1図は単一モードフアイバ用多孔質母材の作
製方法を模式的に示したものである。第1図に於
て、はコア用の多孔質母材を合成するバーナー
はクラツド用の多孔質母材を合成するバーナー
であつて、通常は例えばコア用バーナーでは
SiO2―GeO2ガラスを、またクラツド用バーナー
ではSiO2ガラスの微粒子を夫々合成した後に、
焼結透明ガラス化して光フアイバ用のガラス母材
とする。
FIG. 1 schematically shows a method for producing a porous base material for a single mode fiber. In Figure 1, the burner for synthesizing the porous base material for the core is a burner for synthesizing the porous base material for the cladding, and usually, for example, the burner for the core is
After synthesizing SiO 2 - GeO 2 glass and fine particles of SiO 2 glass in the cladding burner,
It is sintered into transparent glass and used as a glass base material for optical fibers.

このとき多孔質母材堆積時の重要なバラメー
タである多孔質母材の下端の成長点位置(図中
矢印で示す点G)はバーナーとの距離を一定とす
べく制御されるのが普通である。この方法として
は多孔質母材の成長点位置は非接触で光学的に
計測され、バーナーとの距離を一定にするために
は図中の矢印方向への引上速度を変化させるのが
一般的である。
At this time, the position of the growth point at the bottom of the porous base material (point G indicated by the arrow in the figure), which is an important parameter during the deposition of the porous base material, is usually controlled to keep the distance from the burner constant. be. In this method, the growth point position of the porous base material is measured optically without contact, and in order to keep the distance from the burner constant, it is common to change the pulling speed in the direction of the arrow in the figure. It is.

しかし、複数本のバーナーを用いて半径方向に
組成の異なる原料を流して多孔質母材を合成する
場合には、上記方法だけでは以下に述べるような
不具合が生じていた。引上位置だけを制御する場
合は、制御変数として、引上速度を変えるが、引
上速度の変化は多孔質母材先端部以外の領域の堆
積状態を著しく変化させてしまう。
However, when a porous base material is synthesized by flowing raw materials with different compositions in the radial direction using a plurality of burners, the above method alone causes the following problems. When only the pulling position is controlled, the pulling speed is changed as a control variable, but a change in the pulling speed significantly changes the deposition state in areas other than the tip of the porous base material.

特に第1図に示した例で具体的に説明する。第
1図のコア用バーナー、クラツド用バーナー
にそれぞれ一定の流量のSiCl4,H2,O2,及びそ
の他原料を投入してガラスを合成し、コア用バー
ナーと多孔質母材の先端との距離を一定にすべ
く制御しながら引上げて母材を作製するとき、引
上速度は第2図に示す如く一定ではなく変化させ
られている。この場合むろん多孔質母材の先端
位置はコア用バーナーとの距離を一定に保たれて
いる事はいうまでもない。しかし、合成された多
孔質母材の堆積状態は第3図に示すように著しく
均一性を欠くものとなつてしまう。
In particular, this will be specifically explained using the example shown in FIG. A constant flow rate of SiCl 4 , H 2 , O 2 , and other raw materials are fed into the core burner and clad burner shown in Figure 1 to synthesize glass, and the core burner and the tip of the porous base material are connected to each other. When the base material is produced by pulling the base material while controlling the distance to be constant, the pulling speed is not constant but is varied as shown in FIG. In this case, it goes without saying that the position of the tip of the porous base material is maintained at a constant distance from the core burner. However, the deposited state of the synthesized porous base material becomes extremely non-uniform as shown in FIG.

第2図及び第3図とも不具合が生じた典型的な
2例につき示すもので、各図に於て、Aは引上速
度が徐々に速くなつた場合の、またBは引上速度
が徐々に遅くなつた場合の速度変動の様子と多孔
質母材の堆積形状変動を表している。これらの例
から容易に推定できる様に引上速度と合成された
多孔質母材のクラツド径は負の相関を示すのが一
般的である。
Both Figures 2 and 3 show two typical cases where the problem occurred. In each figure, A shows a case where the pulling speed gradually increases, and B shows a case where the pulling speed gradually increases. The figure shows the velocity fluctuations and the changes in the deposition shape of the porous base material when the velocity is slowed down. As can be easily deduced from these examples, there is generally a negative correlation between the pulling speed and the cladding diameter of the synthesized porous base material.

この様な多孔質母材の外径変動は、後の工程で
ある焼結透明ガラス化過程を経ても相似的に保存
されるため最終的にフアイバのコア径等の構造パ
ラメータの長手方向の均一性に悪影響を及ぼして
しまう。
Such variations in the outer diameter of the porous base material are preserved in a similar manner even through the subsequent sintering and transparent vitrification process, so that the fiber core diameter and other structural parameters are uniform in the longitudinal direction. It has a negative impact on sexuality.

(発明の目的) 本発明はこの様な不具合点を解消するための方
法を提示することを目的とする。
(Object of the Invention) An object of the present invention is to present a method for solving such problems.

(発明の構成) 複数のバーナーを用いて長手方向(軸方向)に
均一な母材を作製するためには上記の例からも推
察されるように引上速度を一定とする必要がある
と考えられる。本発明者らは各種の実験よりコア
バーナーの条件変更により引上速度を意図的に変
化させる方法を見出し、本発明に到達した。
(Structure of the Invention) In order to produce a uniform base material in the longitudinal direction (axial direction) using multiple burners, we believe that it is necessary to keep the pulling speed constant, as can be inferred from the above example. It will be done. Through various experiments, the present inventors discovered a method of intentionally changing the pulling speed by changing the conditions of the core burner, and arrived at the present invention.

すなわち本発明の要旨は、VAD法による多孔
質母材の製造において、複数のバーナーを用いて
半径方向に組成の異なるガラス微粒子を堆積させ
るとき、バーナーと成長面先端との距離を一定に
すべく、光を成長する側面より成長面先端部をか
すめて照射し、その透過光量を一定にしながら引
上速度を調整するとともに、複数のバーナーのう
ち成長先端部を合成するバーナーのガス流量条件
を変化させて引上速度を一定となるべく制御する
ことを特徴とする光フアイバ用母材の製造方法に
ある。
In other words, the gist of the present invention is that when glass fine particles with different compositions are deposited in the radial direction using a plurality of burners in manufacturing a porous base material by the VAD method, the distance between the burners and the tip of the growth surface is kept constant. , the light is irradiated from the side of the growing surface, grazing the tip of the growth surface, and the pulling speed is adjusted while keeping the amount of transmitted light constant, and the gas flow conditions of the burner that synthesizes the growing tip among multiple burners are changed. The present invention provides a method for manufacturing an optical fiber base material, characterized in that the pulling speed is controlled to be as constant as possible.

以下に本発明の方法について詳細に説明する。
第4図は、引上速度に及ぼす、コア用バーナー
(先端部合成用バーナー)のガス流量の影響を示
すグラフであつて、横軸はAr,H2,O2の各コア
バーナーにおける流量を示し、縦軸はその際に多
孔質母材先端部とコアバーナーを一定距離に保つ
ための引上速度を示している。第4図に示すよう
に燃焼用ガスのH2を増すと引上速度が低下し、
また、不活性ガスArを増すと同様に引上速度が
低下する傾向が存在することが判明した。この現
象の原因については、前者のH2の場合では燃焼
用ガスの増加にともない多孔質体先端の温度が上
昇し多孔質体の密度が高くなる事により実効的な
成長速度が低下するためであり、また後者のAr
の場合には不活性ガスの増加にともないガラス合
成反応の効率が低下するため成長速度が遅くなる
という原因が考えられる。またO2流量の影響に
ついては上記の両方の効果が存在することによる
と考えられる。
The method of the present invention will be explained in detail below.
Figure 4 is a graph showing the influence of the gas flow rate of the core burner (tip synthesis burner) on the pulling speed, and the horizontal axis represents the flow rate of Ar, H 2 and O 2 in each core burner. The vertical axis indicates the pulling speed to maintain a constant distance between the tip of the porous base material and the core burner. As shown in Figure 4, increasing the H 2 content of the combustion gas reduces the pulling speed;
It was also found that there is a similar tendency for the pulling speed to decrease as the inert gas Ar is increased. The reason for this phenomenon is that in the former case of H2 , as the amount of combustion gas increases, the temperature at the tip of the porous body increases and the density of the porous body increases, which reduces the effective growth rate. Yes, and also the latter Ar
In this case, the growth rate may be slowed down because the efficiency of the glass synthesis reaction decreases as the amount of inert gas increases. Furthermore, the influence of the O 2 flow rate is thought to be due to the existence of both of the above effects.

本発明の特徴とするところは、上述の現象を利
用して、成長点位置を一定にすべく引上速度を制
御し、更にその引上速度自体をコア用バーナーの
ガス流量条件にフイードバツクすることにより一
定に保つことにある。
The characteristics of the present invention are to control the pulling speed to keep the position of the growth point constant by utilizing the above-mentioned phenomenon, and to feed back the pulling speed itself to the gas flow rate conditions of the core burner. The goal is to keep it constant.

次に実施例により本発明を具体的に説明する。 Next, the present invention will be specifically explained with reference to Examples.

第5図は本発明の方法による多孔質母材製造法
の概略説明図であつてはコア用バーナー、及
びはクラツド用バーナー、は多孔質母材を示
す。
FIG. 5 is a schematic explanatory diagram of a method for manufacturing a porous base material according to the method of the present invention, and the core burner and the cladding burner indicate the porous base material.

コア用バーナーとして外径10mmφの同心多重
管型バーナーを用い、クラツド用バーナーとして
は外径20mmφの同心多重管型バーナーを2本用い
る第5図に示す配置で、コアとクラツドの2層構
造をもつ多孔質母材を作製した。それぞれの組成
はコアがSiO2―GeO2でクラツドがSiO2となるべ
く原料を供給した。コア用バーナーには、H2
(2.0/min)、O2(5.0/min)Ar2.0/
min、SiCl4〔100c.c./min(35℃)〕GeCl4〔30
c.c./min(35℃)〕を同心多重管の各層に流し、
クラツド用バーナー,には、H2(6/
min)O2(6/min)、Ar3.0/min、SiCl4
〔150c.c./min(40℃)〕をそれぞれ流した。
A concentric multi-tube burner with an outer diameter of 10 mmφ is used as the core burner, and two concentric multi-tube burners with an outer diameter of 20 mmφ are used as the burner for the cladding.The arrangement shown in Figure 5 creates a two-layer structure of the core and cladding. We prepared a porous base material with The raw materials were supplied so that each composition would have a core of SiO 2 -GeO 2 and a cladding of SiO 2 . For the core burner, H 2
(2.0/min), O 2 (5.0/min) Ar2.0/
min, SiCl 4 [100c.c./min (35℃)] GeCl 4 [30
cc/min (35℃)] into each layer of the concentric multi-tube,
The burner for the cladding is equipped with H 2 (6/
min) O 2 (6/min), Ar3.0/min, SiCl 4
[150 c.c./min (40°C)] was flowed respectively.

コア用バーナーと、多孔質母材の先端位置の間
の距離を一定となる様に多孔質母材引上速度を調
整した。具体的にはコア用バーナーは固定され、
多孔質母材先端位置は、He―Neレーザービーム
を母材先端をかすめて照射しその透過光量をモニ
ターし透過光量を光電変換素子で電圧信号として
とり出しコア用バーナーと多孔質母材との相対位
置関係のモニターとした。このとき上記制御に加
えて、更に引上速度をモニターしながらこれを一
定とすべく、H2流量を変化させた。
The porous base material pulling speed was adjusted so that the distance between the core burner and the tip position of the porous base material was kept constant. Specifically, the core burner is fixed,
The position of the tip of the porous base material is determined by irradiating a He-Ne laser beam that passes over the tip of the base material, monitoring the amount of transmitted light, and extracting the amount of transmitted light as a voltage signal with a photoelectric conversion element, which connects the core burner and the porous base material. It was used as a monitor for relative positional relationships. At this time, in addition to the above control, the H 2 flow rate was changed while monitoring the pulling speed to keep it constant.

H2流量の変化量は2.0/min±0.2/minの
範囲内にあり、引上速度変化は中心値50mm/hに
対し±2mm/hの範囲内におさまつた。この間約
10時間で多孔質母材450mmの長さにおいて外径が
80mmφ±3mmφと均一性の優れたものとなつた。
The amount of change in the H 2 flow rate was within the range of 2.0/min±0.2/min, and the change in the pulling speed was within the range of ±2 mm/h with respect to the central value of 50 mm/h. Approximately during this time
In 10 hours, the outer diameter of a porous base material of 450 mm
The uniformity was 80mmφ±3mmφ.

上記例ではH2ガス流量を制御変数として用い
る方法を示したがO2又はArの流量を制御変数と
してもよい。但しそれぞれ制御の比例ゲインは第
4図のデータに基づき適宜調整する事が必要であ
る。また制御に関しては若干の積分要素を含める
事が制御精度向上には好ましい。
Although the above example shows a method using the H 2 gas flow rate as the control variable, the O 2 or Ar flow rate may also be used as the control variable. However, it is necessary to adjust the proportional gain of each control as appropriate based on the data shown in FIG. Regarding control, it is preferable to include some integral elements in order to improve control accuracy.

(発明の効果) 本発明は第5図に示す実施例に制約されるもの
ではなく、一般に複数のバーナーを用いてVAD
法により多孔質母材を合成する際に、先端位置を
一定に保つ場合に適用されるもので成長方向の均
一性保持に著しく効果を発揮するものである。
(Effects of the Invention) The present invention is not limited to the embodiment shown in FIG. 5, but generally uses VAD using a plurality of burners.
It is applied to keep the tip position constant when synthesizing a porous base material by the method, and is extremely effective in maintaining uniformity in the growth direction.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は単一モードフアイバ用多孔質母材作製
方法の説明図。第2図は多孔質母材作製時の引上
速度変動の例を示す図。第3図は第2図で示した
速度変動があつたときの多孔質母材の成長方向の
不均一性を示す図。第4図は引上速度に及ぼすコ
ア用バーナーの各種ガス流量条件の影響を示すグ
ラフ。第5図は制御の実施例での多孔質母材作製
方法の説明図。
FIG. 1 is an explanatory diagram of a method for producing a porous base material for single mode fiber. FIG. 2 is a diagram showing an example of variation in pulling speed when producing a porous base material. FIG. 3 is a diagram showing non-uniformity in the growth direction of the porous base material when the speed fluctuation shown in FIG. 2 occurs. FIG. 4 is a graph showing the influence of various gas flow conditions of the core burner on the pulling speed. FIG. 5 is an explanatory diagram of a method for producing a porous base material in a control example.

Claims (1)

【特許請求の範囲】 1 VAD法による多孔質母材の製造において、
複数のバーナーを用いて半径方向に組成の異なる
ガラス微粒子を堆積させるとき、バーナーと成長
面先端との距離を一定にすべく、光を成長する側
面より成長面先端部をかすめて照射し、その透過
光量を一定にしながら引上速度を調整するととも
に、複数のバーナーのうち成長先端部を合成する
バーナーのガス流量条件を変化させて引上速度を
一定となるべく制御することを特徴とする光フア
イバ用母材の製造方法。 2 ガス流量条件を変化させるガスが水素である
特許請求の範囲第1項に記載の光フアイバ用母材
の製造方法。 3 ガス流量条件を変化させるガスが不活性ガス
である特許請求の範囲第1項に記載の光フアイバ
用母材の製造方法。 4 ガス流量条件を変化させるガスが酸素である
特許請求の範囲第1項に記載の光フアイバ用母材
の製造方法。
[Claims] 1. In the production of a porous base material by the VAD method,
When depositing glass fine particles with different compositions in the radial direction using multiple burners, in order to keep the distance between the burners and the tip of the growth surface constant, light is irradiated from the side of the growth surface so as to brush over the tip of the growth surface. An optical fiber characterized in that the pulling speed is adjusted while keeping the amount of transmitted light constant, and the pulling speed is controlled to be as constant as possible by changing the gas flow conditions of a burner that synthesizes the growth tip among a plurality of burners. Manufacturing method of base material. 2. The method for manufacturing an optical fiber base material according to claim 1, wherein the gas that changes the gas flow rate condition is hydrogen. 3. The method for manufacturing an optical fiber base material according to claim 1, wherein the gas that changes the gas flow rate condition is an inert gas. 4. The method for manufacturing an optical fiber base material according to claim 1, wherein the gas that changes the gas flow rate condition is oxygen.
JP22704383A 1983-12-02 1983-12-02 Manufacture of parent material for optical fiber Granted JPS60122736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22704383A JPS60122736A (en) 1983-12-02 1983-12-02 Manufacture of parent material for optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22704383A JPS60122736A (en) 1983-12-02 1983-12-02 Manufacture of parent material for optical fiber

Publications (2)

Publication Number Publication Date
JPS60122736A JPS60122736A (en) 1985-07-01
JPS6220139B2 true JPS6220139B2 (en) 1987-05-06

Family

ID=16854625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22704383A Granted JPS60122736A (en) 1983-12-02 1983-12-02 Manufacture of parent material for optical fiber

Country Status (1)

Country Link
JP (1) JPS60122736A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6436550U (en) * 1987-08-28 1989-03-06

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5087929B2 (en) * 2007-01-11 2012-12-05 住友電気工業株式会社 Method for producing glass particulate deposit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641847A (en) * 1979-09-10 1981-04-18 Nec Corp Manufacture of optical fiber base material
JPS58151338A (en) * 1982-03-01 1983-09-08 Hitachi Cable Ltd Manufacture of base material for optical fiber

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6436550U (en) * 1987-08-28 1989-03-06

Also Published As

Publication number Publication date
JPS60122736A (en) 1985-07-01

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