JPS6222412B2 - - Google Patents
Info
- Publication number
- JPS6222412B2 JPS6222412B2 JP54055001A JP5500179A JPS6222412B2 JP S6222412 B2 JPS6222412 B2 JP S6222412B2 JP 54055001 A JP54055001 A JP 54055001A JP 5500179 A JP5500179 A JP 5500179A JP S6222412 B2 JPS6222412 B2 JP S6222412B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- heater
- sensor
- heater material
- sensing element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 22
- 239000000919 ceramic Substances 0.000 claims description 15
- 239000004020 conductor Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Description
【発明の詳細な説明】
本発明は検知素子にかかり、小形で高信頼性か
つ低コストの検知素子を提供しようとするもので
ある。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sensing element, and aims to provide a small, highly reliable, and low-cost sensing element.
従来、この種の検知素子としてセラミツクを用
いたものが実用化されている。たとえばセラミツ
ク湿度センサにおいては、感湿要素の周囲をコイ
ル状のヒータがとりまいたような構造をしてお
り、加熱クリーニングによる再生機能を具備して
いる。これは感湿要素の汚れなどの劣化の問題を
克服し、長期にわたり安定した動作を行なうため
のものである。しかしながら、上記構造のセラミ
ツク湿度センサにおいては、耐振性、機械的強度
が低く、信頼性の点で大きな欠点があつた。ま
た、半導体式ガスセンサを例にとると、検出感度
を高めるために、ガス感応体を200〜450℃の範囲
内の温度に加熱する必要があり、このためにガス
感応体の周囲をコイル状のヒータがとりまいたよ
うな構造をもつ。この場合も、前記セラミツク湿
度センサと同様、耐振性、機械的強度が低く、信
頼性の点で大きな欠点を有する。また、このよう
な構造においては、製造工程上繁雑になりコスト
高になることが避けられない。 Hitherto, detection elements of this type using ceramics have been put into practical use. For example, a ceramic humidity sensor has a structure in which a coiled heater surrounds a humidity sensing element, and has a regeneration function by heating cleaning. This is to overcome the problem of deterioration such as dirt on the humidity sensitive element and to ensure stable operation over a long period of time. However, the ceramic humidity sensor having the above structure has low vibration resistance and mechanical strength, and has major drawbacks in terms of reliability. Taking a semiconductor gas sensor as an example, in order to increase the detection sensitivity, the gas sensitive body needs to be heated to a temperature within the range of 200 to 450°C. It has a structure that looks like it is surrounded by a heater. In this case as well, like the ceramic humidity sensor, vibration resistance and mechanical strength are low, and there are major drawbacks in terms of reliability. Further, in such a structure, the manufacturing process is complicated and costs are inevitably high.
以上述べたように従来の検知素子の問題点に鑑
み、本発明は、センサセラミツクスとヒータ材料
とが一体化した構造を有し、小形で高信頼性、低
コストの検知素子を提供するものである。 As described above, in view of the problems of conventional sensing elements, the present invention provides a small, highly reliable, and low-cost sensing element that has a structure in which sensor ceramics and heater materials are integrated. be.
本発明の検知素子は、外部電極と対向する内部
電極を設けたセンサセラミツクスとヒータ材料と
が一体化した構造を有し、小形で高信頼性、低コ
ストの検知素子を提供するものである。 The sensing element of the present invention has a structure in which sensor ceramics provided with an internal electrode facing an external electrode and a heater material are integrated, and provides a small, highly reliable, and low-cost sensing element.
本発明の検知素子は、外部電極と対向する内部
電極を設けたセンサセラミツクスとヒータ材料と
が渦巻き状で内部まで充填された円柱体または円
板体をなし、この円柱たは円板体の一方の端面に
内部電極の一方とヒータ材料の一端が、側面に外
部電極が、また他方の端面にヒータ材料の他方の
一端がそれぞれ露出している形状のものであり、
さらにこの円柱体または円板体の一方の端面にセ
ンサ用とヒータ用を兼用する電極を、側面の外部
電極上にセンサ用電極を、他方の端面にヒータ用
電極をそれぞれ付与した構成にすることにより、
上述の目的を達成することができる。この構造の
検知素子は、小形で低コストであり、耐振性、機
械的強度に優れ、信頼性が高いものである。この
ことはヒータ材料がセンサセラミツクス中に充填
された構造を有しているためであり、センサセラ
ミツクスとヒータ材料とが同時に焼成するため、
製造工程中の利点も大きい。 The sensing element of the present invention has a cylindrical body or a disc body in which sensor ceramics provided with an internal electrode facing an external electrode and a heater material are spirally filled to the inside, and one of the cylindrical body or disc body is one of the internal electrodes and one end of the heater material is exposed on the end face of the heater, the external electrode is exposed on the side face, and the other end of the heater material is exposed on the other end face,
Furthermore, an electrode for both a sensor and a heater is provided on one end surface of this cylindrical body or a disc body, a sensor electrode is provided on an external electrode on the side surface, and a heater electrode is provided on the other end surface. According to
The above objectives can be achieved. A sensing element with this structure is small, low cost, has excellent vibration resistance and mechanical strength, and is highly reliable. This is because the heater material has a structure filled in the sensor ceramics, and since the sensor ceramics and the heater material are fired at the same time,
The advantages during the manufacturing process are also significant.
次に本発明にかかる検知素子の一実施例につい
て、図面を用いて説明する。第１図Ａはその斜視
図、同図Ｂはその断面図である。図において、１
はセンサセラミツクス、２は内部電極、３は外部
電極、４はヒータ材料であり、センサセラミツク
ス１とヒータ材料４は渦巻き状をなし、内部まで
充填された円柱体または円板体を構成している。
この円柱体または円板体の両端面にはヒータ材料
４の両端が、一方の端面には内部電極２の一端
が、側面は外部電極３がそれぞれ露出している。 Next, one embodiment of the sensing element according to the present invention will be described with reference to the drawings. FIG. 1A is a perspective view thereof, and FIG. 1B is a sectional view thereof. In the figure, 1
is sensor ceramics, 2 is an internal electrode, 3 is an external electrode, and 4 is a heater material. The sensor ceramics 1 and the heater material 4 form a spiral shape and form a cylinder or a disk filled to the inside. .
Both ends of the heater material 4 are exposed on both end faces of this cylindrical body or disc body, one end of the internal electrode 2 is exposed on one end face, and the external electrode 3 is exposed on the side face.
第２図は第１図の検知素子にグレーズ厚膜導体
でヒータ用電極５，６とセンサ用電極５，７をつ
けたもので、センサ用電極５，７は内部電極２と
外部電極３に、ヒータ用電極５，６はヒータ材料
４にそれぞれ接続されている。 Figure 2 shows the sensing element shown in Figure 1 with heater electrodes 5, 6 and sensor electrodes 5, 7 attached using glazed thick film conductors. , heater electrodes 5 and 6 are connected to heater material 4, respectively.
以上述べたように、本発明はセンサセラミツク
スとヒータ材料とが渦巻き状で内部まで充填され
た円柱体または円板体をなし、この円柱体または
円板体の両端面にヒータ材料が、一方の端面に内
部電極が、側面に外部電極がそれぞれ露出してい
る形状のものである。これによれば、ヒータ材料
に対して、外部からの機械的衝撃、湿度などを直
接受けることはなく、小形で高信頼性、低コスト
の検知素子を得ることができる。 As described above, the present invention has a cylindrical body or a disc body in which the sensor ceramics and the heater material are spirally filled to the inside, and the heater material is placed on both end faces of the cylindrical body or disc body, and one side is filled with the heater material. It has an internal electrode exposed on the end face and an external electrode exposed on the side face. According to this, the heater material is not directly exposed to external mechanical shock, humidity, etc., and a small, highly reliable, and low-cost sensing element can be obtained.
第１図Ａは本発明にかかる検知素子の一実施例
の基本的な構造を示す斜視図、同図Ｂはその断面
図、第２図はこの検知素子に電極を付与した状態
を示す断面図である。
１……センサセラミツクス、２……内部電極、
３……外部電極、４……ヒータ材料、５，６……
ヒータ用電極、５，７……センサ用電極。
FIG. 1A is a perspective view showing the basic structure of an embodiment of a sensing element according to the present invention, FIG. 1B is a sectional view thereof, and FIG. It is. 1...Sensor ceramics, 2...Internal electrode,
3... External electrode, 4... Heater material, 5, 6...
Electrode for heater, 5, 7... Electrode for sensor.
Claims (1)
セラミツクスとヒータ材料とが渦巻き状で内部ま
で充填された円柱体または円板体をなし、前記内
部電極の一方とヒータ材料の一端が前記円柱体ま
たは円板体の端面の一方に、また前記外部電極が
前記円柱体または円板体の側面に、前記ヒータ材
料の他方の一端が前記円柱体または円板体の端面
の他方にそれぞれ露出しており、前記円柱体また
は円板体の端面の一方にセンサ用とヒータ用を兼
用する電極が、側面の前記外部電極上にセンサ用
電極が、端面の他方にヒータ用電極がそれぞれ付
与されていることを特徴とする検知素子。 ２ 外部電極と内部電極とヒータ材料とが、セン
サセラミツクスの焼成と同時に焼成することので
きる導電材料で構成されていることを特徴とする
特許請求の範囲第１項記載の検知素子。 ３ センサ用電極とヒータ用電極がグレーズ厚膜
導体で形成され、外部電極と内部電極とヒータ材
料に接続されていることを特徴とする特許請求の
範囲第１項記載の検知素子。[Scope of Claims] 1 Sensor ceramics provided with an internal electrode facing an external electrode and a heater material form a spiral cylinder or disc body filled to the inside, and one of the internal electrodes and the heater material One end of the heater material is attached to one end surface of the cylinder or disc, the external electrode is placed on a side surface of the cylinder or disc, and the other end of the heater material is attached to the other end of the cylinder or disc. An electrode serving both a sensor and a heater is provided on one end surface of the cylinder or disk, a sensor electrode is provided on the external electrode on the side surface, and a heater electrode is provided on the other end surface. A sensing element characterized by being provided with each. 2. The sensing element according to claim 1, wherein the external electrode, the internal electrode, and the heater material are made of a conductive material that can be fired at the same time as the sensor ceramics. 3. The sensing element according to claim 1, wherein the sensor electrode and the heater electrode are formed of a glazed thick film conductor, and are connected to the outer electrode, the inner electrode, and the heater material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5500179A JPS55147342A (en) | 1979-05-04 | 1979-05-04 | Detecting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5500179A JPS55147342A (en) | 1979-05-04 | 1979-05-04 | Detecting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55147342A JPS55147342A (en) | 1980-11-17 |
| JPS6222412B2 true JPS6222412B2 (en) | 1987-05-18 |
Family
ID=12986408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5500179A Granted JPS55147342A (en) | 1979-05-04 | 1979-05-04 | Detecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55147342A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57179152U (en) * | 1981-05-08 | 1982-11-13 | ||
| CA3007911A1 (en) * | 2016-02-12 | 2017-08-17 | Philip Morris Products S.A. | Aerosol-generating system with puff detector |
| JP6916802B2 (en) * | 2016-02-12 | 2021-08-11 | フィリップ・モーリス・プロダクツ・ソシエテ・アノニム | Aerosol generation system with identification of liquid aerosol forming substrates |
| MX2019009868A (en) | 2017-02-28 | 2019-12-02 | Philip Morris Products Sa | Aerosol-generating system with electrodes and sensors. |
-
1979
- 1979-05-04 JP JP5500179A patent/JPS55147342A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55147342A (en) | 1980-11-17 |
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