JPS6232634B2 - - Google Patents
Info
- Publication number
- JPS6232634B2 JPS6232634B2 JP12793379A JP12793379A JPS6232634B2 JP S6232634 B2 JPS6232634 B2 JP S6232634B2 JP 12793379 A JP12793379 A JP 12793379A JP 12793379 A JP12793379 A JP 12793379A JP S6232634 B2 JPS6232634 B2 JP S6232634B2
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- laser
- discharge tube
- reflecting mirror
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 description 11
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
本発明はレーザ装置に係り、光共振器を構成す
る反射鏡の保持装置の改良に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser device, and more particularly to an improvement in a holding device for a reflecting mirror constituting an optical resonator.
一般にガスレーザ装置は、内部にCO2、N2、
He等のガス媒体を充填した放電管に設けた電極
で、グロー放電を起すと、ガス媒体を励起し、反
転分布を生じさせて、レーザ光を発生させる。レ
ーザ光は放電管の両端に一対の反射鏡を対向配置
し、反射鏡間でレーザ光を共振させて、増幅す
る。つまり、光共振器を構成する。レーザ光は一
方の放射鏡の半透明部を介して外部に取出し、被
加工物に穴をあけたり、溶接したりする。 Generally, gas laser devices contain CO 2 , N 2 ,
When a glow discharge is generated with an electrode provided in a discharge tube filled with a gas medium such as He, the gas medium is excited, causing population inversion and generating laser light. A pair of reflecting mirrors are disposed facing each other at both ends of the discharge tube, and the laser beam is amplified by resonating between the reflecting mirrors. In other words, it constitutes an optical resonator. The laser beam is extracted to the outside through the semi-transparent part of one of the radiation mirrors, and is used to drill or weld holes in the workpiece.
ガスレーザ装置の出力は、グロー放電に注入し
た電力に比例する。レーザ出力と電力の比は放電
効率と呼ばれる。ガスレーザ装置の放電効率は、
10〜20％程度であり、残りの電力はガス媒体の温
度上昇として消費される。ガス温度が高くなり過
ぎると反転分布を生じにくくなるので、レーザ光
の効率が悪くなる。そこで、放電管の一方側から
他方側にガス媒体を循環する循環路に送風機およ
び熱交換器を設けて、ガス媒体を循環冷却してい
る。放電管の一端から循環路に流出する出口附近
のガス媒体の温度は、100〜200℃に達する。この
温度による熱は、ガスレーザ装置を支持している
架台を局部加熱し、熱変形を生じる。 The output of a gas laser device is proportional to the power injected into the glow discharge. The ratio of laser output to power is called discharge efficiency. The discharge efficiency of the gas laser device is
It is about 10-20%, and the remaining power is consumed as temperature increase of the gas medium. If the gas temperature becomes too high, population inversion becomes difficult to occur, resulting in poor efficiency of laser light. Therefore, a blower and a heat exchanger are provided in a circulation path that circulates the gas medium from one side of the discharge tube to the other side to circulate and cool the gas medium. The temperature of the gas medium in the vicinity of the outlet, which flows out from one end of the discharge tube into the circulation path, reaches 100-200°C. The heat generated by this temperature locally heats the pedestal supporting the gas laser device, causing thermal deformation.
従来、架台は溝形鋼、形鋼、板鋼等の剛体で製
作されている。この架台と放電管本体および反射
鏡との間は支持部を介して溶接などにより一体に
固定されている。そして、ガスレーザ鏡装置を運
転すると発生する熱によつて、架台に局部加熱を
生ずる。架台の放電管本体等を載置した上面とこ
れと反対側の底面とでは温度差を生じる。上面で
温度が高く、底面で温度が低くなる。このため、
架台の上面は伸びが著しく、低面は上面より伸び
が著しくない。従つて、架台は上面にわん曲して
熱変形をする。この結果、反射鏡の中心軸が傾
き、光共振器の光軸がずれるため、レーザ光の往
復反射が阻害され、レーザ出力は変動する。この
対策として、ガスレーザ装置を予備運転し、熱平
衡に達した時点で反射鏡を調整して、中心軸を反
射鏡間で一致させている。ところが、近年レーザ
出力の高出力化が進むにつれてガスレーザ装置が
益々大形化し、熱平衡に達するのに非常に長時間
を要すること、および完全に調整できないこと等
の問題が生じて来た。 Conventionally, frames have been made of rigid bodies such as channel steel, section steel, and plate steel. The pedestal, the discharge tube body, and the reflecting mirror are integrally fixed by welding or the like via a support portion. The heat generated when the gas laser mirror device is operated causes local heating in the mount. A temperature difference occurs between the top surface of the pedestal on which the discharge tube body and the like are placed and the bottom surface on the opposite side. The temperature is high at the top and low at the bottom. For this reason,
The upper surface of the pedestal has a remarkable elongation, and the lower surface has less elongation than the upper surface. Therefore, the pedestal is bent upward and thermally deformed. As a result, the central axis of the reflecting mirror is tilted and the optical axis of the optical resonator is shifted, so that round-trip reflection of the laser beam is inhibited and the laser output fluctuates. As a countermeasure for this, the gas laser device is pre-operated, and when thermal equilibrium is reached, the reflecting mirrors are adjusted so that the central axes of the reflecting mirrors coincide. However, in recent years, as laser output has become higher and higher, gas laser devices have become increasingly larger, which has led to problems such as a very long time being required to reach thermal equilibrium and complete adjustment being impossible.
一方、放電管本体内でレーザ媒体の圧力は、
4000Pa程度で真空に近い。このため、反射鏡は
内側で真空力と外側つまり外気側の大気圧との圧
力差に応じた力が働き、反射鏡支持部に対して直
角方向、つまり放電管本体の中央部側に圧縮力と
して作用するので、反射鏡の光軸がずれやすい。 On the other hand, the pressure of the laser medium inside the discharge tube body is
At around 4000Pa, it is close to a vacuum. For this reason, a force is applied to the reflector according to the pressure difference between the vacuum force on the inside and the atmospheric pressure on the outside, that is, the outside air side, and a compressive force is applied in a direction perpendicular to the reflector support, that is, toward the center of the discharge tube body. Therefore, the optical axis of the reflecting mirror is likely to shift.
本発明の目的は、反射鏡に働く伸縮による光軸
のずれを防止してレーザ出力を安定させたレーザ
装置を提供することにある。 An object of the present invention is to provide a laser device that stabilizes laser output by preventing deviation of the optical axis due to expansion and contraction acting on a reflecting mirror.
本発明のレーザ装置は、支持枠と架台との間に
設けた複数個の保持部の少なくとも１個を、支持
枠または架台に対して相対運動を許すように構成
したので、支持枠または架台の伸縮力に応じて、
支持枠または架台が相対運動をする。その結果、
反射鏡のずれがなくなり、レーザ出力を安定する
ことができる。 In the laser device of the present invention, at least one of the plurality of holding parts provided between the support frame and the pedestal is configured to allow relative movement with respect to the support frame or the pedestal. Depending on the stretching force,
The support frame or frame undergoes relative movement. the result,
There is no misalignment of the reflecting mirror, and the laser output can be stabilized.
以下、本発明の実施例第１，２図に示すガスレ
ーザ装置により説明する。 Embodiments of the present invention will be explained below using a gas laser apparatus shown in FIGS. 1 and 2.
レーザ発振器１は２本の放電管本体２を並列に
配置して構成されている。放電管本体２は、中央
に配置した中継管３の左右に放電管４Ａ，４Ｂを
設け、放電管の左右端に配置された端部継管５を
介してベローズ６と反射鏡７および出力鏡８を設
ける。これらの中継管３、放電管４Ａ，４Ｂ、端
部継管５、ベローズ６、反射鏡７、出力鏡８は、
端部に形成したフランジ９を介してボルト・ナツ
トの締結部（図示せず）により一体に結合され、
放電管本体２内を気封状態に保持している。放電
管本体内にはCO2、Ne、He等のガス媒体１０を
充填すると共に、陽極１１および陰極１２を配設
している。 The laser oscillator 1 is constructed by arranging two discharge tube bodies 2 in parallel. The discharge tube body 2 includes discharge tubes 4A and 4B on the left and right sides of a relay tube 3 placed in the center, and is connected to a bellows 6, a reflecting mirror 7, and an output mirror via end joint tubes 5 placed at the left and right ends of the discharge tube. 8 will be provided. These relay tubes 3, discharge tubes 4A and 4B, end joint tubes 5, bellows 6, reflector 7, and output mirror 8 are as follows:
They are integrally connected by a bolt/nut fastener (not shown) via a flange 9 formed at the end,
The inside of the discharge tube body 2 is maintained in an airtight state. The discharge tube body is filled with a gas medium 10 such as CO 2 , Ne, He, etc., and an anode 11 and a cathode 12 are disposed therein.
両電極と接続している直流電源１３を印加する
と、両電極間でグロー放電が起り、ガス媒体１０
は励起され、レーザ光１４に変換される。レーザ
光１４は反射鏡７と出力側の反射鏡８との間で共
振する。つまり、光共振器を構成する。レーザ光
は出力側の反射鏡８を透過して外部の被加工物を
照射する。グロー放電によりガス媒体１０は高温
に加熱される。このため、中継管３および端部継
管５を介して放電管本体２と連通している循環路
１５は、循環路内に配設された熱交換器１６およ
び送風機１７を介して、ガス媒体１０を矢印方向
に循環して冷却している。 When the DC power supply 13 connected to both electrodes is applied, a glow discharge occurs between the two electrodes, and the gas medium 10
is excited and converted into laser light 14. The laser beam 14 resonates between the reflecting mirror 7 and the output side reflecting mirror 8. In other words, it constitutes an optical resonator. The laser light passes through the reflecting mirror 8 on the output side and irradiates the external workpiece. The gas medium 10 is heated to a high temperature by the glow discharge. Therefore, the circulation path 15 communicating with the discharge tube main body 2 via the relay pipe 3 and the end joint pipe 5 is connected to the gas medium through the heat exchanger 16 and blower 17 disposed in the circulation path. 10 is circulated in the direction of the arrow for cooling.
レーザ発振器１は保持部２０を介して架台２１
に支持されている。すなわち、支持枠２２は反射
鏡７，８間に一体に連結されている。支持枠２２
を反射鏡たとえば出力側の反射鏡８に取付ける場
合を第３図により説明する。出力側の反射鏡８を
装着して支持枠２３の一端と、レーザ光１４が通
過する穴を形成した当板２４とがボルト・ナツト
の締結部２５により取付けられている。当板２４
とこれに対応する支持枠２２およびベローズ６の
フランジ２６とは締結部２７により一体に結合さ
れている。支持枠２２はベローズ６を貫通する穴
を形成し、支持枠は第４図に示す如く、放電管本
体２の中央部Ｃより反射鏡７，８側にボルト・ナ
ツトの締結部２８を介して４個の可動部２９を取
付ける。可動部の一端と対応する架台２１には、
固定部３０を締結部３１で取付ける。可動部２９
は支持枠２２の伸縮に応じてボール３２を介して
固定部上を移動する。この実施例ではボールを使
用しているが、可動部を直接固定部上に摺動する
ようにしてもよい。また、支持枠２２の両端と架
台２１との間に保持部を設け、少なくとも一端側
の保持部は、支持部または架台に対して相対運動
をするように構成すれば、架台および支持枠の伸
縮力に対して、互いに影響しない。尚、上述のベ
ローズ６は放電管本体内を気密に保ち、かつ放電
管本体および支持枠を伸縮する役目をしている。 The laser oscillator 1 is mounted on a pedestal 21 via a holding part 20.
is supported by That is, the support frame 22 is integrally connected between the reflecting mirrors 7 and 8. Support frame 22
A case in which this is attached to a reflecting mirror, for example, the reflecting mirror 8 on the output side, will be explained with reference to FIG. One end of the support frame 23 to which the output side reflecting mirror 8 is mounted is attached to a contact plate 24 having a hole through which the laser beam 14 passes, and is attached by a fastening portion 25 of bolts and nuts. To board 24
The corresponding support frame 22 and flange 26 of the bellows 6 are integrally connected by a fastening portion 27 . The support frame 22 forms a hole passing through the bellows 6, and the support frame is connected from the center C of the discharge tube body 2 to the reflector 7, 8 side via a fastening part 28 of a bolt and nut, as shown in FIG. Attach the four movable parts 29. The pedestal 21 corresponding to one end of the movable part has a
The fixing part 30 is attached using the fastening part 31. Movable part 29
moves on the fixed part via the ball 32 in accordance with the expansion and contraction of the support frame 22. Although a ball is used in this embodiment, the movable part may be slid directly onto the fixed part. Furthermore, if a holding part is provided between both ends of the support frame 22 and the pedestal 21, and the holding part on at least one end side is configured to move relative to the support part or the pedestal, the pedestal and the support frame can expand and contract. Forces do not affect each other. The bellows 6 described above serves to keep the interior of the discharge tube airtight and to expand and contract the discharge tube body and support frame.
次に、支持枠２２および保持部２０の作用につ
いて説明する。 Next, the functions of the support frame 22 and the holding section 20 will be explained.
(1) レーザ発振器を運転していない場合
放電管本体２内は、真空状態にあるので、反
射鏡，８は放電管本体の中央部Ｃ側に引張られ
る。この引張力つまり圧縮力は反射鏡７，８に
働くが、反射鏡間は支持枠２２により支持され
ているので、反射鏡は中央部側に傾斜しない。
従つて、反射鏡は光軸４０からずれにくい。(1) When the laser oscillator is not operating Since the interior of the discharge tube body 2 is in a vacuum state, the reflector 8 is pulled toward the center C side of the discharge tube body. This tensile or compressive force acts on the reflecting mirrors 7 and 8, but since the space between the reflecting mirrors is supported by the support frame 22, the reflecting mirrors do not tilt toward the center.
Therefore, the reflecting mirror is unlikely to deviate from the optical axis 40.
(2) レーザ発振器を運転している場合
放電管本体２はグロー放電により高温になる
ので、架台２１および支持枠２２も高温にな
る。架台２１の上面２１Ａの温度は、底面２１
Ｂの温度より高い。上面側は底面側より放電管
本体の長手方向への伸びが大きいので、架台２
１は湾曲形状に熱変形をする。この熱変形によ
る引張力は、固定部３０と可動部２９とが一体
に固定されていないので、可動部に伝達されな
い。また、支持枠２２が放電管本体２の長手方
向に伸びると、可動部２９がボール３２を介し
て固定部３０上を摺動して吸収する。つまり、
可動部、固定部、ボール等の保持部は、支持枠
または架台に対して相対運動を許す構成とな
る。従つて、反射鏡７，８の光軸４０はずれな
いので、レーザ光の出力は変動せず中心軸に沿
つて外部に照射される。(2) When operating a laser oscillator Since the discharge tube main body 2 becomes high in temperature due to glow discharge, the mount 21 and the support frame 22 also become high in temperature. The temperature of the top surface 21A of the pedestal 21 is the same as that of the bottom surface 21A.
higher than the temperature of B. The top side has a larger elongation in the longitudinal direction of the discharge tube body than the bottom side, so the mount 2
1 is thermally deformed into a curved shape. The tensile force due to this thermal deformation is not transmitted to the movable part because the fixed part 30 and the movable part 29 are not fixed together. Further, when the support frame 22 extends in the longitudinal direction of the discharge tube main body 2, the movable part 29 slides on the fixed part 30 via the ball 32 and absorbs the movement. In other words,
The movable part, the fixed part, and the holding part such as the ball are configured to allow relative movement with respect to the support frame or the pedestal. Therefore, since the optical axes 40 of the reflecting mirrors 7 and 8 are not shifted, the output of the laser light does not vary and is irradiated to the outside along the central axis.
一方、支持枠２２、反射鏡７，８およびその
取付具２３，２４，２５の重さによつて支持枠
に撓みを生ずる。第５図は撓みの状態を説明す
る模形図で、支持枠２２の梁２２Ａ、保持部２
０による支点２０Ａ、反射鏡等による重さを等
価的に表わしたものである。すなわち、梁２２
Ａには梁自身の自重による等分布荷重ｗと、両
端には反射鏡等による集中荷重Ｗが作用してい
る。従つて、反射鏡７，８は光軸４０に対して
角度θで下側に傾斜している。角度θを小さく
するためには、支点２０Ａの位置を支持枠２２
の中央部Ｃより、反射鏡７，８側に近づけて設
置すれば、反射鏡７，８を上側に向きを傾斜す
ることができるので、角度θは小くなる。この
ため、反射鏡と光軸とが一致し、レーザ光の出
力は変動しない。このことは、支持枠側面中間
にボール３２を配置すれば、支持枠側面の上端
側の伸びは、下端側の伸びより大いが、ボール
３２を支持枠側中間に設ければ、下端に設けた
のに比べて、変形量が小さく、変形力によつて
ボールを押圧する力が小さく、ボール３２を介
して可動部２９が摺動しやすく、反射鏡８が変
動しにくく、更にレーザ出力は変動しにくい。 On the other hand, the weight of the support frame 22, the reflecting mirrors 7, 8, and their attachments 23, 24, 25 causes the support frame to flex. FIG. 5 is a schematic diagram illustrating the state of deflection, showing the beam 22A of the support frame 22 and the holding portion 2.
0 equivalently represents the weight due to the fulcrum 20A, the reflecting mirror, etc. That is, the beam 22
A uniformly distributed load w due to the beam's own weight acts on A, and a concentrated load W due to reflectors etc. acts on both ends. Therefore, the reflecting mirrors 7 and 8 are inclined downward at an angle θ with respect to the optical axis 40. In order to reduce the angle θ, the position of the fulcrum 20A must be adjusted to the support frame 22.
If the reflecting mirrors 7 and 8 are installed closer to the center C than the center C, the reflecting mirrors 7 and 8 can be tilted upward, so that the angle θ becomes smaller. Therefore, the reflecting mirror and the optical axis are aligned, and the output of the laser beam does not fluctuate. This means that if the ball 32 is placed in the middle of the side of the support frame, the elongation at the upper end of the side of the support frame will be greater than the elongation at the lower end; Compared to the previous model, the amount of deformation is small, the force pressing the ball due to the deformation force is small, the movable part 29 can easily slide through the ball 32, the reflector 8 is difficult to change, and the laser output is Less likely to fluctuate.
尚、上述の実施例では放電管を左右に配設した
ガスレーザ装置について説明したが、要はレーザ
光の透過方向に反射鏡を配置したレーザ装置であ
れば、本発明を適用することができることは勿論
である。また、支持枠は、互いに並置した２本の
放電管本体間に一本の支持枠を配置し、この支持
枠の両端に支持枠と直角方向に突出した支持枠の
一部或いは支持板等の支持部を設け、この支持部
で反射鏡を支持するＨ形形状に構成してもよい。 Incidentally, in the above embodiment, a gas laser device in which discharge tubes were arranged on the left and right sides was explained, but the present invention can be applied to any laser device in which a reflecting mirror is arranged in the transmission direction of laser light. Of course. In addition, the support frame has one support frame arranged between two discharge tube bodies arranged in parallel with each other, and a part of the support frame or a support plate etc. that protrudes at right angles to the support frame at both ends of the support frame. A supporting part may be provided and the mirror may be configured in an H-shape in which the reflecting mirror is supported by the supporting part.
以上のように本発明によれば、レーザ発振器の
発熱および真空に対する架台および支持枠の伸縮
によつて、反射鏡の中心軸のずれは極めて少な
く、安定なレーザ出力を得ることができる。 As described above, according to the present invention, due to the heat generation of the laser oscillator and the expansion and contraction of the mount and support frame in response to vacuum, the deviation of the center axis of the reflecting mirror is extremely small, and stable laser output can be obtained.
第１図は本発明の実施例として示したガスレー
ザ装置の斜視図、第２図は第１図の―線断面
図、第３図は第１図の反射鏡および支持枠附近の
部分側断面図、第４図は第１図の保持部附近の部
分側断面図、第５図は支持枠の等価荷重を示す特
性図である。
１…レーザ発振器、２…放電管本体、７，８…
反射鏡、２０…保持部、２１…架台、２２…支持
枠。
Fig. 1 is a perspective view of a gas laser device shown as an embodiment of the present invention, Fig. 2 is a sectional view taken along the line - - in Fig. 1, and Fig. 3 is a partial side sectional view of the vicinity of the reflecting mirror and support frame in Fig. , FIG. 4 is a partial side sectional view of the vicinity of the holding part in FIG. 1, and FIG. 5 is a characteristic diagram showing the equivalent load of the support frame. 1... Laser oscillator, 2... Discharge tube body, 7, 8...
Reflector, 20... Holder, 21... Frame, 22... Support frame.
Claims (1)
絡した放電管本体と、反射鏡間でレーザ光を共振
させるレーザ発振器と、このレーザ発振器を支持
する架台とから成るものにおいて、架台に設けた
支持枠側に伸びる複数の固定部と、固定部端と対
応し、かつ支持枠側面に設けた可動部と、支持枠
側面の上、下端のほぼ中間に配置した上記固定部
と可動部に挾持されたボールと、から成ることを
特徴とするレーザ装置。1. A discharge tube body having a reflecting mirror at its end and connecting the reflecting mirrors with a support frame, a laser oscillator that resonates laser light between the reflecting mirrors, and a pedestal that supports this laser oscillator, A plurality of fixed parts provided on the mount extending toward the support frame side, a movable part corresponding to the ends of the fixed parts and provided on the side surface of the support frame, and the fixed part arranged approximately halfway between the upper and lower ends of the side surface of the support frame. A laser device comprising: a ball held between movable parts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12793379A JPS5651885A (en) | 1979-10-05 | 1979-10-05 | Laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12793379A JPS5651885A (en) | 1979-10-05 | 1979-10-05 | Laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5651885A JPS5651885A (en) | 1981-05-09 |
| JPS6232634B2 true JPS6232634B2 (en) | 1987-07-15 |
Family
ID=14972217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12793379A Granted JPS5651885A (en) | 1979-10-05 | 1979-10-05 | Laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5651885A (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58202580A (en) * | 1982-05-21 | 1983-11-25 | Matsushita Electric Ind Co Ltd | Carbon dioxide laser oscillation device |
| JPS5952887A (en) * | 1982-09-20 | 1984-03-27 | Hitachi Ltd | Laser generator |
| CH667556A5 (en) * | 1983-12-29 | 1988-10-14 | Amada Eng & Service | HIGH-SPEED GAS LASER OSCILLATOR. |
| US4660209A (en) * | 1983-12-29 | 1987-04-21 | Amada Engineering & Service Co., Inc. | High speed axial flow type gas laser oscillator |
| JPH0758815B2 (en) * | 1985-08-02 | 1995-06-21 | 松下電器産業株式会社 | Gas laser equipment |
| JP2502062B2 (en) * | 1986-03-25 | 1996-05-29 | 松下電工株式会社 | Veneer |
| WO2004105200A1 (en) * | 2003-05-20 | 2004-12-02 | Mitsubishi Denki Kabushiki Kaisha | Laser transmitter |
| CN110635345B (en) * | 2019-10-31 | 2025-07-29 | 成都微深科技有限公司 | Carbon dioxide laser with adjustable supporting device |
| JP7499627B2 (en) * | 2020-07-06 | 2024-06-14 | 住友重機械工業株式会社 | Laser Equipment |
-
1979
- 1979-10-05 JP JP12793379A patent/JPS5651885A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5651885A (en) | 1981-05-09 |
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