JPS6223365B2 - - Google Patents
Info
- Publication number
- JPS6223365B2 JPS6223365B2 JP11336580A JP11336580A JPS6223365B2 JP S6223365 B2 JPS6223365 B2 JP S6223365B2 JP 11336580 A JP11336580 A JP 11336580A JP 11336580 A JP11336580 A JP 11336580A JP S6223365 B2 JPS6223365 B2 JP S6223365B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- thickness
- layer
- parts
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910044991 metal oxide Inorganic materials 0.000 claims description 20
- 150000004706 metal oxides Chemical class 0.000 claims description 20
- 150000003377 silicon compounds Chemical class 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 51
- 238000000034 method Methods 0.000 description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 21
- -1 polyethylene terephthalate Polymers 0.000 description 19
- 239000000463 material Substances 0.000 description 15
- 239000000203 mixture Substances 0.000 description 14
- 238000000576 coating method Methods 0.000 description 13
- 229910021331 inorganic silicon compound Inorganic materials 0.000 description 13
- 150000003961 organosilicon compounds Chemical class 0.000 description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 12
- 239000000843 powder Substances 0.000 description 12
- 229920000139 polyethylene terephthalate Polymers 0.000 description 11
- 239000005020 polyethylene terephthalate Substances 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 10
- 229920005989 resin Polymers 0.000 description 10
- 239000011347 resin Substances 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 238000005299 abrasion Methods 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 9
- 238000002834 transmittance Methods 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- 238000007733 ion plating Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000005488 sandblasting Methods 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 229910006404 SnO 2 Inorganic materials 0.000 description 5
- 239000002216 antistatic agent Substances 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 229920001577 copolymer Polymers 0.000 description 5
- 229920006254 polymer film Polymers 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000007788 roughening Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 238000000053 physical method Methods 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000002562 thickening agent Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- 229910002012 Aerosil® Inorganic materials 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910018626 Al(OH) Inorganic materials 0.000 description 1
- 229920001747 Cellulose diacetate Polymers 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- 229920001634 Copolyester Polymers 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 229910017625 MgSiO Inorganic materials 0.000 description 1
- 229910020282 Pb(OH) Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 125000002252 acyl group Chemical group 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- GHPGOEFPKIHBNM-UHFFFAOYSA-N antimony(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Sb+3].[Sb+3] GHPGOEFPKIHBNM-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- BEQNOZDXPONEMR-UHFFFAOYSA-N cadmium;oxotin Chemical compound [Cd].[Sn]=O BEQNOZDXPONEMR-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 125000002057 carboxymethyl group Chemical group [H]OC(=O)C([H])([H])[*] 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000012461 cellulose resin Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 1
- FSBVERYRVPGNGG-UHFFFAOYSA-N dimagnesium dioxido-bis[[oxido(oxo)silyl]oxy]silane hydrate Chemical compound O.[Mg+2].[Mg+2].[O-][Si](=O)O[Si]([O-])([O-])O[Si]([O-])=O FSBVERYRVPGNGG-UHFFFAOYSA-N 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- WOXXJEVNDJOOLV-UHFFFAOYSA-N ethenyl-tris(2-methoxyethoxy)silane Chemical compound COCCO[Si](OCCOC)(OCCOC)C=C WOXXJEVNDJOOLV-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000010433 feldspar Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- PIJPYDMVFNTHIP-UHFFFAOYSA-L lead sulfate Chemical compound [PbH4+2].[O-]S([O-])(=O)=O PIJPYDMVFNTHIP-UHFFFAOYSA-L 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000000391 magnesium silicate Substances 0.000 description 1
- 229910052919 magnesium silicate Inorganic materials 0.000 description 1
- 235000019792 magnesium silicate Nutrition 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
- G11B23/20—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture with provision for splicing to provide permanent or temporary connections
- G11B23/26—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture with provision for splicing to provide permanent or temporary connections of leaders for loading or threading, e.g. to form a temporary connection
Landscapes
- Magnetic Record Carriers (AREA)
Description
本発明は磁気テープの端部に取り付けられて使
用されるリーダーテープに関し、特に耐摩耗性と
透明性とが改良されたリーダーテープに関する。
従来ビデオテープレコーダーにおいて磁気テー
プの終端を光学的に検出する方法が知られてい
る。この方法は、光源とフオトトランジスタとに
より構成され、磁気テープの端部に取付けた透明
なリーダーテープが光源とフオトトランジスタと
を結ぶ線上を通過することによつて終端を検出す
るようになつている。
このような目的で使用されるリーダーテープと
しては通常特別な処理が施されていないポリエチ
レンテレフタレートフイルム、セルロースアセテ
ートフイルム、ポリ塩化ビニルフイルム等の透明
高分子フイルムが用いられている。これらの材料
は透明性が優れている反面、電気抵抗が高いとい
う欠点があり、そのため静電気を帯びやすく静電
気力により拾われたゴミやホコリがやがて磁性面
や磁気ヘツドに付着し、ドロツプアウト、出力低
下等の原因となつていた。
一方、リーダーテープの帯電を防止するため
に、帯電防止剤若しくは顔料等を含む層を高分子
フイルムベース上に設ける方法が提案されている
が、これらの方法は十分な性能を発現できない。
即ち帯電防止剤は湿度の影響を受けやすく、更に
帯電防止剤を多く使用すると導電性は向上するが
粘着がおこりやすくなるという欠点がある。亦、
白色顔料は帯電防止効果が小さいため帯電防止効
果が十分現われる迄添加量を増すと逆に光の散乱
が増加して透明性が低下するという矛盾がある。
亦、無処理の高分子フイルム或いはそれに帯電
防止剤を設けたリーダーテープは耐摩耗性が十分
でない。磁気テープのローデイング時あるいは記
録再生の際の終端検出時にはリーダーテープは回
転を続ける磁気ヘツドと接触しているため、リー
ダーテープに耐摩耗性がない場合はテープ面が削
りとられヘツド目詰りの原因となる。
ところで金属酸化物層を可撓性支持基体上に帯
電防止層として設けると透明性、帯電防止性共に
優れ、且つ湿度の影響も受けないリーダーテープ
が得られる。かかる金属酸化物層を設けたリーダ
ーテープとしては
(i) 表面粗さ0.15μm以上の可撓性支持体を表面
活性化処理し、次いでこの上に透明導電性金属
酸化物層を設けたもの(特開昭53−34505号公
報参照)、
(ii) 非磁性可撓性支持体上に透明導電性金属酸化
物層と酸化ケイ素保護層とを重積したもの(特
開昭53−67408号公報参照)
等が提案されており、いずれも粗面化処理するこ
とにより耐久性等を向上できるとしている。
ところが、粗面化の程度としては0.15μm以
上、特に0.25μm以上が必要であるが粗さが例え
ば1.8μm以上になると光透過性が低下するとさ
れていた。本発明者は粗さの程度を更に高めるこ
とにより接着力を増し、しかも光透過性が低下し
ない方法について鋭意研究した結果、金属酸化物
層と粗面との間にケイ素化合物層を設けることに
より上記目的を達成しうることを見出し本発明に
到達した。即ち本発明は
1 少なくとも片面が粗面化された透明可撓性支
持板の当該粗面上にケイ素化合物層(A)を設け、
更に当該(A)層上に金属酸化物よりなる透明導電
性層(B)が積層されてなるリーダーテープであつ
て、当該粗面の粗さが2μm〜4μmであるこ
とを特徴とするリーダーテープ
である。
本発明における透明可撓性支持板の素材として
は有機高分子化合物が好ましく用いられる。透明
性、可撓性、力学的性質などの点から、ポリエチ
レンテレフタレート、ポリエチレン−2・6−ナ
フタレンジカルボキシレート、ポリカーボネー
ト、ポリスチレン、セルローストリアセテート、
セルロースダイアセテート、ポリ塩化ビニル、ポ
リプロピレン、ポリアミド等が挙げられる。これ
らはホモポリマーやコポリマーとして、亦単独又
はブレンドとして使用される。
透明可撓性支持板の厚さは特に限定しないが5
〜200μmが好ましい。また当該支持体は、顔
料、増白剤、帯電防止剤、可塑剤などを含有する
前記素材からなるものであつてもよい。
上記支持体表面を粗面化する方法は特に限定す
る必要はない。例えばサンドブラスト処理や蝕刻
された金属粗面ロールでのエンボス処理等の物理
的方法、腐蝕性を有するアルカリ性水溶液やアミ
ン系溶媒を用いてのエツチング処理等の化学的方
法及びシリカやアルミナの如き無機粉末を含有す
る樹脂層を塗布する方法が挙げられる。
就中サンドブラスト処理が好ましくそれは高速
回転翼で珪砂のような高硬度の砂状物を前記支持
板例えば高分子フイルムの表面にたたきつける
か、或いは水流中に珪砂の様な高硬度の砂状物を
混ぜ高圧ポンプで高分子フイルムの表面にたたき
つけて支持板表面を削りとることにより達成され
る。
亦、無機粉末含有樹脂層を塗布する方法は、無
機粉末が樹脂100重量部に対して10〜400重量部好
ましくは10〜100重量部混合、分散された無機粉
末含有樹脂を好ましくは0.1〜12μm、特に好ま
しくは1〜10μmの厚さに塗布することにより達
成される。
無機粉末としては、シリカ白〔SiO2・
nH2O〕、アルミナ白〔Al(OH)3〕、鉛白
〔2PbCO3・Pb(OH)2〕、アンチモン白
〔Sb2O3〕、酸化ケイ素〔SiO2〕、酸化アルミニウ
ム、酸化亜鉛、硫化亜鉛、酸化スズ、酸化ジルコ
ニウム、酸化チタン、炭酸カルシウム、炭酸バリ
ウム、硫酸バリウム、硫酸鉛〔2PbSO4・PbO〕、
ケイ酸鉛〔PbO・nSiO2〕、ケイ酸マグネシウム
〔MgSiO2〕、タルク〔3MgO・4SiO2・H2O〕、ク
レー〔Al2O3・2SiO2・2H2O〕、リトボン〔ZnS+
BaSO4〕、等が挙げられる。これらの1種又は2
種以上を樹脂(バインダー)に混合、分散したも
のが用いられる。就中酸化ケイ素及び1又は酸化
アルミニウムを主成分として無機粉末が好まし
い。無機粉末の平均粒子径は0.01〜10μmが好ま
しい。
樹脂(バインダー)としては、塩化ビニル・酢
酸ビニル共重合体、アクリル酸エステル・スチレ
ン共重合体、セルロース系樹脂、塩化ビニル・塩
化ビニリデン共重合体、ポリアミド樹脂、ポリウ
レタン樹脂、アクリル酸エステル・アクリロニト
リル共重合体、アクリル酸エステル樹脂、ポリエ
ステル樹脂、酢酸ビニル樹脂等の熱可塑性樹脂;
エポキシ樹脂 メラミン樹脂、フエノール樹脂等
の熱硬化性樹脂が挙げられ、単独あるいは2種以
上の混合物を適宜選択して用いる。
これらの樹脂を適当な溶媒に溶解し、更に前記
無機粉末を混合・分散させて塗布液とする。塗布
液には必要に応じて更に添加剤例えば硬化剤、増
粘剤、酸化防止剤等が加えてもよい。これら塗布
液を従来公知の塗工法により塗布し、乾燥する。
以上の如き種々の手段によつて透明可撓性支持
板の表面が粗面化されるが前記の中では(1)物理的
方法(2)化学的方法(3)塗布方法の順で好ましい。
粗面化の程度は2μm〜3.5μmが好ましい。
かくして得られた透明可撓性支持体の粗面化し
た面に、次いで有機又は無機のケイ素化合物層(A)
を設ける。
本発明で用いる有機ケイ素化合物は、下記一般
式(1)〜(3)
〔但し、式中R1は下記二式
〔但し、式中R5、R6はそれぞれ独立に水素原子、
炭素原子数1〜4のアルキル基及びヒドロキシア
ルキル基、フエニル基、アリル基(−CH2−CH
=CH2)及びカルボキシメチル基(−CH2−
COOH)からなる群から選ばれる基である。〕
で表わされる基、
The present invention relates to a leader tape used by being attached to the end of a magnetic tape, and particularly to a leader tape with improved abrasion resistance and transparency. 2. Description of the Related Art Conventionally, a method for optically detecting the end of a magnetic tape in a video tape recorder is known. This method consists of a light source and a phototransistor, and the end of the magnetic tape is detected by passing a transparent leader tape attached to the end of the magnetic tape over a line connecting the light source and the phototransistor. . As leader tapes used for this purpose, transparent polymer films such as polyethylene terephthalate film, cellulose acetate film, and polyvinyl chloride film, which have not been subjected to any special treatment, are usually used. Although these materials have excellent transparency, they have the disadvantage of high electrical resistance, and as a result, they tend to be charged with static electricity. Dirt and dust picked up by static electricity will eventually adhere to the magnetic surface or magnetic head, resulting in dropouts and decreased output. This was the cause of such problems. On the other hand, methods have been proposed in which a layer containing an antistatic agent or a pigment is provided on a polymer film base in order to prevent charging of the leader tape, but these methods cannot exhibit sufficient performance.
That is, the antistatic agent is susceptible to the influence of humidity, and if a large amount of the antistatic agent is used, the conductivity is improved, but there is a drawback that adhesion tends to occur. also,
Since white pigments have a small antistatic effect, there is a contradiction in that if the amount added is increased until a sufficient antistatic effect is achieved, light scattering will increase and transparency will decrease. Furthermore, leader tapes made of untreated polymer films or coated with antistatic agents do not have sufficient abrasion resistance. When loading a magnetic tape or detecting the end during recording and playback, the leader tape is in contact with the rotating magnetic head, so if the leader tape does not have wear resistance, the tape surface will be scraped off, causing the head to become clogged. becomes. By the way, if a metal oxide layer is provided as an antistatic layer on a flexible support base, a leader tape can be obtained which has excellent transparency and antistatic properties and is not affected by humidity. The leader tape provided with such a metal oxide layer is (i) a flexible support having a surface roughness of 0.15 μm or more that is surface-activated, and then a transparent conductive metal oxide layer is provided thereon ( (see JP-A No. 53-34505), (ii) a transparent conductive metal oxide layer and a silicon oxide protective layer stacked on a non-magnetic flexible support (see JP-A-53-67408); ) have been proposed, all of which claim that durability can be improved by roughening the surface. However, although the degree of surface roughening needs to be 0.15 μm or more, particularly 0.25 μm or more, it has been thought that if the roughness is, for example, 1.8 μm or more, the light transmittance will decrease. As a result of intensive research into a method for increasing the adhesive strength by further increasing the degree of roughness without reducing light transmittance, the inventor found that by providing a silicon compound layer between the metal oxide layer and the rough surface, The inventors have discovered that the above object can be achieved and have arrived at the present invention. That is, the present invention provides (1) providing a silicon compound layer (A) on the rough surface of a transparent flexible support plate whose at least one side is roughened;
A leader tape further comprising a transparent conductive layer (B) made of a metal oxide laminated on the layer (A), wherein the rough surface has a roughness of 2 μm to 4 μm. It is. An organic polymer compound is preferably used as the material for the transparent flexible support plate in the present invention. In terms of transparency, flexibility, mechanical properties, etc., polyethylene terephthalate, polyethylene-2,6-naphthalene dicarboxylate, polycarbonate, polystyrene, cellulose triacetate,
Examples include cellulose diacetate, polyvinyl chloride, polypropylene, polyamide, and the like. These can be used as homopolymers or copolymers, alone or in blends. The thickness of the transparent flexible support plate is not particularly limited, but may be 5
~200 μm is preferred. Further, the support may be made of the above-mentioned materials containing pigments, brighteners, antistatic agents, plasticizers, and the like. The method for roughening the surface of the support is not particularly limited. For example, physical methods such as sandblasting or embossing with a rough-etched metal roll, chemical methods such as etching using corrosive alkaline aqueous solutions or amine solvents, and inorganic powders such as silica and alumina. A method of applying a resin layer containing . Particularly preferred is sandblasting, in which a high-hardness sand-like material such as silica sand is struck onto the surface of the support plate, for example, a polymer film, using a high-speed rotary blade, or a high-hardness sand-like material such as silica sand is blown into a stream of water. This is achieved by mixing and hitting the surface of the polymer film with a high-pressure pump to scrape off the surface of the support plate. In addition, the method of applying the inorganic powder-containing resin layer is such that the inorganic powder is mixed with 10 to 400 parts by weight, preferably 10 to 100 parts by weight, per 100 parts by weight of the resin, and the dispersed inorganic powder-containing resin is preferably 0.1 to 12 μm thick. This is particularly preferably achieved by coating to a thickness of 1 to 10 μm. As an inorganic powder, silica white [SiO 2
nH 2 O], alumina white [Al(OH) 3 ], lead white [2PbCO 3・Pb(OH) 2 ], antimony white [Sb 2 O 3 ], silicon oxide [SiO 2 ], aluminum oxide, zinc oxide, Zinc sulfide, tin oxide, zirconium oxide, titanium oxide, calcium carbonate, barium carbonate, barium sulfate, lead sulfate [ 2PbSO4・PbO],
Lead silicate [PbO・nSiO 2 ], magnesium silicate [MgSiO 2 ], talc [3MgO・4SiO 2・H 2 O], clay [Al 2 O 3・2SiO 2・2H 2 O], lithobon [ZnS+
BaSO 4 ], etc. One or two of these
A mixture and dispersion of at least one species in a resin (binder) is used. Among these, inorganic powders containing silicon oxide and aluminum oxide as main components are preferred. The average particle diameter of the inorganic powder is preferably 0.01 to 10 μm. Resins (binders) include vinyl chloride/vinyl acetate copolymer, acrylic ester/styrene copolymer, cellulose resin, vinyl chloride/vinylidene chloride copolymer, polyamide resin, polyurethane resin, acrylic ester/acrylonitrile copolymer, etc. Thermoplastic resins such as polymers, acrylic ester resins, polyester resins, and vinyl acetate resins;
Epoxy resins include thermosetting resins such as melamine resins and phenol resins, and can be used alone or in a mixture of two or more as appropriate. These resins are dissolved in a suitable solvent, and the inorganic powder is further mixed and dispersed to prepare a coating liquid. Additives such as curing agents, thickeners, antioxidants, etc. may be added to the coating liquid as necessary. These coating liquids are applied by a conventionally known coating method and dried. The surface of the transparent flexible support plate can be roughened by various means as described above, but among the above methods, (1) physical method, (2) chemical method, and (3) coating method are preferred in this order. The degree of surface roughening is preferably 2 μm to 3.5 μm. An organic or inorganic silicon compound layer (A) is then applied to the roughened surface of the thus obtained transparent flexible support.
will be established. The organosilicon compound used in the present invention has the following general formulas (1) to (3). [However, R 1 in the formula is the following two formulas [However, in the formula, R 5 and R 6 are each independently a hydrogen atom,
Alkyl groups having 1 to 4 carbon atoms, hydroxyalkyl groups, phenyl groups, allyl groups (-CH 2 -CH
= CH2 ) and carboxymethyl group ( -CH2-
COOH). ] A group represented by
【式】−SH、−Cl、[Formula] -SH, -Cl,
【式】及び[Formula] and
で表わされる化合物及びこれらを加水分解して得
られるプレポリマーから成る群から選ばれる1種
又は2種以上の化合物が好ましく用いられる。か
かる有機ケイ素化合物は、本発明の効果を妨げな
い範囲で、他の有機金属化合物、例えば有機チタ
ン化合物等との混合物として用いる事ができ、ま
た必要に応じて硬化触媒、接着促進剤、ぬれ性改
良剤、可塑剤、各種安定剤、難燃剤、酸化防止
剤、滑剤、消泡剤及び/又は増粘剤等と混合して
用いることもできる。
これは、そのままでも、又溶媒にとかして使用
してもよい。かかる溶媒としては、メタノール、
エタノール、イソプロパノール、n−ブタノー
ル、トルエン、酢酸エチル等の1種又は2種以上
の混合物が挙げられる。
該有機ケイ素化合物層(A)の厚さは、特に限定し
ないが、0.01〜10μmの範囲が好ましい。耐摩耗
性、光学的特性の点から特に0.05〜1μmが好ま
しい。0.01μm未満では連続的な膜を形成し難い
ため、所期の目的を達成することはできない。一
方、10μmを越えると剥離、クラツクが生じた
り、また当該支持体の可撓性が失われるため好ま
しくない。
有機ケイ素化合物の塗布には、可撓性支持体や
有機ケイ素化合物の形状、性質に応じてドクター
ナイフ、バーコーター、グラビアロールコータ
ー、カーテンコーター、ナイフコーターなどの公
知の塗工機械を用いる塗工法、スプレー法、浸漬
法などが用いられる。
有機ケイ素化合物は、塗布後乾燥し、加熱、イ
オンボンバード或いは紫外線、β線、γ線などの
放射線により硬化させる。
本発明に用いられる無機ケイ素化合物は、一般
式SiOx(O<x≦2)で表わされ、Si、SiO、
SiO2の1種又は2種以上の混合物である。
本発明に用いられる無機ケイ素化合物層の厚さ
は、50〜5000Åが好ましく、特に好ましくは、
100〜3000Åである。50Å以下では、無機ケイ素
化合物層の機械的強度が弱く、本発明の効果が期
待できない。また、5000Å以上では、無機ケイ素
化合物層に亀裂、剥離が生じ易く好ましくない。
無機ケイ素化合物層を設ける方法としては、
スパツタリング法、真空蒸着法、イオンプレ
ーテイング法等の方法があげられる。スパツタリ
ングは通常の各種方式が用いられる。ターゲツト
に関しては、Siを酸化性雰囲気で化成スパツター
する方法、SiO2を高周波スパツターする方法等
がある。
真空蒸着、イオンプレーテイングは、通常の各
種方式が用いられる。蒸着材料としては、Si、
SiO、SiO2の1種又は2種以上の混合物を用いる
事ができる。
無機ケイ素化合物層を設ける各種方法は、可撓
性支持体の耐熱性に応じて適当なものを選ぶ事が
できる。
スパツタリング条件、真空蒸着条件、イオンプ
レーテイング条件等の違いにより、得られた無機
ケイ素化合物層の組成が異なつてくる。被膜中の
Siが多くなると被膜の透明性が悪くなる。特に透
明性が要求される場合には、Siの含有が少い被膜
が得られる様なスパツタリング条件、真空蒸着条
件、イオンプレーテイング条件等を選ぶ事が望ま
しい。又、無機ケイ素化合物層を形成後、空気中
でアニールする事によつて、被膜の透明性を向上
させる事もできる。
前記有機ケイ素化合物と無機ケイ素化合物の中
では有機ケイ素化合物を用いる方が好ましい。次
に本発明に用いられる金属酸化物としてはインジ
ウム、錫、カドミウム、ジルコニウム及びチタン
よりなる群から選ばれた1種以上の金属の酸化物
があげられる。これらの金属酸化物は、本来透明
な電気絶縁体であるが、微量の不純物を含有す
る場合、わずかに酸素不足になつている場合、
2種以上の金属の酸化物である場合等に半導体
になる。本発明の透明導電性被膜を構成する金属
酸化物は、半導体でなければならない。好ましい
半導体金属酸化物としては、例えば錫をドープし
た酸化インジウム〔(In)2=x(Sn)xO3−y〕、
アンチモンをドープした酸化錫〔(Sn)1−m
(Sb)mO2−n〕、酸化カドミウム錫
(Cd2SnO4)等をあげる事ができるる。十分な導電
性を得るために、これらの金属酸化物被膜の膜厚
は10Å以上であることが好ましく、30Å以上であ
れば更に好ましい。また、十分に透明度の高い被
膜を得るためには、5000Å以下である事が好まし
く、3000Å以下がより好ましい。これらの半導体
金属酸化物被膜を、ケイ素化合物からなる層上に
設ける方法としては、スパツタリング法、真
空蒸着法、イオンプレーテイング法等の方法が
あげられる。
スパツタリングは、通常の各種の方式が用いら
れるが、マグネトロンにより、プラズマをターゲ
ツトの周りに閉じ込めて、成型物基板をプラズマ
の外に置く低温スパツタリング法が好ましく用い
られる。
真空蒸着は、通常の各種の方式が用いられる例
えば抵抗加熱方式、高周波誘導加熱方式、エレク
トロンビームによる加熱方式がある。また、金属
を酸素ガス雰囲気中で蒸着する反応性蒸着法もあ
る。
イオンプレーテイングは通常の各種の方式が用
いられるが、13.56MHzの高周波電場による放電
及び直流電場によるイオンの加速を行なう高周波
イオンプレーテイング法が好ましく用いられる。
これらの方法で得られた透明導電層の機械的特
性、或いは化学的耐久性を向上させるために、被
膜形成時或いは形成後に熱処理(アニーリング)
を施す事が好ましい。特に、真空蒸着法では、被
膜形成時にほとんど基板表面の加熱が行なわれな
いため、金属酸化物被膜形成後に熱処理を必要と
する。特に電気中等、酸素雰囲気中で熱処理を行
なうと、金属酸化物被膜の酸化及び結晶化が進行
し、該被膜の透明性、機械的特性、化学的耐久性
が著しく向上する。
かくして得られたリーダーテープは従来のもの
に比較して、透明性、耐摩耗性が格段に優れてい
る。
以下実施例をあげて本発明を更に具体的に説明
する。
実施例中「部」はすべて重量部である。
実施例1〜2 比較例1〜4
共重合ポリエステル(東洋紡績K.K.製品、バ
イロン300)100部をメチレンクロライド420部、
エチレンクロライド420部の混合物に溶解し、こ
れに澱粉50部、及び無機粉末15部〔長石微粉(カ
ナダIndusmin社製品、Minex7)5部、湿式合成
シリカ微粉(富士デビソンK.K.製品、サイロイ
ド308)5部、及び乾式合成シリカ微粉(日本ア
エロジルK.K.製品、R972)5部の混合物〕を加
え、ボールミルで120時間混練し、塗布液を調製
した。
該塗布液を、ポリエチレンテレフタレートフイ
ルム(厚さ25μm)の片面に、100〜110℃の溶媒
を乾燥した後の膜厚が5μmになるようにロール
コートした。得られた粗面化フイルム(表面粗さ
3μm)を以下フイルム(イ−1)と称する。
フイルム(イ−1)の粗面化した面に、“NUC
シリコンプライマー”(日本ユニカーK.K.製品)
0.7部含有のメタノール、エタノール、イソプロ
パノール混合アルコール系溶液をグラビアロール
コーターで塗布し、150℃で1分間乾燥した。乾
燥後の有機ケイ素化合物層の膜厚は、700Åであ
つた。以下これをフイルム(ロ−1と称する。
また、別のフイルム(イ−1)の粗面化した面
に、SiO2を蒸着材料として、7×10-5Torr下
で、真空蒸着した。
無機ケイ素化合物層の膜厚は、800Åであつ
た。
以下これをフイルム(ハ−1)と称する。
フイルム(イ−1)、フイルム(ロ−1)、フイ
ルム(ハ−1)に、In2O395部、SnO25部よりな
る混合物を蒸着材料として、8×10-5Torrで、
真空蒸着した。金属酸化物層の膜厚は、100Åで
あつた。引続いて150℃で熱処理し、透明導電層
を得た。
全く同様にして、粗面化を行なわないポリエチ
レンテレフタレートフイルム上に、有機又は無機
ケイ素化合物層(A)及び透明導電層(D)、又は、透明
導電層(B)のみを形成した。
上記6種類のサンプルを1/2インチ巾にスリツ
トしてリーダーテープとした。これらのリーダー
テープの透過率、表面抵抗、耐摩耗性を第1表に
示す。
なお、耐摩耗性(スチル時間)とは、テープを
静止した状態で回転磁気ヘツドをテープの同一位
置に走査させて、この部分の被膜が削りとられ、
支持体上に傷がはいるまでの時間である。
Preferably, one or more compounds selected from the group consisting of compounds represented by the above and prepolymers obtained by hydrolyzing these compounds are used. Such organosilicon compounds can be used as a mixture with other organometallic compounds, such as organotitanium compounds, as long as they do not impede the effects of the present invention. It can also be used in combination with modifiers, plasticizers, various stabilizers, flame retardants, antioxidants, lubricants, antifoaming agents, and/or thickeners. This may be used as it is or after being dissolved in a solvent. Such solvents include methanol,
Examples include one or a mixture of two or more of ethanol, isopropanol, n-butanol, toluene, ethyl acetate, and the like. The thickness of the organosilicon compound layer (A) is not particularly limited, but is preferably in the range of 0.01 to 10 μm. In terms of wear resistance and optical properties, the thickness is particularly preferably 0.05 to 1 μm. If the thickness is less than 0.01 μm, it will be difficult to form a continuous film, making it impossible to achieve the intended purpose. On the other hand, if the thickness exceeds 10 μm, peeling or cracking may occur, and the flexibility of the support may be lost, which is not preferable. For coating the organosilicon compound, a coating method using known coating machines such as a doctor knife, bar coater, gravure roll coater, curtain coater, knife coater, etc. is used depending on the flexible support and the shape and properties of the organosilicon compound. , spray method, dipping method, etc. are used. After being applied, the organosilicon compound is dried and cured by heating, ion bombardment, or radiation such as ultraviolet rays, β rays, and γ rays. The inorganic silicon compound used in the present invention is represented by the general formula SiOx (O<x≦2), and includes Si, SiO,
It is one type of SiO 2 or a mixture of two or more types. The thickness of the inorganic silicon compound layer used in the present invention is preferably 50 to 5000 Å, particularly preferably,
It is 100 to 3000 Å. If it is less than 50 Å, the mechanical strength of the inorganic silicon compound layer will be weak and the effects of the present invention cannot be expected. Further, if the thickness is 5000 Å or more, the inorganic silicon compound layer tends to crack or peel, which is not preferable. As a method for providing an inorganic silicon compound layer,
Examples of methods include sputtering method, vacuum evaporation method, and ion plating method. Various conventional methods are used for sputtering. Regarding targets, there are methods such as chemical sputtering of Si in an oxidizing atmosphere and high frequency sputtering of SiO 2 . Various ordinary methods are used for vacuum evaporation and ion plating. The vapor deposition materials include Si,
One type or a mixture of two or more of SiO and SiO 2 can be used. Various methods for providing the inorganic silicon compound layer can be selected depending on the heat resistance of the flexible support. The composition of the obtained inorganic silicon compound layer varies depending on the sputtering conditions, vacuum deposition conditions, ion plating conditions, etc. in the coating
As Si increases, the transparency of the film deteriorates. In particular, when transparency is required, it is desirable to select sputtering conditions, vacuum deposition conditions, ion plating conditions, etc. that will yield a film with low Si content. Furthermore, the transparency of the film can be improved by annealing it in air after forming the inorganic silicon compound layer. Among the organosilicon compounds and inorganic silicon compounds, it is preferable to use organosilicon compounds. Next, examples of the metal oxide used in the present invention include oxides of one or more metals selected from the group consisting of indium, tin, cadmium, zirconium, and titanium. These metal oxides are originally transparent electrical insulators, but if they contain trace amounts of impurities or are slightly oxygen deficient,
When it is an oxide of two or more metals, it becomes a semiconductor. The metal oxide constituting the transparent conductive film of the present invention must be a semiconductor. Preferred semiconductor metal oxides include, for example, tin-doped indium oxide [(In) 2 =x(Sn)xO 3 -y];
Antimony-doped tin oxide [(Sn) 1 −m
(Sb) mO 2 −n], cadmium tin oxide (Cd 2 SnO 4 ), and the like. In order to obtain sufficient conductivity, the thickness of these metal oxide films is preferably 10 Å or more, more preferably 30 Å or more. Further, in order to obtain a film with sufficiently high transparency, the thickness is preferably 5000 Å or less, more preferably 3000 Å or less. Methods for providing these semiconductor metal oxide films on layers made of silicon compounds include methods such as sputtering, vacuum evaporation, and ion plating. Various conventional methods can be used for sputtering, but a low-temperature sputtering method in which plasma is confined around a target using a magnetron and the molded substrate is placed outside the plasma is preferably used. Various conventional methods are used for vacuum deposition, including a resistance heating method, a high frequency induction heating method, and a heating method using an electron beam. There is also a reactive deposition method in which metal is deposited in an oxygen gas atmosphere. Various conventional methods can be used for ion plating, but a high frequency ion plating method in which discharge is performed using a 13.56 MHz high frequency electric field and ions are accelerated using a DC electric field is preferably used. In order to improve the mechanical properties or chemical durability of the transparent conductive layer obtained by these methods, heat treatment (annealing) is carried out during or after film formation.
It is preferable to apply In particular, in the vacuum evaporation method, since the substrate surface is hardly heated during film formation, heat treatment is required after the metal oxide film is formed. In particular, when heat treatment is performed in an oxygen atmosphere such as with electricity, oxidation and crystallization of the metal oxide film progresses, and the transparency, mechanical properties, and chemical durability of the film are significantly improved. The leader tape thus obtained has much better transparency and abrasion resistance than conventional tapes. EXAMPLES The present invention will be explained in more detail with reference to Examples below. All "parts" in the examples are parts by weight. Examples 1-2 Comparative Examples 1-4 100 parts of copolyester (Toyobo KK product, Vylon 300) was mixed with 420 parts of methylene chloride,
Dissolved in a mixture of 420 parts of ethylene chloride, 50 parts of starch, and 15 parts of inorganic powder (5 parts of feldspar fine powder (Canada Indusmin product, Minex7), 5 parts of wet synthetic silica powder (Fuji Davison KK product, Cyroid 308) , and a mixture of 5 parts of dry synthetic silica fine powder (Nippon Aerosil KK product, R972)] and kneaded in a ball mill for 120 hours to prepare a coating solution. The coating solution was roll coated onto one side of a polyethylene terephthalate film (thickness: 25 μm) so that the film thickness after drying the solvent at 100 to 110° C. was 5 μm. The obtained roughened film (surface roughness: 3 μm) is hereinafter referred to as film (I-1). “NUC” is placed on the roughened surface of the film (I-1).
Silicon Primer” (Nippon Unicar KK product)
A mixed alcohol solution containing 0.7 parts of methanol, ethanol, and isopropanol was applied using a gravure roll coater and dried at 150°C for 1 minute. The thickness of the organosilicon compound layer after drying was 700 Å. This film is hereinafter referred to as film (Ro-1). In addition, SiO 2 was vacuum-deposited on the roughened surface of another film (I-1) under 7×10 -5 Torr as a deposition material. Inorganic The film thickness of the silicon compound layer was 800 Å.Hereinafter, this will be referred to as film (HA-1). Film (I-1), film (RO-1), film (HA- 1 ) were 3 and 5 parts of SnO 2 as a deposition material at 8×10 -5 Torr.
Vacuum deposited. The thickness of the metal oxide layer was 100 Å. Subsequently, heat treatment was performed at 150°C to obtain a transparent conductive layer. In exactly the same manner, an organic or inorganic silicon compound layer (A) and a transparent conductive layer (D), or only a transparent conductive layer (B) were formed on a polyethylene terephthalate film that was not roughened. The six types of samples mentioned above were slit into 1/2 inch width to make leader tapes. Table 1 shows the transmittance, surface resistance, and abrasion resistance of these leader tapes. Abrasion resistance (still time) is measured by scanning a rotary magnetic head over the same position on the tape while the tape is stationary, and scraping away the film in this area.
This is the time until scratches appear on the support.
【表】
比較例 5
ポリエチレンテレフタレートフイルム(厚さ25
μm)を、アルゴンプラズマでボンバード処理し
た後、IN2O395部、SnO25部よりなる混合物を蒸
着材料として、8×10-5Torr下で真空蒸着し
た。金属酸化物層の膜厚は、100Åであつた。引
き続いて150℃で熱処理し、透明導電層を得た。
次いで透明導電層上に、SiOを蒸着材料とし
て、5×10-4Torrの酸素雰囲気下で、反応性蒸
着を行なつた。酸化ケイ素層の膜厚は500Åであ
つた。
上記サンプルを1/2インチ巾にスリツトしてリ
ーダーテープとした。リーダーテープの表面抵抗
は5×104Ω/□、透過率は80%であつた。実施
例1と同様な方法で、耐摩耗性を調べた所、スチ
ル時間は30秒であつた。
実施例3〜4、比較例6〜9
サンドブラスト処理により表面粗さが2μmに
なるように粗面化したポリエチレンテレフタレー
トフイルム(厚さ25μm)の粗面化した面に、
“NUCシリコンプライマー”(日本ユニカーK.K.
製品)0.5部含有のメタノール、エタノール、イ
ソプロパノール混合アルコール系溶液をグラビア
ロールコーターで塗布し、150℃で1分間乾燥し
た。乾燥後の有機ケイ素化合物層の膜厚は、600
Åであつた。
以下これをフイルム(イ−2)と称する。
また、サンドブラスト処理により表面粗さが2
μmになるように粗面化した別のポリエチレンテ
レフタレートフイルム(厚さ25μm)の粗面化し
た面に、SiO2を蒸着材料として7×10-5Torr下
で真空蒸着した。
無機ケイ素化合物層の膜厚は700Åであつた。
以下これをフイルム(ロ−2)と称する。
サンドブラスト処理により、粗面化しただけで
ケイ素化合物層を形成しないポリエチレンテレフ
タレートフイルム、フイルム(イ−2)及びフイ
ルム(ロ−2)に、In2O395部、SnO25部よりな
る混合物を蒸着材料として、8×10-5Torr下で
真空蒸着した。金属酸化物層の膜厚は、100Åで
あつた。引続いて150℃で熱処理し、透明導電層
を得た。
全く同様にして、粗面化を行なわないポリエチ
レンテレフタレートフイルムに、有機又は無機ケ
イ素化合物層(A)及び透明導電層(B)、又は、透明導
電層(B)のみを形成した。
上記6種類のサンプルを1/2インチ巾にスリツ
トしてリーダーテープとした。これらのリーダー
テープの透過率、表面抵抗、耐摩耗性を第2表に
示す。
なお、耐摩耗性(スチル時間)とは、テープを
静止した状態で回転磁気ヘツドをテープの同一位
置に走査させて、この部分の被膜が削り取られ、
支持体上に傷がはいるまでの時間である。[Table] Comparative example 5 Polyethylene terephthalate film (thickness 25
μm) was bombarded with argon plasma, and then vacuum evaporated under 8×10 −5 Torr using a mixture of 95 parts of IN 2 O 3 and 5 parts of SnO 2 as a deposition material. The thickness of the metal oxide layer was 100 Å. Subsequently, heat treatment was performed at 150°C to obtain a transparent conductive layer. Next, reactive vapor deposition was performed on the transparent conductive layer using SiO as a vapor deposition material in an oxygen atmosphere of 5×10 -4 Torr. The thickness of the silicon oxide layer was 500 Å. The above sample was slit into 1/2 inch width to make a leader tape. The leader tape had a surface resistance of 5×10 4 Ω/□ and a transmittance of 80%. Abrasion resistance was examined in the same manner as in Example 1, and the still time was 30 seconds. Examples 3-4, Comparative Examples 6-9 On the roughened surface of a polyethylene terephthalate film (thickness 25 μm) that had been roughened by sandblasting to a surface roughness of 2 μm,
“NUC Silicon Primer” (Nippon Unicar KK
Product) A mixed alcohol solution containing 0.5 parts of methanol, ethanol, and isopropanol was applied using a gravure roll coater and dried at 150°C for 1 minute. The thickness of the organosilicon compound layer after drying is 600
It was Å. Hereinafter, this will be referred to as film (I-2). In addition, the surface roughness has been reduced to 2 by sandblasting.
On the roughened surface of another polyethylene terephthalate film (thickness: 25 μm), which had been roughened to a thickness of μm, SiO 2 was vacuum deposited as a deposition material under 7×10 −5 Torr. The thickness of the inorganic silicon compound layer was 700 Å. Hereinafter, this will be referred to as film (Ro-2). A mixture consisting of 95 parts of In 2 O 3 and 5 parts of SnO 2 was applied to polyethylene terephthalate films, films (I-2) and films (R-2) whose surfaces were only roughened by sandblasting and did not form a silicon compound layer. The material to be deposited was vacuum deposited under 8×10 −5 Torr. The thickness of the metal oxide layer was 100 Å. Subsequently, heat treatment was performed at 150°C to obtain a transparent conductive layer. In exactly the same manner, an organic or inorganic silicon compound layer (A) and a transparent conductive layer (B), or only a transparent conductive layer (B) were formed on a polyethylene terephthalate film that was not roughened. The six types of samples mentioned above were slit into 1/2 inch width to make leader tapes. Table 2 shows the transmittance, surface resistance, and abrasion resistance of these leader tapes. Abrasion resistance (still time) is measured by scanning a rotating magnetic head over the same position on the tape while the tape is stationary, and removing the film in this area.
This is the time until scratches appear on the support.
【表】
比較例 10
ポリエチレンテレフタレートフイルム(厚さ25
μm)を空気のプラズマでボンバード処理した
後、In2O395部、SnO25部よりなる混合物を蒸着
材料として、8×10-5Torr下で真空蒸着した。
金属酸化物層の膜厚は、100Åであつた。引き続
いて150℃で熱処理し、透明導電層を得た。
次いで透明導電層上に、SiOを蒸着材料とし
て、5×10-4Torrの酸素雰囲気下で、反応性蒸
着を行なつた。酸化ケイ素層の膜厚は500Åであ
つた。
上記サンプルを1/2インチ巾にスリツトしてリ
ーダーテープとした。リーダーテープの表面抵抗
は、5×104Ω/□、透過率80%であつた。実施
例3と同様な方法で、耐摩耗性を調べた所、スチ
ル時間は、30秒であつた。
実施例 5
サンドブラスト処理により表面粗さ2μmにな
る様に粗面化したポリエチレンテレフタレートフ
イルム(厚さ25μm)の粗面化した面に、ガン
マ・メタクリロキシプロピルトリメトキシシラン
(信越化学工業K.K.製品KBM503)10部のエタノ
ール90部、水10部の混合溶媒に溶解させた塗布液
をグラビアロールコーターで塗布し、150℃で1
分間乾燥した。乾燥後の有機ケイ素化合物層の膜
厚は、700Åであつた。更に、有機ケイ素化合物
層上に、In2O395部、SnO25部よりなる混合物を
蒸着材料として8×10-5Torr下で真空蒸着し
た。金属酸化物層の膜厚は、100Åであつた。引
続いて150℃で熱処理し、透明導電層を得た。
上記サンプルを1/2インチ巾にスリツトしてリ
ーダーテープとした。リーダーテープの表面抵抗
は、4×104Ω/□透過率は68%であつた。
実施例3と同様な方法で耐摩耗性を調べた所、
スチル時間は9分であつた。
実施例 6
有機ケイ素化合物をビニルトリス(β−メトキ
シエトキシ)シラン(信越化学工業K.K.製品
KBC1003)に換えた以外は実施例5と全く同様
にして、1/2インチ巾のリーダーテープを得た。
リーダーテープの表面抵抗は、6×104Ω/□、
透過率は68%であつた。
実施例3と同様な方法で耐摩耗性を調べた所、
スチル時間は9分であつた。[Table] Comparative example 10 Polyethylene terephthalate film (thickness 25
[mu]m) was bombarded with air plasma, and then a mixture of 95 parts of In 2 O 3 and 5 parts of SnO 2 was used as a deposition material and vacuum evaporated under 8×10 −5 Torr.
The thickness of the metal oxide layer was 100 Å. Subsequently, heat treatment was performed at 150°C to obtain a transparent conductive layer. Next, reactive vapor deposition was performed on the transparent conductive layer using SiO as a vapor deposition material in an oxygen atmosphere of 5×10 −4 Torr. The thickness of the silicon oxide layer was 500 Å. The above sample was slit into 1/2 inch width to make a leader tape. The leader tape had a surface resistance of 5×10 4 Ω/□ and a transmittance of 80%. Abrasion resistance was examined in the same manner as in Example 3, and the still time was 30 seconds. Example 5 Gamma methacryloxypropyltrimethoxysilane (Shin-Etsu Chemical KK product KBM503) was applied to the roughened surface of a polyethylene terephthalate film (thickness 25 μm) that had been roughened to a surface roughness of 2 μm by sandblasting. A coating solution dissolved in a mixed solvent of 10 parts of ethanol and 10 parts of water was applied using a gravure roll coater and coated at 150℃ for 1 hour.
Dry for a minute. The thickness of the organosilicon compound layer after drying was 700 Å. Furthermore, a mixture of 95 parts of In 2 O 3 and 5 parts of SnO 2 was vacuum-deposited on the organosilicon compound layer as a deposition material under 8×10 −5 Torr. The thickness of the metal oxide layer was 100 Å. Subsequently, heat treatment was performed at 150°C to obtain a transparent conductive layer. The above sample was slit into 1/2 inch width to make a leader tape. The leader tape had a surface resistance of 4×10 4 Ω/□ and a transmittance of 68%. Wear resistance was examined in the same manner as in Example 3.
The still time was 9 minutes. Example 6 Organosilicon compound was converted into vinyltris(β-methoxyethoxy)silane (Shin-Etsu Chemical KK product)
A leader tape with a width of 1/2 inch was obtained in exactly the same manner as in Example 5, except that KBC1003) was used.
The surface resistance of the leader tape is 6×10 4 Ω/□,
The transmittance was 68%. Wear resistance was examined in the same manner as in Example 3.
The still time was 9 minutes.
Claims (1)
持板の当該粗面上にケイ素化合物層(A)を設け、更
に当該(A)層上に金属酸化物よりなる透面導電性層
(B)が積層されてなるリーダーテープであつて、当
該粗面の粗さが2μm〜3.5μmであることを特
徴とするリーダーテープ。1 A silicon compound layer (A) is provided on the rough surface of a transparent flexible support plate whose surface is roughened at least on one side, and a transparent conductive layer made of a metal oxide is further provided on the layer (A).
A leader tape comprising (B) laminated, wherein the rough surface has a roughness of 2 μm to 3.5 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11336580A JPS5737785A (en) | 1980-08-20 | 1980-08-20 | Leader tape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11336580A JPS5737785A (en) | 1980-08-20 | 1980-08-20 | Leader tape |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5737785A JPS5737785A (en) | 1982-03-02 |
| JPS6223365B2 true JPS6223365B2 (en) | 1987-05-22 |
Family
ID=14610425
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11336580A Granted JPS5737785A (en) | 1980-08-20 | 1980-08-20 | Leader tape |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5737785A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001004902A1 (en) * | 1999-07-09 | 2001-01-18 | Fuji Photo Film Co., Ltd. | Magnetic tape cartridge |
-
1980
- 1980-08-20 JP JP11336580A patent/JPS5737785A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5737785A (en) | 1982-03-02 |
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