JPS6222085B2 - - Google Patents

Description

[Detailed description of the invention]

The present invention relates to a method for fixing a film specimen and a measuring device for measuring the surface roughness of a film using a stylus. Conventionally, the surface roughness of a film has generally been measured by firmly fixing a film specimen to a glass surface or the like so that no air is present. However, with this method, minute protrusions appear on the film surface due to subtle irregularities on the glass surface itself or minute dust that has entered between the glass surface and the film, and the measured roughness curve is based on the film surface. The problem often arises that the true roughness curve is different. This problem becomes more pronounced as the film becomes thinner. As a result of intensive study to solve these problems, we created a recess in the smooth solid plane that will serve as the sample stage.
By allowing the liquid to exist in the recesses, subtle irregularities on the solid plane and protrusions caused by microscopic dust attached to the plane are absorbed so as not to affect the roughness of the film surface, resulting in true surface roughness. We have invented a method and device that can measure the temperature. That is, in the method of the present invention, a depth of 1 is applied to a smooth solid plane.
A liquid such as water, alcohol, oil, etc. is injected into the recess of a sample stage having a recess of ~500 μm, and a film specimen is fixed on the specimen stage so that the back side of the film specimen comes into contact with the liquid. This is a method for measuring the surface roughness of a film, which consists of measuring the surface roughness of the film specimen at a position where the specimen is placed by a known method. Further, the present invention is a film surface roughness measuring device characterized in that a recess with a depth of 1 to 500 μm is provided on a sample stage on which a film specimen is fixed. Next, the present invention will be explained in more detail. In the surface roughness measurement method of the present invention, a smooth solid plane, for example, an optical flat (JIS B7430,
(equivalent to grade 3), form a groove-like recess with a depth of 1 μm or more and 500 μm or less to create a sample stage. A non-solvent liquid of the film to be measured is made to exist in this recess, and a film specimen is fixed on this liquid. Then, the surface roughness of the film on the surface of the film above the liquid in the recessed portion is measured using a stylus type surface roughness meter. Next, the film sample fixing method of the present invention will be explained with reference to the drawings. FIG. 1 is a plan view of a sample stage (also referred to as a fixing stage) on which a film specimen of the present invention is fixed. Moreover, FIG. 2 is a cross-sectional view (elevation) of the sample stage. Optical flat (3 in JIS B7430)
A groove-shaped recess 2 is provided approximately in the center of a sample stage 1 which has a smooth solid plane polished to a surface equivalent to the standard grade. The depth of this groove-like recess can be selected from a range of 1 to 500 μm. The depth of the recess may be different or the same at the center and side portions of the groove. The sample stage is supported by an outer cylinder 3 and guides a stage 4 that is movable up and down. Therefore, the level of the stage 4 can be changed by operating the vertically movable sliding operation screw 5, and since the sample stage is fixed to the stage, it can naturally move up and down. The fixing of a sample during actual measurement of a film sample can be explained with reference to FIG. First, a non-swelling (non-dissolving) liquid medium 8 is dropped onto the film specimen 6 into the groove-like recess. The liquid on the sample stage forms a liquid surface that is approximately at the same level as the sample stage. Next, a film specimen whose size is slightly smaller than the outer cylinder of the specimen stage is spread on the specimen stage so as to cover the liquid medium, and the peripheral edge of the specimen is fixed with adhesive tape or the like 7. Subsequently, by raising the vertically movable stage, the back surface of the film specimen is pressed so as to come into contact with the liquid in the groove and the surface of the sample stage having the optical flat. Then, the front side of the film specimen fixed on the sample stage is rolled along the groove using a small roller with good cylindricity and surface smoothness. This operation forces excess liquid medium out of the recess. With the above operating means, the surface roughness on the surface of the groove of the film specimen can be accurately measured. The film surface roughness was measured using a commercially available device, Surfcorder (trade name: manufactured by Kosaka Laboratory Co., Ltd.).
Surfcom (product name: manufactured by Tokyo Seimitsu Co., Ltd.),
Talysurf or Talystep (manufactured by Rank Taylor Hobson) can be used as is. The sample stage of the present invention can be a glass surface, a metal plate, a smooth optical flat made of plastic or ceramics. Furthermore, the shape of the recess provided on the solid surface is not limited to the groove shape. It can be circular or quadrilateral. However, in the case of a circular or rectangular shape, after pasting the film sample, excess liquid is removed from the recess and the film specimen (measurement surface) is rolled with a roller to flatten it, but at this time the excess liquid comes out from the recess. An exit is required. The depth of the recess must be 1 μm or more and 550 μm or less. This depth is desirably 2 μm or more and 200 μm or less. When the depth of the recess is 1 μm or less, the liquid layer cannot absorb the influence of dust or the like that has entered between the film specimen and the bottom of the recess, so that protrusions appear on the surface of the film to be measured. Moreover, when the depth is 500 μm or more, undulations appear on the surface of the film to be measured.
Note that after the film sample is fixed, the liquid existing in the recesses is stably retained by capillary action. Any liquid may be used as long as it is a non-solvent for the film to be measured, but from the viewpoint of handling, water, alcohol, etc. are preferable. The present invention will be specifically explained below with reference to Examples. In all of the following examples, the surface roughness of biaxially stretched polyester films (thickness: 10 μm) was measured. Example 1 A groove-like recess with a depth of 3 μm was machined on the sample stage of the optical flat of the film surface roughness measurement fixing device shown in Fig. 1, and water was dripped into this groove-like recess.
Fix the film specimen as shown below and roll it in a direction parallel to the groove-like recesses using a small roller with good cylindricity and surface smoothness to drive out excess water. After the film surface above the groove-like recesses was flattened in this way, the surface roughness of the film surface above the groove-like recesses was measured. The results are shown in Table 1. Example 2 Measurement was carried out in the same manner as in Example 1 using an optical flat sample stage machined with a groove-like recess of 50 μm in depth. The results are shown in Table 1. Comparative Example 1 Using the same fixing device as in Example 1, water was dropped near the center of an optical flat sample stage without groove-shaped recesses, and measurements were carried out in the same manner as in Example 1. The results are shown in Table 1. Comparative Example 2 Measurement was carried out in the same manner as in Example 1 using a sample stage machined with a groove-like recess with a depth of 0.8 μm. The results are shown in Table 1. Comparative Example 3 Table 1 shows the results of measurements carried out in the same manner as in Example 1 using a sample stage in which a groove-like recess with a depth of 300 μm was machined. Comparative Example 4 Measurement was attempted in the same manner as in Example 1 using a sample stage with a groove-shaped recess of 600 μm in depth, but the measurement was not possible due to the presence of waviness on the film surface to be measured.

【table】

[Table] Tar.

[Brief explanation of the drawing]

FIG. 1 is a plan view of the device of the present invention, and FIG.
FIG. FIG. 3 is an elevational view showing the method of the present invention. In the drawing, 1 is a sample stage, 2 is a groove-shaped recess, and 4 is a sample stage.
6 is a stage for raising and lowering the sample stage, 6 is a film specimen, and 8 is a liquid poured into a recess.

Claims (1)

[Claims] 1. A sample stage having a recess with a depth of 1 μm to 500 μm provided in a flat solid plate, a liquid is poured into the recess, a film is fixed on the sample stage, and the back side of the film is A method for measuring the surface roughness of a film, comprising measuring the surface roughness of the film at a position in contact with a liquid. 2 At a depth of 1 μm on the sample stage on which the film specimen is fixed.
A film surface roughness measuring device characterized by having a recess in the range of 500 μm to 500 μm.