JPS6228561B2 - - Google Patents
Info
- Publication number
- JPS6228561B2 JPS6228561B2 JP55050609A JP5060980A JPS6228561B2 JP S6228561 B2 JPS6228561 B2 JP S6228561B2 JP 55050609 A JP55050609 A JP 55050609A JP 5060980 A JP5060980 A JP 5060980A JP S6228561 B2 JPS6228561 B2 JP S6228561B2
- Authority
- JP
- Japan
- Prior art keywords
- humidity sensing
- sensing element
- layer
- film
- humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5060980A JPS56146222A (en) | 1980-04-16 | 1980-04-16 | Moisture detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5060980A JPS56146222A (en) | 1980-04-16 | 1980-04-16 | Moisture detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56146222A JPS56146222A (en) | 1981-11-13 |
| JPS6228561B2 true JPS6228561B2 (sr) | 1987-06-22 |
Family
ID=12863703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5060980A Granted JPS56146222A (en) | 1980-04-16 | 1980-04-16 | Moisture detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56146222A (sr) |
-
1980
- 1980-04-16 JP JP5060980A patent/JPS56146222A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56146222A (en) | 1981-11-13 |
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