JPS6233535B2 - - Google Patents
Info
- Publication number
- JPS6233535B2 JPS6233535B2 JP17806485A JP17806485A JPS6233535B2 JP S6233535 B2 JPS6233535 B2 JP S6233535B2 JP 17806485 A JP17806485 A JP 17806485A JP 17806485 A JP17806485 A JP 17806485A JP S6233535 B2 JPS6233535 B2 JP S6233535B2
- Authority
- JP
- Japan
- Prior art keywords
- optical
- signal
- light
- pulse signal
- thermocouple
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 46
- 230000005540 biological transmission Effects 0.000 claims description 31
- 230000008054 signal transmission Effects 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 239000013307 optical fiber Substances 0.000 description 15
- 238000010586 diagram Methods 0.000 description 4
- 238000002955 isolation Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/02—Means for indicating or recording specially adapted for thermometers
- G01K1/024—Means for indicating or recording specially adapted for thermometers for remote indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/10—Arrangements for compensating for auxiliary variables, e.g. length of lead
- G01K7/12—Arrangements with respect to the cold junction, e.g. preventing influence of temperature of surrounding air
- G01K7/13—Circuits for cold-junction compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、熱電対を用いて温度を検出し、この
温度信号を光信号として伝送する温度信号伝送装
置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a temperature signal transmission device that detects temperature using a thermocouple and transmits the temperature signal as an optical signal.
（従来の技術）
従来、プロセス信号を検出し、計器室内の受信
端に伝送するのに、空気圧信号と電気信号とが用
いられている。空気圧信号はパワーがあり本質安
全防爆計装に適する反面、信号伝送に遅れがある
うえに計装が空気信号配管で、かつ空気圧源を必
要とする等高価になる欠点がある。電気信号によ
る伝送は、信号の伝送に遅れが無く計装も比較的
容易であるが、伝送装置を動作させるための電力
の供給回路を本質安全防爆上如何に構成するか、
ノイズの混入や信号のアイソレーシヨンに対する
回路構成を如何にするか等を考慮することが必要
で、全体構成が複雑となる欠点を有している。BACKGROUND OF THE INVENTION Conventionally, pneumatic signals and electrical signals are used to detect and transmit process signals to a receiving end within an instrument room. Although pneumatic signals have high power and are suitable for intrinsically safe explosion-proof instrumentation, they have disadvantages such as a delay in signal transmission and the fact that the instrumentation requires pneumatic signal piping and an air pressure source, making it expensive. Transmission by electrical signals has no delay in signal transmission and is relatively easy to instrument, but how to configure the power supply circuit to operate the transmission device in an intrinsically safe manner is important.
It is necessary to consider how to configure the circuit to deal with noise contamination and signal isolation, which has the disadvantage that the overall configuration is complicated.
とりわけ、熱電対からの信号のように微小な直
流信号を伝送する場合、伝送端側において、伝送
端を働かせるための電源や出力信号の接地レベル
及び基準接点補償回路の接地レベルを、熱電対か
らの信号の接地レベルに対して十分考慮しておか
ないと、接地電流が流れたり、信号や電源ライン
からのノイズの混入が問題となるなど、その取扱
いに著しい制約を受けるという欠点を有してい
る。 In particular, when transmitting a minute DC signal such as a signal from a thermocouple, the power supply for operating the transmission end, the ground level of the output signal, and the ground level of the reference junction compensation circuit must be controlled from the thermocouple at the transmission end. If sufficient consideration is not given to the grounding level of the signal, the grounding current may flow, noise from the signal or power line may enter, and the handling of the signal will be severely restricted. There is.
（発明の目的）
本発明は、従来技術におけるこれらの欠点に鑑
みてなされたもので、その目的は、空気圧信号、
電気信号による伝送方式の問題点を解決するとと
もに、熱電対を用いる場合に必要となる基準接点
補償回路や電源回路、出力回路の接地レベルやノ
イズに対して考慮する必要のない温度信号伝送装
置を実現しようとするものである。(Object of the Invention) The present invention has been made in view of these drawbacks in the prior art, and its object is to
In addition to solving the problems of transmission methods using electrical signals, we have created a temperature signal transmission device that does not require consideration of the ground level and noise of the reference junction compensation circuit, power supply circuit, and output circuit that are required when using thermocouples. This is what we are trying to achieve.
（問題点を解決するための手段〕
前記した目的を達成する本発明は、光エネルギ
を電気エネルギに変換する光電変換手段と、この
光電変換手段から電力が供給されて動作し熱電対
からの温度信号に関連した時間間隔のパルス信号
を出力する電子回路と、光ダイオードを含み前記
熱電対の一端に接続され当該熱電対の基準接点補
償を行なう基準接点補償回路と、前記電子回路の
出力パルス信号によつて駆動され光学的なパルス
信号を生ずる光学素子とを有する伝送端、光源と
受光素子とを有する受信端、一端が前記伝送端内
の光電変換手段と光学素子及びホトダイオードと
に光学的に結合し、他端が前記受信端内の光源と
受光素子とに光学的に結合した光伝送路を具備
し、前記受信端から前記伝送端への電力の供給お
よび前記伝送端から前記受信端への信号の伝送を
いずれも光信号で行なうことを特徴とするもので
ある。(Means for Solving the Problems) The present invention, which achieves the above-mentioned objects, includes a photoelectric conversion means for converting light energy into electrical energy, and a temperature control unit that operates by being supplied with electric power from the photoelectric conversion means and converts temperature from a thermocouple. an electronic circuit that outputs a pulse signal at a time interval related to the signal; a reference junction compensation circuit that includes a photodiode and is connected to one end of the thermocouple and performs reference junction compensation of the thermocouple; and an output pulse signal of the electronic circuit. a transmission end having an optical element that is driven by an optical element to generate an optical pulse signal; a reception end having a light source and a light receiving element; an optical transmission line whose other end is optically coupled to a light source and a light receiving element in the receiving end, supplying power from the receiving end to the transmitting end and from the transmitting end to the receiving end. This system is characterized in that all of the signals are transmitted using optical signals.
（実施例）
第１図は、本発明の一実施例を示す構成接続図
である。図において、１は伝送端、２は受信端、
３は伝送端１と受信端２とを結ぶ伝送路で、ここ
では２本のオプテイカルフアイバ３１，３２で構
成されている。伝送端１において、１１は温度を
検出する熱電対、Ｂ０は熱電対１の一端が接続さ
れた熱電対の基準接点補償回路で、オプテイカル
フアイバ３１の一端から出射する光を受光する光
ダイオード１４１及びこの光ダイオード１４１に
発生する信号が与えられる抵抗R1，R2の分圧回
路で構成されている。この基準接点補償回路Ｂ０
は、光ダイオード１４１の温度特性を利用して、
熱電対の基準接点補償を行なつている。A1は熱
電対１１からの、基準接点補償された信号eiを増
幅する増幅器、１２は増幅器A1からの信号を入
力信号とし、これをパルス幅信号に変換するパル
ス幅変換器である。このパルス幅変換器１２は、
入力抵抗Riを介して増幅器A1からの信号と、コ
ンデンサCi及び抵抗Riを介して発振器OSCから
のクロツクパルスPCと、抵抗RS、FETスイツチ
Ｓ０を介して基準電圧VSとが印加される積分器
IN、積分器INの出力信号を零電位と比較し、こ
の比較結果に応じてFETスイツチＳ０をオン／
オフする比較器Ｃ０で構成されている。(Embodiment) FIG. 1 is a configuration and connection diagram showing an embodiment of the present invention. In the figure, 1 is the transmission end, 2 is the reception end,
Reference numeral 3 denotes a transmission line connecting the transmission end 1 and the reception end 2, and here it is composed of two optical fibers 31 and 32. At the transmission end 1, 11 is a thermocouple that detects temperature, B0 is a reference junction compensation circuit for the thermocouple to which one end of the thermocouple 1 is connected, and a photodiode 14 that receives light emitted from one end of the optical fiber 31. 1 and resistors R 1 and R 2 to which signals generated in the photodiode 14 1 are applied. This reference junction compensation circuit B0
Using the temperature characteristics of the photodiode 141 ,
Performs reference junction compensation for thermocouples. A 1 is an amplifier that amplifies the reference junction compensated signal ei from the thermocouple 11, and 12 is a pulse width converter that takes the signal from the amplifier A 1 as an input signal and converts it into a pulse width signal. This pulse width converter 12 is
An integrator to which the signal from the amplifier A1 is applied via the input resistor Ri, the clock pulse PC from the oscillator OSC via the capacitor Ci and the resistor Ri, and the reference voltage VS via the resistor RS and FET switch S0.
IN, the output signal of the integrator IN is compared with zero potential, and the FET switch S0 is turned on/off according to the comparison result.
It consists of a comparator C0 that is turned off.
１３は比較器Ｃ０の出力パルス幅信号によつて
駆動される例えば液晶フイルタで構成された光ス
イツチ素子で、オプテイカルフアイバ３１の一端
とオプテイカルフアイバ３２の一端が、それぞれ
光学的に結合している。１４は光エネルギを電気
エネルギに変換する光電変換手段で、例えば太陽
電池が用いられ、オプテイカルフアイバ３１の一
端に光学的に結合している。１５は基準電圧VS
を得るためのツエナーダイオードである。 Reference numeral 13 denotes an optical switch element composed of, for example, a liquid crystal filter, which is driven by the output pulse width signal of the comparator C0, and one end of the optical fiber 31 and one end of the optical fiber 32 are optically coupled to each other. There is. 14 is a photoelectric conversion means for converting light energy into electric energy; for example, a solar cell is used, and the photoelectric conversion means is optically coupled to one end of the optical fiber 31. 15 is the reference voltage VS
It is a Zener diode to obtain .
伝送端１において、発振器OSC、増幅器A1，
A2及び比較器Ｃ０の作動電力の供給を受ける端
子＋Ｖ、−Ｖは、オプテイカルフアイバ３１の一
端から出射される光を受光している太陽電池１４
の両端に接続されており、これらのすべての回路
は、この太陽電池１４からの電力によつて動作し
ている。また、積分器INの入力端に抵抗RSおよ
びスイツチＳ０を介して印加される基準電圧VS
も、同様に太陽電池１４の一部から電圧を得てい
る。更に、熱電対１１の基準接点補償回路Ｂ０
も、光ダイオード１４１から得られる電圧を利用
している。 At the transmission end 1, an oscillator OSC, an amplifier A 1 ,
Terminals +V and -V, which receive the operating power of A2 and comparator C0, are connected to the solar cell 14 which receives the light emitted from one end of the optical fiber 31.
All of these circuits are operated by power from this solar cell 14. Also, the reference voltage VS applied to the input end of the integrator IN via the resistor RS and switch S0
Similarly, the voltage is obtained from a part of the solar cell 14. Furthermore, the reference junction compensation circuit B0 of the thermocouple 11
The voltage obtained from the photodiode 141 is also utilized.
受信端２において、２１は光源で、オプテイカ
ルフアイバ３１の他端に光学的に結合している。
この光源としては、白熱ランプ、発光ダイオー
ド、レーザ光源などが使用可能である。２２は受
光素子で、オプテイカルフアイバ３２の他端に光
学的に結合している。この受光素子としては、受
光ダイオード、ホトトランジスタ、光導電素子な
どが使用し得る。 At the receiving end 2, a light source 21 is optically coupled to the other end of the optical fiber 31.
As this light source, an incandescent lamp, a light emitting diode, a laser light source, etc. can be used. Reference numeral 22 denotes a light receiving element, which is optically coupled to the other end of the optical fiber 32. As this light receiving element, a light receiving diode, a phototransistor, a photoconductive element, etc. can be used.
このように構成した装置の動作は次の通りであ
る。 The operation of the device configured as described above is as follows.
まず、受信端２の光源２１を動作させ、ここか
らの光エネルギを、光伝送路を構成している１つ
のオプテイカルフアイバ３１を介して伝送端１に
送る。伝送端１側において、太陽電池１４は、オ
プテイカルフアイバ３１の一端から出射する光エ
ネルギを受光し、これを電気エネルギに変換す
る。変換された電気エネルギは、発振器OSC、
各増幅器A1，A2比較器Ｃ０の各電源電力として
供給され、また基準電圧VSを発生する。また、
光ダイオード１４１を含む基準接点補償回路Ｂ０
は、基準接点補償のための補償信号を発生する。 First, the light source 21 of the receiving end 2 is operated, and optical energy from there is sent to the transmission end 1 via one optical fiber 31 constituting an optical transmission path. On the transmission end 1 side, the solar cell 14 receives light energy emitted from one end of the optical fiber 31 and converts it into electrical energy. The converted electrical energy is sent to the oscillator OSC,
It is supplied as the power supply to each amplifier A 1 , A 2 and comparator C0, and also generates a reference voltage VS. Also,
Reference junction compensation circuit B0 including photodiode 141
generates a compensation signal for reference junction compensation.
よつて、増幅器A1は、熱電対１１からの基準
接点補償された温度信号を増幅し、パルス幅変換
器１２は、これをパルス幅信号に変換する。光ス
イツチ素子１３は、パルス幅変換器１２の比較器
Ｃ０から出力される出力パルス幅信号によつて駆
動されるもので、その光の透過率がパルス幅信号
に応じて変る。この光スイツチ素子１３の一方に
は、オプテイカルフアイバ３１の一端が分岐し、
光源２１からの光が一部導びかれており、光の透
過率が変ることによつて、光スイツチ素子１３の
他方から光の断続によつて形成される光パルス幅
信号が得られる。この光パルス幅信号は、オプテ
イカルフアイバ３２の一端に入射し、オプテイカ
ルフアイバ３２を介して受信端２側に送られ、受
光素子２２に照射される。受光素子２２は、受光
した光パルス幅信号を電気信号に変換し、信号処
理回路（図示せず）に送る。 Thus, amplifier A 1 amplifies the reference junction compensated temperature signal from thermocouple 11 and pulse width converter 12 converts it into a pulse width signal. The optical switch element 13 is driven by the output pulse width signal output from the comparator C0 of the pulse width converter 12, and its light transmittance changes depending on the pulse width signal. One end of an optical fiber 31 branches to one end of this optical switch element 13,
A portion of the light from the light source 21 is guided, and by changing the light transmittance, an optical pulse width signal formed by intermittent light is obtained from the other optical switch element 13. This optical pulse width signal enters one end of the optical fiber 32, is sent to the receiving end 2 side via the optical fiber 32, and is irradiated onto the light receiving element 22. The light receiving element 22 converts the received optical pulse width signal into an electrical signal and sends it to a signal processing circuit (not shown).
このように構成した装置によれば、受信端から
伝送端への電力の供給および温度信号の伝送端か
ら受信端への伝送を、いずれも光信号で行なうも
のであるから、信号の伝送に遅れがなく、また、
本質安全防爆、ノイズに対する対策、信号のアイ
ソレーシヨン等が容易で、計装を安価に行なえる
という利点がある。また、基準接点補償回路Ｂ０
を、オプテイカルフアイバ３１からの光エネルギ
を受ける光ダイオードを含んで構成したもので、
簡単な構成で、熱電対からの信号の基準接点補償
を行なうことができる。 According to the device configured in this way, the supply of power from the receiving end to the transmitting end and the transmission of temperature signals from the transmitting end to the receiving end are both performed using optical signals, so there is a delay in signal transmission. There is no, and also,
It has the advantage of being intrinsically safe, easy to take measures against noise, signal isolation, etc., and can be instrumented at low cost. In addition, the reference junction compensation circuit B0
, which includes a photodiode that receives light energy from the optical fiber 31,
With a simple configuration, reference junction compensation for signals from thermocouples can be performed.
第２図は、本発明の他の実施例を示す構成ブロ
ツク図である。この実施例においては、光伝送路
３を１本のオプテイカルフアイバで構成したもの
で、光伝送路３の両端にそれぞれハーフミラーの
ような光分配器を配置させるようにしている。ま
た、増幅器を含むパルス幅変換器１２の出力端に
出力トランジスタ１６を設けるとともに、この出
力トランジスタ１６と直列に発光ダイオード１３
を接続するようにしたものである。 FIG. 2 is a block diagram showing another embodiment of the present invention. In this embodiment, the optical transmission line 3 is composed of one optical fiber, and optical splitters such as half mirrors are arranged at both ends of the optical transmission line 3, respectively. Further, an output transistor 16 is provided at the output end of the pulse width converter 12 including an amplifier, and a light emitting diode 13 is connected in series with the output transistor 16.
It is designed to connect.
受信端２の光源２１からの光エネルギは、光分
配器３４、光伝送路３、光分配器３３を介して、
伝送端１側の太陽電池１４及び光ダイオード１４
１に照射される。また、パルス幅変換器１２は、
太陽電池１４からの電力によつて作動し、出力ト
ランジスタ１６を介して発光ダイオード１３を出
力パルス幅信号に応じて駆動する。発光ダイオー
ド１３から出射した光パルス信号は、光分配器３
３、光伝送路３及び光分配器３４を介して受信端
２の受光素子２２に伝送される。 The light energy from the light source 21 at the receiving end 2 is transmitted through the optical splitter 34, the optical transmission line 3, and the optical splitter 33.
Solar cell 14 and photodiode 14 on the transmission end 1 side
1 . Further, the pulse width converter 12 is
It is operated by power from the solar cell 14 and drives the light emitting diode 13 via the output transistor 16 according to the output pulse width signal. The optical pulse signal emitted from the light emitting diode 13 is sent to the optical distributor 3
3. The light is transmitted to the light receiving element 22 of the receiving end 2 via the optical transmission line 3 and the optical splitter 34.
なお、上記の実施例では、光学的なパルス信号
を生ずる光学素子１３として、液晶フイルタで構
成された光スイツチ素子や、発光ダイオードを用
いたものであるが、光の反射率が変化するような
液晶等用いてもよい。 In the above embodiments, an optical switch element composed of a liquid crystal filter or a light emitting diode is used as the optical element 13 that generates an optical pulse signal. A liquid crystal or the like may also be used.
（発明の効果）
以上説明した通り、本発明に係る装置によれ
ば、伝送端と受信端とを結ぶ伝送路を光伝送路で
構成し、電源電力の供給および信号の伝送を光信
号によつて行なうものであり、また、熱電対の基
準接点補償回路を光伝送路からの光を受ける光ダ
イオードを含んで構成したもので、本質安全防爆
上の対策、ノイズの対策あるいは各回路の接地レ
ベルや信号のアイソレーシヨン等について特別な
考慮をする必要なく、簡単な構成で、かつ全体計
装の安価な装置が実現できる。また、温度信号を
パルス幅信号に変換し、光学素子１３をパルス信
号で駆動するようにしたことから、伝送端での消
費電力量を少なくすることができる。(Effects of the Invention) As explained above, according to the device according to the present invention, the transmission path connecting the transmission end and the reception end is configured with an optical transmission path, and power supply and signal transmission are performed using optical signals. In addition, the thermocouple reference junction compensation circuit is configured to include a photodiode that receives light from the optical transmission line, and is used as an intrinsically safe explosion-proof countermeasure, noise countermeasure, or grounding level of each circuit. It is possible to realize a device with a simple configuration and an inexpensive overall instrumentation without the need for special consideration of signal isolation, etc. Furthermore, since the temperature signal is converted into a pulse width signal and the optical element 13 is driven by the pulse signal, power consumption at the transmission end can be reduced.
第１図は本発明の一実施例を示す構成接続図、
第２図は本発明の他の実施例を示す構成ブロツク
図である。
１……伝送端、２……受信端、３……光伝送
路、１２……パルス幅変換器、１３……光スイツ
チ素子、１４……太陽電池、１４１……光ダイオ
ード、２１……光源、２２……受光素子。
FIG. 1 is a configuration and connection diagram showing an embodiment of the present invention;
FIG. 2 is a block diagram showing another embodiment of the present invention. 1... Transmission end, 2... Receiving end, 3... Optical transmission line, 12... Pulse width converter, 13... Optical switch element, 14... Solar cell, 14 1 ... Photo diode, 21... Light source, 22... light receiving element.
Claims (1)
換手段と、この光電変換手段から電力が供給され
て動作し熱電対からの温度信号に関連した時間間
隔のパルス信号を出力する電子回路と、光ダイオ
ードを含み前記熱電対の一端に接続され当該熱電
対の基準接点補償を行なう基準接点補償回路と、
前記電子回路の出力パルス信号によつて駆動され
光学的なパルス信号を生ずる光学素子とを有する
伝送端、光源と受光素子とを有する受信端、一端
が前記伝送端内の光電変換手段と光学素子及びホ
トダイオードとに光学的に結合し、他端が前記受
信端内の光源と受光素子とに光学的に結合した光
伝送路を具備し、前記受信端から前記伝送端への
電力の供給および前記伝送端から前記受信端への
信号の伝送をいずれも光信号によつて行なうよう
にしたことを特徴とする温度信号伝送装置。 ２ 光学的なパルス信号を生ずる光学素子として
光の透過量が変化する光学スイツチ素子を用いた
特許請求の範囲第１項記載のプロセス信号伝送装
置。 ３ 光学的なパルス信号を生ずる光学素子として
発光素子を用いた特許請求の範囲第１項記載のプ
ロセス信号伝送装置。 ４ 光学的なパルス信号を生ずる光学素子として
光反射素子を用いた特許請求の範囲第１項記載の
プロセス信号伝送装置。[Scope of Claims] 1. A photoelectric conversion means that converts light energy into electrical energy, and an electronic device that operates upon being supplied with power from the photoelectric conversion means and outputs a pulse signal at a time interval related to the temperature signal from the thermocouple. a reference junction compensation circuit including a photodiode and connected to one end of the thermocouple to perform reference junction compensation of the thermocouple;
a transmission end having an optical element driven by an output pulse signal of the electronic circuit to generate an optical pulse signal; a reception end having a light source and a light receiving element; one end having a photoelectric conversion means and an optical element within the transmission end; and a photodiode, the other end of which is optically coupled to a light source and a light-receiving element in the receiving end, and supplying power from the receiving end to the transmitting end, and 1. A temperature signal transmission device characterized in that signals are transmitted from the transmission end to the reception end using optical signals. 2. The process signal transmission device according to claim 1, which uses an optical switch element that changes the amount of light transmitted as the optical element that generates the optical pulse signal. 3. The process signal transmission device according to claim 1, which uses a light emitting element as an optical element that generates an optical pulse signal. 4. The process signal transmission device according to claim 1, which uses a light reflecting element as an optical element that generates an optical pulse signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17806485A JPS61159122A (en) | 1985-08-13 | 1985-08-13 | Temperature signal transmitter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17806485A JPS61159122A (en) | 1985-08-13 | 1985-08-13 | Temperature signal transmitter |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4111976A Division JPS52124346A (en) | 1976-04-12 | 1976-04-12 | Process signal transmitter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61159122A JPS61159122A (en) | 1986-07-18 |
| JPS6233535B2 true JPS6233535B2 (en) | 1987-07-21 |
Family
ID=16041978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17806485A Granted JPS61159122A (en) | 1985-08-13 | 1985-08-13 | Temperature signal transmitter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61159122A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009244174A (en) * | 2008-03-31 | 2009-10-22 | Tokyo Electron Ltd | Wafer thermometer, temperature measuring device, heat treatment device and temperature measuring method |
| US20110144790A1 (en) * | 2009-12-15 | 2011-06-16 | Terry Gerritsen | Thermal Sensing for Material Processing Assemblies |
| CN110455437A (en) * | 2019-08-07 | 2019-11-15 | 中国电子科技集团公司第四十一研究所 | Solar panel temperature monitoring system and layout monitoring method based on optical fiber temperature distribution tester |
-
1985
- 1985-08-13 JP JP17806485A patent/JPS61159122A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61159122A (en) | 1986-07-18 |
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