JPS6225966B2 - - Google Patents
Info
- Publication number
- JPS6225966B2 JPS6225966B2 JP56052651A JP5265181A JPS6225966B2 JP S6225966 B2 JPS6225966 B2 JP S6225966B2 JP 56052651 A JP56052651 A JP 56052651A JP 5265181 A JP5265181 A JP 5265181A JP S6225966 B2 JPS6225966 B2 JP S6225966B2
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- output
- receiving element
- slit
- digital
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims 1
- 230000010363 phase shift Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 14
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000013139 quantization Methods 0.000 description 4
- 239000000872 buffer Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Navigation (AREA)
Description
【発明の詳細な説明】
本発明は太陽光などの入射角をデイジタル的及
びアナログ的に測定する高精度入射角測定装置に
関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a high-precision incident angle measuring device that measures the incident angle of sunlight or the like digitally and analogously.
人工衛星の姿勢制御方式として、人工衛星の所
定の個所に入射する太陽光の角度を測定し、この
角度を設定値に合わせるようにして衛星の軸方向
（姿勢）を制御するものがある。この人工衛星
が、第１図に示すように、衛星１１の軸１２を中
心に矢印１３の方向にスピンしているとすると、
あらかじめ定められた位置における太陽光１０の
入射角Ａを太陽センサ１５により測定する必要が
ある。 As an attitude control method for an artificial satellite, there is a method that measures the angle of sunlight incident on a predetermined part of the artificial satellite, and controls the axial direction (attitude) of the satellite by adjusting this angle to a set value. Assuming that this artificial satellite is spinning in the direction of the arrow 13 around the axis 12 of the satellite 11, as shown in FIG.
It is necessary to measure the incident angle A of sunlight 10 at a predetermined position using the sun sensor 15.
この太陽センサのうちデイジタル的に測定を行
うデイジタル太陽センサは、第２図の構成図に示
すように、細長いスリツト２０を設けたケース２
１内の所定の方向に受光素子２３をデイジタル的
に配列した受光板２２とから構成される。太陽光
がスリツト２０から受光面２２に垂直に入射した
場合の位置Ｂとし、スリツト２０との距離ｄ＝
とし、入射した太陽光の入射位置Ｃとし、こ
の垂直入射の位置Ｂとの距離ｆ＝とすれば、
太陽光の入射角Ａは、
Ａ＝tan-1ｆ／ｄ
となる。この距離ｄは一定であるから、垂直位置
Ｂからのずれを測ることにより、入射角が求めら
れる。 Among these sun sensors, the digital sun sensor that performs measurements digitally has a case 2 equipped with an elongated slit 20, as shown in the configuration diagram of FIG.
1, and a light receiving plate 22 in which light receiving elements 23 are digitally arranged in a predetermined direction. Position B is the case where sunlight enters the light-receiving surface 22 from the slit 20 perpendicularly, and the distance from the slit 20 is d=
If the incident position of the incident sunlight is C, and the distance from this vertical incidence position B is f=, then
The incident angle A of sunlight is A=tan −1 f/d. Since this distance d is constant, the angle of incidence can be determined by measuring the deviation from the vertical position B.
このデイジタル太陽センサはこのずれｆをデイ
ジタル的に測定するものである。このセンサの受
光板２２は、第３図の部分拡大図に示すように、
中心線Ｂの両側に、７ビツトのグレイコードのよ
うにデイジタル的に配列された受光素子群２３１
〜２３７と、この受光素子群の両側に配置された
光検出素子２３０，２３８とを備え、スリツトか
ら入射した光３０をそれぞれの受光素子でデイジ
タル的に検出してずれｆをデイジタル的に求める
ものである。この受光素子としては細長い太陽電
池の表面を一定の間隔毎にデイジタル的にマスク
したものや、フオトダイオードの上にマスクを形
成したものを用いることができる。この実施例は
両側の受光素子２３０，２３８がマスクのない素
子で、受光素子２３１〜２３７がデイジタル的に
所定間隔毎にマスクを設けた素子を示している。 This digital sun sensor measures this shift f digitally. The light receiving plate 22 of this sensor is, as shown in the partially enlarged view of FIG.
On both sides of the center line B, a group of light receiving elements 231 are arranged digitally like a 7-bit Gray code.
~ 237 and photodetecting elements 230 and 238 arranged on both sides of this group of photodetecting elements, and digitally detecting the light 30 incident from the slit with each photodetecting element to digitally determine the deviation f. It is. As this light-receiving element, it is possible to use one in which the surface of an elongated solar cell is digitally masked at regular intervals, or one in which a mask is formed on a photodiode. In this embodiment, the light receiving elements 230 and 238 on both sides are elements without masks, and the light receiving elements 231 to 237 are elements digitally provided with masks at predetermined intervals.
人工衛星が矢印１３の方向にスピンしている
と、太陽光のスリツト２０を通つた光は、相対的
に矢印２５の方向（第３図では−Ｘの方向）に移
動するようになる。この太陽光がスピン軸と、受
光板の法線とからなる平面にきた時に角度を読取
る必要があり、この読取位置がずれると、読取誤
差を生ずる。従来のこの太陽センサはデイジタル
量子化誤差±0.25゜に、受光素子、入力回路にお
ける閾値の選択により最大±0.25゜のアナログ誤
差が重畳される可能性がある。 When the satellite is spinning in the direction of arrow 13, sunlight passing through slit 20 moves relatively in the direction of arrow 25 (-X direction in FIG. 3). It is necessary to read the angle when this sunlight comes to a plane consisting of the spin axis and the normal to the light receiving plate, and if this reading position is shifted, a reading error will occur. In this conventional solar sensor, an analog error of up to ±0.25° may be superimposed on the digital quantization error of ±0.25° depending on the selection of threshold values in the light receiving element and input circuit.
このアナログ誤差を小さくする方法は、本発明
者の提案による特願昭52−133862号に説明のよう
に、第３図におけるスリツトの長さが受光素子の
幅の中心となる幅に設定し、太陽からの光がこれ
ら受光素子の中心にきたときに作られる読出パル
スにより受光素子の出力を読出す方法である。ま
た、デイジタル量子化誤差を小さくする方法は、
同様の先願特願昭55−179351号に説明している。
すなわち、第４図に示すように、受光素子２３１
の出力電圧をＡ／Ｄ変換器８０によりデイジタル
信号に変換して角度データのビツト数の追加を行
つている。この太陽センサは、受光素子２３１の
出力電圧のみでＡ／Ｄ変換が行われるので、その
出力波形は第５図に示すようになる。第５図ａに
示す受光素子２３１の配置に対し、その出力電圧
は理想的には第５図ｂのように直線的な出力とな
るはずであるが、実際には太陽光の0.5゜の広が
り、回折、乱反射等の現象により第５図ｃに示す
出力電圧のようにその波形が鈍つてしまう。特に
出力電圧が最大、最小の近傍において、この鈍り
の影響を受け角度誤差が大きくなる。 As explained in Japanese Patent Application No. 52-133862 proposed by the present inventor, a method for reducing this analog error is to set the length of the slit in FIG. 3 to a width that is the center of the width of the light-receiving element; This is a method of reading out the output of the light receiving elements using a read pulse generated when light from the sun reaches the center of these light receiving elements. Also, the method to reduce digital quantization error is as follows:
This is explained in the similar prior patent application No. 179351/1983.
That is, as shown in FIG.
The output voltage is converted into a digital signal by an A/D converter 80, and the number of bits of angle data is added. In this solar sensor, A/D conversion is performed only with the output voltage of the light receiving element 231, so the output waveform is as shown in FIG. For the arrangement of the light receiving element 231 shown in FIG. 5a, the output voltage should ideally be a linear output as shown in FIG. Due to phenomena such as , diffraction, and diffused reflection, the waveform of the output voltage becomes dull as shown in FIG. 5c. Particularly near the maximum and minimum output voltages, the angle error becomes large due to the influence of this blunting.
本発明の目的は、このようなデイジタル量子化
誤差を均等にかつ充分小さくし、入射角の測定精
度を上げた高精度入射角測定装置を提供すること
にある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a high-precision incident angle measuring device that can uniformly and sufficiently reduce such digital quantization errors and improve the accuracy of measuring the incident angle.
以下図面により本発明を詳細に説明する。 The present invention will be explained in detail below with reference to the drawings.
第６図は本発明の実施例の受光部の構成図であ
る。この受光部は、フオトダイオード受光素子の
スタートラインの素子２３０とエンドラインの素
子２３８との間に、フオトダイオードの受光素子
角度測定のための７ビツトのグレイコードを構成
する素子２３１〜２３７と、素子２３１と同じパ
ターンをＹ方向に、受光素子長の1/2だけ移動
させたパターンの素子２３８を配列したものであ
る。また、スリツト光３０のスリツト幅はに等
しく、スリツト長は受光素子２３０の中心線と素
子２３８の中心線との間の長さに等しくなつてい
る。 FIG. 6 is a configuration diagram of a light receiving section according to an embodiment of the present invention. This light receiving section includes elements 231 to 237 that constitute a 7-bit Gray code for measuring the angle of the photodiode light receiving element, between the start line element 230 and the end line element 238 of the photodiode light receiving element; Elements 238 are arranged in the same pattern as the elements 231 but moved in the Y direction by 1/2 of the length of the light receiving element. Further, the slit width of the slit light 30 is equal to , and the slit length is equal to the length between the center line of the light receiving element 230 and the center line of the element 238 .
第７図は第６図に対応する回路図である。図
中、５０〜５９はバツフア増幅器、６１〜６８は
アナログ加算器、７１〜７７はコンパレータ、７
８はゼロ検出器、８０は割算器、８１は増幅器、
８２はアナログ／デジタル（Ａ／Ｄ）変換器、８
４，８５はアナログスイツチ、８３はスイツチド
ライバである。このスイツチドライバ８３はレベ
ルシフト回路、絶対値回路、比較器から構成され
る。 FIG. 7 is a circuit diagram corresponding to FIG. 6. In the figure, 50 to 59 are buffer amplifiers, 61 to 68 are analog adders, 71 to 77 are comparators, and 7
8 is a zero detector, 80 is a divider, 81 is an amplifier,
82 is an analog/digital (A/D) converter, 8
4 and 85 are analog switches, and 83 is a switch driver. This switch driver 83 is composed of a level shift circuit, an absolute value circuit, and a comparator.
第８図は第７図の動作を説明する図で、第８図
ａは受光素子２３１，２３９及びスリツト３０の
配置図、第８図ｂは第８図ａに対応する受光素子
２３１，２３９の出力電圧波形図、第８図ｃは第
７図のアナログスイツチ８４，８５のON／OFF
を示す波形図、第８図ｄは第８図ｂの出力に対し
てレベルシフトを行い絶対値回路を通した波形図
である。 8 is a diagram explaining the operation of FIG. 7, FIG. 8a is a layout diagram of the light receiving elements 231, 239 and the slit 30, and FIG. 8b is a diagram of the arrangement of the light receiving elements 231, 239 corresponding to FIG. 8a. Output voltage waveform diagram, Figure 8c shows ON/OFF of analog switches 84 and 85 in Figure 7.
FIG. 8d is a waveform diagram showing the output of FIG. 8b subjected to level shift and passed through an absolute value circuit.
受光素子２３１，２３９の出力電圧は第８図ｂ
に示すような、測定角度θと出力電圧V231，V239
の関係が得られる。この電圧V231において角度θ
１，θ２の間と角度θ３，θ４の間とは直線性が
良く、角度θ２，θ３の間と角度θ４，θ５の間
とは直線性が悪くなる。一方、電圧V239は角度θ
２，θ３の間と角度θ４，θ５の間の直線性が良
く、角度θ１，θ２の間と角度θ３，θ４の間と
の直線性が悪くなる。従つてこれら電圧V231，
V239の直線性の良い部分のみで、波形を組み合わ
せることにより、測定視野角度全域を確保するこ
とができる。 The output voltages of the light receiving elements 231 and 239 are shown in Fig. 8b.
Measurement angle θ and output voltage V 231 , V 239 as shown in
The following relationship is obtained. At this voltage V 231 the angle θ
The linearity is good between the angles 1 and θ 2 and between the angles θ 3 and θ 4 , and the linearity is poor between the angles θ 2 and θ 3 and between the angles θ 4 and θ 5 . On the other hand, the voltage V 239 is the angle θ
The linearity between angles θ 4 and θ 5 is good, and the linearity between angles θ 1 and θ 2 and between angles θ 3 and θ 4 is poor. Therefore, these voltages V 231 ,
By combining waveforms only in the areas with good linearity of the V 239 , it is possible to secure the entire measurement field of view angle.
第７図において受光素子２３１，２３９の出力
信号をバツフア５０，５９に通した後、スイツチ
ドライバ８３にて波形操作を行う。第８図ｂの最
大出力電圧は第８図ａに示す受光面積Ｗ・に比
例する。この最大出力電圧の1/2を基準にするた
め、受光素子２３０の出力電圧を用いる。すなわ
ち、第６図に示すように、角度を読み出す時は受
光素子２３０，２３８における太陽光の照射面積
は相等しくＷ／２となるので、素子２３０の出
力電圧により、V231，V239の基準を最大出力電圧
の1/2まで上げることができる。この1/2のレベル
を基準にして、絶対値回路を通して第８図ｄに示
す出力電圧を得る。これら２種の電圧を比較する
ことにより、第８図ｄのスイツチSW１，SW２
のON／OFFの波形を作り、このように得られた
ON／OFF信号を角度データのデコードのため外
部へ出力する一方、この信号によりアナログスイ
ツチ８４，８５のどちらか一方をONとし、割算
器８０に電圧V231またはV239を供給する。この入
力を分子とし、受光素子２３０の電圧を分母とし
て入力し割算を行い、その信号の利得を調整し、
Ａ／Ｄ変換して出力角度データを得る。このグレ
イコードビツトの処理回路は、従来のように加算
器６１〜６７によりアナログ加算を行い、比較器
７１〜７７により、比較を行つて、出力角度デー
タとしている。 In FIG. 7, after the output signals of the light receiving elements 231 and 239 are passed through the buffers 50 and 59, the waveforms are manipulated by the switch driver 83. The maximum output voltage shown in FIG. 8b is proportional to the light receiving area W· shown in FIG. 8a. In order to use 1/2 of this maximum output voltage as a reference, the output voltage of the light receiving element 230 is used. That is, as shown in FIG. 6, when reading the angle, the irradiation area of sunlight on the light receiving elements 230 and 238 is equal to W/2, so the output voltage of the element 230 determines the reference value of V 231 and V 239 . can be increased to 1/2 of the maximum output voltage. Using this 1/2 level as a reference, the output voltage shown in FIG. 8d is obtained through the absolute value circuit. By comparing these two types of voltages, the switches SW1 and SW2 in Fig. 8d
Create an ON/OFF waveform of
While the ON/OFF signal is outputted to the outside for decoding the angle data, this signal turns on one of the analog switches 84 and 85, and supplies the voltage V 231 or V 239 to the divider 80. This input is used as the numerator, the voltage of the light receiving element 230 is input as the denominator, and division is performed to adjust the gain of the signal.
A/D conversion is performed to obtain output angle data. This gray code bit processing circuit performs analog addition using adders 61 to 67 as in the conventional case, and comparison is performed using comparators 71 to 77 to obtain output angle data.
本発明を人工衛星のスピン型太陽センサに用い
た場合、測定角度のデイジタル量子化誤差をＡ／
Ｄ変換器のビツト数にまで、例えば８ビツトとす
ると1/256度まで、分解能を上げることが可能と
なる。さらに、その分解能に対する精度をほぼ均
一にできるので、視野全域の測定精度を上げるこ
とができる。 When the present invention is used in a spin-type solar sensor for an artificial satellite, the digital quantization error of the measurement angle can be reduced by A/
If the number of bits of the D converter is set to 8 bits, for example, the resolution can be increased to 1/256 degree. Furthermore, since the accuracy with respect to the resolution can be made almost uniform, the measurement accuracy over the entire field of view can be improved.
また、本発明は太陽高度計、レーザ光線と併用
して測地計器などへの応用も可能であり、さらに
スリツト長を長くしたスリツト２本を直交に組み
受光素子を２組用いることにより、２次元の高精
度入射角測定装置にも応用できる。 Furthermore, the present invention can be applied to geodetic instruments, etc. in combination with solar altimeters and laser beams.Furthermore, by arranging two long slits orthogonally and using two sets of light-receiving elements, two-dimensional It can also be applied to high-precision incident angle measurement equipment.
第１図は人工衛星と太陽センサの説明図、第２
図は従来の太陽センサの構成図、第３図は本発明
の適用される受光板２３部分の平面図、第４図は
従来の太陽センサの読取回路の回路図、第５図
ａ，ｂ，ｃは第４図の受光素子配置に対する出力
波形図、第６図は本発明の実施例の受光部構成
図、第７図は第６図の読取回路の回路図、第８図
ａ，ｂ，ｃ，ｄは第６図の受光素子配置に対する
出力波形図である。図において、
１０……太陽光、１１……人工衛星、１２……
スピン軸、１３……スピン方向の矢印、１５……
太陽センサ、２０……スリツト、２１……ケー
ス、２２……受光板、２２３，２３０〜２３９…
…受光素子、２５……入射光の移動方向の矢印、
３０，３２……スリツト入射光、５０〜５９……
バツフア増幅器、６１〜６８……加算器、７１〜
７７……コンパレータ、７８……レベル検出器、
８０……割算器、８１……増幅器、８２……アナ
ログ／デイジタル変換器、８３……スイツチドラ
イバ、８４，８５……アナログスイツチ、であ
る。
Figure 1 is an explanatory diagram of the satellite and solar sensor, Figure 2
3 is a plan view of the light receiving plate 23 portion to which the present invention is applied; FIG. 4 is a circuit diagram of a reading circuit of a conventional sun sensor; FIGS. 5 a, b, c is an output waveform diagram for the light-receiving element arrangement shown in FIG. 4, FIG. 6 is a configuration diagram of a light-receiving section according to an embodiment of the present invention, FIG. 7 is a circuit diagram of the reading circuit shown in FIG. 6, and FIGS. 8 a, b, c and d are output waveform diagrams for the light receiving element arrangement of FIG. 6. In the figure, 10... sunlight, 11... artificial satellite, 12...
Spin axis, 13... Arrow in spin direction, 15...
Sun sensor, 20...Slit, 21...Case, 22...Light receiving plate, 223, 230-239...
... Light receiving element, 25 ... Arrow in the moving direction of the incident light,
30, 32...Slit incident light, 50-59...
Buffer amplifier, 61-68... Adder, 71-
77... Comparator, 78... Level detector,
80...divider, 81...amplifier, 82...analog/digital converter, 83...switch driver, 84, 85...analog switch.
Claims (1)
ツトを備えた暗室部材と、この暗室部材内に前記
スリツトから所定の距離離れて設定された受光板
部材と、この受光板部材上に前記スリツトの長さ
方向と直交して、所定のデイジタルコードに従つ
て複数個配列された受光素子およびそのデイジタ
ルコードの最低桁の受光素子と同じ大きさでこの
受光素子に対して位相をずらせて配置した補正受
光素子を備えかつ前記最低桁の受光素子の長さを
前記スリツトの幅と実質的に等しくしたデイジタ
ル素子群と、このデイジタル素子群の配列幅の両
端部でこの素子群と並行に前記受光板部材上に配
設された受光検出素子と、これら受光検出素子お
よび前記デイジタル素子群の出力を増幅する手段
と、前記受光検出素子の一方の増幅出力と他の一
方の増幅出力との差をとる第１の減算手段と、こ
の差出力と所定電圧値を比較して読取信号を出力
する手段と、前記受光検出素子の一方の増幅出力
と前記デイジタル素子群のそれぞれの増幅出力と
のそれぞれの差をとる第２の減算手段と、これら
第２の減算出力を前記読取信号によつてそれぞれ
読取る第１のデイジタル信号出力手段と、前記最
低桁受光素子および前記補正受光素子の各出力を
切替えて直線性の良いアナログ出力をとり出す最
低桁出力回路と、前記受光検出素子の一方の増幅
出力を分母とし前記最低桁出力回路のアナログ出
力を分子として割算する除算手段と、この除算出
力電圧をデイジタル信号に変換する第２のデイジ
タル信号出力手段とを有する高精度入射角測定装
置。1. A darkroom member equipped with a narrow slit of a predetermined length to take in incident light, a light receiving plate member set within the darkroom member at a predetermined distance from the slit, and a light receiving plate member provided with the slit on the light receiving plate member. A plurality of light receiving elements are arranged perpendicular to the length direction according to a predetermined digital code, and the light receiving element has the same size as the lowest digit light receiving element of the digital code and is arranged with a phase shift with respect to the light receiving element. a digital element group including a correction light receiving element and in which the length of the lowest digit light receiving element is substantially equal to the width of the slit; A light receiving and detecting element disposed on a plate member, a means for amplifying the outputs of these light receiving and detecting elements and the digital element group, and a difference between the amplified output of one of the light receiving and detecting elements and the amplified output of the other one. a first subtraction means for comparing the difference output with a predetermined voltage value and outputting a read signal; and a first subtraction means for comparing the difference output with a predetermined voltage value and outputting a read signal; a second subtraction means for taking a difference; a first digital signal output means for respectively reading these second subtraction outputs according to the read signal; and switching each output of the lowest digit light receiving element and the correction light receiving element. a lowest digit output circuit that takes out an analog output with good linearity; a dividing means that divides the analog output of the lowest digit output circuit as a numerator by using the amplified output of one of the light receiving detection elements as a denominator; and second digital signal output means for converting into a digital signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56052651A JPS57166510A (en) | 1981-04-08 | 1981-04-08 | High-precision measuring device for angle of incidence |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56052651A JPS57166510A (en) | 1981-04-08 | 1981-04-08 | High-precision measuring device for angle of incidence |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57166510A JPS57166510A (en) | 1982-10-14 |
| JPS6225966B2 true JPS6225966B2 (en) | 1987-06-05 |
Family
ID=12920753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56052651A Granted JPS57166510A (en) | 1981-04-08 | 1981-04-08 | High-precision measuring device for angle of incidence |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57166510A (en) |
-
1981
- 1981-04-08 JP JP56052651A patent/JPS57166510A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57166510A (en) | 1982-10-14 |
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